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公开(公告)号:US09102121B2
公开(公告)日:2015-08-11
申请号:US13463468
申请日:2012-05-03
IPC分类号: G03F7/20 , B32B3/30 , G03F7/00 , G03F7/40 , H01L21/311
CPC分类号: B32B3/30 , G03F7/0035 , G03F7/2002 , G03F7/40 , H01L21/0337 , H01L21/31144 , Y10T428/24521 , Y10T428/24612
摘要: Substrates and methods of forming a pattern on a substrate. The pattern includes a repeating pattern region and a pattern-interrupting region adjacent to the repeating pattern region. A mask is formed on the substrate, with the mask including the repeating pattern region and the pattern-interrupting region and which are formed using two separate masking steps. The mask is used in forming the pattern into underlying substrate material on which the mask is received. Substrates comprising masks are also disclosed.
摘要翻译: 衬底和在衬底上形成图案的方法。 图案包括重复图案区域和与重复图案区域相邻的图案中断区域。 在衬底上形成掩模,其中掩模包括重复图案区域和图案中断区域,并且使用两个单独的掩蔽步骤形成掩模。 该掩模用于将图案形成到其上接收掩模的下面的基底材料中。 还公开了包括掩模的基板。
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公开(公告)号:US20110129991A1
公开(公告)日:2011-06-02
申请号:US12629722
申请日:2009-12-02
申请人: Kyle Armstrong , David A. Kewley , Duane Goodner , Mark Kiehlbauch , Zengtao Liu
发明人: Kyle Armstrong , David A. Kewley , Duane Goodner , Mark Kiehlbauch , Zengtao Liu
CPC分类号: H01L21/31138 , H01L21/0273 , H01L21/0337 , H01L21/0338 , H01L21/28132 , H01L21/3086 , H01L21/3088 , H01L21/32139 , H01L27/11517 , H01L27/11521
摘要: Some embodiments include methods of patterning materials. A mass may be formed over a material, and a first mask may be formed over the mass. First spacers may be formed along features of the first mask, and then the first mask may be removed to leave a second mask corresponding to the first spacers. A pattern of the second mask may be partially transferred into the mass to form an upper portion of the mass into a third mask. The first spacers may be removed from over the third mask, and then second spacers be formed along features of the third mask. The second spacers are a fourth mask. A pattern of the fourth mask may be transferred into a bottom portion of the mass, and then the bottom portion may be used as a mask during processing of the underlying material.
摘要翻译: 一些实施例包括图案化材料的方法。 可以在材料上形成质量,并且可以在物质上方形成第一掩模。 可以沿着第一掩模的特征形成第一间隔物,然后可以去除第一掩模以留下对应于第一间隔物的第二掩模。 第二掩模的图案可以部分地转移到质量体中以形成质量的上部成为第三掩模。 可以从第三掩模上方移除第一间隔物,然后沿着第三掩模的特征形成第二间隔物。 第二间隔物是第四掩模。 第四掩模的图案可以被转移到质量的底部,然后底部可以在下面的材料的加工期间用作掩模。
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公开(公告)号:US5986576A
公开(公告)日:1999-11-16
申请号:US10298
申请日:1998-01-21
IPC分类号: G08G1/0955 , H01Q1/36
CPC分类号: G08G1/0955 , F21V21/06
摘要: A remote control portable traffic signaling device (10) and system (94) for controlling a flow of traffic. The remote control portable traffic signaling system (94) includes the portable signaling device (10) and a plurality of warning flashers (76). The portable signaling device (10) includes a remote control unit (42) and a signal head (11) having an LED display device (50) and a microprocessor (46). The remote control unit (42) transmits a control signal to be received by the microprocessor (46) for use in controlling a message communicated by the LED display device (50). A base unit (30) including a storage compartment for housing the power source (36) is connected to the signal head (11) for supplying power to the microprocessor (46) and LED display device (50) via a connection wire (38) extending through a pole (24) positioned therebetween. A device for adjustably connecting the pole (26, 27, 28, 29, 35, 64 and 65) between the signal head (11) and base unit (30) allows for height adjustment of the portable signaling device (10). A plurality of warning flashers (76) including a pair of high luminous LEDs (82) are positioned at a predetermined distance from the portable signaling device (10) to warn passersby of the presence of the portable signaling device (10).
摘要翻译: 一种用于控制业务流的遥控便携式业务信令装置(10)和系统(94)。 遥控便携式话务信号系统(94)包括便携式信号装置(10)和多个警告闪光器(76)。 便携式信号装置(10)包括遥控单元(42)和具有LED显示装置(50)和微处理器(46)的信号头(11)。 遥控单元(42)发送要由微处理器(46)接收的用于控制由LED显示装置(50)传送的消息的控制信号。 包括用于容纳电源(36)的储藏室的基座单元(30)连接到用于经由连接线(38)向微处理器(46)和LED显示装置(50)供电的信号头(11) 延伸穿过其间定位的杆(24)。 用于可调节地连接信号头(11)和基座单元(30)之间的极(26,27,28,29,35,64和65)的装置允许便携式信号装置(10)的高度调节。 包括一对高亮度LED(82)的多个警告闪光器(76)位于与便携式信号装置(10)预定距离处,以便警告路人存在便携式信号装置(10)。
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公开(公告)号:US20130295335A1
公开(公告)日:2013-11-07
申请号:US13463468
申请日:2012-05-03
CPC分类号: B32B3/30 , G03F7/0035 , G03F7/2002 , G03F7/40 , H01L21/0337 , H01L21/31144 , Y10T428/24521 , Y10T428/24612
摘要: Substrates and methods of forming a pattern on a substrate. The pattern includes a repeating pattern region and a pattern-interrupting region adjacent to the repeating pattern region. A mask is formed on the substrate, with the mask including the repeating pattern region and the pattern-interrupting region and which are formed using two separate masking steps. The mask is used in forming the pattern into underlying substrate material on which the mask is received. Substrates comprising masks are also disclosed.
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