公开(公告)号：US08212351B1

公开(公告)日：2012-07-03

申请号：US11542088

申请日：2006-10-02

申请人： Michael J Debar ,  David J Howard ,  Daniel M. So

发明人： Michael J Debar ,  David J Howard ,  Daniel M. So

IPC分类号： H01L23/12

CPC分类号： H01L23/3135 ,  H01L21/56 ,  H01L23/3121 ,  H01L23/315 ,  H01L2924/0002 ,  H01L2924/00

摘要： According to an embodiment disclosed herein, a microelectronic device to be encapsulated is built on, or alternatively in, a substrate. The device is then coated with a sacrificial layer. A lid layer is deposited over the sacrificial layer, and then appropriately perforated to optimize the removal of the sacrificial layer. The sacrificial layer is then removed using one of several etching or other processes. The perforations in the lid layer are then sealed using a viscous sealing material, thereby fixing the environment that encapsulates the device. The sealing material is then cured or hardened. An optional moisture barrier may be deposited over the cured sealing layer to provide further protection for the encapsulation if needed.

摘要翻译： 根据本文公开的实施例，要封装的微电子器件建立在衬底上或替代地衬底中。 然后将该装置涂覆有牺牲层。 将盖层沉积在牺牲层上，然后适当穿孔以优化牺牲层的去除。 然后使用几个蚀刻或其它工艺之一去除牺牲层。 然后使用粘性密封材料密封盖层中的穿孔，由此固定封装该装置的环境。 然后将密封材料固化或硬化。 可选的湿气屏障可以沉积在固化的密封层上，以便在需要时为封装提供进一步的保护。

公开(公告)号：US06996146B1

公开(公告)日：2006-02-07

申请号：US10610110

申请日：2003-06-30

申请人： Keith B. Kahen ,  Michael J. DeBar ,  Lingadahalli G. Shantharama

发明人： Keith B. Kahen ,  Michael J. DeBar ,  Lingadahalli G. Shantharama

IPC分类号： H01S3/04

CPC分类号： H01S3/0627 ,  H01S3/0604 ,  H01S3/08 ,  H01S3/168 ,  H01S5/36 ,  H01S5/423

摘要： A method of making an organic vertical cavity laser array device includes providing a substrate and a bottom dielectric stack reflective to light over a predetermined range of wavelengths and being disposed over the substrate; forming an etched region in the top surface of the bottom dielectric stack to define an array of spaced laser pixels which have higher reflectance than the interpixel regions so that the array emits laser light; and forming a planarization layer over the etched bottom dielectric stack. The method also includes forming an active region over the planarization layer for producing laser light; and forming a top dielectric stack spaced from the bottom dielectric stack and reflective to light over a predetermined range of wavelengths.

摘要翻译： 一种制造有机垂直腔激光器阵列器件的方法包括提供反射到预定波长范围上的光的衬底和底部电介质叠层，并设置在衬底上; 在所述底部电介质堆叠的顶表面中形成蚀刻区域以限定具有比所述像素间区域更高的反射率的间隔开的激光像素的阵列，使得所述阵列发射激光; 以及在蚀刻的底部电介质叠层上形成平坦化层。 该方法还包括在用于产生激光的平坦化层上形成有源区; 以及形成与所述底部电介质叠层间隔开并且在预定波长范围上反射的顶部电介质堆叠。

公开(公告)号：US06527373B1

公开(公告)日：2003-03-04

申请号：US10122566

申请日：2002-04-15

申请人： Christopher N. Delametter ,  Edward P. Furlani ,  Michael J. Debar ,  Gilbert A. Hawkins

发明人： Christopher N. Delametter ,  Edward P. Furlani ,  Michael J. Debar ,  Gilbert A. Hawkins

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： A liquid emission device includes a chamber having a nozzle orifice. Separately addressable dual electrodes are positioned on opposite sides of a ground electrode. The three electrodes are aligned with the nozzle orifice. A rigid electrically insulating coupler connects the two addressable electrodes. To eject a drop, an electrostatic charge is applied to the addressable electrode nearest to the nozzle orifice, which pulls that electrode away from the orifice, drawing liquid into the expanding chamber. The other addressable electrode moves in conjunction, storing potential energy in the system. Subsequently the addressable electrode nearest to the nozzle is de-energized and the other addressable electrode is energized, causing the other electrode to be pulled toward the ground electrode in conjunction with the release of the stored elastic potential energy. This action pressurizes the liquid in the chamber behind the nozzle orifice, causing a drop to be ejected from the nozzle orifice.

摘要翻译： 液体排放装置包括具有喷嘴孔的室。 单独可寻址的双电极位于接地电极的相对侧。 三个电极与喷嘴孔对齐。 刚性电绝缘耦合器连接两个可寻址电极。 为了喷射液滴，静电电荷施加到最接近喷嘴孔的可寻址电极，该电极将该电极拉离孔口，将液体引入扩张室。 其他可寻址电极一起移动，将势能存储在系统中。 随后，最接近喷嘴的可寻址电极被断电，另一个可寻址电极通电，使另一个电极与存储的弹性势能的释放一起被拉向接地电极。 这种作用使喷嘴孔后面的腔中的液体加压，导致从喷嘴口喷出的液滴。

公开(公告)号：US08513063B2

公开(公告)日：2013-08-20

申请号：US13533635

申请日：2012-06-26

申请人： Michael J DeBar ,  David J Howard ,  Daniel M. So

发明人： Michael J DeBar ,  David J Howard ,  Daniel M. So

IPC分类号： H01L21/44

CPC分类号： H01L23/3135 ,  H01L21/56 ,  H01L23/3121 ,  H01L23/315 ,  H01L2924/0002 ,  H01L2924/00

摘要： According to an embodiment disclosed herein, a microelectronic device to be encapsulated is built on, or alternatively in, a substrate. The device is then coated with a sacrificial layer. A lid layer is deposited over the sacrificial layer, and then appropriately perforated to optimize the removal of the sacrificial layer. The sacrificial layer is then removed using one of several etching or other processes. The perforations in the lid layer are then sealed using a viscous sealing material, thereby fixing the environment that encapsulates the device. The sealing material is then cured or hardened. An optional moisture barrier may be deposited over the cured sealing layer to provide further protection for the encapsulation if needed.

摘要翻译： 根据本文公开的实施例，要封装的微电子器件建立在衬底上或替代地衬底中。 然后将该装置涂覆有牺牲层。 将盖层沉积在牺牲层上，然后适当穿孔以优化牺牲层的去除。 然后使用几个蚀刻或其它工艺之一去除牺牲层。 然后使用粘性密封材料密封盖层中的穿孔，从而固定封装该装置的环境。 然后将密封材料固化或硬化。 可选的湿气屏障可以沉积在固化的密封层上，以便在需要时为封装提供进一步的保护。

公开(公告)号：US20120270371A1

公开(公告)日：2012-10-25

申请号：US13533635

申请日：2012-06-26

申请人： Michael J. DeBar ,  David J. Howard ,  Daniel M. So

发明人： Michael J. DeBar ,  David J. Howard ,  Daniel M. So

IPC分类号： H01L21/56

CPC分类号： H01L23/3135 ,  H01L21/56 ,  H01L23/3121 ,  H01L23/315 ,  H01L2924/0002 ,  H01L2924/00

摘要： According to an embodiment disclosed herein, a microelectronic device to be encapsulated is built on, or alternatively in, a substrate. The device is then coated with a sacrificial layer. A lid layer is deposited over the sacrificial layer, and then appropriately perforated to optimize the removal of the sacrificial layer. The sacrificial layer is then removed using one of several etching or other processes. The perforations in the lid layer are then sealed using a viscous sealing material, thereby fixing the environment that encapsulates the device. The sealing material is then cured or hardened. An optional moisture barrier may be deposited over the cured sealing layer to provide further protection for the encapsulation if needed.

摘要翻译： 根据本文公开的实施例，要封装的微电子器件建立在衬底上或替代地衬底中。 然后将该装置涂覆有牺牲层。 将盖层沉积在牺牲层上，然后适当穿孔以优化牺牲层的去除。 然后使用几个蚀刻或其它工艺之一去除牺牲层。 然后使用粘性密封材料密封盖层中的穿孔，由此固定封装该装置的环境。 然后将密封材料固化或硬化。 可选的湿气屏障可以沉积在固化的密封层上，以便在需要时为封装提供进一步的保护。

公开(公告)号：US06843121B1

公开(公告)日：2005-01-18

申请号：US10647360

申请日：2003-08-25

申请人： Michael J. DeBar ,  Zhihao Yang

发明人： Michael J. DeBar ,  Zhihao Yang

IPC分类号： B41J2/175 ,  G01L7/20 ,  G01L9/00 ,  G01F5/00 ,  G01L7/18

CPC分类号： B41J2/175 ,  B41J2/17556 ,  G01L7/20 ,  G01L9/0095

摘要： A method of measuring absolute static pressure in a microfluidic device transporting a working fluid that is immiscible in a first selected gas environment, includes providing a first fluid conducting channel having an atmosphere provided by the first selected gas environment in a sealed environment and in communication with the microfluidic device at a first point of communication; providing a first sensing mechanism that is electrically interrogated, disposed adjacent to the first fluid conducting channel; and transporting the working fluid under pressure conducted by the microfluidic device into the first fluid conducting channel such that the volume transported into such first fluid conducting channel varies depending upon the absolute static pressure of the working fluid.

摘要翻译： 传输在第一选定气体环境中不混溶的工作流体的微流体装置中测量绝对静压的方法包括在密封环境中提供具有由第一选定气体环境提供的气氛的第一流体传导通道并与 所述微流体装置在第一通信点处; 提供被电询问的第一感测机构，邻近所述第一流体传导通道设置; 以及在由所述微流体装置传导的压力下将所述工作流体输送到所述第一流体传导通道中，使得输送到所述第一流体传导通道中的体积根据所述工作流体的绝对静压而变化。

公开(公告)号：US06702209B2

公开(公告)日：2004-03-09

申请号：US10138908

申请日：2002-05-03

申请人： Edward P. Furlani ,  Michael J. Debar ,  Christopher N. Delametter ,  Gilbert A. Hawkins ,  Constantine N. Anagnostopoulos

发明人： Edward P. Furlani ,  Michael J. Debar ,  Christopher N. Delametter ,  Gilbert A. Hawkins ,  Constantine N. Anagnostopoulos

IPC分类号： B05B300

CPC分类号： B41J2/14314

摘要： A drop-on-demand liquid emission device, such as for example an ink jet printer, includes a member movable through a path for driving liquid from the device, wherein the speed at which the member moves is reduced over the time period that liquid is being expelled. During that time period, a portion of the liquid flows through a passage away from the nozzle orifice. According to a feature of the present invention, a variable flow restrictor increases the resistance to flow through the passage during the time period that liquid is being expelled; thereby tending to compensate for the reduction of the liquid-expulsion force over the time period. The result is a reduction of undesirable satellite droplets following a main drop.

摘要翻译： 液滴喷射装置例如喷墨打印机包括可移动通过用于从装置驱动液体的路径的构件，其中构件移动的速度在液体为 被驱逐 在该时间段期间，一部分液体流过远离喷嘴孔的通道。 根据本发明的特征，可变流量限制器在液体被排出的时间段内增加了通过通道的流动阻力; 从而有助于补偿在该时间段内液体排出力的减少。 结果是在主下降之后减少不期望的卫星液滴。

公开(公告)号：US06874867B2

公开(公告)日：2005-04-05

申请号：US10325205

申请日：2002-12-18

申请人： Michael J. DeBar ,  Edward P. Furlani ,  Constantine N. Anagnostopoulos ,  Christopher N. Delametter

发明人： Michael J. DeBar ,  Edward P. Furlani ,  Constantine N. Anagnostopoulos ,  Christopher N. Delametter

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/06

CPC分类号： B41J2/14314

摘要： A drop emission device includes a chamber having a nozzle orifice through which a drop of liquid can be emitted. A deformable electrode is associated with the chamber such that movement of the electrode in a first direction increases the chamber's volume and movement of the electrode in a second direction decreases the chamber's volume to emit a drop through the nozzle orifice. A fixed electrode opposes to the deformable electrode to define a second chamber there between such that control of relative voltage differences between the deformable and the fixed electrodes selectively moves the deformable electrode in the first or second directions. The variable volume is vented to a source of dielectric material through an opening in the fixed electrode. The ratio of the cross-sectional area of the opening to the perimeter of the opening is greater than 0.5 μm, and is preferably about 5 μm.

摘要翻译： 液滴发射装置包括具有喷嘴孔的腔室，通过该喷嘴孔可以发射一滴液体。 可变形电极与室相关联，使得电极沿第一方向的运动增加了室的体积，并且电极在第二方向上的移动减小了室的体积，以通过喷嘴孔发出液滴。 固定电极与可变形电极相对以在其间限定第二室，使得可变形和固定电极之间的相对电压差的控制选择性地使可变形电极沿第一或第二方向移动。 可变容积通过固定电极中的开口排出到电介质材料源。 开口的横截面积与开口周长的比例大于0.5μm，优选为约5μm。

公开(公告)号：US06575026B1

公开(公告)日：2003-06-10

申请号：US10184208

申请日：2002-06-28

申请人： Michael J. DeBar ,  Zhihao Yang

发明人： Michael J. DeBar ,  Zhihao Yang

IPC分类号： G01F500

CPC分类号： G01L7/20

摘要： A method of measuring absolute static pressure at one or more positions along the wall of a microfluidic device transporting a working fluid that is immiscible in a first selected gas environment, includes providing a first fluid conducting channel having an atmosphere provided by the selected gas environment under a sealed environment and in communication with the microfluidic device at a first point of communication; providing a visual scale adjacent to the first fluid conducting channel; and transporting the working fluid under pressure conducted by the microfluidic device into the first fluid conducting channel such that the volume transported into such first fluid conducting channel varies depending upon the absolute static pressure of the working fluid at the first point of communication, whereby the absolute static pressure at the first point of communication is visually determined depending on the position of the interface of the working fluid and the first selected gas environment in the first fluid conducting channel when compared with the first visual scale.

摘要翻译： 在沿着微流体装置的壁的一个或多个位置处测量绝对静态压力的方法，该微流体装置输送在第一选定气体环境中不混溶的工作流体，包括提供具有由选定气体环境下提供的气氛的第一流体传导通道 密封环境并且在第一通信点处与微流体装置通信; 提供与所述第一流体传导通道相邻的视觉刻度; 以及将由所述微流体装置传导的压力下的工作流体输送到所述第一流体传导通道中，使得输送到所述第一流体传导通道中的体积根据所述第一连通点处的工作流体的绝对静态压力而变化，由此绝对 根据第一流体传导通道中的工作流体和第一选定气体环境的界面的位置，与第一视觉刻度相比，在第一连通点处的静压被视觉地确定。

公开(公告)号：US06966110B2

公开(公告)日：2005-11-22

申请号：US10254350

申请日：2002-09-25

申请人： Michael J. DeBar ,  Gilbert A. Hawkins ,  James M. Chwalek

发明人： Michael J. DeBar ,  Gilbert A. Hawkins ,  James M. Chwalek

IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/14 ,  B41J2/16 ,  H04R17/00 ,  H05K3/02 ,  H05K3/10

CPC分类号： B41J2/16 ,  B41J2/14314 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  Y10S29/037 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49401

摘要： A method of fabricating a liquid emission device includes a chamber having a nozzle orifice. Separately addressable dual electrodes are positioned on opposite sides of a central electrode. The three electrodes are aligned with the nozzle orifice. A rigid electrically insulating coupler connects the two addressable electrodes. To eject a drop, an electrostatic charge is applied to the addressable electrode nearest to the nozzle orifice, which pulls that electrode away from the orifice, drawing liquid into the expanding chamber. The other addressable electrode moves in conjunction, storing potential energy in the system. Subsequently the addressable electrode nearest to the nozzle is de-energized and the other addressable electrode is energized, causing the other electrode to be pulled toward the central electrode in conjunction with the release of the stored elastic potential energy. This action pressurizes the liquid in the chamber behind the nozzle orifice, causing a drop to be ejected from the nozzle orifice.

摘要翻译： 制造液体发射装置的方法包括具有喷嘴孔的腔室。 单独寻址的双电极位于中心电极的相对侧上。 三个电极与喷嘴孔对齐。 刚性电绝缘耦合器连接两个可寻址电极。 为了喷射液滴，静电电荷施加到最接近喷嘴孔的可寻址电极，该电极将该电极拉离孔口，将液体引入扩张室。 其他可寻址电极一起移动，将势能存储在系统中。 随后，最接近喷嘴的可寻址电极被断电，另一个可寻址电极通电，使另一个电极与存储的弹性势能的释放一起被拉向中心电极。 这种作用使喷嘴孔后面的腔中的液体加压，导致从喷嘴口喷出的液滴。