公开(公告)号：US11932960B2

公开(公告)日：2024-03-19

申请号：US17725855

申请日：2022-04-21

申请人： Meng Tao ,  Laidong Wang

发明人： Meng Tao ,  Laidong Wang

IPC分类号： C25D3/66 ,  C25D3/54 ,  C25D5/00 ,  C25D5/10 ,  C25D5/50 ,  C25D7/12 ,  H01L31/0224 ,  H01L31/028 ,  H01L31/068 ,  H01L31/18

CPC分类号： C25D3/665 ,  C25D3/54 ,  C25D5/011 ,  C25D5/10 ,  C25D5/50 ,  C25D7/12 ,  H01L31/022425 ,  H01L31/022458 ,  H01L31/028 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804

摘要： Methods for light-induced electroplating of aluminum are disclosed herein. Exemplary methods may comprise preparing an ionic liquid comprising aluminum chloride (AlCl3) and an organic halide, placing the silicon substrate into the ionic liquid, illuminating the silicon substrate, the illumination passing through the ionic liquid, and depositing aluminum onto the silicon substrate via a light-induced electroplating process, wherein the light-induced electroplating process utilizes an applied current that does not exceed a photo-generated current generated by the illumination.

公开(公告)号：US20220243351A1

公开(公告)日：2022-08-04

申请号：US17725855

申请日：2022-04-21

申请人： Meng Tao ,  Laidong Wang

发明人： Meng Tao ,  Laidong Wang

IPC分类号： C25D3/66 ,  H01L31/0224 ,  H01L31/068 ,  H01L31/028 ,  C25D3/54 ,  C25D7/12 ,  H01L31/18 ,  C25D5/00

摘要： Methods for light-induced electroplating of aluminum are disclosed herein. Exemplary methods may comprise preparing an ionic liquid comprising aluminum chloride (AlCl3) and an organic halide, placing the silicon substrate into the ionic liquid, illuminating the silicon substrate, the illumination passing through the ionic liquid, and depositing aluminum onto the silicon substrate via a light-induced electroplating process, wherein the light-induced electroplating process utilizes an applied current that does not exceed a photo-generated current generated by the illumination.

公开(公告)号：US20240240346A1

公开(公告)日：2024-07-18

申请号：US18586085

申请日：2024-02-23

申请人： Meng Tao ,  Laidong Wang

发明人： Meng Tao ,  Laidong Wang

IPC分类号： C25D3/66 ,  C25D3/54 ,  C25D5/00 ,  C25D5/10 ,  C25D5/50 ,  C25D7/12 ,  H01L31/0224 ,  H01L31/028 ,  H01L31/068 ,  H01L31/18

CPC分类号： C25D3/665 ,  C25D3/54 ,  C25D5/011 ,  C25D5/10 ,  C25D5/50 ,  C25D7/12 ,  H01L31/022425 ,  H01L31/022458 ,  H01L31/028 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804

摘要： Methods for light-induced electroplating of aluminum are disclosed herein. Exemplary methods may comprise preparing an ionic liquid comprising aluminum chloride (AlCl3) and an organic halide, placing the silicon substrate into the ionic liquid, illuminating the silicon substrate, the illumination passing through the ionic liquid, and depositing aluminum onto the silicon substrate via a light-induced electroplating process, wherein the light-induced electroplating process utilizes an applied current that does not exceed a photo-generated current generated by the illumination.

公开(公告)号：US20190067498A1

公开(公告)日：2019-02-28

申请号：US16113822

申请日：2018-08-27

申请人： Meng Tao ,  Laidong Wang

发明人： Meng Tao ,  Laidong Wang

IPC分类号： H01L31/0224 ,  H01L31/068 ,  H01L31/028 ,  H01L31/18 ,  C25D3/54 ,  C25D7/12 ,  C25D5/00

摘要： Methods for light-induced electroplating of aluminum are disclosed herein. Exemplary methods may comprise preparing an ionic liquid comprising aluminum chloride (AlCl3) and an organic halide, placing the silicon substrate into the ionic liquid, illuminating the silicon substrate, the illumination passing through the ionic liquid, and depositing aluminum onto the silicon substrate via a light-induced electroplating process, wherein the light-induced electroplating process utilizes an applied current that does not exceed a photo-generated current generated by the illumination.