Method for forming minute pattern and method for forming minute pattern mask
    1.
    发明授权
    Method for forming minute pattern and method for forming minute pattern mask 有权
    形成微小图案的方法和形成微图案掩模的方法

    公开(公告)号:US08721905B2

    公开(公告)日:2014-05-13

    申请号:US13431516

    申请日:2012-03-27

    IPC分类号: H01L21/302

    摘要: A method for forming a minute pattern mask includes forming an etching target layer on a substrate. A convex pattern including a plurality of convex parts is formed on the etching target layer. A resin composition is coated on the convex pattern to form a resin layer including a first region neighboring the convex part and a second region positioned between the neighboring convex parts. The resin layer is ashed or etched to form the plurality of first resin patterns. The plurality of first resin patterns is processed to form a minute pattern mask including a plurality of second resin patterns. The etching target layer is etched using the plurality of second resin patterns as an etch mask to form a minute pattern.

    摘要翻译: 形成微图案掩模的方法包括在基板上形成蚀刻目标层。 在蚀刻目标层上形成包括多个凸部的凸形图案。 将树脂组合物涂覆在凸形图案上以形成包括邻近凸部的第一区域和位于相邻凸部之间的第二区域的树脂层。 树脂层被灰化或蚀刻以形成多个第一树脂图案。 处理多个第一树脂图案以形成包括多个第二树脂图案的微小图案掩模。 使用多个第二树脂图案作为蚀刻掩模蚀刻蚀刻目标层以形成微小图案。

    METHOD OF FORMING A FINE PATTERN, DISPLAY SUBSTRATE, AND METHOD OF MANUFACTURING THE SAME USING THE METHOD OF FORMING A FINE PATTERN
    4.
    发明申请
    METHOD OF FORMING A FINE PATTERN, DISPLAY SUBSTRATE, AND METHOD OF MANUFACTURING THE SAME USING THE METHOD OF FORMING A FINE PATTERN 有权
    形成精细图案的方法,显示基板及其使用形成精细图案的方法制造相同方法

    公开(公告)号:US20120248442A1

    公开(公告)日:2012-10-04

    申请号:US13349487

    申请日:2012-01-12

    摘要: A method is provided for forming a fine pattern. In the method, a first fine pattern and a first metal pattern are formed by respectively patterning a first fine pattern layer on a base substrate and a first metal layer on the first fine pattern layer. A second fine pattern layer and a second metal layer are sequentially formed over the first fine pattern and the first metal pattern. The second metal layer is patterned, so that a second metal pattern between adjacent portions of the first fine pattern. The second fine pattern layer is patterned using the second metal pattern as a mask, so that a second fine pattern is formed between adjacent portions of the first fine pattern.

    摘要翻译: 提供了形成精细图案的方法。 在该方法中,通过分别对第一精细图案层上的基底基板上的第一精细图案层和第一金属层进行构图来形成第一精细图案和第一金属图案。 在第一精细图案和第一金属图案上顺序地形成第二精细图案层和第二金属层。 图案化第二金属层,使得在第一精细图案的相邻部分之间的第二金属图案。 使用第二金属图案作为掩模对第二精细图案图案进行图案化,使得在第一精细图案的相邻部分之间形成第二精细图案。

    METHOD AND SYSTEM FOR SHARING INFORMATION BETWEEN USERS IN MEDIA REPRODUCING SYSTEM
    5.
    发明申请
    METHOD AND SYSTEM FOR SHARING INFORMATION BETWEEN USERS IN MEDIA REPRODUCING SYSTEM 有权
    在媒体传播系统中用户之间共享信息的方法和系统

    公开(公告)号:US20090193463A1

    公开(公告)日:2009-07-30

    申请号:US12246787

    申请日:2008-10-07

    IPC分类号: H04N5/445

    摘要: A method and system for sharing information between users while reproducing media in a media reproducing system, the method including: reproducing the media in the media reproducing system; capturing a part of the media in the media reproducing system; and registering a media related question including the captured part of the media in an information sharing server through a return channel of the media reproducing system. Accordingly, the users can share information in real time by generating the media related question by directly capturing the media in the media reproducing system, registering the media related question in the information sharing server, and displaying on the media reproducing system of another user that such media related question is registered. Also, since a question can be directly registered while reproducing the media, information can be conveniently shared without interrupting the media reproduction.

    摘要翻译: 一种用于在媒体再现系统中再现媒体时在用户之间共享信息的方法和系统,所述方法包括:在媒体再现系统中再现媒体; 在媒体再现系统中捕获媒体的一部分; 以及通过所述媒体再现系统的返回信道,将信息共享服务器中包含所捕获的媒体部分的媒体相关问题登记。 因此,用户可以通过直接在媒体再现系统中捕获媒体,将媒体相关问题登记在信息共享服务器中,并通过在媒体再现系统上显示另一用户的媒体再现系统来产生媒体相关问题来实时共享信息, 媒体相关问题已注册。 此外,由于可以在再现媒体时直接注册一个问题,所以可以方便地共享信息而不中断媒体再现。

    Method and system for sharing information between users in media reproducing system
    6.
    发明授权
    Method and system for sharing information between users in media reproducing system 有权
    在媒体再现系统中用户之间共享信息的方法和系统

    公开(公告)号:US09544544B2

    公开(公告)日:2017-01-10

    申请号:US12246787

    申请日:2008-10-07

    摘要: A method and system for sharing information between users while reproducing media in a media reproducing system, the method including: reproducing the media in the media reproducing system; capturing a part of the media in the media reproducing system; and registering a media related question including the captured part of the media in an information sharing server through a return channel of the media reproducing system. Accordingly, the users can share information in real time by generating the media related question by directly capturing the media in the media reproducing system, registering the media related question in the information sharing server, and displaying on the media reproducing system of another user that such media related question is registered. Also, since a question can be directly registered while reproducing the media, information can be conveniently shared without interrupting the media reproduction.

    摘要翻译: 一种用于在媒体再现系统中再现媒体时在用户之间共享信息的方法和系统,所述方法包括:在媒体再现系统中再现媒体; 在媒体再现系统中捕获媒体的一部分; 以及通过所述媒体再现系统的返回信道,将信息共享服务器中包含所捕获的媒体部分的媒体相关问题登记。 因此,用户可以通过直接在媒体再现系统中捕获媒体,将媒体相关问题登记在信息共享服务器中,并通过在媒体再现系统上显示另一用户的媒体再现系统来产生媒体相关问题来实时共享信息, 媒体相关问题已注册。 此外,由于可以在再现媒体时直接注册一个问题,所以可以方便地共享信息而不中断媒体再现。

    Method of forming a fine pattern, display substrate, and method of manufacturing the same using the method of forming a fine pattern
    7.
    发明授权
    Method of forming a fine pattern, display substrate, and method of manufacturing the same using the method of forming a fine pattern 有权
    使用形成精细图案的方法形成精细图案的方法,显示基板及其制造方法

    公开(公告)号:US08575031B2

    公开(公告)日:2013-11-05

    申请号:US13349487

    申请日:2012-01-12

    IPC分类号: H01L29/04

    摘要: A method is provided for forming a fine pattern. In the method, a first fine pattern and a first metal pattern are formed by respectively patterning a first fine pattern layer on a base substrate and a first metal layer on the first fine pattern layer. A second fine pattern layer and a second metal layer are sequentially formed over the first fine pattern and the first metal pattern. The second metal layer is patterned, so that a second metal pattern between adjacent portions of the first fine pattern. The second fine pattern layer is patterned using the second metal pattern as a mask, so that a second fine pattern is formed between adjacent portions of the first fine pattern.

    摘要翻译: 提供了形成精细图案的方法。 在该方法中,通过分别对第一精细图案层上的基底基板上的第一精细图案层和第一金属层进行构图来形成第一精细图案和第一金属图案。 在第一精细图案和第一金属图案上顺序地形成第二精细图案层和第二金属层。 图案化第二金属层,使得在第一精细图案的相邻部分之间的第二金属图案。 使用第二金属图案作为掩模对第二精细图案图案进行图案化,使得在第一精细图案的相邻部分之间形成第二精细图案。

    Method for Forming Minute Pattern and Method for Forming Minute Pattern Mask
    9.
    发明申请
    Method for Forming Minute Pattern and Method for Forming Minute Pattern Mask 有权
    形成分钟图案的方法和形成分钟图案掩模的方法

    公开(公告)号:US20130098869A1

    公开(公告)日:2013-04-25

    申请号:US13431516

    申请日:2012-03-27

    IPC分类号: B44C1/22

    摘要: A method for forming a minute pattern mask includes forming an etching target layer on a substrate. A convex pattern including a plurality of convex parts is formed on the etching target layer. A resin composition is coated on the convex pattern to form a resin layer including a first region neighboring the convex part and a second region positioned between the neighboring convex parts. The resin layer is ashed or etched to form the plurality of first resin patterns. The plurality of first resin patterns is processed to form a minute pattern mask including a plurality of second resin patterns. The etching target layer is etched using the plurality of second resin patterns as an etch mask to form a minute pattern.

    摘要翻译: 形成微图案掩模的方法包括在基板上形成蚀刻目标层。 在蚀刻目标层上形成包括多个凸部的凸形图案。 将树脂组合物涂覆在凸形图案上以形成包括邻近凸部的第一区域和位于相邻凸部之间的第二区域的树脂层。 树脂层被灰化或蚀刻以形成多个第一树脂图案。 处理多个第一树脂图案以形成包括多个第二树脂图案的微小图案掩模。 使用多个第二树脂图案作为蚀刻掩模蚀刻蚀刻目标层以形成微小图案。