-
公开(公告)号：US20070068628A1
公开(公告)日：2007-03-29
申请号：US11362868
申请日：2006-02-28
IPC分类号： H01L21/306 , C23C16/00
CPC分类号： H01L21/67769 , H01L21/67017 , H01L21/67389 , H01L21/67775
摘要： A vacuum processing apparatus having an improved wafer processing efficiency and an improved working efficiency is provided. The vacuum processing apparatus includes a vacuum container in which a specimen is processed with plasma generated from a processing gas supplied to the vacuum container; a transfer container through which the specimen processed in the vacuum container is transferred, the transfer container being coupled to the vacuum container under ambient pressure; a blower for generating an ambient gas flow in the transfer container and an outlet disposed on the transfer container; a storage container for storing the specimen processed in the vacuum container, the storage container being disposed in the ambient gas flow in the transfer container; and an exhauster for exhausting a gas in the storage container.
摘要翻译： 提供了一种具有改进的晶片处理效率和提高的工作效率的真空处理设备。 真空处理装置包括：真空容器，其中用从供给到真空容器的处理气体产生的等离子体处理试样; 在真空容器中处理的试样被转移通过的转移容器，转印容器在环境压力下连接到真空容器; 用于在所述转移容器中产生环境气流的鼓风机和设置在所述转移容器上的出口; 储存容器，用于储存处理在真空容器中的试样，该储存容器设置在转移容器中的环境气流中; 以及用于排出储存容器中的气体的排气装置。
-
公开(公告)号：US20070068626A1
公开(公告)日：2007-03-29
申请号：US11512309
申请日：2006-08-30
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： H01L21/67126 , H01J37/32495 , H01J37/3266 , H01J37/32743
摘要： A plasma processing apparatus which contributes to reducing required time for maintenance and thereby to enhancing the efficiency of processing and that of apparatus operation is to be provided. A vacuum processing apparatus comprises a vacuum vessel in which a substrate-shaped sample is arranged in an internally arranged processing chamber in which the pressure is reduced; a transfer chamber to which the vacuum vessel is linked and through whose inside reduced in pressure the sample is transferred; a passage which establishes communication between the transfer chamber and the vacuum vessel in a state in which the transfer chamber and the processing chamber are linked to each other and through whose inside the sample not yet processed or already processed is transferred; and a covering member which is removably coupled to cover the internal wall face of the passage, wherein the sample is processed within the processing chamber with a plasma formed in the processing chamber.
摘要翻译： 提供一种等离子体处理装置，其有助于减少维护所需的时间，从而提高处理效率和装置操作的效率。 真空处理装置包括真空容器，其中基板形样品布置在其中压力降低的内部布置的处理室中; 传送室，真空容器连接到该传送室，并且其内部的压力降低，样品被传送; 在传送室和处理室彼此连接并且样品尚未处理或已经被处理的内部的状态下传送在传送室和真空容器之间建立连通的通道; 以及覆盖部件，其可移除地联接以覆盖通道的内壁面，其中，在处理室内用处理室中形成的等离子体处理样品。
-
公开(公告)号：US20130183121A1
公开(公告)日：2013-07-18
申请号：US13409371
申请日：2012-03-01
IPC分类号： H01L21/677
CPC分类号： H01L21/67745 , H01L21/67184
摘要： In a vacuum processing apparatus having a plurality of vacuum processing chambers at least one of which are coupled to each of a plurality of vacuum transfer chambers which are behind an atmospheric transfer chamber and have vacuum transfer robots in their interior to transfer a wafer, taking out a plurality of wafers in a cassette and transferring successively to the plurality of the vacuum processing chambers, and thereafter returning to the cassette, the wafers are controlled to be transferred to all of the vacuum processing chambers coupled to the backmost vacuum transfer chamber and thereafter a next wafer is transferred to a vacuum processing chamber which becomes possible for the next wafer to be transferred in before they are possible to be transferred out from the vacuum processing chambers coupled to the backmost vacuum transfer chamber and arranged backmost.
摘要翻译： 在具有多个真空处理室的真空处理设备中，其中至少一个真空处理室连接到大气传输室后面的多个真空传送室中的每一个，并且在其内部具有真空传送机器人以转移晶片，取出 在盒中的多个晶片并连续地传送到多个真空处理室，然后返回到盒子，晶片被控制为传送到耦合到最后面的真空传送室的所有真空处理室，之后是 下一个晶片被转移到真空处理室，该真空处理室在下一个晶片可能被转移到可能的状态下，可以从耦合到最后面的真空传输室的真空处理室转出并最后排列。
-
公开(公告)号：US20110137454A1
公开(公告)日：2011-06-09
申请号：US12712861
申请日：2010-02-25
IPC分类号： H01L21/677 , H01L21/68
CPC分类号： H01L21/67766 , H01L21/67778
摘要： A vacuum chamber includes: a vacuum vessel arranged at the backward side, where a wafer of a processing subject is processed inside an internal processing chamber; a transfer chamber arranged at the forward side, where said wafer is transferred at the inside thereof under atmospheric pressure; a cassette stage arranged at the forward of this transfer chamber, where a cassette storing said wafer is mounted; a lock chamber connected with said transfer chamber at the backward of said transfer chamber; a robot arranged inside said transfer chamber, where said wafer is transferred between said cassette and said lock chamber; and an aligning machine for making position of said wafer fit with the predetermined position, wherein the wafer is transferred to said lock chamber, after performing alignment of said wafer on said aligning machine, in the case where displacement amount of position of this wafer is larger than the predetermined value.
摘要翻译： 真空室包括：设置在后方的真空容器，处理对象的晶片在内部处理室内处理; 传送室，其布置在前侧，其中所述晶片在其大气压下在其内部传送; 设置在该传送室前方的盒级，其中安装有存储所述晶片的盒; 在所述传送室的后方与所述传送室连接的锁定室; 布置在所述传送室内部的机器，其中所述晶片在所述盒和所述锁定室之间传送; 以及用于使所述晶片的位置与所述预定位置相配合的对准机，其中在所述晶片位于所述对准机器的位置量较大的情况下，在将所述晶片对准所述对准机之后，将所述晶片转移到所述锁定室 超过预定值。
-
5.发明授权Device and method for controlling the concentration of aqueous solution of alcohol 失效用于控制酒精水溶液浓度的装置和方法
公开(公告)号：US4745953A
公开(公告)日：1988-05-24
申请号：US934790
申请日：1986-11-25
申请人： Michiaki Kobayashi , Daiji Suzuki , Kenji Yamada
发明人： Michiaki Kobayashi , Daiji Suzuki , Kenji Yamada
CPC分类号： G01N33/1826 , B41F33/0054
摘要： The invention discloses a device for measuring the concentration of alcohol contained in the dampening water used in printing. Part of the dampening water pumped up from a dampening water tank (1) and delivered to a water fountain (3) is sampled through a bypass passage and the dampening water is returned to the dampening water tank (1) after the measurement of the concentration of the sampled dampening water. A measuring unit (8) for detecting the concentration of alcohol has a shielding plate (13) disposed adjacent to the dampening water inlet so that the disturbance of the surface of the dampening water introduced into the measuring unit is prevented. The dampening water discharge outlet consists of a pipe whose upper end is in coplanar relationship with a predetermined surface level of the aqueous solution in the measuring unit so that the excessive dampening water overflows into the pipe (10) to return to the dampening water tank. The measuring unit (8) includes a temperature sensor (15), a gas sensor (16) and a pH sensor (50) when required and the gas sensor (16) is disposed within a predetermined closed space.
摘要翻译： 本发明公开了一种用于测量印刷中使用的润版水中所含醇的浓度的装置。 从润版水箱（1）泵出并送到水池（3）的一部分润版水通过旁路通道进行取样，在测量浓度后，润湿水返回润版水箱（1） 的采样润版水。 用于检测醇浓度的测量单元（8）具有邻近润湿水入口设置的屏蔽板（13），从而防止了引入到测量单元中的润版水表面的干扰。 润版水排出口由上部与测量单元中的水溶液的预定表面水平共面关系的管构成，使得过量的润版水溢出到管道（10）中以返回到润版水箱。 当需要时，测量单元（8）包括温度传感器（15），气体传感器（16）和pH传感器（50），并且气体传感器（16）设置在预定的封闭空间内。
-
6.发明授权
公开(公告)号：US4703691A
公开(公告)日：1987-11-03
申请号：US859307
申请日：1986-05-05
CPC分类号： B41F33/00 , B41F31/045 , B41F33/0027
摘要： An ink fountain has at least one position display means for displaying the position of each ductor blade piece to be preset before printing and at least one position indicating means for indicating an actual position of the blade piece. A gap between the distal end of the blade piece and the surface of an ink fountain roller is adjusted in such a manner that the actual position of the blade piece is registered with the position, to be preset, of the blade piece by operating an adjusting member.
-
7.发明授权
公开(公告)号：US4594868A
公开(公告)日：1986-06-17
申请号：US631200
申请日：1984-07-16
CPC分类号： B41F27/005 , B41F13/12 , B41F33/0081 , G03F9/00
摘要： A method for registering in an offset printing press comprises: mounting a printing plate on a shiftable table of a plate bending machine; detecting datum fine lines on said plate, by means of optical sensors; shifting the shiftable table so that said datum fine lines are placed at specific positions; inscribing, by means of a register mark inscribing device, register marks for carrying out automatic registering while, at the same time, bending the lateral edges of the printing plate; thereafter mounting the printing plate on a corresponding plate cylinder of a printing press; and carrying out automatic registering. The above plate bending machine comprises plate bending mechanisms, a shiftable table for holding the printing plate, optical detection sensors disposed above the shiftable table and operating to detect datum lines on the plate and thereby to generate signals for the movement of the table and register mark inscribing devices for automatic registering on a plate cylinder of the printing press.
摘要翻译： 一种用于记录胶版印刷机的方法，包括：将印版安装在平板折弯机的可移动台上; 通过光学传感器检测所述板上的基准细线; 移动可移动台，使得所述基准细线被放置在特定位置; 通过对准标记刻印装置刻印用于进行自动登记的对准标记，同时弯曲印版的侧边缘; 然后将印版安装在印刷机的对应印版滚筒上; 并进行自动注册。 上述板材弯曲机包括板弯曲机构，用于保持印版的可移动台，设置在可移动台上方的光学检测传感器，并操作以检测板上的基准线，从而产生用于移动台和对准标记的信号 用于在印刷机的印版滚筒上自动记录的印刷装置。
-
公开(公告)号：US4582768A
公开(公告)日：1986-04-15
申请号：US716822
申请日：1985-03-27
CPC分类号： G03F9/00 , Y10S101/36
摘要： A method for forming or marking register marks used for the automatic registration between a plurality of printing plates in a printing press. A register mark forming or marking device is mounted on a printing frame of an automatic composer so that a register mark can be formed or marked on a printing plate simultaneously with the printing of a film original over the printing plate. Misalignment between the thus formed or marked register marks and patterns or images can be eliminated.
摘要翻译： 用于形成或标记用于印刷机中的多个印版之间的自动对准的对准标记的方法。 对准标记形成或标记装置安装在自动作曲者的打印框架上，使得可以在印版上形成或标记对准标记，同时在印版上印刷胶片原稿。 可以消除由此形成的或标记的对准标记和图案或图像之间的对准。
-
9.发明授权Method, system, and plate bending machine for registering in an offset printing press 失效方法，系统和板材弯曲机，用于记录胶版印刷机
公开(公告)号：US4489652A
公开(公告)日：1984-12-25
申请号：US434241
申请日：1982-10-14
CPC分类号： B41F27/005 , Y10S101/36
摘要： A method for registering in an offset printing press comprises: mounting a printing plate on a shiftable table of a plate bending machine; detecting datum fine lines on said plate, by means of optical sensors; shifting the shiftable table so that said datum fine lines are placed at specific positions; inscribing, by means of a register mark inscribing device, register marks for carrying out automatic registering while, at the same time, bending the lateral edges of the printing plate; thereafter mounting the printing plate on a corresponding plate cylinder of a printing press; and carrying out automatic registering. The above plate bending machine comprises plate bending mechanisms, a shiftable table for holding the printing plate, optical detection sensors disposed above the shiftable table and operating to detect datum lines on the plate and thereby to generate signals for the movement of the table and register mark inscribing devices for automatic registering on a plate cylinder of the printing press.
摘要翻译： 一种用于记录胶版印刷机的方法，包括：将印版安装在平板折弯机的可移动台上; 通过光学传感器检测所述板上的基准细线; 移动可移动台，使得所述基准细线被放置在特定位置; 通过对准标记刻印装置刻印用于进行自动登记的对准标记，同时弯曲印版的侧边缘; 然后将印版安装在印刷机的对应印版滚筒上; 并进行自动注册。 上述板材弯曲机包括板弯曲机构，用于保持印版的可移动台，设置在可移动台上方的光学检测传感器，并操作以检测板上的基准线，从而产生用于移动台和对准标记的信号 用于在印刷机的印版滚筒上自动记录的印刷装置。
-
公开(公告)号：US4367071A
公开(公告)日：1983-01-04
申请号：US231395
申请日：1981-02-04
CPC分类号： C09D11/033 , B41M5/0356 , D06P5/004 , Y10S428/913 , Y10S428/914 , Y10T428/24843 , Y10T428/24901 , Y10T428/24934 , Y10T428/273 , Y10T428/277
摘要： An ink composition for heat transfer printing comprising at least one of carbinol bases of basic dyes or their derivatives, a strong base, a binder and a solvent for dissolving the binder. This ink composition is excellent in storage stability because it contains a carbinol base of a basic dye or its derivative in isolated form as a coloring agent along with a strong base. By using this ink composition, a transfer sheet having high storage stability can be obtained.
摘要翻译： 一种用于热转印的油墨组合物，其包含碱性染料或其衍生物的甲醇碱中的至少一种，强碱，粘合剂和用于溶解粘合剂的溶剂。 这种油墨组合物由于含有作为着色剂的碱性染料的甲醇基或其衍生物以及强碱而具有优异的储存稳定性。 通过使用该油墨组合物，可以获得具有高储存稳定性的转印片。
-
-
-
-
-
-
-
-
-
搜索结果
20 条记录 (耗时 0.023 秒)