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公开(公告)号:US08984453B2
公开(公告)日:2015-03-17
申请号:US13536625
申请日:2012-06-28
申请人: Shmuel Mangan , Amir Sagiv , Mariano Abramson
发明人: Shmuel Mangan , Amir Sagiv , Mariano Abramson
CPC分类号: G01N21/8806 , G01N21/00 , G01N21/9501 , G01N2201/068 , G03F1/84 , G03F7/70116
摘要: Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
摘要翻译: 用于基于表示由检查系统仿真的期望曝光条件的数据设计二进制空间滤波器的方法和系统,以及用于在检查系统的光路中实现二进制空间滤波器,由此能够仿真期望的曝光条件 通过将检查系统的光束与二进制空间滤波器相互作用。 本方法和系统使得能够即时和按需设计和实现/生成用于检测系统的空间滤波器。
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公开(公告)号:US06265102B1
公开(公告)日:2001-07-24
申请号:US09187567
申请日:1998-11-05
申请人: Yaron Shrim , Mariano Abramson , Robert B. Dopp
发明人: Yaron Shrim , Mariano Abramson , Robert B. Dopp
IPC分类号: H01M202
CPC分类号: H01M2/0222 , H01M12/06
摘要: The invention provides a metal-air electrochemical cell, having a leak-proof, metal prismatic casing comprising a pair of interfacing interengaging rectangular tray-like casing components, a first substantially rectangular tray-like casing component having a first major surface and contiguous side walls for encompassing a cathode of the cell and a second inverted substantially tray-like casing component having a second major surface and contiguous depending side walls for encompassing an anode of the cell, the side walls of one of the casing components being of a height to facilitate the curling and crimping of an upper portion thereof over a peripheral edge area of the major surface of the other casing component to form a leak-proof, closed prismatic casing.
摘要翻译: 本发明提供了一种金属 - 空气电化学电池,其具有防漏的金属棱柱形壳体,其包括一对相互接合的矩形托盘状壳体部件,第一基本矩形的托盘状壳体部件,其具有第一主表面和相邻的侧壁 用于包围电池的阴极和具有第二主表面和邻接的悬垂侧壁的第二倒置的基本上为托盘状的壳体部件,用于包围电池的阳极,其中一个壳体部件的侧壁的高度便于 其上部的卷曲和卷曲在另一壳体部件的主表面的周缘区域上方形成防漏闭合的棱柱形壳体。
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公开(公告)号:US08207504B2
公开(公告)日:2012-06-26
申请号:US12950058
申请日:2010-11-19
申请人: Chaim Braude , Mariano Abramson , Adam Baer , Jimmy Vishnipolsky , Yuri Belenky
发明人: Chaim Braude , Mariano Abramson , Adam Baer , Jimmy Vishnipolsky , Yuri Belenky
IPC分类号: G01J1/42
摘要: A system that includes: (a) a mask manipulator, that is arranged to: receive an opaque EUV pod that encloses an EUV mask, extract, in a highly clean environment, the EUV mask from the outer pod and the inner pod of the EUV pod, and cover an upper face of the EUV mask with protective cover that is at least partially transparent to DUV radiation; (b) a scanner, arranged to scan the EUV mask, using DUV illumination while maintaining in the scanner an environment that has a cleanliness level that is below a tolerable EUV mask cleanliness level; and (c) a transport system arranged to transport the EUV mask and the protective cover between the scanner and the mask manipulator.
摘要翻译: 一种系统,包括:(a)掩模操纵器,其被设置为:接收包围EUV掩模的不透明EUV舱,在高度清洁的环境中从EUV的外舱和内舱提取EUV掩模 并且覆盖EUV面罩的上表面,其保护罩对于DUV辐射至少部分透明; (b)扫描器,被设置为使用DUV照明扫描EUV掩模,同时在扫描仪中保持清洁度低于耐受的EUV面罩清洁度水平的环境; 以及(c)运送系统,其布置成在扫描仪和掩模操纵器之间输送EUV掩模和保护盖。
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公开(公告)号:US20140007025A1
公开(公告)日:2014-01-02
申请号:US13536625
申请日:2012-06-28
申请人: Shmuel Mangan , Amir Sagiv , Mariano Abramson
发明人: Shmuel Mangan , Amir Sagiv , Mariano Abramson
IPC分类号: G06F17/50
CPC分类号: G01N21/8806 , G01N21/00 , G01N21/9501 , G01N2201/068 , G03F1/84 , G03F7/70116
摘要: Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
摘要翻译: 用于基于表示由检查系统仿真的期望曝光条件的数据设计二进制空间滤波器的方法和系统,以及用于在检查系统的光路中实现二进制空间滤波器,由此能够仿真期望的曝光条件 通过将检查系统的光束与二进制空间滤波器相互作用。 本方法和系统使得能够即时和按需设计和实现/生成用于检测系统的空间滤波器。
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公开(公告)号:US20110121193A1
公开(公告)日:2011-05-26
申请号:US12950058
申请日:2010-11-19
申请人: Chaim Braude , Mariano Abramson , Adam Baer , Jimmy Vishnipolsky , Yuri Belenky
发明人: Chaim Braude , Mariano Abramson , Adam Baer , Jimmy Vishnipolsky , Yuri Belenky
IPC分类号: G01J1/42
摘要: A system that includes: (a) a mask manipulator, that is arranged to: receive an opaque EUV pod that encloses a EUV mask, extract, in a highly clean environment, the EUV mask from the outer pod and the inner pod of the EUV pod, and cover an upper face of the EUV mask with protective cover that is at least partially transparent to DUV radiation; (b) a scanner, arranged scan the EUV mask, using DUV illumination while maintaining in the scanner an environment that has a cleanliness level that is below a tolerable EUV mask cleanliness level; and a transport system arranged to transport the EUV mask and the protective cover between the scanner and the mask manipulator.
摘要翻译: 一种系统,包括:(a)掩模操纵器,其被设置为:接收包围EUV掩模的不透明EUV舱,在高度清洁的环境中从EUV的外舱和内舱提取EUV掩模 并且覆盖EUV面罩的上表面,其保护罩对于DUV辐射至少部分透明; (b)扫描仪,扫描EUV掩模,使用DUV照明,同时在扫描仪中保持清洁度低于可耐受的EUV面罩清洁度水平的环境; 以及传送系统,其布置成在扫描仪和掩模操纵器之间传送EUV掩模和保护盖。
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公开(公告)号:US06517967B1
公开(公告)日:2003-02-11
申请号:US09293927
申请日:1999-04-15
申请人: Yaron Shrim , Menachem Givon , Tzvi Rosenberg , Neal Naimer , Mariano Abramson , Jonathan Goldstein , Mark Slutski
发明人: Yaron Shrim , Menachem Givon , Tzvi Rosenberg , Neal Naimer , Mariano Abramson , Jonathan Goldstein , Mark Slutski
IPC分类号: H01M200
CPC分类号: H01M12/065 , H01M2/0217 , H01M2/0222 , H01M2/0255 , H01M2/0257 , H01M2/0275 , H01M2/08 , H01M2/10 , H01M2/1061 , H01M2/1066 , H01M2/1235 , H01M2/20 , H01M2/30 , H01M4/02 , H01M4/06 , H01M4/62 , H01M4/621 , H01M4/628 , H01M4/745 , H01M4/8605 , H01M4/9016 , H01M4/96 , H01M6/42 , H01M6/50 , H01M6/5033 , H01M8/0206 , H01M8/0213 , H01M8/0228 , H01M8/04089 , H01M10/0413 , H01M10/0468 , H01M10/44 , H01M12/06 , H01M16/00 , H01M2002/0205 , H01M2004/021 , H01M2004/8689 , H01M2010/0495 , H01M2200/20
摘要: A high capacity primary (single-use; non-rechargeable) battery pack for high current portable appliances such as cellular phones employs electrochemical cells that use ambient oxygen for one of the electrodes. The pack makes possible a simple low cost design by providing for oxygen supply in a completely passive yet compact configuration. Cells may be arranged inside a housing in a tightly packed arrangement by providing internal spaces that are sized to permit diffusion and, if possible, bulk air flow. The highest volumetric energy density is achievable by permitting bulk flow of air into the housing. It has been found that in practical use, in applications such as cellular telephones, that bulk air flow can play a significant role in gas exchange required for operation. A number of design criteria are developed for providing for a mix of molecular diffusion and bulk flow in the design of battery packs according to the invention. Most of these criteria relate to providing for gas exchange to portions of cells that are housed deep within the housing structure without requiring large amounts of physical space that would undermine the design goal of compactness. These criteria permit portions of cells to be positioned remotely from openings in the housing while still providing adequate oxygen delivery.
摘要翻译: 用于大电流便携式电器(例如蜂窝电话)的高容量初级(一次性;不可充电)电池组使用将环境氧用于电极之一的电化学电池。 通过在完全无源且紧凑的配置中提供氧气供应,该包可以实现简单的低成本设计。 细胞可以通过提供尺寸允许扩散的尺寸的内部空间并且如果可能的话,可以以紧密堆积的布置布置在壳体内。 最大的体积能量密度可以通过允许空气大量流入壳体来实现。 已经发现,在实际使用中,在诸如蜂窝电话的应用中,该大量空气流可以在操作所需的气体交换中起重要作用。 开发了许多设计标准,用于在根据本发明的电池组的设计中提供分子扩散和体积流动的混合。 这些标准中的大多数涉及提供气体交换到容纳在壳体结构内部的细胞的部分,而不需要大量物理空间,这将破坏紧凑性的设计目标。 这些标准允许细胞的一部分远离外壳中的开口定位,同时仍然提供足够的氧气输送。
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