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公开(公告)号：US5484026A
公开(公告)日：1996-01-16
申请号：US115569
申请日：1993-09-03
申请人： Toshikazu Susaki , Kyoji Nakamura
发明人： Toshikazu Susaki , Kyoji Nakamura
CPC分类号： G01C15/004 , B25B21/00 , B25B23/00 , B25B23/0064 , B25H1/0085 , B25H1/0092 , E04F15/024
摘要： A handheld electromotive tool capable of efficient execution of a floor board and a ceiling board is provided. The tool is used in combination with a beam emitting device for emitting a radiation beam in a reference plane, and is provided with a housing held by an operator. The housing has a work member driven by an electric motor and a photo detector for receiving the radiation beam projected in the reference plane. Output signals indicating positional deviation of the photo detector from the reference plane are generated on the basis of output of the photo detector. Rotation of the motor is controlled as follows. Rotation of the electric motor is stopped when the radiation beam is received at a reference position of the photo detector. The electric motor rotates at high speed until the radiation beam is received in the vicinity of the reference position. The electric motor rotates at low speed from the time the radiation beam is received in the vicinity of the reference position to the time the radiation beam is received at the reference position.
摘要翻译： 提供了能够高效地执行地板和天花板的手持电动工具。 该工具与用于在参考平面中发射辐射束的光束发射装置组合使用，并且设置有由操作者保持的壳体。 壳体具有由电动机驱动的工件和用于接收投影在参考平面中的辐射束的光电检测器。 基于光电检测器的输出，产生指示光电检测器与基准面的位置偏差的输出信号。 马达的旋转如下控制。 当辐射束被接收在光检测器的基准位置时，停止电动机的旋转。 电动机高速旋转直到辐射束在基准位置附近被接收。 电动机从参考位置附近的辐射束接收到参考位置处接收辐射束的时刻以低速旋转。
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公开(公告)号：US06961114B2
公开(公告)日：2005-11-01
申请号：US10446000
申请日：2003-05-27
申请人： Masayuki Murayama , Kyoji Nakamura , Taro Ogata , Susumu Mori
发明人： Masayuki Murayama , Kyoji Nakamura , Taro Ogata , Susumu Mori
CPC分类号： G03F7/70058 , G03F7/70808 , G03F7/70883 , G03F7/70933 , G03F7/70983
摘要： An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements.
摘要翻译： 一种具有沿着照射光的光路布置的至少一个光学元件的光学装置。 沿着将光路与环境空气分开并且充以预定气体的光路限定第一密封室。 第二密封室位于第一密封室中，其将光路与第一密封室中的气体分离并保持光学元件。
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公开(公告)号：US5365801A
公开(公告)日：1994-11-22
申请号：US025567
申请日：1993-03-03
申请人： Kyoji Nakamura
发明人： Kyoji Nakamura
CPC分类号： F16H1/16 , G02B7/004 , G05G11/00 , F16H2057/0213 , Y10T74/19172 , Y10T74/19828
摘要： A coarse/fine adjustment of a rotary body, comprising: a worm wheel fitted to a rotary shaft of a rotary body; a worm meshing with the worm wheel and having a first screw; a rotary driving shaft having a second screw engaging with the first screw and rotated by a manipulation member and a switching means for effecting a switchover to rotationally or rectilinearly move the worm engaging with the rotary driving shaft. The worm is biased by a biasing means to mesh with the worm wheel while keeping a thrust state.
摘要翻译： 旋转体的粗调/微调，包括：安装在旋转体的旋转轴上的蜗轮; 与蜗轮啮合并具有第一螺钉的蜗杆; 旋转驱动轴，其具有与第一螺钉啮合并由操作构件旋转的第二螺钉和切换装置，用于进行切换以旋转或直线地移动与旋转驱动轴接合的蜗杆。 蜗杆通过偏置装置偏置以与蜗轮啮合同时保持推力状态。
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4.发明授权Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method 有权可变狭缝装置，照明装置，曝光装置，曝光方法和装置制造方法公开(公告)号：US07889320B2
公开(公告)日：2011-02-15
申请号：US11430917
申请日：2006-05-10
申请人： Eizo Ohya , Kyoji Nakamura , Yasushi Mizuno
发明人： Eizo Ohya , Kyoji Nakamura , Yasushi Mizuno
IPC分类号： G03B27/54
CPC分类号： G03F7/70191 , G03F7/70066 , G03F7/70558
摘要： The present invention provides a variable slit apparatus, which can rapidly change the shape of the slit width of the illumination light while finely controlling the shape of the slit-shaped illumination light, an illumination apparatus that uses such, an exposure apparatus, and the like. The variable slit apparatus for forming a slit-shaped illumination light comprises: a first light-shielding mechanism that comprises a plurality of blades for defining one long side of the illumination light; a second light-mechanism configured to define another long side of the illumination light; and a drive mechanism that changes the width of the illumination light in the latitudinal direction orthogonal to the longitudinal direction by driving the first light-shielding mechanism and the second light-shielding mechanism.
摘要翻译： 本发明提供一种可变狭缝装置，其可以在精细地控制狭缝状照明光的形状，使用这种照明装置的照明装置，曝光装置等的同时，快速地改变照明光的狭缝宽度的形状 。 用于形成狭缝状照明光的可变狭缝装置包括：第一遮光机构，其包括用于限定照明光的一个长边的多个叶片; 第二光机构，被配置为限定照明光的另一长边; 以及驱动机构，其通过驱动第一遮光机构和第二遮光机构来改变与纵向正交的纬向的照明光的宽度。
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公开(公告)号：US20090029450A1
公开(公告)日：2009-01-29
申请号：US11878546
申请日：2007-07-25
申请人： Kyoji Nakamura , Takayuki Uozumi
发明人： Kyoji Nakamura , Takayuki Uozumi
IPC分类号： C12M1/36
CPC分类号： C12M41/14 , C12M23/22 , C12M23/50 , C12M41/36 , G01N2035/00356
摘要： An accommodating unit capable of accommodating a culture vessel, a transfer unit supporting and transferring the culture vessel, and taking in and out the culture vessel relative to the accommodating unit, and an observation unit observing a sample inside of the culture vessel via an observation optical system under a state in which the culture vessel is supported by the transfer unit, are included. The transfer unit performs a positioning of each part of the sample on an optical axis of the observation optical system by moving the culture vessel at the time of observation of the sample by the observation unit. Consequently, it is possible to provide an incubator having a simple configuration.
摘要翻译： 一种能够容纳培养容器的容纳单元，支撑和传送培养容器的转移单元，以及相对于容纳单元吸入和取出培养容器，以及观察单元，其通过观察光学器件观察培养容器内部的样品 包括在培养容器由转印单元支撑的状态下的系统。 转印单元通过在观察单元观察样品时移动培养容器，来将样品的每个部分定位在观察光学系统的光轴上。 因此，可以提供具有简单构造的培养箱。
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6.发明授权Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method 失效照明光学装置及其制造方法，曝光装置及其制造方法以及装置制造方法公开(公告)号：US06727981B2
公开(公告)日：2004-04-27
申请号：US10307963
申请日：2002-12-03
IPC分类号： G03B2752
CPC分类号： G03F7/70916 , G03B27/42 , G03F7/70058 , G03F7/709
摘要： The illuminating optical system is divided into a first portion including movable blades moving during exposure, and a second portion not containing a movable portion moving over the movable blade during exposure. The second portion is installed on the exposure main portion, and the first portion, separately from the exposure main portion. The frames configuring the first and the second optical units, the second optical unit having optical elements of a smaller movable amount than the movable amount of the movable blades, are relatively displaceably connected via the bellows-shaped member. The frames configuring the second optical units are fixed to each other via the O-ring suppressing relative displacement. As a result, the effect of vibration of the illuminating optical system during exposure on the main portion can be reduced. Upon purging nitrogen gas or the like in the space interior of the frame and the space between adjacent frames, the degree of air-tightness and chemical cleanliness is improved, consequently improving the exposure accuracy.
摘要翻译： 照明光学系统被分为包括在曝光期间移动的可移动刀片的第一部分和不包含在曝光期间在可动刀片上移动的可移动部分的第二部分。 第二部分安装在曝光主体部分上，第一部分与曝光主体部分分开。 构成第一和第二光学单元的框架，具有比可动叶片的可移动量小的可移动量的光学元件的第二光学单元经由波纹管状构件相对可移动地连接。 构成第二光学单元的框架经由O形环彼此固定，抑制相对位移。 结果，可以减少照射光学系统在主要部分的曝光期间的振动的影响。 当在框架的空间内部和相邻框架之间的空间中吹扫氮气等时，提高了气密性和化学清洁度，从而提高了曝光精度。
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公开(公告)号：US5400515A
公开(公告)日：1995-03-28
申请号：US270318
申请日：1994-07-05
申请人： Kyoji Nakamura
发明人： Kyoji Nakamura
CPC分类号： G01C1/02
摘要： A measuring apparatus having a high water-proof property has water-proof rings rotatably disposed about outer peripheries of a horizontal shaft and a vertical shaft bearing. Gaps between the rings and the peripheries of corresponding openings in a housing are blocked by respective deformable elastic water-proof members which secure the rings to the housing.
摘要翻译： 具有高防水性的测量装置具有围绕水平轴和垂直轴轴承的外周旋转地设置的防水环。 环之间的间隙和壳体中的相应开口的周边部分被相应的可变形的弹性防水构件阻挡，这些构件将环固定到壳体上。
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公开(公告)号：US07968330B2
公开(公告)日：2011-06-28
申请号：US12216885
申请日：2008-07-11
申请人： Kyoji Nakamura , Takayuki Uozumi
发明人： Kyoji Nakamura , Takayuki Uozumi
摘要： The present application includes a culture chamber, an observation chamber having an optical system of observation to observe samples to be cultured in the culture chamber, and a movement stage provided at a boundary which separates the culture chamber and the observation chamber, functioning as a wall to maintain an environment of both of the chambers, bearing the samples, and moving the samples on a light axis of observation of the optical system of observation. Due to such an arrangement, a culture observation equipment which has good response and excellent environmental resistance can be achieved, preventing problems such as the overall size of the device became large, maintenance work was difficult, and device cost became expensive.
摘要翻译： 本申请包括培养室，具有观察用光学系统的观察室，以观察培养室中培养的样品，以及设置在分隔培养室和观察室的边界的移动台，其作为壁 以维持两个室的环境，承载样品，并且在观察光学系统的观察的光轴上移动样品。 由于这样的布置，可以实现具有良好的响应性和优异的耐环境性的文化观察装置，防止装置的整体尺寸等问题变大，维修工作困难，装置成本昂贵。
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公开(公告)号：US20080293131A1
公开(公告)日：2008-11-27
申请号：US12216885
申请日：2008-07-11
申请人： Kyoji Nakamura , Takayuki Uozumi
发明人： Kyoji Nakamura , Takayuki Uozumi
IPC分类号： C12M3/00
摘要： The present application includes a culture chamber, an observation chamber having an optical system of observation to observe samples to be cultured in the culture chamber, and a movement stage provided at a boundary which separates the culture chamber and the observation chamber, functioning as a wall to maintain an environment of both of the chambers, bearing the samples, and moving the samples on a light axis of observation of the optical system of observation. Due to such an arrangement, a culture observation equipment which has good response and excellent environmental resistance can be achieved, preventing problems such as the overall size of the device became large, maintenance work was difficult, and device cost became expensive.
摘要翻译： 本申请包括培养室，具有观察用光学系统的观察室，以观察培养室中培养的样品，以及设置在分隔培养室和观察室的边界的移动台，其作为壁 以维持两个室的环境，承载样品，并且在观察光学系统的观察的光轴上移动样品。 由于这样的布置，可以实现具有良好的响应性和优异的耐环境性的文化观察装置，防止装置的整体尺寸等问题变大，维修工作困难，装置成本昂贵。
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10.发明申请Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method 有权可变狭缝装置，照明装置，曝光装置，曝光方法和装置制造方法公开(公告)号：US20070014112A1
公开(公告)日：2007-01-18
申请号：US11430917
申请日：2006-05-10
申请人： Eizo Ohya , Kyoji Nakamura , Yasushi Mizuno
发明人： Eizo Ohya , Kyoji Nakamura , Yasushi Mizuno
IPC分类号： F21S8/00
CPC分类号： G03F7/70191 , G03F7/70066 , G03F7/70558
摘要： The present invention provides a variable slit apparatus, which can rapidly change the shape of the slit width of the illumination light while finely controlling the shape of the slit-shaped illumination light, an illumination apparatus that uses such, an exposure apparatus, and the like. The variable slit apparatus for forming a slit-shaped illumination light comprises: a first light-shielding mechanism that comprises a plurality of blades for defining one long side of the illumination light; a second light-mechanism configured to define another long side of the illumination light; and a drive mechanism that changes the width of the illumination light in the latitudinal direction orthogonal to the longitudinal direction by driving the first light-shielding mechanism and the second light-shielding mechanism.
摘要翻译： 本发明提供一种可变狭缝装置，其可以在精细地控制狭缝状照明光的形状，使用这种照明装置的照明装置，曝光装置等的同时，快速地改变照明光的狭缝宽度的形状 。 用于形成狭缝状照明光的可变狭缝装置包括：第一遮光机构，其包括用于限定照明光的一个长边的多个叶片; 第二光机构，被配置为限定照明光的另一长边; 以及驱动机构，其通过驱动第一遮光机构和第二遮光机构来改变与纵向正交的纬向的照明光的宽度。
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