Method and system for creation of binary spatial filters
    1.
    发明授权
    Method and system for creation of binary spatial filters 有权
    用于创建二进制空间滤波器的方法和系统

    公开(公告)号:US08984453B2

    公开(公告)日:2015-03-17

    申请号:US13536625

    申请日:2012-06-28

    摘要: Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.

    摘要翻译: 用于基于表示由检查系统仿真的期望曝光条件的数据设计二进制空间滤波器的方法和系统,以及用于在检查系统的光路中实现二进制空间滤波器,由此能够仿真期望的曝光条件 通过将检查系统的光束与二进制空间滤波器相互作用。 本方法和系统使得能够即时和按需设计和实现/生成用于检测系统的空间滤波器。

    Prismatic metal-air cells
    2.
    发明授权
    Prismatic metal-air cells 有权
    棱柱金属 - 空气细胞

    公开(公告)号:US06265102B1

    公开(公告)日:2001-07-24

    申请号:US09187567

    申请日:1998-11-05

    IPC分类号: H01M202

    CPC分类号: H01M2/0222 H01M12/06

    摘要: The invention provides a metal-air electrochemical cell, having a leak-proof, metal prismatic casing comprising a pair of interfacing interengaging rectangular tray-like casing components, a first substantially rectangular tray-like casing component having a first major surface and contiguous side walls for encompassing a cathode of the cell and a second inverted substantially tray-like casing component having a second major surface and contiguous depending side walls for encompassing an anode of the cell, the side walls of one of the casing components being of a height to facilitate the curling and crimping of an upper portion thereof over a peripheral edge area of the major surface of the other casing component to form a leak-proof, closed prismatic casing.

    摘要翻译: 本发明提供了一种金属 - 空气电化学电池,其具有防漏的金属棱柱形壳体,其包括一对相互接合的矩形托盘状壳体部件,第一基本矩形的托盘状壳体部件,其具有第一主表面和相邻的侧壁 用于包围电池的阴极和具有第二主表面和邻接的悬垂侧壁的第二倒置的基本上为托盘状的壳体部件,用于包围电池的阳极,其中一个壳体部件的侧壁的高度便于 其上部的卷曲和卷曲在另一壳体部件的主表面的周缘区域上方形成防漏闭合的棱柱形壳体。

    Inspection of EUV masks by a DUV mask inspection tool
    3.
    发明授权
    Inspection of EUV masks by a DUV mask inspection tool 有权
    通过DUV面罩检查工具检查EUV面罩

    公开(公告)号:US08207504B2

    公开(公告)日:2012-06-26

    申请号:US12950058

    申请日:2010-11-19

    IPC分类号: G01J1/42

    摘要: A system that includes: (a) a mask manipulator, that is arranged to: receive an opaque EUV pod that encloses an EUV mask, extract, in a highly clean environment, the EUV mask from the outer pod and the inner pod of the EUV pod, and cover an upper face of the EUV mask with protective cover that is at least partially transparent to DUV radiation; (b) a scanner, arranged to scan the EUV mask, using DUV illumination while maintaining in the scanner an environment that has a cleanliness level that is below a tolerable EUV mask cleanliness level; and (c) a transport system arranged to transport the EUV mask and the protective cover between the scanner and the mask manipulator.

    摘要翻译: 一种系统,包括:(a)掩模操纵器,其被设置为:接收包围EUV掩模的不透明EUV舱,在高度清洁的环境中从EUV的外舱和内舱提取EUV掩模 并且覆盖EUV面罩的上表面,其保护罩对于DUV辐射至少部分透明; (b)扫描器,被设置为使用DUV照明扫描EUV掩模,同时在扫描仪中保持清洁度低于耐受的EUV面罩清洁度水平的环境; 以及(c)运送系统,其布置成在扫描仪和掩模操纵器之间输送EUV掩模和保护盖。

    METHOD AND SYSTEM FOR CREATION OF BINARY SPATIAL FILTERS
    4.
    发明申请
    METHOD AND SYSTEM FOR CREATION OF BINARY SPATIAL FILTERS 有权
    二次空间滤波器的创建方法和系统

    公开(公告)号:US20140007025A1

    公开(公告)日:2014-01-02

    申请号:US13536625

    申请日:2012-06-28

    IPC分类号: G06F17/50

    摘要: Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.

    摘要翻译: 用于基于表示由检查系统仿真的期望曝光条件的数据设计二进制空间滤波器的方法和系统,以及用于在检查系统的光路中实现二进制空间滤波器,由此能够仿真期望的曝光条件 通过将检查系统的光束与二进制空间滤波器相互作用。 本方法和系统使得能够即时和按需设计和实现/生成用于检测系统的空间滤波器。

    INSPECTION OF EUV MASKS BY A DUV MASK INSPECTION TOOL
    5.
    发明申请
    INSPECTION OF EUV MASKS BY A DUV MASK INSPECTION TOOL 有权
    通过DUV面罩检查工具检查EUV面罩

    公开(公告)号:US20110121193A1

    公开(公告)日:2011-05-26

    申请号:US12950058

    申请日:2010-11-19

    IPC分类号: G01J1/42

    摘要: A system that includes: (a) a mask manipulator, that is arranged to: receive an opaque EUV pod that encloses a EUV mask, extract, in a highly clean environment, the EUV mask from the outer pod and the inner pod of the EUV pod, and cover an upper face of the EUV mask with protective cover that is at least partially transparent to DUV radiation; (b) a scanner, arranged scan the EUV mask, using DUV illumination while maintaining in the scanner an environment that has a cleanliness level that is below a tolerable EUV mask cleanliness level; and a transport system arranged to transport the EUV mask and the protective cover between the scanner and the mask manipulator.

    摘要翻译: 一种系统,包括:(a)掩模操纵器,其被设置为:接收包围EUV掩模的不透明EUV舱,在高度清洁的环境中从EUV的外舱和内舱提取EUV掩模 并且覆盖EUV面罩的上表面,其保护罩对于DUV辐射至少部分透明; (b)扫描仪,扫描EUV掩模,使用DUV照明,同时在扫描仪中保持清洁度低于可耐受的EUV面罩清洁度水平的环境; 以及传送系统,其布置成在扫描仪和掩模操纵器之间传送EUV掩模和保护盖。