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公开(公告)号：US06441350B1
公开(公告)日：2002-08-27
申请号：US09386565
申请日：1999-08-31
IPC分类号： H05B102
CPC分类号： H01L21/67248 , C23C16/52 , C30B25/10 , C30B25/16 , C30B31/12 , C30B31/18 , F27B9/024 , F27B9/063 , F27B9/40 , F27D19/00 , F27D21/0014 , H01L21/67109
摘要： A temperature control system for a thermal reactor is disclosed that addresses many of the problems in the art. In accordance with one aspect of the disclosed control system, a plurality of temperature controllers are employed. Each temperature controller employs one or more dynamic models that are optimized for a given temperature range. The temperature range over which a particular controller is optimized is preferably generally exclusive of the temperature ranges over which other controllers of the plurality of temperature controllers are optimized. In accordance with another aspect of the control system, the control system employs enhanced ramp trajectory logic. In accordance with another aspect of the control system, the control system employs a virtual temperature sensor in the event of a hardware failure of the corresponding non-virtual temperature sensor. Upon the detection of a failure of the non-virtual temperature sensor, the temperature control system automatically substitutes a virtual temperature sensor in its place as a control system input. In accordance with a still further aspect of the temperature control system, the control system is provided with control logic that switches the control mode of the system in the event of a failure of a heating element. All of the foregoing aspect of the present invention may be combined into a single temperature controller. Alternatively, these temperature control system improvements may be incorporated as individual elements, without reliance on the other inventive aspects disclosed herein.
摘要翻译： 公开了一种用于热反应器的温度控制系统，其解决了本领域的许多问题。 根据所公开的控制系统的一个方面，采用多个温度控制器。 每个温度控制器都使用一个或多个针对给定温度范围进行优化的动态模型。 特定控制器优化的温度范围优选地通常不超过多个温度控制器中的其它控制器被优化的温度范围。 根据控制系统的另一方面，控制系统采用增强的斜坡轨迹逻辑。 根据控制系统的另一方面，在对应的非虚拟温度传感器发生硬件故障的情况下，控制系统采用虚拟温度传感器。 在检测到非虚拟温度传感器的故障时，温度控制系统自动地将虚拟温度传感器替代为控制系统输入。 根据温度控制系统的另一方面，控制系统设置有控制逻辑，其在加热元件发生故障的情况下切换系统的控制模式。 本发明的所有前述方面可以组合成单个温度控制器。 或者，这些温度控制系统改进可以作为单独的元件并入，而不依赖于本文公开的其它发明方面。
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2.发明授权Apparatus and method for system identification and loop-shaping controller design in a process control system 有权在过程控制系统中用于系统识别和环路整形控制器设计的装置和方法公开(公告)号：US08311653B2
公开(公告)日：2012-11-13
申请号：US12028208
申请日：2008-02-08
CPC分类号： G05B17/02
摘要： One method includes obtaining a preliminary model associated with a system to be controlled and constructing a weighted model using one or more weighting factors. The method also includes identifying a final model of the system using the preliminary and weighted models, where the final model has a stability margin that is greater than an uncertainty associated with the final model. The method further includes controlling the system using a controller designed based on the final model. Another method includes identifying a first model associated with a system to be controlled, performing model order reduction to identify a second model, and controlling the system using a controller designed based on the second model. Performing the model order reduction includes reducing a weighted coprime factor model uncertainty between the first and second models.
摘要翻译： 一种方法包括获得与要控制的系统相关联的初步模型，并使用一个或多个加权因子构建加权模型。 该方法还包括使用初始和加权模型识别系统的最终模型，其中最终模型具有大于与最终模型相关联的不确定性的稳定性裕度。 该方法还包括使用基于最终模型设计的控制器来控制系统。 另一种方法包括识别与要控制的系统相关联的第一模型，执行模型订单减少以识别第二模型，以及使用基于第二模型设计的控制器来控制系统。 执行模型订单减少包括减少第一和第二模型之间的加权互质因子模型不确定性。
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公开(公告)号：US06587744B1
公开(公告)日：2003-07-01
申请号：US09599357
申请日：2000-06-20
IPC分类号： G06F1900
CPC分类号： G05B19/41885 , G05B2219/31086 , G05B2219/31104 , G05B2219/31422 , G05B2219/32388 , Y02P90/14 , Y02P90/20 , Y02P90/26 , Y02P90/285
摘要： A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comprises an interface for receiving metrology data from the metrology tools and a number of variable parameter tables, one for each of the processing tools, collectively associated with a manufacturing process recipe. The supervising station also includes one or more internal models which relate received metrology data to one or more variables for a processing tool, and which can modify variables stored in the variable parameter table to control the process tools using feedback and/or feed-forward control algorithms. Feed-forward control algorithms may, in certain embodiments, be used to adjust process targets for closed loop feedback control. The supervising station may have a user interface by which different feedback or feed-forward model formats (single or multi-variate) may be interactively selected based upon experimental or predicted behavior of the system, and may also permit users to utilize their own models for run-to-run control.
摘要翻译： 用于控制制造过程的自动运行控制控制器包括一组处理工具，一组用于从处理工具进行度量测量的计量工具，以及用于管理和控制处理工具的监控站。 监督站包括用于从计量工具接收测量数据的接口和多个可变参数表，每个可变参数表与制造过程配方共同关联的每个处理工具。 监督站还包括一个或多个内部模型，将接收到的计量数据与处理工具的一个或多个变量相关联，并且可以修改存储在可变参数表中的变量，以使用反馈和/或前馈控制来控制过程工具 算法。 在某些实施例中，可以使用前馈控制算法来调整闭环反馈控制的过程目标。 监督站可以具有用户界面，通过该用户界面可以基于系统的实验或预测行为来交互地选择不同的反馈或前馈模型格式（单变量或多变量），并且还可以允许用户利用它们自己的模型 运行控制。
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公开(公告)号：US06222164B1
公开(公告)日：2001-04-24
申请号：US09387001
申请日：1999-08-31
IPC分类号： H05B102
CPC分类号： H01L21/67248 , C23C16/52 , C30B25/10 , C30B25/16 , C30B31/12 , C30B31/18 , F27B9/024 , F27B9/063 , F27B9/40 , F27D19/00 , F27D21/0014 , H01L21/67109
摘要： A temperature control system for a thermal reactor is disclosed that addresses many of the problems in the art. In accordance with one aspect of the disclosed control system, a plurality of temperature controllers are employed. Each temperature controller employs one or more dynamic models that are optimized for a given temperature range. The temperature range over which a particular controller is optimized is preferably generally exclusive of the temperature ranges over which other controllers of the plurality of temperature controllers are optimized. In accordance with another aspect of the control system the control system employs enhanced ramp trajectory logic. In accordance with another aspect of the control system, the control system employs a virtual temperature sensor in the event of a hardware failure of the corresponding non-virtual temperature sensor. Upon the detection of a failure of the non-virtual temperature sensor, the temperature control system automatically substitutes a virtual temperature sensor in its place as a control system input. In accordance with a still further aspect of the temperature control system, the control system is provided with control logic that switches the control mode of the system in the event of a failure of a heating element. All of the foregoing aspect of the present invention may be combined into a single temperature controller. Alternatively, these temperature control system improvements may be incorporated as individual elements, without reliance on the other inventive aspects disclosed herein.
摘要翻译： 公开了一种用于热反应器的温度控制系统，其解决了本领域的许多问题。 根据所公开的控制系统的一个方面，采用多个温度控制器。 每个温度控制器都使用一个或多个针对给定温度范围进行优化的动态模型。 特定控制器优化的温度范围优选地通常不超过多个温度控制器中的其它控制器被优化的温度范围。 根据控制系统的另一方面，控制系统采用增强的斜坡轨迹逻辑。 根据控制系统的另一方面，在对应的非虚拟温度传感器发生硬件故障的情况下，控制系统采用虚拟温度传感器。 在检测到非虚拟温度传感器的故障时，温度控制系统自动地将虚拟温度传感器替代为控制系统输入。 根据温度控制系统的另一方面，控制系统设置有控制逻辑，其在加热元件发生故障的情况下切换系统的控制模式。 本发明的所有前述方面可以组合成单个温度控制器。 或者，这些温度控制系统改进可以作为单独的元件并入，而不依赖于本文公开的其它发明方面。
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5.发明授权
公开(公告)号：US5895596A
公开(公告)日：1999-04-20
申请号：US791024
申请日：1997-01-27
IPC分类号： H05B3/00 , C23C14/54 , C23C16/52 , C30B25/10 , G05D23/22 , H01L21/00 , H01L21/205 , H01L21/22 , H01L21/324 , H05B1/02
CPC分类号： H01L21/67115 , C23C16/52 , C30B25/10 , G05D23/1931 , G05D23/22
摘要： Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.
摘要翻译： 用于控制热反应堆或其他热半导体处理器的控制器和相关方法，其包括由电源供电的加热元件，并具有轮廓热电偶和尖峰热电偶。 一种优选的方法包括以下步骤：建模热反应器的热动力学特征，建模步骤包括在热反应器中提供热电偶仪表化晶片，通过使用刺激序列控制加热元件来扰乱热反应器，以及基于变化开发模型 在温度造成的扰动。 这些型号是离线开发的，可以包括一个或多个型号，例如功率与尖峰热电偶读数的模型，尖峰热电偶读数与型材热电偶读数的模型，以及轮廓热电偶读数与热电偶仪器化晶圆读数的模型。 在运行期间进一步导出和使用在线模型，以使用测量的轮廓和峰值温度来控制对热处理器的区域的功率输入。 模型可以级联或选择性地激活以实现不同的控制方式。
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公开(公告)号：US20070073422A1
公开(公告)日：2007-03-29
申请号：US11238304
申请日：2005-09-29
申请人： Sujit Gaikwad , Sachi Dash , Konstantinos Tsakalis
发明人： Sujit Gaikwad , Sachi Dash , Konstantinos Tsakalis
IPC分类号： G05B13/02
CPC分类号： G05B11/42 , G05B13/024
摘要： A method to automatically tune control systems, the method comprising selecting a target loop transfer function for at least one plant subsystem in response to an input excitation, selecting at least one fit-error criterion for a plant subsystem transfer function, and automatically inputting the input excitation and tuning the plant subsystem transfer function to the target loop transfer function. The tuning includes automatically selecting a bandwidth of the plant subsystem transfer function from a plurality of bandwidths determined in accordance with limits of the plant subsystem, inputting the input excitation to the plant subsystem, determining the fit-error of the plant subsystem transfer function to the target loop transfer function in response to the input excitation, and continuing the selecting of a bandwidth in accordance with the fit-error criterion.
摘要翻译： 一种自动调整控制系统的方法，所述方法包括响应于输入激励为至少一个工厂子系统选择目标循环传递函数，为工厂子系统传递函数选择至少一个拟合误差准则，并自动输入输入 激励和调整工厂子系统传递函数到目标循环传递函数。 调谐包括根据工厂子系统的极限确定的多个带宽自动选择工厂子系统传递函数的带宽，将输入激励输入到工厂子系统，确定工厂子系统传递函数的拟合误差到 响应于输入激励的目标循环传递函数，以及根据拟合误差准则继续选择带宽。
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公开(公告)号：US06207937B1
公开(公告)日：2001-03-27
申请号：US09386567
申请日：1999-08-31
IPC分类号： H05B102
CPC分类号： H01L21/67248 , C23C16/52 , C30B25/10 , C30B25/16 , C30B31/12 , C30B31/18 , F27B9/024 , F27B9/063 , F27B9/40 , F27D19/00 , F27D21/0014 , H01L21/67109
摘要： A temperature control system for a thermal reactor is disclosed that addresses many of the problems in the art. In accordance with one aspect of the disclosed control system, a plurality of temperature controllers are employed. Each temperature controller employs one or more dynamic models that are optimized for a given temperature range. The temperature range over which a particular controller is optimized is preferably generally exclusive of the temperature ranges over which other controllers of the plurality of temperature controllers are optimized. In accordance with another aspect of the control system, the control system employs enhanced ramp trajectory logic. In accordance with another aspect of the control system, the control system employs a virtual temperature sensor in the event of a hardware failure of the corresponding non-virtual temperature sensor. Upon the detection of a failure of the non-virtual temperature sensor, the temperature control system automatically substitutes a virtual temperature sensor in its place as a control system input. In accordance with a still further aspect of the temperature control system, the control system is provided with control logic that switches the control mode of the system in the event of a failure of a heating element. All of the foregoing aspect of the present invention may be combined into a single temperature controller. Alternatively, these temperature control system improvements may be incorporated as individual elements, without reliance on the other inventive aspects disclosed herein.
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8.发明授权Apparatus and method for controller performance monitoring in a process control system 有权过程控制系统中控制器性能监控的装置和方法公开(公告)号：US07787978B2
公开(公告)日：2010-08-31
申请号：US11542065
申请日：2006-10-03
IPC分类号： G06F19/00 , G06F11/30 , G05B13/02 , G05B9/02 , G01R31/00 , G01R13/00 , G01R29/26 , G21C17/00
CPC分类号： G05B23/0254 , G05B23/0262
摘要： An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller in the process system is determined using the determined level of disturbance and operating data associated with operation of the process system. The at least one value is compared to at least one threshold value, and a problem with the controller is identified based on the comparison. As an example, the process system could represent a product production system. Also, the operating data could include at least one of: measurement data from one or more sensors and control data for one or more actuators. The controller may be operable to receive the measurement data and generate the control data.
摘要翻译： 提供了一种设备，方法和计算机程序，用于过程控制系统中的控制器性能监控。 确定与过程系统相关联的干扰水平，并且使用确定的干扰水平和与处理系统的操作相关联的操作数据来确定识别过程系统中的控制器的稳定性度量的至少一个值。 将至少一个值与至少一个阈值进行比较，并且基于该比较来识别控制器的问题。 例如，流程系统可以代表产品生产系统。 此外，操作数据可以包括以下至少一个：来自一个或多个传感器的测量数据和用于一个或多个致动器的控制数据。 控制器可操作以接收测量数据并产生控制数据。
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9.发明申请APPARATUS AND METHOD FOR SYSTEM IDENTIFICATION AND LOOP-SHAPING CONTROLLER DESIGN IN A PROCESS CONTROL SYSTEM 有权用于系统识别和循环控制器设计过程控制系统的装置和方法公开(公告)号：US20090204233A1
公开(公告)日：2009-08-13
申请号：US12028208
申请日：2008-02-08
IPC分类号： G05B17/02
CPC分类号： G05B17/02
摘要： One method includes obtaining a preliminary model associated with a system to be controlled and constructing a weighted model using one or more weighting factors. The method also includes identifying a final model of the system using the preliminary and weighted models, where the final model has a stability margin that is greater than an uncertainty associated with the final model. The method further includes controlling the system using a controller designed based on the final model. Another method includes identifying a first model associated with a system to be controlled, performing model order reduction to identify a second model, and controlling the system using a controller designed based on the second model. Performing the model order reduction includes reducing a weighted coprime factor model uncertainty between the first and second models.
摘要翻译： 一种方法包括获得与要控制的系统相关联的初步模型，并使用一个或多个加权因子构建加权模型。 该方法还包括使用初始和加权模型识别系统的最终模型，其中最终模型具有大于与最终模型相关联的不确定性的稳定性裕度。 该方法还包括使用基于最终模型设计的控制器来控制系统。 另一种方法包括识别与要控制的系统相关联的第一模型，执行模型订单减少以识别第二模型，以及使用基于第二模型设计的控制器来控制系统。 执行模型订单减少包括减少第一和第二模型之间的加权互质因子模型不确定性。
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10.发明申请Apparatus and method for controller performance monitoring in a process control system 有权过程控制系统中控制器性能监控的装置和方法公开(公告)号：US20080082312A1
公开(公告)日：2008-04-03
申请号：US11542065
申请日：2006-10-03
IPC分类号： G06F9/455
CPC分类号： G05B23/0254 , G05B23/0262
摘要： An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller in the process system is determined using the determined level of disturbance and operating data associated with operation of the process system. The at least one value is compared to at least one threshold value, and a problem with the controller is identified based on the comparison. As an example, the process system could represent a product production system. Also, the operating data could include at least one of: measurement data from one or more sensors and control data for one or more actuators. The controller may be operable to receive the measurement data and generate the control data.
摘要翻译： 提供了一种设备，方法和计算机程序，用于过程控制系统中的控制器性能监控。 确定与过程系统相关联的干扰水平，并且使用确定的干扰水平和与过程系统的操作相关联的操作数据来确定识别过程系统中的控制器的稳定性度量的至少一个值。 将至少一个值与至少一个阈值进行比较，并且基于该比较来识别控制器的问题。 例如，流程系统可以代表产品生产系统。 此外，操作数据可以包括以下至少一个：来自一个或多个传感器的测量数据和用于一个或多个致动器的控制数据。 控制器可操作以接收测量数据并产生控制数据。
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