Transistor and Method of Manufacturing a Transistor
    3.
    发明申请
    Transistor and Method of Manufacturing a Transistor 有权
    晶体管及制造晶体管的方法

    公开(公告)号:US20120068309A1

    公开(公告)日:2012-03-22

    申请号:US12888142

    申请日:2010-09-22

    申请人: Klaus Diefenbeck

    发明人: Klaus Diefenbeck

    摘要: In accordance with an embodiment of the present invention a transistor is disclosed. The transistor comprises a collector, a base and an emitter, wherein a first end width of the base is larger than a middle width of the base, wherein a first end width of the collector is larger than a middle width of the collector, or wherein a first end width of the emitter is larger than a middle width of the emitter.

    摘要翻译: 根据本发明的实施例,公开了一种晶体管。 晶体管包括集电极,基极和发射极,其中基极的第一端宽度大于基极的中间宽度,其中集电极的第一端宽度大于集电极的中间宽度,或者其中 发射极的第一端宽度大于发射极的中间宽度。

    Method for manufacturing a patterned bottom electrode in a piezoelectric device
    8.
    发明申请
    Method for manufacturing a patterned bottom electrode in a piezoelectric device 有权
    压电元件制造图形底电极的方法

    公开(公告)号:US20070254397A1

    公开(公告)日:2007-11-01

    申请号:US11429469

    申请日:2006-05-05

    IPC分类号: H01L21/00

    CPC分类号: H03H3/02 H03H9/131

    摘要: A method for manufacturing a patterned bottom electrode in a piezoelectric device comprises the steps of providing a basic material and producing a layer structure of a conductive material on the basic material. A protective layer is applied on the layer structure over an area. Thereafter, a planarization layer is applied on the protective layer and on the basic material. A portion of the protective layer is then exposed by patterning the planarization layer. Subsequently, the pattern is planarized by removing the portions of the planarization layer remaining outside the portion such that the protective layer laterally abuts on the planarization layer in a flush manner and forms a planar surface. The protective layer is then removed along with a corresponding part of the planarization layer laterally arranged in a flush manner. This results in the layer structure and the remaining planarization layer forming a planar surface.

    摘要翻译: 一种用于在压电器件中制造图案化底部电极的方法包括以下步骤:在基底材料上提供基底材料并产生导电材料的层结构。 在一个区域上的层结构上施加保护层。 此后,在保护层和基材上施加平坦化层。 然后通过图案化平坦化层来暴露保护层的一部分。 随后,通过去除保留在该部分外部的平坦化层的部分使得保护层以平齐的方式横向邻接在平坦化层上并形成平坦表面,使图案平坦化。 然后将保护层与平坦化层的相应部分一起以排列方式横向排列。 这导致层结构和剩余的平坦化层形成平坦表面。

    Method for manufacturing a patterned bottom electrode in a piezoelectric device
    10.
    发明授权
    Method for manufacturing a patterned bottom electrode in a piezoelectric device 有权
    压电元件制造图形底电极的方法

    公开(公告)号:US07491569B2

    公开(公告)日:2009-02-17

    申请号:US11429469

    申请日:2006-05-05

    IPC分类号: H01L21/00

    CPC分类号: H03H3/02 H03H9/131

    摘要: A method for manufacturing a patterned bottom electrode in a piezoelectric device comprises the steps of providing a basic material and producing a layer structure of a conductive material on the basic material. A protective layer is applied on the layer structure over an area. Thereafter, a planarization layer is applied on the protective layer and on the basic material. A portion of the protective layer is then exposed by patterning the planarization layer. Subsequently, the pattern is planarized by removing the portions of the planarization layer remaining outside the portion such that the protective layer laterally abuts on the planarization layer in a flush manner and forms a planar surface. The protective layer is then removed along with a corresponding part of the planarization layer laterally arranged in a flush manner. This results in the layer structure and the remaining planarization layer forming a planar surface.

    摘要翻译: 一种用于在压电器件中制造图案化底部电极的方法包括以下步骤:在基底材料上提供基底材料并产生导电材料的层结构。 在一个区域上的层结构上施加保护层。 此后,在保护层和基材上施加平坦化层。 然后通过图案化平坦化层来暴露保护层的一部分。 随后,通过去除保留在该部分外部的平坦化层的部分使得保护层以平齐的方式横向邻接在平坦化层上并形成平坦表面,使图案平坦化。 然后将保护层与平坦化层的相应部分一起以排列方式横向排列。 这导致层结构和剩余的平坦化层形成平坦表面。