公开(公告)号：US5422703A

公开(公告)日：1995-06-06

申请号：US262619

申请日：1994-06-20

申请人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

发明人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

IPC分类号： G01B9/04 ,  G01B11/00 ,  G01B11/02 ,  G01B11/06 ,  G02B21/00

CPC分类号： G01B11/02 ,  G01B11/0616 ,  G01B11/0625 ,  G01N21/55 ,  G01N2201/064 ,  G01N2201/128

摘要： A method of measuring light reflected by a test sample with a microscopic photometric system. The test sample placed in an in-focus position of an objective is irradiated, and light reflected by the test sample is measured. Stray light generated by microscopic optics including the objective is measured with the test sample placed in an out-of-focus position of the objective. Light actually reflected by the test sample is determined from a difference between the reflected light and the stray light measured.

摘要翻译： 用微观光度测量系统测量由测试样品反射的光的方法。 照射放置在物体的聚焦位置的测试样品，并测量由测试样品反射的光。 用包含物镜的微观光学器件产生的杂散光通过放置在物镜的焦点外位置的测试样品进行测量。 由测试样本实际反射的光由反射光和测量的杂散光之间的差确定。

公开(公告)号：US06850350B2

公开(公告)日：2005-02-01

申请号：US10600869

申请日：2003-06-23

申请人： Motonobu Kawabata ,  Masahiko Kokubo

发明人： Motonobu Kawabata ,  Masahiko Kokubo

IPC分类号： B41J2/44 ,  G02B13/00 ,  G02B26/10 ,  G02B26/12 ,  H04N1/036 ,  H04N1/113 ,  G02B26/08

CPC分类号： G02B26/125 ,  G02B13/0005

摘要： An optical scanner according to the present invention comprises a collimator lens, a cylindrical lens, a light deflector, an f-θ lens and an anamorphic lens. The f-θ lens is constituted by three groups of five lenses, i.e., a first cemented lens formed by bonding a first lens and a second lens to each other, a second cemented lens formed by boding a third lens and a fourth lens to each other and a fifth lens having positive refracting power. The f-θ lens is formed to satisfy relational expressions L/f

摘要翻译： 根据本发明的光学扫描器包括准直透镜，柱面透镜，光偏转器，f-θ透镜和变形透镜。 f-theta透镜由三组五个透镜构成，即通过将第一透镜和第二透镜彼此结合而形成的第一胶合透镜，通过将第三透镜和第四透镜粘贴到每个透镜而形成的第二胶合透镜 其他和第五透镜具有正折射力。 形成f-theta透镜以满足关系式L / f <0.100和0.04 <= r1 / r4 <= 0.31，其中L表示f-theta透镜的总长度，f表示f-θ的焦距 透镜，r1表示第一透镜的入射侧折射界面的曲率半径，r4表示第三透镜的入射侧折射界面的曲率半径。 因此，当增加焦距f以及扫描线长度W时，还提供包括具有小总长度L和高光学性能的f-θ透镜的紧凑型光学扫描器。

公开(公告)号：US06771429B2

公开(公告)日：2004-08-03

申请号：US10461488

申请日：2003-06-16

申请人： Motonobu Kawabata ,  Masahiko Kokubo

发明人： Motonobu Kawabata ,  Masahiko Kokubo

IPC分类号： G02B900

CPC分类号： G02B27/0031 ,  G02B26/124

摘要： An optical scanner according to the present invention comprises a first imaging optical system consisting of a collimator lens and a cylindrical lens, a light deflector reflecting/deflecting a light beam for scanning, and a second imaging optical system consisting of an f-&thgr; lens and an anamorphic lens. The f-&thgr; lens has three groups of lenses, i.e., a first lens having negative refracting power, a second lens having positive refracting power and a third lens having positive refracting power. The f-&thgr; lens is formed to satisfy relational expressions L/f

摘要翻译： 根据本发明的光学扫描器包括由准直透镜和柱面透镜组成的第一成像光学系统，反射/偏转用于扫描的光束的光偏转器，以及由f-θ透镜和 变形镜头。 f-theta透镜具有三组透镜，即具有负折射力的第一透镜，具有正折射率的第二透镜和具有正折射光焦度的第三透镜。 形成f-theta透镜以满足关系式L / f <0.100和0.10 <= r1 / r3 <= 0.26，其中L表示f-theta透镜的总长度，f表示f-θ的焦距 透镜，r1表示第一透镜的光束入射侧折射界面的曲率半径，r3表示第二透镜的光束入射侧折射界面的曲率半径。 因此，当增加焦距f以及扫描线长度W时，还提供包括具有小总长度L和高光学性能的f-θ透镜的紧凑型光学扫描器。

公开(公告)号：US5718503A

公开(公告)日：1998-02-17

申请号：US462828

申请日：1995-06-05

申请人： Masahiko Kokubo ,  Kenji Ueyama ,  Kenji Endo

发明人： Masahiko Kokubo ,  Kenji Ueyama ,  Kenji Endo

IPC分类号： G02B27/00 ,  F21S8/00 ,  F21V5/04 ,  F21V7/00 ,  G02B19/00 ,  G02B27/18

CPC分类号： G02B27/18 ,  G02B19/0028 ,  G02B19/0047

摘要： An illumination apparatus is disclosed which efficiently irradiates an irradiation surface without destroying the symmetry of an illuminance distribution at the irradiation surface. A light source is displaced from a center of curvature of a spherical mirror in a direction in a displacement plane which includes an axis of symmetry of the spherical mirror so as to form a light source image at a position off the light source. Due to this, a ray from the spherical mirror passes off the light source (i.e., the position of the light source image), and therefore, a reflection ray is not shielded, absorbed nor otherwise disturbed by the light source, which in turn prevents deterioration in the efficiency of utilization of light. Further, the light source, the spherical minor and the lens are assembled into a light source unit which is inclined at an angle about a principal point of the lens with respect to a central axis of the irradiation surface and displaced a certain distance in a displacement direction which is perpendicular to the central axis. Hence, the illuminance distribution at the irradiation surface is adjusted and the symmetry of the illuminance distribution at the irradiation surface is improved.

摘要翻译： 公开了一种有效地照射照射面而不破坏照射面的照度分布的对称性的照明装置。 光源从包括球面镜的对称轴的位移面内的方向从球面镜的曲率中心偏离，以便在离开光源的位置处形成光源图像。 由此，来自球面镜的光线离开光源（即，光源图像的位置），因此，反射光线不被光源屏蔽，吸收或以其它方式干扰，反过来又防止 光利用效率的恶化。 此外，光源，球形小镜和透镜组装成光源单元，该光源单元相对于照射表面的中心轴以角度绕透镜的主要点倾斜并且在位移中移位一定距离 方向垂直于中心轴线。 因此，调整照射面的照度分布，提高照射面的照度分布的对称性。

公开(公告)号：US5686993A

公开(公告)日：1997-11-11

申请号：US677274

申请日：1996-07-09

申请人： Masahiko Kokubo ,  Masahiro Horie

发明人： Masahiko Kokubo ,  Masahiro Horie

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： A film thickness measuring apparatus measures the thickness of a thin film which is formed on a substrate with an excellent reproducibility regardless of inclination of a surface of a sample. Since an illumination system (20) includes a glass rod (GL) which corrects wavelength dependencies of luminance distributions of light sources (HL, DL), even when an eclipse in reflected light due to inclination of a sample (SP) decreases the energy of the reflected light, a spectral distribution of the reflected light entering a spectroscopic unit (40) is maintained with almost no change. A control unit (50) performs data conversion of multiplying an actual spectral reflectance by a ratio of an average of the actual spectral reflectance which is determined based on an output from the spectroscopic unit (40) to an average of a calibrated spectral reflectance and thereafter calculates a deviation between the two spectral reflectances. As a result, the film thickness is accurately measured while preventing an influence of inclination of the sample (SP).

摘要翻译： 薄膜厚度测量装置测量形成在基板上的薄膜的厚度，其重复性优异，而与样品表面的倾斜度无关。 由于照明系统（20）包括校正光源（HL，DL）的亮度分布的波长依赖性的玻璃棒（GL），即使当由于样品（SP）的倾斜而在反射光中的日食降低时，能量 反射光，进入分光单元（40）的反射光的光谱分布几乎保持不变。 控制单元（50）执行数据转换，将实际的光谱反射率乘以基于分光单元（40）的输出确定的实际光谱反射率的平均值与校准的光谱反射率的平均值之比 计算两个光谱反射率之间的偏差。 结果，在防止样品（SP）的倾斜的影响的同时精确测量膜厚度。

公开(公告)号：US5493401A

公开(公告)日：1996-02-20

申请号：US309164

申请日：1994-09-20

申请人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

发明人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： Light of an observation wavelength range is irradiated upon a sample object to measure spectral reflection ratios, and an waveform is developed from the spectral reflection ratios. Based on the total number of peaks and valleys found in the interference waveform and two wavelengths specified within the observation wavelength range, possible ranges for the film thicknesses of the respective transparent films are determined. While changing tentative film thicknesses of the respective transparent films each by a predetermined film thickness pitch within the film thickness ranges, a deviation between theoretical spectral reflectance and measured spectral reflectance with respect to the tentative film thicknesses is calculated to thereby find a film thickness combination which causes the deviation to be minimum.

摘要翻译： 将观察波长范围的光照射在样品物体上，以测量光谱反射率，并从光谱反射率展开波形。 基于在干涉波形中发现的峰和谷的总数以及在观察波长范围内指定的两个波长，确定各透明膜的膜厚的可能范围。 在膜厚度范围内，通过预定的膜厚度间距改变各透明膜的临时膜厚度，计算理论光谱反射率和测定的光谱反射率相对于试样膜厚度的偏差，从而找到膜厚组合， 导致偏差最小。