Semiconductor manufacturing line monitoring system
    4.
    发明授权
    Semiconductor manufacturing line monitoring system 失效
    半导体制造线监控系统

    公开(公告)号:US06757580B2

    公开(公告)日:2004-06-29

    申请号:US10390918

    申请日:2003-03-19

    IPC分类号: G06F1900

    摘要: A monitoring system includes a factory automation (FA) computer for receiving information from a manufacturing apparatus, an information collecting computer for receiving the information on a LAN from the FA computer and sending the received information to a facility operation monitoring host computer, and the facility operation monitoring host computer constructs a database based on the received information and displaying the information for a supervisor in accordance with the constructed database. The facility operation monitoring host computer includes databases, and displays information stored in the databases on a monitor, linking the information from the databases.

    摘要翻译: 监视系统包括用于从制造装置接收信息的工厂自动化(FA)计算机,用于从FA计算机接收LAN上的信息并将接收到的信息发送到设施操作监视主计算机的信息收集计算机,以及设备 操作监控主机基于接收到的信息构建数据库,并根据构建的数据库显示主管的信息。 设备操作监控主机包括数据库,并在监视器上显示存储在数据库中的信息,链接来自数据库的信息。