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1.发明申请公开(公告)号：US20140218711A1
公开(公告)日：2014-08-07
申请号：US14005686
申请日：2012-02-07
Applicant: Eugene Maria Brinkhof , Jan Bex , Anko Jozef Cornelus Sijben , Johannes Wihelmus Damen
IPC: G03F7/20
CPC classification number: G03F7/70708 , G03F7/70691 , H01L21/6831
Abstract: An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.
Abstract translation: 一种用于将物体保持在支撑台上的静电夹具，所述静电夹具包括：多层膜，其包括限定在位于电绝缘层之间的导电层中的电极。
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Patent Agency Ranking
2.发明授权Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder 有权基片支架，光刻设备，器件制造方法以及衬底保持器的制造方法公开(公告)号：US09354528B2
公开(公告)日：2016-05-31
申请号：US13455870
申请日：2012-04-25
Applicant: Jan Bex , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Johannes Wilhelmus Damen , Eugene Maria Brinkhof , Yogesh Pramod Karade
Inventor： Jan Bex , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Johannes Wilhelmus Damen , Eugene Maria Brinkhof , Yogesh Pramod Karade
CPC classification number: G03F7/70708 , G03F7/70716 , G03F7/7085 , G03F7/70875
Abstract: A method of manufacturing a substrate holder for use in a lithographic apparatus, the method including providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate, providing a carrier surface adjacent the main body surface, and forming a conductive layer on at least part of the main body surface and an integral part on at least part of the carrier surface.
Abstract translation: 一种制造用于光刻设备的衬底保持器的方法，所述方法包括提供具有表面的主体和从所述表面突出的多个毛刺，并且具有端面以支撑衬底，提供邻近所述主体的载体表面 表面，并且在主体表面的至少一部分上形成导电层，并在载体表面的至少一部分上形成整体部分。
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公开(公告)号：US07628875B2
公开(公告)日：2009-12-08
申请号：US11519204
申请日：2006-09-12
Applicant: Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
Inventor： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
IPC: B32B37/12
CPC classification number: B81C3/001 , B81C2203/032 , Y10T428/20 , Y10T428/218 , Y10T428/219 , Y10T428/249953
Abstract: A method of bonding a MEMS device to a substrate to form a MEMS device assembly. A thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate is determined. An adhesive is deposited onto a mating surface of the MEMS device and/or the mating surface of the substrate. The mating surfaces of the MEMS device and substrate are brought together, such that the adhesive can bond the MEMS device to the substrate. The volume of adhesive deposited at particular locations on the mating surface is varied to compensate for local variations in the thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate.
Abstract translation: 将MEMS器件接合到衬底以形成MEMS器件组件的方法。 确定MEMS器件的厚度分布和/或衬底的配合表面的平坦度。 将粘合剂沉积到MEMS器件的配合表面和/或衬底的配合表面上。 MEMS器件和衬底的配合表面被带到一起，使得粘合剂可以将MEMS器件接合到衬底。 沉积在配合表面上的特定位置处的粘合剂的体积被改变以补偿MEMS装置的厚度分布的局部变化和/或基底的配合表面的平坦度。
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4.发明申请SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER 有权基板支架，光刻装置，装置制造方法及制造基板支架的方法公开(公告)号：US20120274920A1
公开(公告)日：2012-11-01
申请号：US13455870
申请日：2012-04-25
Applicant: Jan BEX , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Johannes Wilhelmus Damen , Eugene Maria Brinkhof , Yogesh Pramod Karade
Inventor： Jan BEX , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Johannes Wilhelmus Damen , Eugene Maria Brinkhof , Yogesh Pramod Karade
CPC classification number: G03F7/70708 , G03F7/70716 , G03F7/7085 , G03F7/70875
Abstract: A method of manufacturing a substrate holder for use in a lithographic apparatus, the method including providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate, providing a carrier surface adjacent the main body surface, and forming a conductive layer on at least part of the main body surface and an integral part on at least part of the carrier surface.
Abstract translation: 一种制造用于光刻设备的衬底保持器的方法，所述方法包括提供具有表面的主体和从所述表面突出的多个毛刺，并且具有端面以支撑衬底，提供邻近所述主体的载体表面 表面，并且在主体表面的至少一部分上形成导电层，并在载体表面的至少一部分上形成整体部分。
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5.发明授权公开(公告)号：US09360771B2
公开(公告)日：2016-06-07
申请号：US14005686
申请日：2012-02-07
Applicant: Eugene Maria Brinkhof , Jan Bex , Anko Jozef Cornelus Sijben , Johannes Wilhelmus Damen
IPC: G03F7/20 , H01L21/683
CPC classification number: G03F7/70708 , G03F7/70691 , H01L21/6831
Abstract: An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.
Abstract translation: 一种用于将物体保持在支撑台上的静电夹具，所述静电夹具包括：多层膜，其包括限定在位于电绝缘层之间的导电层中的电极。
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公开(公告)号：US20080063830A1
公开(公告)日：2008-03-13
申请号：US11519204
申请日：2006-09-12
Applicant: Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
Inventor： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
CPC classification number: B81C3/001 , B81C2203/032 , Y10T428/20 , Y10T428/218 , Y10T428/219 , Y10T428/249953
Abstract: A method of bonding a MEMS device to a substrate to form a MEMS device assembly. A thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate is determined. An adhesive is deposited onto a mating surface of the MEMS device and/or the mating surface of the substrate. The mating surfaces of the MEMS device and substrate are brought together, such that the adhesive can bond the MEMS device to the substrate. The volume of adhesive deposited at particular locations on the mating surface is varied to compensate for local variations in the thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate.
Abstract translation: 将MEMS器件接合到衬底以形成MEMS器件组件的方法。 确定MEMS器件的厚度分布和/或衬底的配合表面的平坦度。 将粘合剂沉积到MEMS器件的配合表面和/或衬底的配合表面上。 MEMS器件和衬底的配合表面被带到一起，使得粘合剂可以将MEMS器件接合到衬底。 沉积在配合表面上的特定位置处的粘合剂的体积被改变以补偿MEMS装置的厚度分布的局部变化和/或基底的配合表面的平坦度。
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