利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

7 条记录 (耗时 0.008 秒)

    Electron source producing apparatus and method
    1.
    发明授权
    Electron source producing apparatus and method 失效
    电子源产生装置及方法

    公开(公告)号：US07445535B2

    公开(公告)日：2008-11-04

    申请号：US11000986

    申请日：2004-12-02

    申请人： Kazumasa Takatsu ,  Shigeto Kamata

    发明人： Kazumasa Takatsu ,  Shigeto Kamata

    IPC分类号： H01J9/00 ,  H01L21/00

    CPC分类号： C23C16/4412 ,  C23C16/04 ,  C23C16/26 ,  H01J9/027

    摘要： An electron source producing apparatus for forming an electron-emission part on a conductive member disposed on a substrate in an atmosphere containing a desired gas. The apparatus includes a container for forming a hermetic atmosphere between the container and a surface of the substrate on which the conductive member is formed. The container has a gas inlet and a gas outlet. A diffusing member is for diffusing an introduced gas, and is disposed between the gas inlet and the surface of the substrate. A resisting member provides exhaust resistance, and is disposed between the gas outlet and the surface of the substrate and is separated from the gas outlet. The resisting member is disposed closer to the surface of the substrate than is the diffusing member.

    摘要翻译： 一种用于在包含所需气体的气氛中设置在基板上的导电部件上形成电子发射部分的电子源产生装置。 该装置包括用于在容器和形成有导电构件的基板的表面之间形成密封气氛的容器。 容器具有气体入口和气体出口。 扩散构件用于扩散引入的气体，并且设置在气体入口和衬底的表面之间。 抵抗构件提供排气阻力，并且设置在气体出口和基板的表面之间并与气体出口分离。 抵抗构件比扩散构件更靠近衬底的表面设置。

    Electron source producing apparatus and method
    4.
    发明申请
    Electron source producing apparatus and method 失效
    电子源产生装置及方法

    公开(公告)号：US20050127812A1

    公开(公告)日：2005-06-16

    申请号：US11000986

    申请日：2004-12-02

    申请人： Kazumasa Takatsu ,  Shigeto Kamata

    发明人： Kazumasa Takatsu ,  Shigeto Kamata

    IPC分类号： C23C16/04 ,  C23C16/26 ,  C23C16/44 ,  H01J9/02 ,  H01J1/62 ,  H01J63/04

    CPC分类号： C23C16/4412 ,  C23C16/04 ,  C23C16/26 ,  H01J9/027

    摘要： An electron source producing apparatus for forming an electron-emission part on a conductive member disposed on a substrate in an atmosphere containing a desired gas. The apparatus includes a container for forming a hermetic atmosphere between the container and a surface of the substrate on which the conductive member is formed. The container has a gas inlet and a gas outlet. A diffusing member is for diffusing an introduced gas, and is disposed between the gas inlet and the surface of the substrate. A resisting member provides exhaust resistance, and is disposed between the gas outlet and the surface of the substrate and is separated from the gas outlet. The resisting member is disposed closer to the surface of the substrate than is the diffusing member.

    摘要翻译： 一种用于在包含所需气体的气氛中设置在基板上的导电部件上形成电子发射部分的电子源产生装置。 该装置包括用于在容器和形成有导电构件的基板的表面之间形成密封气氛的容器。 容器具有气体入口和气体出口。 扩散构件用于扩散引入的气体，并且设置在气体入口和衬底的表面之间。 抵抗构件提供排气阻力，并且设置在气体出口和基板的表面之间并与气体出口分离。 抵抗构件比扩散构件更靠近衬底的表面设置。