公开(公告)号：US07711249B2

公开(公告)日：2010-05-04

申请号：US10533585

申请日：2003-11-10

申请人： Kojiro Kawasaki ,  Hiroyuki Kondo ,  Masahiro Horie

发明人： Kojiro Kawasaki ,  Hiroyuki Kondo ,  Masahiro Horie

IPC分类号： H04N5/91

CPC分类号： H04N9/8042 ,  G11B20/00086 ,  G11B20/00159 ,  G11B2020/10537 ,  H04H60/27 ,  H04H60/47

摘要： When a digital broadcast is decoded and then re-encoded and digitally recorded, detailed program information contained in the original digital broadcast and information such as age-based viewer control information or parental control information may be lost. This problem is solved by providing a digital tuner to demodulate the digital broadcast signal and output the MPEG-TS, a demultiplexer to demultiplex the MPEG-TS into the component packet streams, an AV decoder to decode the demultiplexed AV data packets, and an AV encoder to re-encode the demultiplexed AV data packets into AV data packets for recording. A control microprocessor reads, reconstructs, and sends the PSI or SI packets demultiplexed by the demultiplexer to save the viewer control information to the system multiplexer. The system multiplexer multiplexes the PSI or SI packets with the re-encoded AV data packets, and the multiplexed stream is then written to the recording medium.

摘要翻译： 当数字广播被解码然后被重新编码和数字记录时，包含在原始数字广播中的详细节目信息和诸如基于年龄的观众控制信息或家长控制信息之类的信息可能会丢失。 通过提供数字调谐器来解调数字广播信号并输出​​MPEG-TS，解复用器将MPEG-TS解复用到分量分组流中，解码数字调谐器以解码解复用的AV数据分组的AV解码器和AV 编码器将解复用的AV数据分组重新编码为用于记录的AV数据分组。 控制微处理器读取，重建并发送由解复用器解复用的PSI或SI分组，以将观众控制信息保存到系统多路复用器。 系统复用器将PSI或SI分组与重新编码的AV数据分组复用，然后将多路复用流写入记录介质。

公开(公告)号：US20080111987A1

公开(公告)日：2008-05-15

申请号：US11979116

申请日：2007-10-31

申请人： Kumiko Akashika ,  Masahiro Horie

发明人： Kumiko Akashika ,  Masahiro Horie

IPC分类号： G01B11/16 ,  G01B11/25

CPC分类号： G01B11/0625 ,  G01L5/0047

摘要： In a stress measuring apparatus, reflected light of light emitted to a substrate through an objective lens is received by a light shielding pattern imaging part, to acquire an image of a light shielding pattern positioned at an aperture stop part of an optical system. A control part obtains gradient vectors of the substrate in a plurality of gradient vector measurement areas and surface form of the substrate on the basis of outputs of the light shielding pattern imaging part, to obtain a stress in a film formed on the substrate. Since light directed through the objective lens becomes approximately parallel rays of light on the substrate, measurement can be performed without focusing on each gradient vector measurement area and the surface form of the substrate can be obtained easily and rapidly. Consequently, it is possible to obtain a stress in the film formed on the substrate easily and rapidly.

摘要翻译： 在应力测量装置中，通过遮光图案成像部分接收通过物镜发射到基板的光的反射光，以获取位于光学系统的孔径光阑部分的遮光图案的图像。 控制部分基于遮光图案成像部的输出，在多个梯度矢量测量区域和基板的表面形式中获得衬底的梯度向量，以获得在衬底上形成的膜中的应力。 由于通过物镜引导的光在基板上变成大致平行的光线，因此可以在不关注各梯度矢量测量区域的情况下进行测量，并且可以容易且快速地获得基板的表面形状。 因此，可以容易且快速地获得在基板上形成的膜的应力。

公开(公告)号：US20080049222A1

公开(公告)日：2008-02-28

申请号：US11889391

申请日：2007-08-13

申请人： Shinji Yamaguchi ,  Masahiro Horie

发明人： Shinji Yamaguchi ,  Masahiro Horie

IPC分类号： G01J3/28 ,  G01N21/55

CPC分类号： G01B11/0625

摘要： In a trench shape measuring apparatus, a substrate having a trench pattern extending in a predetermined trench direction on a measurement area is held by a holding part. A light emission part applies illumination light to the measurement area and reflected light of the illumination light from the measurement area is spectrally dispersed by a diffraction grating of a spectroscope, to acquire a measured spectral reflectance. Since the diffraction grating is arranged so that an angle formed between a direction on the substrate corresponding to a grating direction of the diffraction grating and the trench direction becomes 45 degrees, even if an oscillation direction of the reflected light from the substrate is limited by influence of the trench pattern, it is possible to accurately obtain a spectral reflectance of the measurement area without influence of polarization of the reflected light and obtain a depth of the trench pattern with accuracy.

摘要翻译： 在沟槽形状测量装置中，具有在测量区域上以预定沟槽方向延伸的沟槽图案的衬底由保持部分保持。 发光部将照明光施加到测量区域，并且通过分光镜的衍射光栅使来自测量区域的照明光的反射光被光谱地分散，以获得测量的光谱反射率。 由于衍射光栅被布置成使得对应于衍射光栅的光栅方向的基板上的方向与沟槽方向之间形成的角度成为45度，所以即使来自基板的反射光的振荡方向受到影响的限制 的沟槽图案，可以精确地获得测量区域的光谱反射率而不受反射光的偏振的影响，并且准确地获得沟槽图案的深度。

公开(公告)号：US06879408B1

公开(公告)日：2005-04-12

申请号：US09526482

申请日：2000-03-15

申请人： Ryuichi Hori ,  Masahiro Horie ,  Shuji Okamoto

发明人： Ryuichi Hori ,  Masahiro Horie ,  Shuji Okamoto

IPC分类号： G06F3/12 ,  G06F15/00

CPC分类号： G06F3/1248 ,  G06F3/1204 ,  G06F3/1254 ,  G06F3/1284 ,  G06F3/1285

摘要： A printer and a printer driver automatically execute setting processing relevant to information unique to each printer without a user's intervention. Printer language specifications indicating a correspondence between plot objects and printer languages are stored. Printer language specifications setting data predetermined for the printer language specifications are generated. Control language specifications indicating a correspondence between control elements and control languages are stored. Control language specifications setting data predetermined for the control language specifications are generated. According to a trigger instructing a host PC to start transmission, the generated language specifications setting data to a bi-directional communication part are transmitted. The bi-directional communication part transmits the received language specifications setting data through a transmission path to the host PC.

摘要翻译： 打印机和打印机驱动程序自动执行与每个打印机唯一的信息相关的设置处理，无需用户干预。 存储指示绘图对象和打印机语言之间的对应关系的打印机语言规范。 生成针对打印机语言规格预定的打印机语言规格设定数据。 存储指示控制元件和控制语言之间的对应关系的控制语言规范。 生成用于控制语言规范的控制语言规格设定数据。 根据指示主机PC开始发送的触发信号，发送生成的语言规格设置数据到双向通信部件。 双向通信部分通过传输路径将接收到的语言规范设置数据发送到主机PC。

公开(公告)号：US5686993A

公开(公告)日：1997-11-11

申请号：US677274

申请日：1996-07-09

申请人： Masahiko Kokubo ,  Masahiro Horie

发明人： Masahiko Kokubo ,  Masahiro Horie

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： A film thickness measuring apparatus measures the thickness of a thin film which is formed on a substrate with an excellent reproducibility regardless of inclination of a surface of a sample. Since an illumination system (20) includes a glass rod (GL) which corrects wavelength dependencies of luminance distributions of light sources (HL, DL), even when an eclipse in reflected light due to inclination of a sample (SP) decreases the energy of the reflected light, a spectral distribution of the reflected light entering a spectroscopic unit (40) is maintained with almost no change. A control unit (50) performs data conversion of multiplying an actual spectral reflectance by a ratio of an average of the actual spectral reflectance which is determined based on an output from the spectroscopic unit (40) to an average of a calibrated spectral reflectance and thereafter calculates a deviation between the two spectral reflectances. As a result, the film thickness is accurately measured while preventing an influence of inclination of the sample (SP).

摘要翻译： 薄膜厚度测量装置测量形成在基板上的薄膜的厚度，其重复性优异，而与样品表面的倾斜度无关。 由于照明系统（20）包括校正光源（HL，DL）的亮度分布的波长依赖性的玻璃棒（GL），即使当由于样品（SP）的倾斜而在反射光中的日食降低时，能量 反射光，进入分光单元（40）的反射光的光谱分布几乎保持不变。 控制单元（50）执行数据转换，将实际的光谱反射率乘以基于分光单元（40）的输出确定的实际光谱反射率的平均值与校准的光谱反射率的平均值之比 计算两个光谱反射率之间的偏差。 结果，在防止样品（SP）的倾斜的影响的同时精确测量膜厚度。

公开(公告)号：US5493401A

公开(公告)日：1996-02-20

申请号：US309164

申请日：1994-09-20

申请人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

发明人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： Light of an observation wavelength range is irradiated upon a sample object to measure spectral reflection ratios, and an waveform is developed from the spectral reflection ratios. Based on the total number of peaks and valleys found in the interference waveform and two wavelengths specified within the observation wavelength range, possible ranges for the film thicknesses of the respective transparent films are determined. While changing tentative film thicknesses of the respective transparent films each by a predetermined film thickness pitch within the film thickness ranges, a deviation between theoretical spectral reflectance and measured spectral reflectance with respect to the tentative film thicknesses is calculated to thereby find a film thickness combination which causes the deviation to be minimum.

摘要翻译： 将观察波长范围的光照射在样品物体上，以测量光谱反射率，并从光谱反射率展开波形。 基于在干涉波形中发现的峰和谷的总数以及在观察波长范围内指定的两个波长，确定各透明膜的膜厚的可能范围。 在膜厚度范围内，通过预定的膜厚度间距改变各透明膜的临时膜厚度，计算理论光谱反射率和测定的光谱反射率相对于试样膜厚度的偏差，从而找到膜厚组合， 导致偏差最小。

公开(公告)号：US20090119596A1

公开(公告)日：2009-05-07

申请号：US12092633

申请日：2006-11-10

申请人： Yuji Iwahara ,  Masahiro Horie

发明人： Yuji Iwahara ,  Masahiro Horie

IPC分类号： G06F3/048

CPC分类号： H04N9/8205 ,  G11B27/105 ,  G11B27/329 ,  G11B27/34 ,  H04N5/765 ,  H04N5/772 ,  H04N5/781 ,  H04N5/85 ,  H04N5/907 ,  H04N9/8047

摘要： A viewer apparatus displays, on a display screen, a slideshow of still image data recorded on a recording medium. The viewer apparatus includes a layout determination unit 3 for allocating a display area, on the display screen, to each display-level folder located directly under a target folder, the target folder being any of folders in a hierarchical tree on the recording medium, a slideshow list generation unit 5 for selecting, as a slideshow target, still image data that belongs to one of (i) the display-level folder and (ii) a subordinate folder located below the display-level folder and a slideshow control unit 8 for executing a plurality of slideshows for the selected still image data in the display areas allocated to each of the display-level folders located above each of the still image data.

摘要翻译： 观看器装置在显示屏幕上显示记录在记录介质上的静止图像数据的幻灯片。 观看者装置包括布局确定单元3，用于在显示屏幕上将显示区域分配给位于目标文件夹正下方的每个显示级文件夹，目标文件夹是记录介质上分层树中的文件夹中的任一个， 幻灯片列表生成单元5，用于选择属于（i）显示级文件夹和（ii）位于显示级文件夹下方的下级文件夹之一的静止图像数据作为幻灯片放映目标，以及幻灯片放映控制单元8，用于 在分配给位于每个静止图像数据上方的每个显示级文件夹的显示区域中执行用于所选择的静止图像数据的多个幻灯片。

公开(公告)号：US20090059228A1

公开(公告)日：2009-03-05

申请号：US12196463

申请日：2008-08-22

申请人： Masahiro Horie ,  Kumiko Fukue

发明人： Masahiro Horie ,  Kumiko Fukue

IPC分类号： G01J4/04

CPC分类号： G01J3/447 ,  G01J3/4412

摘要： In a spectroscopic ellipsometer, light emitted from a light source enters a measurement surface of a substrate through an optical system in a lighting part so as to incline to the measurement surface to be directed to a light receiving device, and ellipsometry is performed based on spectral intensity of reflected light reflected on the measurement surface, the spectral intensity being acquired by the light receiving device. In focusing of the spectroscopic ellipsometer, a focus position of the measurement surface is obtained based on a total light amount in a predetermined wavelength band of the reflected light, the total light amount being obtained by the light receiving device. In the spectroscopic ellipsometer, since the optical system for ellipsometry and the optical system for focusing are common, it is possible to eliminate influences of change of the optical systems by temperature change or the like and to achieve high accurate focusing.

摘要翻译： 在光谱椭偏仪中，从光源发出的光通过照明部中的光学系统进入基板的测量面，从而向测量面倾斜而被引导到光接收装置，并且基于光谱进行椭偏仪 在测量表面反射的反射光的强度，由光接收装置获取的光谱强度。 在分光椭偏仪的聚焦中，基于反射光的预定波长带中的总光量，由光接收装置获得的总光量，获得测量表面的聚焦位置。 在分光椭偏仪中，由于用于椭偏仪的光学系统和用于聚焦的光学系统是常见的，因此可以通过温度变化等来消除光学系统的变化的影响，并且实现高精度的聚焦。

公开(公告)号：US20080243412A1

公开(公告)日：2008-10-02

申请号：US12076886

申请日：2008-03-25

申请人： Masahiro Horie ,  Yoshiharu Itano

发明人： Masahiro Horie ,  Yoshiharu Itano

IPC分类号： G06F19/00

CPC分类号： G01N21/9501

摘要： In a defect inspection apparatus, a first lighting part applies polarized light to an inspection region on a substrate, reflected light reflected on the inspection region is received by a first spectrometer in a first light receiving part, and a phase difference spectrum representing a reflection property of the reflected light is transmitted to an inspection part of a control part. In the control part, an inspection wavelength and a threshold value determined based on theoretical calculation according to a type of defects to be detected are stored in a memory in advance, and a group of defects in a plurality of recessed portions formed in the inspection region are detected based on the threshold value and a phase difference in an inspection wavelength obtained from the phase difference spectrum. Thus, it is possible to detect a defect in a small recessed portion on the substrate with high accuracy.

摘要翻译： 在缺陷检查装置中，第一照明部将偏振光施加到基板上的检查区域，检查区域反射的反射光被第一受光部中的第一光谱仪接收，表示反射特性的相位差光谱 的反射光被传送到控制部的检查部。 在控制部中，将检测波长和基于要检测的缺陷的类型的理论计算确定的阈值预先存储在存储器中，并且形成在检查区域中的多个凹部中的一组缺陷 基于从相位差光谱获得的检查波长的阈值和相位差来检测。 因此，可以高精度地检测基板上的小凹部的缺陷。

公开(公告)号：US07095498B2

公开(公告)日：2006-08-22

申请号：US10791780

申请日：2004-03-04

申请人： Masahiro Horie

发明人： Masahiro Horie

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/213

摘要： In a spectroscopic ellipsometer (1), a lighting part (3) comprises a light source part for measurement (measurement light source) (31) and a polarizer (32), and the polarizer (32) obtains polarized light from light outputted from the measurement light source (31) and guides the polarized light to a substrate (9). A light receiving part (4) comprises an analyzer (41) on which reflected light which is the polarized light reflected on the substrate 9 is incident and a spectroscope (42), and the reflected light through the analyzer (41) enters the spectroscope (42), where a polarization state at each wavelength is acquired. The spectroscopic ellipsometer (1) has a construction in which mirrors are disposed only between the measurement light source (31) and the polarizer (32) and between the analyzer (41) and the spectroscope (42). In the spectroscopic ellipsometer (1), with this construction, the polarization state of the polarized light or its reflected light is not changed by mirrors and it is therefore possible to achieve measurements with high accuracy.

摘要翻译： 在分光椭偏仪（1）中，发光部（3）包括测量用光源部（测定光源）（31）和偏振片（32），偏光板（32） 测量光源（31）并将偏振光引导到衬底（9）。 光接收部分（4）包括分析器（41），反射在基板9上的偏振光入射的反射光和分光镜（42），并且通过分析器（41）的反射光进入分光器 42），其中获取每个波长的偏振状态。 光谱椭偏仪（1）具有仅在测量光源（31）和偏振器（32）之间以及分析器（41）和分光器（42）之间设置反射镜的结构。 在分光椭圆偏振仪（1）中，通过这种结构，偏振光或其反射光的偏振状态不会被反射镜改变，因此可以以高精度实现测量。