Anti-fuse for programming redundancy cell, repair circuit having programming apparatus, and fabrication method of anti-fuse
    4.
    发明授权
    Anti-fuse for programming redundancy cell, repair circuit having programming apparatus, and fabrication method of anti-fuse 失效
    用于编程冗余单元的反熔丝,具有编程设备的修复电路和反熔丝的制造方法

    公开(公告)号:US06306689B1

    公开(公告)日:2001-10-23

    申请号:US09220801

    申请日:1998-12-28

    IPC分类号: H01L2182

    CPC分类号: H01L27/11206

    摘要: An anti-fuse for programming a redundancy cell and a repair circuit having a programming apparatus are disclosed. The circuit includes a half power voltage supplier for supplying a half power voltage, a programming voltage supplier for supplying a programming voltage for exchanging a defective cell of the memory cell array with a redundancy cell, a ground voltage supplier for supplying a ground electric potential in response to an address signal of the memory cell, an anti-fuse for receiving a voltage of the half power voltage supplier and charging the same in the normal operation and breaking a dielectric film in accordance with a voltage difference between the programming voltage supplier and the ground voltage supplier during the programming operation for thereby implementing a programming, and an output unit for outputting an output signal based on the programmed state of the anti-fuse in accordance with a voltage applied from a node commonly connected with the half power voltage supplier, the programming voltage supplier, and the anti-fuse, for thereby enhancing a fabrication yield and reliability of a memory apparatus by easily exchanging a defective cell with a redundancy cell using a threshold voltage of a dielectric film without using an expensive laser apparatus.

    摘要翻译: 公开了一种用于编程冗余单元的反熔丝和具有编程装置的修复电路。 电路包括用于提供半电源电压的半电源供应器,用冗余电池提供用于交换存储单元阵列的有缺陷单元的编程电压的编程电压供应器,用于提供地电位的地电压供应器 响应于存储单元的地址信号,反熔丝,用于接收半电源供应器的电压并在正常操作中对其进行充电,并根据编程电压供应器和 接地电压供给器,用于实现编程,以及输出单元,用于根据从与半电源供应器共同连接的节点施加的电压,基于反熔丝的编程状态输出输出信号, 编程电压供应商和反熔丝,从而提高制造产量和可靠性 通过使用电介质膜的阈值电压容易地与冗余单元交换缺陷单元而不使用昂贵的激光装置来实现存储装置。