Portable apparatus and method for treating a workpiece
    4.
    发明授权
    Portable apparatus and method for treating a workpiece 有权
    用于处理工件的便携式设备和方法

    公开(公告)号:US06821379B2

    公开(公告)日:2004-11-23

    申请号:US10027646

    申请日:2001-12-21

    IPC分类号: H05H100

    摘要: A plasma generating apparatus and method for treating a surface of a workpiece. This apparatus comprises a power supply 100, at least one powerable electrode connected to the power supply 100, at least one groundable electrode connected to ground, a dielectric separating the at least one powerable electrode and the at least one groundable electrode, a chamber at least partially housing both the powerable electrode and the groundable electrode and a first inlet for admitting a first gas into the chamber such that the first gas can flow between the at least one powerable electrode and the at least one groundable electrode. The at least one powerable electrode and the at least one groundable electrode are disposed in an array. These electrodes are arranged to be on a common side of a workpiece, to provide a portable apparatus.

    摘要翻译: 一种用于处理工件表面的等离子体产生装置和方法。 该装置包括电源100,连接到电源100的至少一个电源电极,连接到地的至少一个可接地电极,至少一个电源电极和至少一个可接地电极的绝缘体,至少一个室 部分地容纳可驱动电极和可接地电极;以及第一入口,用于允许第一气体进入室,使得第一气体可以在至少一个可动电极和至少一个可接地电极之间流动。 所述至少一个电源电极和所述至少一个可接地电极被布置成阵列。 这些电极被布置成在工件的公共侧上,以提供便携式设备。