公开(公告)号：US20110000512A1

公开(公告)日：2011-01-06

申请号：US12824565

申请日：2010-06-28

申请人： Takayuki TOSHIMA ,  Kazuo TERADA ,  Kazuyuki HONDA

发明人： Takayuki TOSHIMA ,  Kazuo TERADA ,  Kazuyuki HONDA

IPC分类号： B08B3/00

CPC分类号： B08B3/10 ,  H01L21/67057 ,  H01L21/67751 ,  Y10S134/902

摘要： Provided are a substrate processing apparatus and a substrate processing method capable of processing of a substrate using a supercritical fluid without exposing the pattern formed on the substrate to an atmospheric environment. The substrate processing apparatus includes a cleaning bath configured to accommodate a substrate and clean the substrate by flowing a cleaning solution, and a processing vessel configured to accommodate the cleaning bath and process the substrate with a supercritical fluid.

摘要翻译： 提供了一种基板处理装置和基板处理方法，其能够使用超临界流体处理基板，而不将形成在基板上的图案暴露于大气环境。 基板处理装置包括：清洗槽，其配置为容纳基板并通过流动清洁溶液清洁基板;以及处理容器，其构造成容纳清洗槽并用超临界流体处理基板。

公开(公告)号：US06368040B1

公开(公告)日：2002-04-09

申请号：US09251100

申请日：1999-02-16

申请人： Katuki Yamasaki ,  Osamu Kuroda ,  Kazuyuki Honda ,  Hiroshi Yamahata

发明人： Katuki Yamasaki ,  Osamu Kuroda ,  Kazuyuki Honda ,  Hiroshi Yamahata

IPC分类号： B65H100

CPC分类号： H01L21/67781 ,  Y10S414/136 ,  Y10S414/137

摘要： A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

公开(公告)号：US5644659A

公开(公告)日：1997-07-01

申请号：US430621

申请日：1995-04-28

申请人： Kazuyuki Honda

发明人： Kazuyuki Honda

IPC分类号： B41J29/26 ,  B41J2/44 ,  B41J2/485 ,  B41J21/00 ,  G06F9/32 ,  G06K15/02 ,  G06T11/00 ,  G09G5/22 ,  G09G5/32 ,  G06K9/36

CPC分类号： G06K15/02 ,  G06T11/001 ,  G06K2215/0028 ,  G06K2215/0054

摘要： An output apparatus to generate a decoration rule pattern comprises: a memory to store data indicative of a kind of pattern to be generated and data indicative of an output position of the pattern; and a making circuit to make a pattern on the basis of the data indicative of the kind of the pattern to be generated and the data indicative of the output position which are stored in the memory, wherein the making circuit continuously makes a plurality of units of the pattern to be generated, makes a rotation pattern (rotated version) of the unit, and makes a pattern of an edge portion of the pattern to be generated from the unit. With the apparatus, a decoration rule pattern can be drawn at the high speed and with high quality by rotating a pattern and repetitively generating a pattern.

摘要翻译： 用于生成装饰规则图案的输出装置包括：存储器，用于存储指示要生成的图案的种类的数据和指示图案的输出位置的数据; 以及制造电路，其基于表示要生成的图案的种类的数据和表示存储在存储器中的输出位置的数据，形成图案，其中，制作电路连续地制作多个单元 要生成的图案，使单元的旋转图案（旋转版本），并且从单元生成图案的边缘部分的图案。 利用该装置，可以通过旋转图案并重复地生成图案，以高速和高质量绘制装饰规则图案。

公开(公告)号：US20110265107A1

公开(公告)日：2011-10-27

申请号：US13059099

申请日：2009-12-18

申请人： Kazuyuki Honda ,  Tetsuya Okubo ,  Kenji Urushihara ,  Yoshikazu Ohmura ,  Tomomi Nishikata

发明人： Kazuyuki Honda ,  Tetsuya Okubo ,  Kenji Urushihara ,  Yoshikazu Ohmura ,  Tomomi Nishikata

IPC分类号： G11B17/028

CPC分类号： G11B7/082 ,  G11B7/08582 ,  G11B17/022 ,  G11B17/0282 ,  G11B17/051

摘要： A disk device configured in such a manner that, in addition to tilt adjustment, the adjustment of the distance between a disk and an optical pickup can be easily performed. The disk device is provided with a stepping motor (23) for moving the optical pickup (5), a base chassis (2) to which a spindle motor (3) for rotating a turntable on which a disk (1) is affixed is mounted so as to be adjustable in position, a guide shaft (6) provided to the base chassis (2) so as to extend in the radial direction of the disk and guiding the movement of the optical pickup (5) by being in contact with a portion of the optical pickup (5), a sub guide shaft (7) provided to the base chassis (2) and guiding the movement of the optical pickup (5), a tilt adjusting section (300) for adjusting the relative distance between the sub guide shaft (7) and the base chassis (2), and a turntable adjusting section (200) for adjusting the radial angle, the tangential angle, and the height of the spindle motor (3) relative to the base chassis (2).

摘要翻译： 一种盘装置，其特征在于，除了倾斜调整以外，可以容易地进行光盘与光拾取器之间的距离的调整。 盘装置设置有用于移动光学拾取器（5）的步进电机（23），安装有用于旋转固定有盘（1）的转盘的主轴电动机（3）的底架（2）， 以便可以在位置上调整;导向轴（6），其设置在所述基座（2）上，以沿所述盘的径向方向延伸，并通过与所述光学拾取器（5）的接触而引导所述光学拾取器 光拾取器（5）的一部分，设置在底架（2）上并引导光拾取器（5）的移动的副引导轴（7），倾斜调节部分（300），用于调节光拾取器 副导向轴（7）和底架（2），以及用于调节主轴电动机（3）相对于底架（2）的径向角度，切线角度和高度的转盘调节部分（200） 。

公开(公告)号：US08321882B2

公开(公告)日：2012-11-27

申请号：US13059099

申请日：2009-12-18

申请人： Kazuyuki Honda ,  Tetsuya Okubo ,  Kenji Urushihara ,  Yoshikazu Ohmura ,  Tomomi Nishikata

发明人： Kazuyuki Honda ,  Tetsuya Okubo ,  Kenji Urushihara ,  Yoshikazu Ohmura ,  Tomomi Nishikata

IPC分类号： G11B19/20

CPC分类号： G11B7/082 ,  G11B7/08582 ,  G11B17/022 ,  G11B17/0282 ,  G11B17/051

摘要： A disk device configured in such a manner that, in addition to tilt adjustment, the adjustment of the distance between a disk and an optical pickup can be easily performed. The disk device is provided with a stepping motor (23) for moving the optical pickup (5), a base chassis (2) to which a spindle motor (3) for rotating a turntable on which a disk (1) is affixed is mounted so as to be adjustable in position, a guide shaft (6) provided to the base chassis (2) so as to extend in the radial direction of the disk and guiding the movement of the optical pickup (5) by being in contact with a portion of the optical pickup (5), a sub guide shaft (7) provided to the base chassis (2) and guiding the movement of the optical pickup (5), a tilt adjusting section (300) for adjusting the relative distance between the sub guide shaft (7) and the base chassis (2), and a turntable adjusting section (200) for adjusting the radial angle, the tangential angle, and the height of the spindle motor (3) relative to the base chassis (2).

摘要翻译： 一种盘装置，其特征在于，除了倾斜调整以外，可以容易地进行光盘与光拾取器之间的距离的调整。 盘装置设置有用于移动光学拾取器（5）的步进电机（23），安装有用于旋转固定有盘（1）的转盘的主轴电动机（3）的底架（2）， 以便可以在位置上调整;导向轴（6），其设置在所述基座（2）上，以沿所述盘的径向方向延伸，并通过与所述光学拾取器（5）的接触而引导所述光学拾取器 光拾取器（5）的一部分，设置在底架（2）上并引导光拾取器（5）的移动的副引导轴（7），倾斜调节部分（300），用于调节光拾取器 副导向轴（7）和底架（2），以及用于调节主轴电机（3）相对于底架（2）的径向角度，切线角度和高度的转盘调节部分（200） 。

公开(公告)号：US20110145845A1

公开(公告)日：2011-06-16

申请号：US13059105

申请日：2009-12-18

申请人： Tetsuya Okubo ,  Kazuyuki Honda ,  Yoshikazu Ohmura ,  Kenji Urushihara ,  Tomomi Nishikata

发明人： Tetsuya Okubo ,  Kazuyuki Honda ,  Yoshikazu Ohmura ,  Kenji Urushihara ,  Tomomi Nishikata

IPC分类号： G11B17/028

CPC分类号： G11B17/0284 ,  G11B17/0282 ,  G11B17/0286

摘要： A disk device, wherein a disk clamp unit is further thinned. The disk device is provided with a spindle motor (300) for positioning and rotating a disk, an alignment ring (301) fixed to the rotating shaft of the spindle motor, and a clamp section (400) for mounting the disk on the spindle motor (300). The alignment ring (301) is provided with a projection section (301C) formed around the rotating shaft of the spindle motor (300), and a magnet (302) provided around the rotating shaft with a space provided between the magnet (302) and the projection section (301C). The clamp section (400) is provided with a center member (401) having formed therein a recessed space (401G) in which the projection section (301C) is fitted, and also with a member (402) to be attracted which is attracted by the magnet (302). The clamp section (400) is adapted in such a manner that the disk is mounted on the spindle motor (300) when the projection section (301C) is fitted in the recessed space (401G) and attracted by the magnet (302).

摘要翻译： 一种盘装置，其中盘夹单元进一步变薄。 盘装置设有用于定位和旋转盘的主轴马达（300），固定到主轴马达的转轴的定位环（301）和用于将盘安装在主轴马达上的夹紧部分（400） （300）。 定位环（301）设置有形成在主轴电动机（300）的旋转轴周围的突出部（301C）和设置在旋转轴周围的磁体（302），该磁体设置在磁体（302）和 投影部（301C）。 夹紧部分（400）设有中心部件（401），中心部件（401）中形成有凹入空间（401G），突出部分（301C）装配在该凹进空间中，并且还具有被吸引的部件（402） 磁体（302）。 当突出部分（301C）装配在凹陷空间（401G）中并被磁体（302）吸引时，夹紧部分（400）适于使盘安装在主轴马达（300）上。

公开(公告)号：US06375758B2

公开(公告)日：2002-04-23

申请号：US09097097

申请日：1998-06-12

申请人： Satoshi Nakashima ,  Yuji Kamikawa ,  Kazuyuki Honda

发明人： Satoshi Nakashima ,  Yuji Kamikawa ,  Kazuyuki Honda

IPC分类号： B08B300

CPC分类号： H01L21/67028 ,  Y10S134/902

摘要： A cleaning and drying apparatus includes a cleaning bath 22 for collecting cleaning liquid and also discharging the liquid, a drying chamber 23 arranged above the cleaning bath 22 and a wafer boat 24 for conveying semiconductor wafers W between the cleaning bath 22 and the drying chamber 23. Dry gas nozzles 37 for ejecting dry gas are provided in the drying chamber 23. A shutter 36 is arranged between the cleaning bath 22 and the drying chamber 23, for insulating the cleaning bath 22 from the drying chamber 23. A central processing unit 60 controls respective operations of the dry gas nozzles 37 and a driving unit 52 for the shutter 36. With the arrangement, after the wafers W have been cleaned in the cleaning bath 22, the cleaning liquid is discharged through a bottom of the bath 22, while the dry gas is supplied from the dry gas nozzles 37 to contact with surfaces of the wafers W and the cleaning liquid in a first drying process. Next, a second drying process is carried out due to condensation of the cleaning liquid on the wafers and the dry gas. In this way, the improvement in drying efficiency and the reduction of consumed dry gas can be accomplished.

摘要翻译： 清洗干燥装置包括清洗液22，用于收集清洗液并排出液体，设置在清洗槽22上方的干燥室23和用于在清洗槽22和干燥室23之间输送半导体晶片W的晶片舟24 用于喷射干燥气体的干燥气体喷嘴37设置在干燥室23中。在清洗槽22和干燥室23之间设置闸板36，以将清洗槽22与干燥室23隔离。中央处理单元60 控制干气喷嘴37的各个操作和用于闸板36的驱动单元52.通过这种布置，在清洗槽22中清洁晶片W之后，清洗液通过槽22的底部排出，同时 在干燥气体喷嘴37中，干燥气体在第一干燥过程中与晶片W和清洗液体的表面接触。 接下来，由于清洁液体在晶片和干燥气体上的冷凝而进行第二干燥处理。 这样可以实现干燥效率的提高和干燥气体的消耗减少。

公开(公告)号：US6141489A

公开(公告)日：2000-10-31

申请号：US645778

申请日：1996-05-14

申请人： Kazuyuki Honda

发明人： Kazuyuki Honda

IPC分类号： H04N5/92 ,  G11B27/00 ,  G11B27/034 ,  G11B27/11 ,  G11B27/28 ,  G11B27/32 ,  H04N5/85 ,  H04N9/804

CPC分类号： G11B27/002 ,  G11B27/034 ,  G11B27/11 ,  G11B27/28 ,  G11B27/329 ,  H04N9/8042 ,  G11B2220/20 ,  G11B2220/218 ,  G11B2220/2525 ,  G11B2220/2545 ,  G11B2220/41 ,  G11B2220/90 ,  H04N5/85

摘要： A data recording device that can easily and reliably manage a plurality of recording media or information recording surfaces even when a data compression rate largely varies with the contents of the data and that can record, for example, mass image data by effectively preventing the picture quality of an image represented by the image data from being degraded. The data recording device records image data after securing a region according to the preliminarily estimated number of recording media or information recording surfaces at the time of recording image data by using a coding method, by which a data compression rate largely varies with the contents of data. Thereafter, the data recording device records management date used for managing the plurality of recording media or information recording surfaces, on which the coded data is recorded, on the management region according to a result of recording.

摘要翻译： 即使当数据压缩率大幅度地随着数据的内容而变化并且可以通过有效地防止图像质量来记录大量图像数据时，能够容易且可靠地管理多个记录介质或信息记录表面的数据记录装置 由图像数据表示的图像劣化。 数据记录装置通过使用编码方法记录图像数据时根据预先估计的记录介质数量或信息记录表面确保区域之后记录图像数据，由此数据压缩率随着数据的内容而大量变化 。 此后，数据记录装置根据记录结果，在管理区域上记录用于管理多个记录介质的管理日期或记录了编码数据的信息记录表面。

公开(公告)号：US08235061B2

公开(公告)日：2012-08-07

申请号：US12824565

申请日：2010-06-28

申请人： Takayuki Toshima ,  Kazuo Terada ,  Kazuyuki Honda

发明人： Takayuki Toshima ,  Kazuo Terada ,  Kazuyuki Honda

IPC分类号： B08B3/08 ,  B08B3/10

CPC分类号： B08B3/10 ,  H01L21/67057 ,  H01L21/67751 ,  Y10S134/902

摘要： Provided are a substrate processing apparatus and a substrate processing method capable of processing of a substrate using a supercritical fluid without exposing the pattern formed on the substrate to an atmospheric environment. The substrate processing apparatus includes a cleaning bath configured to accommodate a substrate and clean the substrate by flowing a cleaning solution, and a processing vessel configured to accommodate the cleaning bath and process the substrate with a supercritical fluid.

摘要翻译： 提供了一种基板处理装置和基板处理方法，其能够使用超临界流体处理基板，而不将形成在基板上的图案暴露于大气环境。 基板处理装置包括：清洗槽，其配置为容纳基板并通过流动清洁溶液清洁基板;以及处理容器，其构造成容纳清洗槽并用超临界流体处理基板。

公开(公告)号：US06795640B1

公开(公告)日：2004-09-21

申请号：US09637809

申请日：2000-08-11

申请人： Kazuyuki Honda

发明人： Kazuyuki Honda

IPC分类号： H04N591

CPC分类号： G11B27/329 ,  G11B27/002 ,  G11B27/034 ,  G11B27/11 ,  G11B27/28 ,  G11B2220/20 ,  G11B2220/218 ,  G11B2220/2525 ,  G11B2220/2545 ,  G11B2220/41 ,  G11B2220/90 ,  H04N5/85 ,  H04N9/8042

摘要： A data recording device that can easily and reliably manage a plurality of recording media or information recording surfaces even when a data compression rate largely varies with the contents of the data and that can record, for example, mass image data by effectively preventing the picture quality of an image represented by the image data from being degraded. The data recording device records image data after securing a region according to the preliminarily estimated number of recording media or information recording surfaces at the time of recording image data by using a coding method, by which a data compression rate largely varies with the contents of data. Thereafter, the data recording device records management data used for managing the plurality of recording media or information recording surfaces, on which the coded data is recorded, on the management region according to a result of recording.

摘要翻译： 即使当数据压缩率大幅度地随着数据的内容而变化并且可以通过有效地防止图像质量来记录大量图像数据时，能够容易且可靠地管理多个记录介质或信息记录表面的数据记录装置 由图像数据表示的图像劣化。 数据记录装置通过使用编码方法记录图像数据时根据预先估计的记录介质数量或信息记录表面确保区域之后记录图像数据，由此数据压缩率随着数据的内容而大量变化 。 此后，数据记录装置根据记录结果，将用于管理多个记录介质的管理数据或其上记录有编码数据的信息记录表面记录在管理区域上。