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公开(公告)号：US20140042108A1
公开(公告)日：2014-02-13
申请号：US13978320
申请日：2012-01-03
IPC分类号： B01D9/00
CPC分类号： B01D9/00 , B01D9/0045 , B01D9/005
摘要： The invention is directed to an improvement in operation of wash columns, and more in particular to an apparatus for separating solid particles from a slurry and to a process for separating solid particles from a mother liquor slurry. The apparatus of the invention comprises a wash column (1), which comprises a melting circuit (8,10,11,21), wherein means (22,23) are present to introduce a compound or composition to said wash column between a wash front (6b) formed in said wash column in operation and a product outlet and/or in the melting circuit. The process of the invention comprises separating the liquid from the solid particles by filtration with the aid of at least one filtering element (4), while a packed bed of solid particles coming from the mother liquid slurry forms near said filtering element (4), and wherein a wash front (6b) forms which is obtained by bringing a washing liquid in counter current to the solid particles in the bed, the bed being subjected to a movement in the direction of said wash front (6b), while a product stream comprising the material of said solid particles is obtained by continuously discharging a portion of said washing liquid, wherein a portion of said bed is continuously disintegrated, characterized in that a compound or composition is introduced into said wash column (1) between the wash front (6b) and a product outlet and/or in a melting circuit (8,10,11,21), and wherein the introduction of the said compound or composition decreases the equilibrium temperature of the contents of the melting circuit (8,10,11,21), further characterized by the feature that the introduced compound or composition is completely miscible with the product suspension and/or molten product being present in the said melting circuit (8,10,11,21).
摘要翻译： 本发明涉及洗涤塔的操作的改进，更具体地涉及用于从浆料中分离固体颗粒的装置以及从母液浆液中分离固体颗粒的方法。 本发明的装置包括洗涤塔（1），其包括熔化回路（8,10,11,21），其中存在用于将化合物或组合物引入所述洗涤塔的洗涤剂（22,23） 在操作中在所述洗涤塔中形成的前部（6b）和产品出口和/或在熔解回路中。 本发明的方法包括借助于至少一个过滤元件（4）过滤分离液体与固体颗粒，同时来自母液浆料的固体颗粒的填充床形成在所述过滤元件（4）附近， 并且其中形成洗涤前部（6b），其通过使洗涤液与所述床中的固体颗粒相反地使洗涤液沿所述洗涤前部（6b）的方向移动，同时产物流 包括所述固体颗粒的材料是通过连续排出所述洗涤液的一部分获得的，其中所述床的一部分被连续分解，其特征在于将化合物或组合物引入所述洗涤塔（1） 6b）和产品出口和/或在熔解回路（8,10,11,21）中，并且其中所述化合物或组合物的引入降低了熔融物的内容物的平衡温度 g电路（8,10,11,21），其特征还在于引入的化合物或组合物与存在于所述熔解回路中的产物悬浮液和/或熔融产物完全混溶的特征（8,10,11,21 ）。
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公开(公告)号：US20120118835A1
公开(公告)日：2012-05-17
申请号：US13318894
申请日：2010-05-06
IPC分类号： B01D24/00
CPC分类号： B01D9/0013 , B01D9/0036 , B01D9/004 , B01D9/0045
摘要： A wash column for processing a suspension of solid particles in a liquid comprising a bed forming chamber in which a packed bed of solid particles can be formed, filtrate extraction means for extracting liquid from the suspension as to form the packed bed of solid particles in the bed forming chamber, and a suspension supply line for supplying the suspension directly to an end of the bed forming chamber, wherein the suspension supply line ends in the bed forming chamber.
摘要翻译： 一种用于处理液体中固体颗粒悬浮液的洗涤塔，包括可形成固体颗粒填充床的床形成室，滤液萃取装置，用于从悬浮液中提取液体以形成固体颗粒的填充床 床形成室和用于将悬浮液直接供应到床形成室的端部的悬浮液供应管线，其中悬浮液供应管线在床形成室中终止。
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3.发明申请OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HEATED OPTICAL ELEMENT, OPERATING METHODS, AND METHODS FOR CLEANING AS WELL AS FOR PROVIDING AN OPTICAL ELEMENT 有权具有至少一个加热光学元件的光学装置和EUV光刻装置，用于清洁以提供光学元件的操作方法和方法公开(公告)号：US20080143981A1
公开(公告)日：2008-06-19
申请号：US11854621
申请日：2007-09-13
申请人： Dirk Heinrich EHM , Annemieke van de Runstraat , Bastiaan Theodoor Wolschrijn , Arnoldus Jan Storm , Thomas Stein , Marco G. H. Meijerink , A. G. Ton M. Bastein , Esther L. J. van Soest-Vercammen , Norbertus Benedictus Koster , Frits G. H. M. Gubbels , Peter J. Oprel , Michiel Nienoord , Michel Riepen , Johannes Hubertus Josephina Moors
发明人： Dirk Heinrich EHM , Annemieke van de Runstraat , Bastiaan Theodoor Wolschrijn , Arnoldus Jan Storm , Thomas Stein , Marco G. H. Meijerink , A. G. Ton M. Bastein , Esther L. J. van Soest-Vercammen , Norbertus Benedictus Koster , Frits G. H. M. Gubbels , Peter J. Oprel , Michiel Nienoord , Michel Riepen , Johannes Hubertus Josephina Moors
CPC分类号： G03F7/70958 , B82Y10/00 , G03F7/70316 , G03F7/70891 , G03F7/70925 , G21K1/062 , G21K2201/061 , G21K2201/067
摘要： An optical arrangement, in particular a projection system, illumination system or beam shaping system for EUV lithography, including at least one optical element that is arranged in a beam path of the optical arrangement and that reflects radiation in the soft X-ray- or EUV wavelength range, wherein at least during operation of the optical arrangement at least one of, preferably each of, the reflective optical elements in the beam path, at least at the optical surface, has an operating temperature of approximately 30° C. or more, preferably of approximately 100° C. or more, particularly preferably of approximately 150° C. or more, and even more preferably of approximately 250° C. or more, and wherein the optical design of the at least one reflective optical element is selected such that its optical characteristics are optimised for operation at the operating temperature. Also presented is a method for providing a reflective optical element with such an optical design.
摘要翻译： 一种用于EUV光刻的光学装置，特别是投影系统，照明系统或光束整形系统，包括布置在光学装置的光束路径中并且反射软X射线或EUV中的辐射的至少一个光学元件 波长范围，其中至少在所述光学装置的操作期间，所述光束路径中至少在所述光学表面处的所述反射光学元件中的至少一个优选地各自具有大约30℃或更高的工作温度， 优选为约100℃以上，特别优选为约150℃以上，甚至更优选为约250℃以上，并且其中选择所述至少一个反射型光学元件的光学设计 其光学特性被优化以在操作温度下操作。 还提出了一种用于提供具有这种光学设计的反射光学元件的方法。
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4.发明申请Rotating knife, washing column, and method for disintegrating a crystal bed in a washing column 有权旋转刀，洗涤柱，以及在洗涤塔中分解结晶床的方法公开(公告)号：US20110146030A1
公开(公告)日：2011-06-23
申请号：US12996318
申请日：2009-06-05
CPC分类号： B01D9/004
摘要： A rotating knife is disclosed for disintegrating a crystal bed formed in a washing column for processing suspension of solid particles in a liquid. The rotating knife is provided with a spoke support. The spoke support comprises at least two spokes. The relative angle of the spokes is between approximately 20° and approximately 80°.
摘要翻译： 公开了一种旋转刀，用于分解洗涤塔中形成的晶体床，用于处理液体中固体颗粒的悬浮液。 旋转刀具设有辐条支架。 辐条支架包括至少两个辐条。 轮辐的相对角度在大约20°和大约80°之间。
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公开(公告)号：US07425273B2
公开(公告)日：2008-09-16
申请号：US10503098
申请日：2003-01-30
CPC分类号： B01D9/0013 , B01D9/004 , C22B9/023 , Y02P10/234
摘要： The invention relates to a method and apparatus for processing a suspension. According to the invention, a suspension is led into a washing column in which at least one filter element is present, so that near the filtering element, a packed bed of particles forms. The bed is disintegrated under the influence of the impulse of a washing liquid, while particles from the bed are incorporated in the washing liquid.
摘要翻译： 本发明涉及一种用于处理悬架的方法和装置。 根据本发明，将悬浮液引入其中存在至少一个过滤元件的洗涤塔，使得在过滤元件附近形成填充的颗粒层。 床在洗涤液的冲击作用下分解，同时将来自床的颗粒加入清洗液中。
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公开(公告)号：US10406452B2
公开(公告)日：2019-09-10
申请号：US13978320
申请日：2012-01-03
IPC分类号： B01D9/00
摘要： The invention is directed to an improvement in operation of wash columns, and more in particular to an apparatus for separating solid particles from a slurry and to a process for separating solid particles from a mother liquor slurry. The apparatus of the invention comprises a wash column (1), which comprises a melting circuit (8,10,11,21), wherein means (22,23) are present to introduce a compound or composition to said wash column between a wash front (6b) formed in said wash column in operation and a product outlet and/or in the melting circuit. The process of the invention comprises separating the liquid from the solid particles by filtration with the aid of at least one filtering element (4), while a packed bed of solid particles coming from the mother liquid slurry forms near said filtering element (4), and wherein a wash front (6b) forms which is obtained by bringing a washing liquid in counter current to the solid particles in the bed, the bed being subjected to a movement in the direction of said wash front (6b), while a product stream comprising the material of said solid particles is obtained by continuously discharging a portion of said washing liquid, wherein a portion of said bed is continuously disintegrated, characterized in that a compound or composition is introduced into said wash column (1) between the wash front (6b) and a product outlet and/or in a melting circuit (8,10,11,21), and wherein the introduction of the said compound or composition decreases the equilibrium temperature of the contents of the melting circuit (8,10,11,21), further characterized by the feature that the introduced compound or composition is completely miscible with the product suspension and/or molten product being present in the said melting circuit (8,10,11,21).
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7.发明授权Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element 有权具有至少一个加热光学元件的光学布置和EUV光刻设备，操作方法和清洁方法以及用于提供光学元件公开(公告)号：US07959310B2
公开(公告)日：2011-06-14
申请号：US11854621
申请日：2007-09-13
申请人： Dirk Heinrich Ehm , Annemieke Van De Runstraat , Bastiaan Theodoor Wolschrijn , Arnoldus Jan Storm , Thomas Stein , Marco G. H. Meijerink , A. G. Ton M. Bastein , Esther L. J. Van Soest-Vercammen , Norbertus Benedictus Koster , Frits G. H. M. Gubbels , Peter J. Oprel , Michiel Nienoord , Michel Riepen , Johannes Hubertus Josephina Moors
发明人： Dirk Heinrich Ehm , Annemieke Van De Runstraat , Bastiaan Theodoor Wolschrijn , Arnoldus Jan Storm , Thomas Stein , Marco G. H. Meijerink , A. G. Ton M. Bastein , Esther L. J. Van Soest-Vercammen , Norbertus Benedictus Koster , Frits G. H. M. Gubbels , Peter J. Oprel , Michiel Nienoord , Michel Riepen , Johannes Hubertus Josephina Moors
CPC分类号： G03F7/70958 , B82Y10/00 , G03F7/70316 , G03F7/70891 , G03F7/70925 , G21K1/062 , G21K2201/061 , G21K2201/067
摘要： An optical arrangement, in particular a projection system, illumination system or beam shaping system for EUV lithography, including at least one optical element that is arranged in a beam path of the optical arrangement and that reflects radiation in the soft X-ray- or EUV wavelength range, wherein at least during operation of the optical arrangement at least one of, preferably each of, the reflective optical elements in the beam path, at least at the optical surface, has an operating temperature of approximately 30° C. or more, preferably of approximately 100° C. or more, particularly preferably of approximately 150° C. or more, and even more preferably of approximately 250° C. or more, and wherein the optical design of the at least one reflective optical element is selected such that its optical characteristics are optimised for operation at the operating temperature. Also presented is a method for providing a reflective optical element with such an optical design.
摘要翻译： 一种用于EUV光刻的光学装置，特别是投影系统，照明系统或光束整形系统，包括布置在光学装置的光束路径中并且反射软X射线或EUV中的辐射的至少一个光学元件 波长范围，其中至少在所述光学装置的操作期间，所述光束路径中至少在所述光学表面处的所述反射光学元件中的至少一个优选地各自具有大约30℃或更高的工作温度， 优选为约100℃以上，特别优选为约150℃以上，甚至更优选为约250℃以上，并且其中选择所述至少一个反射型光学元件的光学设计 其光学特性被优化以在操作温度下操作。 还提出了一种用于提供具有这种光学设计的反射光学元件的方法。
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8.发明授权Rotating knife, washing column, and method for disintegrating a crystal bed in a washing column 有权旋转刀，洗涤柱，以及在洗涤塔中分解结晶床的方法公开(公告)号：US08641786B2
公开(公告)日：2014-02-04
申请号：US12996318
申请日：2009-06-05
IPC分类号： B01D9/00
CPC分类号： B01D9/004
摘要： A rotating knife is disclosed for disintegrating a crystal bed formed in a washing column for processing suspension of solid particles in a liquid. The rotating knife is provided with a spoke support. The spoke support comprises at least two spokes. The relative angle of the spokes is between approximately 20° and approximately 80°.
摘要翻译： 公开了一种旋转刀，用于分解洗涤塔中形成的晶体床，用于处理液体中固体颗粒的悬浮液。 旋转刀具设有辐条支架。 辐条支架包括至少两个辐条。 轮辐的相对角度在大约20°和大约80°之间。
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公开(公告)号：US20130287666A1
公开(公告)日：2013-10-31
申请号：US13976282
申请日：2012-01-03
IPC分类号： C01B25/234
CPC分类号： C01B25/234 , B01D9/0045
摘要： Process for purifying a stream comprising phosphoric acid and a first amount of impurities, comprising: forming a slurry of phosphoric acid crystals in a water mother liquor; separating the phosphoric acid crystals from the mother liquor by filtration in a wash column comprising a filtering element, while a packed bed of crystals coming from the slurry forms near such filtering element; washing the separated phosphoric acid crystals in the wash column by bringing a washing liquid in countercurrent to the crystals in the bed up to a wash front, where the washing liquid recrystallizes, the bed being subjected to a movement in the direction of such wash front; forming a purified stream comprising phosphoric acid and a reduced amount of impurities by melting at least part of the washed crystals; and extracting the purified stream from the wash column through a product outlet of the wash column; wherein water is introduced into the wash column, between the wash front and the product outlet and/or in a melting circuit producing at least part of the washing liquid, and wherein the introduction of the said water decreases the equilibrium temperature of the contents of the melting circuit.
摘要翻译： 一种净化含有磷酸和第一量杂质的物流的方法，包括：在水母液中形成磷酸晶体的浆料; 在包含过滤元件的洗涤塔中通过过滤从母液中分离磷酸晶体，而来自浆料的晶体填充床形成在该过滤元件附近; 通过使洗涤液与床中的晶体逆流洗涤前洗涤液洗涤液中的分离的磷酸晶体，洗涤液重结晶，床沿这种洗涤前方向移动; 通过熔化至少部分洗涤的晶体形成包含磷酸和减少量的杂质的纯化物流; 并通过洗涤塔的产物出口从洗涤塔提取纯化物流; 其中将水引入洗涤塔中，洗涤前部和产品出口之间和/或在产生至少部分洗涤液的熔解回路中，并且其中所述水的引入降低了所述洗涤液的内容物的平衡温度 熔化电路。
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公开(公告)号：US20050115363A1
公开(公告)日：2005-06-02
申请号：US10503098
申请日：2003-01-30
CPC分类号： B01D9/0013 , B01D9/004 , C22B9/023 , Y02P10/234
摘要： The invention relates to a method and apparatus for processing a suspension. According to the invention, a suspension is led into a washing column in which at least one filter element is present, so that near the filtering element, a packed bed of particles forms. The bed is disintegrated under the influence of the impulse of a washing liquid, while particles from the bed are incorporated in the washing liquid.
摘要翻译： 本发明涉及一种用于处理悬架的方法和装置。 根据本发明，将悬浮液引入其中存在至少一个过滤元件的洗涤塔，使得在过滤元件附近形成填充的颗粒层。 床在洗涤液的冲击作用下分解，同时将来自床的颗粒加入清洗液中。
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