公开(公告)号：US20050051515A1

公开(公告)日：2005-03-10

申请号：US10936892

申请日：2004-09-08

申请人： Hyo-Jin Nam

发明人： Hyo-Jin Nam

IPC分类号： G11B9/14 ,  G01Q60/38 ,  G01Q70/16 ,  G01Q80/00 ,  G11B5/127 ,  G11B9/00 ,  H01L41/09

CPC分类号： G01Q60/38 ,  G01Q80/00 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B2005/0021 ,  H01L41/0946

摘要： In the present invention, disclosed are a cantilever microstructure and a fabrication thereof comprising a base plate; a cantilever beam extended from one surface of the base plate to outside so that a part thereof can be suspended, and formed of a silicon nitride material, and a probing tip formed at a front end of one surface of the cantilever beam, whereby the thickness of the cantilever beam becomes uniform and the mechanical and electrical characteristic thereof are improved.

摘要翻译： 在本发明中，公开了一种悬臂微观结构及其制造方法，包括基板; 悬臂梁从基板的一个表面延伸到外部，使得其一部分可以悬挂，并且由氮化硅材料形成，并且探针尖端形成在悬臂梁的一个表面的前端，由此厚度 的悬臂梁变得均匀，并且其机械和电气特性得到改善。

公开(公告)号：US06851301B2

公开(公告)日：2005-02-08

申请号：US10151102

申请日：2002-05-21

申请人： Young Sik Kim ,  Hyo Jin Nam

发明人： Young Sik Kim ,  Hyo Jin Nam

IPC分类号： G01B7/34 ,  G01Q20/04 ,  G01Q60/00 ,  G01Q60/24 ,  G01Q70/16 ,  G01B5/28 ,  G01N13/16

CPC分类号： G01Q20/04 ,  G01Q10/045 ,  G01Q60/38 ,  Y10S977/87 ,  Y10S977/873

摘要： Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.

摘要翻译： 用于扫描探针显微镜（SPM）的悬臂，包括具有尖端的基底，基板上的压电致动器可响应于外部电信号而移动，以及形成在压电致动器周围的传感器，以便不与压电致动器重叠，从而最小化内部联接 。

公开(公告)号：US08451291B2

公开(公告)日：2013-05-28

申请号：US11779569

申请日：2007-07-18

申请人： Hyo Jin Nam ,  June Seok Kim ,  Sun Young Yi ,  Nho Kyung Hong ,  Jae Joon Hwang

发明人： Hyo Jin Nam ,  June Seok Kim ,  Sun Young Yi ,  Nho Kyung Hong ,  Jae Joon Hwang

IPC分类号： G09G5/12 ,  H04M1/725

CPC分类号： H04M1/72519 ,  H04M1/72544 ,  H04M1/72552 ,  H04M1/72566

摘要： Provided is a method for displaying information in a mobile terminal having an Electro-Luminescence (EL) region. The method includes determining whether a request for setting an item to be displayed on the EL region is input in a state in which the mobile terminal is in an EL display mode; if a request is input, setting an item to be displayed on the EL region; and displaying contents corresponding to the set item on the EL region in the EL display mode. The method allows information related to a mobile terminal to be consistently displayed at a preset position while performing a specific function of the mobile terminal, thus enabling simultaneous display of the specific function and of information stored in the mobile terminal.

摘要翻译： 提供了一种在具有电致发光（EL）区域的移动终端中显示信息的方法。 该方法包括确定在移动终端处于EL显示模式的状态下是否输入要设置要显示在EL区域上的项目的请求; 如果输入请求，则设置要显示在EL区域上的项目; 并且在EL显示模式下，在EL区域上显示与设定项目相对应的内容。 该方法允许在执行移动终端的特定功能的同时将与移动终端相关的信息一致地显示在预设位置，从而能够同时显示存储在移动终端中的特定功能和信息。

公开(公告)号：US07182876B2

公开(公告)日：2007-02-27

申请号：US10936892

申请日：2004-09-08

申请人： Hyo-Jin Nam

发明人： Hyo-Jin Nam

IPC分类号： H01L21/00

CPC分类号： G01Q60/38 ,  G01Q80/00 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B2005/0021 ,  H01L41/0946

摘要： In the present invention, disclosed are a cantilever microstructure and a fabrication thereof comprising a base plate; a cantilever beam extended from one surface of the base plate to outside so that a part thereof can be suspended, and formed of a silicon nitride material, and a probing tip formed at a front end of one surface of the cantilever beam, whereby the thickness of the cantilever beam becomes uniform and the mechanical and electrical characteristic thereof are improved.

摘要翻译： 在本发明中，公开了一种悬臂微观结构及其制造方法，包括基板; 悬臂梁从基板的一个表面延伸到外部，使得其一部分可以悬挂，并且由氮化硅材料形成，并且探针尖端形成在悬臂梁的一个表面的前端，由此厚度 的悬臂梁变得均匀，并且其机械和电气特性得到改善。

公开(公告)号：US07106684B2

公开(公告)日：2006-09-12

申请号：US10390794

申请日：2003-03-19

申请人： Hyo Jin Nam

发明人： Hyo Jin Nam

IPC分类号： G11B9/00

CPC分类号： G11B9/14 ,  B82Y10/00 ,  G11B9/1409 ,  G11B9/1454 ,  G11B2005/0021

摘要： Device for writing and reading a data including a floated cantilever part connected to a support, a resistively heated tip at an end of the cantilever part, and a piezoelectric sensor formed on the cantilever part, thereby preventing an occurrence of a sensing error by reading a data and reducing power consumption by using a piezoelectric sensor, and tip wear by making heights of the cantilever array uniform by using piezoelectric actuators.

公开(公告)号：US20060018239A1

公开(公告)日：2006-01-26

申请号：US11183870

申请日：2005-07-19

申请人： Hyo-Jin Nam ,  Young-Sik Kim

发明人： Hyo-Jin Nam ,  Young-Sik Kim

IPC分类号： G11B9/00

CPC分类号： G11B9/1409 ,  B82Y10/00 ,  Y10T29/49083

摘要： A nano data writing and reading apparatus using a cantilever structure includes a cantilever formed by patterning a deposition material deposited on a sacrificial substrate, a probe formed at a front end portion of one surface of the cantilever and formed simultaneously with the cantilever as the deposition material is filled in a probe groove pattern formed on the sacrificial substrate when the deposition material is deposited on the sacrificial substrate, a heater formed of polycrystalline silicon at the cantilever, for heating the probe, a data sensing unit formed at the cantilever and sensing data written on media, a signal connection pad connected to the data sensing unit and formed at the cantilever to provide an electrical connection with an external signal line, a signal transfer circuit unit connected to the signal connection pad, for controlling writing and reading of data on and from the media, and a bonding unit allowing the cantilever to be supported at the signal transfer circuit unit and providing a passage for an electrical connection between the signal connection pad and the signal transfer circuit unit. Accordingly, the cantilever and the probe can be precisely formed by a molding technique through the removal of a sacrificial substrate and are formed of a deposition material such as a silicon nitride material, thereby remarkably reducing variations in a thickness of the cantilever and improving the durability of the probe. Also, because a bonding process with a glass wafer for fabricating the cantilever structure is not required, the process is facilitated and a fabrication coast is greatly reduced.

摘要翻译： 使用悬臂结构的纳米数据写入和读取装置包括通过图案化沉积在牺牲基板上的沉积材料形成的悬臂，形成在悬臂的一个表面的前端部分并与悬臂作为沉积材料同时形成的探针 填充在牺牲基板上形成的探针凹槽图案中，当沉积材料沉积在牺牲基板上时，在悬臂处形成由多晶硅形成的加热器，用于加热探针，在悬臂处形成的数据感测单元和感测数据写入 在媒体上，连接到数据感测单元并形成在悬臂处以提供与外部信号线的电连接的信号连接焊盘，连接到信号连接焊盘的信号传输电路单元，用于控制数据的写入和读取，以及 以及粘合单元，允许在信号传送时支撑悬臂 并提供用于信号连接焊盘和信号传输电路单元之间的电连接的通道。 因此，悬臂和探针可以通过模制技术通过去除牺牲基板精确地形成，并且由诸如氮化硅材料的沉积材料形成，从而显着地减小悬臂的厚度变化并提高耐久性 的探头。 此外，由于不需要用于制造悬臂结构的玻璃晶片的接合工艺，因此易于加工，并且大大降低了制造焊道。

公开(公告)号：US06291251B1

公开(公告)日：2001-09-18

申请号：US09588382

申请日：2000-06-07

申请人： Hyo Jin Nam

发明人： Hyo Jin Nam

IPC分类号： H01G706

CPC分类号： H01L21/28291 ,  H01L29/78391 ,  Y10S438/945

摘要： Method for fabricating a nonvolatile ferroelectric memory, including the steps of (1) forming an insulating layer, a semiconductor layer, an etch stop layer, a lower electrode, a ferroelectric layer, and an upper electrode on a substrate in succession, (2) forming an etch mask pattern of a required form on the upper electrode, (3) using the etch mask pattern as a mask in subjecting the upper electrode, the ferroelectric layer, the lower electrode, the etch stop layer, the semiconductor layer, and the insulating layer to en bloc etching, to expose the substrate, and (4) removing the etch mask pattern, and forming source/drain regions in the exposed substrate, whereby providing a simple fabrication process and permitting to minimize an alignment allowance.

摘要翻译： （1）在基板上依次形成绝缘层，半导体层，蚀刻停止层，下电极，强电介质层和上电极的步骤，其特征在于， 在上电极上形成所需形式的蚀刻掩模图案，（3）使用蚀刻掩模图案作为掩模，对上电极，铁电层，下电极，蚀刻停止层，半导体层和 绝缘层以整体蚀刻，以暴露衬底，以及（4）去除蚀刻掩模图案，以及在暴露的衬底中形成源极/漏极区域，从而提供简单的制造工艺并允许最小化对准余量。

公开(公告)号：US07652972B2

公开(公告)日：2010-01-26

申请号：US11183870

申请日：2005-07-19

申请人： Hyo-Jin Nam ,  Young-Sik Kim

发明人： Hyo-Jin Nam ,  Young-Sik Kim

IPC分类号： G11B9/00 ,  H05B3/00

CPC分类号： G11B9/1409 ,  B82Y10/00 ,  Y10T29/49083

摘要： A nano data writing and reading apparatus using a cantilever structure includes a cantilever formed by patterning a deposition material deposited on a sacrificial substrate, a probe formed at a front end portion of one surface of the cantilever and formed simultaneously with the cantilever as the deposition material is filled in a probe groove pattern formed on the sacrificial substrate when the deposition material is deposited on the sacrificial substrate, a heater formed of polycrystalline silicon at the cantilever, for heating the probe, a data sensing unit formed at the cantilever and sensing data written on media, a signal connection pad connected to the data sensing unit and formed at the cantilever to provide an electrical connection with an external signal line, a signal transfer circuit unit connected to the signal connection pad, for controlling writing and reading of data on and from the media, and a bonding unit allowing the cantilever to be supported at the signal transfer circuit unit and providing a passage for an electrical connection between the signal connection pad and the signal transfer circuit unit. Accordingly, the cantilever and the probe can be precisely formed by a molding technique through the removal of a sacrificial substrate and are formed of a deposition material such as a silicon nitride material, thereby remarkably reducing variations in a thickness of the cantilever and improving the durability of the probe. Also, because a bonding process with a glass wafer for fabricating the cantilever structure is not required, the process is facilitated and a fabrication coast is greatly reduced.

摘要翻译： 使用悬臂结构的纳米数据写入和读取装置包括通过图案化沉积在牺牲基板上的沉积材料形成的悬臂，形成在悬臂的一个表面的前端部分并与悬臂作为沉积材料同时形成的探针 填充在牺牲基板上形成的探针凹槽图案中，当沉积材料沉积在牺牲基板上时，在悬臂处形成由多晶硅形成的加热器，用于加热探针，在悬臂处形成的数据感测单元和感测数据写入 在媒体上，连接到数据感测单元并形成在悬臂处以提供与外部信号线的电连接的信号连接焊盘，连接到信号连接焊盘的信号传输电路单元，用于控制数据的写入和读取，以及 以及粘合单元，允许在信号传送时支撑悬臂 并提供用于信号连接焊盘和信号传输电路单元之间的电连接的通道。 因此，悬臂和探针可以通过模制技术通过去除牺牲基板精确地形成，并且由诸如氮化硅材料的沉积材料形成，从而显着地减小悬臂的厚度变化并提高耐久性 的探头。 此外，由于不需要用于制造悬臂结构的玻璃晶片的接合工艺，因此易于加工，并且大大降低了制造焊道。

公开(公告)号：US06277760B1

公开(公告)日：2001-08-21

申请号：US09339211

申请日：1999-06-24

申请人： Heon-Min Lee ,  Hyo-Jin Nam ,  Dong-Chun Kim

发明人： Heon-Min Lee ,  Hyo-Jin Nam ,  Dong-Chun Kim

IPC分类号： H01L21302

CPC分类号： H01L28/55 ,  H01L21/31122 ,  H01L21/32136 ,  H01L21/32139 ,  H01L28/65

摘要： Method for fabricating a ferroelectric capacitor, including the steps of (1) foxing an etch stopper formed of any one of TiO2 and RuO2 a lower electrode, a ferroelectric layer, an upper electrode, and an etch mask layer formed of any one of Ti, Ru and Cr in succession on a substrate, (2) patterning the etch mask layer to a required form, (3) using the etch mask layer as a mask in etching the upper electrode, the ferroelectric layer, and the lower electrode at a time, to expose the etch stopper, and (4) removing the etch stopper and the etch mask layer, whereby allowing a simple and easy fabrication of the capacitor regardless of presence of steps.

摘要翻译： 制造铁电体电容器的方法，包括以下步骤：（1）将由TiO 2和RuO 2中的任一种形成的蚀刻停止器的下电极，铁电层，上电极和由Ti， Ru和Cr连续地在衬底上，（2）将蚀刻掩模层图案化成所需的形式，（3）在蚀刻上电极，铁电层和下电极的同时使用蚀刻掩模层作为掩模 ，以暴露蚀刻停止器，以及（4）去除蚀刻停止器和蚀刻掩模层，从而允许简单且容易地制造电容器，而不管步骤的存在。

公开(公告)号：US20080051152A1

公开(公告)日：2008-02-28

申请号：US11779569

申请日：2007-07-18

申请人： Hyo Jin Nam ,  June Seok Kim ,  Sun Young Yi ,  Nho Kyung Hong ,  Jae Joon Hwang

发明人： Hyo Jin Nam ,  June Seok Kim ,  Sun Young Yi ,  Nho Kyung Hong ,  Jae Joon Hwang

IPC分类号： H04B1/38

CPC分类号： H04M1/72519 ,  H04M1/72544 ,  H04M1/72552 ,  H04M1/72566

摘要： Provided is a method for displaying information in a mobile terminal having an Electro-Luminescence (EL) region. The method includes determining whether a request for setting an item to be displayed on the EL region is input in a state in which the mobile terminal is in an EL display mode; if a request is input, setting an item to be displayed on the EL region; and displaying contents corresponding to the set item on the EL region in the EL display mode. The method allows information related to a mobile terminal to be consistently displayed at a preset position while performing a specific function of the mobile terminal, thus enabling simultaneous display of the specific function and of information stored in the mobile terminal.

摘要翻译： 提供了一种在具有电致发光（EL）区域的移动终端中显示信息的方法。 该方法包括确定在移动终端处于EL显示模式的状态下是否输入要设置要显示在EL区域上的项目的请求; 如果输入请求，则设置要显示在EL区域上的项目; 并且在EL显示模式下，在EL区域上显示与设定项目相对应的内容。 该方法允许在执行移动终端的特定功能的同时将与移动终端相关的信息一致地显示在预设位置，从而能够同时显示存储在移动终端中的特定功能和信息。