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公开(公告)号：US20100047973A1
公开(公告)日：2010-02-25
申请号：US12520385
申请日：2007-12-20
IPC分类号： H01L21/336 , H01L21/20
CPC分类号： H01L29/7853 , B82Y10/00 , H01L29/42392 , H01L29/66795 , H01L29/7854 , Y10S977/938
摘要： A method for forming a wire in a layer based on a monocrystalline or amorphous material. The method forms two trenches in the layer, crossing through one face of the layer, separated from each other by one portion of the layer, by an etching of the layer on which is arranged an etching mask, and anneals, under hydrogenated atmosphere, the layer, the etching mask being maintained on the layer during the annealing. The depths and widths of the sections of the two trenches, and the width of a section of the portion of the layer, are such that the annealing eliminates a part of the portion of the layer, the two trenches then forming a single trench in which a remaining part of the portion of the layer forms the wire.
摘要翻译： 一种用于在基于单晶或非晶材料的层中形成导线的方法。 该方法在层中形成两个沟槽，穿过该层的一个面，通过蚀刻其上布置有蚀刻掩模的层彼此分离一层该层，并在氢化气氛下退火， 在退火期间，蚀刻掩模保持在该层上。 两个沟槽的部分的深度和宽度以及该部分的部分的宽度使得退火消除了该部分的一部分，然后两个沟槽形成单个沟槽，其中 层的部分的剩余部分形成电线。
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2.发明授权公开(公告)号：US07985469B2
公开(公告)日：2011-07-26
申请号：US11718859
申请日：2005-11-03
申请人： Yves Samson , Franck Fournel , Joel Eymery
发明人： Yves Samson , Franck Fournel , Joel Eymery
CPC分类号： H01F1/009 , B82Y25/00 , B82Y30/00 , C30B29/68 , Y10T428/24893 , Y10T428/25 , Y10T428/2991 , Y10T428/31504
摘要： The invention relates to a method for realizing a particle network comprising a particle depositing step, capable of self-organizing with a determined increment along a first direction, onto a substrate exhibiting a property that permits an interaction between the substrate and the particles and modulated along the first direction with a period adapted to said increment. A substantial interaction thus subsists between each of the particles and its neighboring particles along the first direction.
摘要翻译： 本发明涉及一种用于实现粒子网络的方法，该粒子网络包括粒子沉积步骤，能够沿着第一方向以确定的增量自组织到具有允许衬底和粒子之间的相互作用并且被调制的性质的衬底上 第一方向具有适应于所述增量的周期。 因此，沿着第一方向在每个颗粒和其相邻颗粒之间存在实质的相互作用。
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公开(公告)号：US20100230674A1
公开(公告)日：2010-09-16
申请号：US12519356
申请日：2007-12-20
CPC分类号： B81C1/00047 , B01L3/5027 , B81B2201/058 , B81B2203/0384
摘要： The invention relates to a method for forming microcavities (118) of different depths in a layer (102) based on at least an amorphous or monocrystalline material, comprising at least the following steps in which: at least one shaft and/or trench is formed in the layer (102) so as to extend through one face (101) thereof, such that two sections of the shaft and/or the trench, in two different planes parallel to the face (101), are aligned in relation to one another along an alignment axis forming a non-zero angle with a normal to the plane of said face (101); and the layer (102) is annealed in a hydrogenated atmosphere so as to transform the shaft and/or trench into at least two microcavities (118).
摘要翻译： 本发明涉及一种基于至少一种非晶或单晶材料形成层（102）中不同深度的微腔（118）的方法，该方法至少包括以下步骤，其中：形成至少一个轴和/或沟槽 在所述层（102）中延伸通过其一个面（101），使得所述轴和/或所述沟槽的两个平行于所述面（101）的不同平面中的两个部分相对于彼此对准 沿着与所述面（101）的平面垂直的非零角度的对准轴线; 并且所述层（102）在氢化气氛中退火，以便将所述轴和/或沟槽转变成至少两个微腔（118）。
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公开(公告)号：US07985632B2
公开(公告)日：2011-07-26
申请号：US12520385
申请日：2007-12-20
IPC分类号： H01L21/336
CPC分类号： H01L29/7853 , B82Y10/00 , H01L29/42392 , H01L29/66795 , H01L29/7854 , Y10S977/938
摘要： A method for forming a wire in a layer based on a monocrystalline or amorphous material. The method forms two trenches in the layer, crossing through one face of the layer, separated from each other by one portion of the layer, by an etching of the layer on which is arranged an etching mask, and anneals, under hydrogenated atmosphere, the layer, the etching mask being maintained on the layer during the annealing. The depths and widths of the sections of the two trenches, and the width of a section of the portion of the layer, are such that the annealing eliminates a part of the portion of the layer, the two trenches then forming a single trench in which a remaining part of the portion of the layer forms the wire.
摘要翻译： 一种用于在基于单晶或非晶材料的层中形成导线的方法。 该方法在层中形成两个沟槽，穿过该层的一个面，通过蚀刻其上布置有蚀刻掩模的层彼此分离一层该层，并在氢化气氛下退火， 在退火期间，蚀刻掩模保持在该层上。 两个沟槽的部分的深度和宽度以及该部分的部分的宽度使得退火消除了该部分的一部分，然后两个沟槽形成单个沟槽，其中 层的部分的剩余部分形成电线。
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5.发明申请公开(公告)号：US20080290471A1
公开(公告)日：2008-11-27
申请号：US12091857
申请日：2006-10-25
申请人： Joel Eymery , Pascal Pochet
发明人： Joel Eymery , Pascal Pochet
IPC分类号： H01L21/265 , H01L29/02
CPC分类号： H01L21/02694 , H01L21/02422 , H01L21/02529 , H01L21/02532 , H01L21/0254 , H01L21/26506
摘要： A method for making a thin-film structure includes a thin film stabilized on a substrate. The structure of the thin film is defined by a material which includes at least one first chemical species. The method includes a step of inputting particles of the first chemical species into the thin film so as to compensate for the flow of vacancies from the surface of the film.
摘要翻译： 制造薄膜结构的方法包括在基板上稳定的薄膜。 薄膜的结构由包括至少一种第一化学物质的材料限定。 该方法包括将第一化学物质的颗粒输入到薄膜中以补偿从膜的表面流出空位的步骤。
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公开(公告)号：US20080160316A1
公开(公告)日：2008-07-03
申请号：US11718859
申请日：2005-11-03
申请人： Yves Samson , Franck Fournel , Joel Eymery
发明人： Yves Samson , Franck Fournel , Joel Eymery
CPC分类号： H01F1/009 , B82Y25/00 , B82Y30/00 , C30B29/68 , Y10T428/24893 , Y10T428/25 , Y10T428/2991 , Y10T428/31504
摘要： The invention relates to a method for realizing a particle network comprising a particle depositing step, capable of self-organizing with a determined increment along a first direction, onto a substrate exhibiting a property that permits an interaction between the substrate and the particles and modulated along the first direction with a period adapted to said increment. A substantial interaction thus subsists between each of the particles and its neighboring particles along the first direction.
摘要翻译： 本发明涉及一种用于实现粒子网络的方法，该粒子网络包括粒子沉积步骤，能够沿着第一方向以确定的增量自组织到具有允许衬底和粒子之间的相互作用并且被调制的性质的衬底上 第一方向具有适应于所述增量的周期。 因此，沿着第一方向在每个颗粒和其相邻颗粒之间存在实质的相互作用。
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公开(公告)号：US20080246022A1
公开(公告)日：2008-10-09
申请号：US11576605
申请日：2005-10-12
申请人： Joel Eymery , Pascal Gentile
发明人： Joel Eymery , Pascal Gentile
CPC分类号： H01L29/882 , B82Y10/00 , H01L29/158 , H01L29/32
摘要： An electron transport device, including at least one transport layer in which at least one periodic dislocation and/or defect array is produced, and a mechanism for guiding electrons in the transport layer.
摘要翻译： 一种电子传输装置，包括至少一个传输层，其中产生至少一个周期性位错和/或缺陷阵列，以及用于引导传输层中的电子的机构。
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