Method for producincg silicon wafer and silicon wafer
    1.
    发明申请
    Method for producincg silicon wafer and silicon wafer 有权
    生产硅晶片和硅晶片的方法

    公开(公告)号:US20060174820A1

    公开(公告)日:2006-08-10

    申请号:US10565108

    申请日:2004-07-12

    申请人: Ken Yoshizawa

    发明人: Ken Yoshizawa

    CPC分类号: C30B29/06 C30B13/00 C30B13/34

    摘要: The present invention are a method for producing a silicon wafer having a crystal orientation from a silicon single crystal ingot grown by a Floating Zone method (FZ method), wherein, at least, an FZ silicon single crystal ingot is grown by being made to be dislocation-free by Dash Necking method using a seed crystal having its crystal axis inclined at a specified angle from a crystal orientation , and the grown FZ silicon single crystal ingot is sliced at the just angle of a crystal orientation to produce a silicon wafer having a crystal orientation , and a silicon wafer produced by the method. Thereby, there are provided a method for producing a silicon wafer having a crystal orientation from a silicon single crystal ingot made to be dislocation-free at a high success rate by using Dash Necking method by FZ method, and a silicon wafer having an crystal orientation .

    摘要翻译: 本发明是一种通过浮选法生长的硅单晶锭(FZ法)制造具有晶体取向<110>的硅晶片的方法,其中至少通过以下步骤生长FZ硅单晶锭: 通过使用晶体从晶体取向<110>倾斜指定角度的晶种的Dash Necking方法使其无位错,并且将生长的FZ硅单晶锭以晶体取向< 制造晶体取向<110>的硅晶片和通过该方法制造的硅晶片。 因此,提供了一种通过使用FZ方法的Dash Necking方法从以高成功率制成无位错的硅单晶锭制造具有晶体取向<110>的硅晶片的方法,以及具有 晶体取向<110>。

    Optical recording disc
    3.
    发明授权
    Optical recording disc 失效
    光记录盘

    公开(公告)号:US4710913A

    公开(公告)日:1987-12-01

    申请号:US878075

    申请日:1986-06-24

    IPC分类号: G11B7/24 G11B7/26 G01D15/14

    摘要: An optical recording disc comprises a first bonding recess formed near an outside surface of an optical recording disc in a bonding boundary portion between a cylindrical hub and a transparent disc substrate, a disc member bonded with said transparent disc substrate through said cylindrical hub, and a second bonding recess formed near the outside surface of said optical recording disc in a bonding boundary portion between said cylindrical hub and said disc member. Accordingly, said optical recording disc can prevent remainder of a bonding material for bonding a pair of said transparent disc substrates or said transparent disc substrate and said disc member together from pushing out of the outside surface of the optical recording disc, resulting in that focusing for reading and writing an information signal can be properly performed.

    摘要翻译: 一种光记录盘包括在圆盘形轮毂和透明盘基片之间的接合边界部分附近形成在光记录盘的外表面的第一接合凹槽,通过所述圆柱形轮毂与所述透明盘基片接合的盘构件,以及 在所述圆柱形轮毂和所述盘构件之间的接合边界部分中,在所述光记录盘的外表面附近形成第二接合凹部。 因此,所述光学记录盘可以防止用于将一对所述透明盘基片或所述透明盘基片与所述光盘部件结合在一起的粘合材料的剩余部分从光记录盘的外表面推出,导致聚焦 可以适当地执行读取和写入信息信号。

    Method for producing silicon wafer and silicon wafer
    5.
    发明授权
    Method for producing silicon wafer and silicon wafer 有权
    硅晶片和硅晶片的制造方法

    公开(公告)号:US07361219B2

    公开(公告)日:2008-04-22

    申请号:US10565108

    申请日:2004-07-12

    申请人: Ken Yoshizawa

    发明人: Ken Yoshizawa

    IPC分类号: C30B21/04 C30B13/34

    CPC分类号: C30B29/06 C30B13/00 C30B13/34

    摘要: The present invention are a method for producing a silicon wafer having a crystal orientation from a silicon single crystal ingot grown by a Floating Zone method (FZ method), wherein, at least, an FZ silicon single crystal ingot is grown by being made to be dislocation-free by Dash Necking method using a seed crystal having its crystal axis inclined at a specified angle from a crystal orientation , and the grown FZ silicon single crystal ingot is sliced at the just angle of a crystal orientation to produce a silicon wafer having a crystal orientation , and a silicon wafer produced by the method. Thereby, there are provided a method for producing a silicon wafer having a crystal orientation from a silicon single crystal ingot made to be dislocation-free at a high success rate by using Dash Necking method by FZ method, and a silicon wafer having an crystal orientation .

    摘要翻译: 本发明是一种通过浮选法生长的硅单晶锭(FZ法)制造具有晶体取向<110>的硅晶片的方法,其中至少通过以下步骤生长FZ硅单晶锭: 通过使用晶体从晶体取向<110>倾斜指定角度的晶种的Dash Necking方法使其无位错,并且将生长的FZ硅单晶锭以晶体取向< 制造晶体取向<110>的硅晶片和通过该方法制造的硅晶片。 因此,提供了一种通过使用FZ方法的Dash Necking方法从以高成功率制成无位错的硅单晶锭制造具有晶体取向<110>的硅晶片的方法,以及具有 晶体取向<110>。

    High-frequency induction heater and method of producing semiconductor
single crystal using the same
    6.
    发明授权
    High-frequency induction heater and method of producing semiconductor single crystal using the same 失效
    高频感应加热器及使用其制造半导体单晶的方法

    公开(公告)号:US5792258A

    公开(公告)日:1998-08-11

    申请号:US593698

    申请日:1996-01-29

    摘要: A high-frequency induction heater for use in the growth of a semiconductor single crystal by the FZ method, including a plurality of high-frequency induction heating coils disposed in concentric juxtaposed relation to each other and each having a pair of power supply terminals provided for supplying a high-frequency current to the associated heating coil, with the power supply terminals of one of the heating coils being disposed in a space defined between opposite ends of an adjacent heating coil disposed outside the one heating coil, wherein a pair of electrically conductive members is attached to the pair of power supply terminals, respectively, of at least an innermost one of the heating coils so as to cover a space defined between the power supply terminals of the innermost heating coil. With the induction heater thus constructed, the so-called "pulsation", i.e., microscopic resistivity fluctuations and the macroscopic resistivity distribution in the diametrical and growth directions can be improved at one time.

    摘要翻译: 一种用于通过FZ方法生长半导体单晶的高频感应加热器,包括多个彼此并置设置的高频感应加热线圈,每个高频感应加热线圈具有一对电源端子, 向相关联的加热线圈提供高频电流,其中一个加热线圈的电源端子设置在限定在设置在一个加热线圈外侧的相邻加热线圈的相对端之间的空间中,其中一对导电 至少最内侧加热线圈中的一对电源端子分别连接在一起,以覆盖在最内侧的加热线圈的电源端子之间限定的空间。 利用如此构造的感应加热器,可以一次性地改善所谓的“脉动”,即直径和生长方向的微观电阻率波动和宏观电阻率分布。

    Optical disc manufacturing method
    7.
    发明授权
    Optical disc manufacturing method 失效
    光盘制造方法

    公开(公告)号:US5273598A

    公开(公告)日:1993-12-28

    申请号:US928662

    申请日:1992-08-17

    CPC分类号: G11B7/26 G11B7/24021

    摘要: An optical recording disc which includes a pair of recording disc substrates opposed to each other with a space there between with a hub situated at the central portion of the disc substrates so that there is formed the closed space between the disc substrates, thereby providing a dual sided recordable optical recording disc. The hub may be formed by a pair of hub halves. There is disposed an annular inner spacer and annular outer space around the hub so as to separate the pair of recording disc substrates.

    摘要翻译: 一种光记录盘,其包括一对彼此相对的记录盘基板,其间具有位于盘基板的中心部分的毂之间,从而在盘基板之间形成封闭空间,从而提供双 双面可记录光学记录盘。 轮毂可以由一对轮毂半部形成。 在轮毂周围设有环形内隔圈和环形外空,从而分开一对记录盘基片。

    Optical disc
    8.
    发明授权
    Optical disc 失效
    光盘

    公开(公告)号:US4911968A

    公开(公告)日:1990-03-27

    申请号:US122186

    申请日:1987-11-18

    IPC分类号: G11B7/24 G11B7/26

    摘要: An optical recording disc which includes a pair of recording disc substrates opposed to each other with a space therebetween, with a hub situated at the central portion of the disc substrates so that there is formed the closed space between the disc substrates, thereby providing a dual sided recordable optical recording disc. The hub may be formed by a pair of hub halves. There is disposed an annular inner spacer and annular outer spacer around the hub so as to separate the pair of recording disc substrates.

    摘要翻译: 一种光记录盘,其包括一对彼此相对的记录盘基板,其间具有间隙,其中毂位于盘基板的中心部分,使得在盘基板之间形成封闭空间,从而提供双 双面可记录光学记录盘。 轮毂可以由一对轮毂半部形成。 在轮毂周围设置有环形内隔片和环形外隔片,以分离该对记录盘基片。