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    FULL-ENCLOSURE, CONTROLLED-FLOW MINI-ENVIRONMENT FOR THIN FILM CHAMBERS
    1.
    发明申请
    FULL-ENCLOSURE, CONTROLLED-FLOW MINI-ENVIRONMENT FOR THIN FILM CHAMBERS 审中-公开
    全封闭，薄膜冲击阀的控制流动微环境

    公开(公告)号：US20110303148A1

    公开(公告)日：2011-12-15

    申请号：US13157077

    申请日：2011-06-09

    申请人： Jun XIE ,  Kevin P. Fairbairn ,  Charles Liu ,  Patrick Leahey ,  Robert L. Ruck ,  Terry Bluck

    发明人： Jun XIE ,  Kevin P. Fairbairn ,  Charles Liu ,  Patrick Leahey ,  Robert L. Ruck ,  Terry Bluck

    IPC分类号： C23C16/50

    CPC分类号： C23C16/4412 ,  C23C16/4409 ,  H01J37/32513 ,  H01J37/32798 ,  H01J37/32834 ,  H01J37/32871

    摘要： An enclosure for generating a secondary environment within a processing chamber for coating a substrate. An enclosure wall forms a secondary environment encompassing the coating source, plasma, and the substrate, and separating them from interior of the processing chamber. The enclosure wall includes a plurality of pumping channels for diverting gaseous flow away from the substrate. The channels have an intake of larger diameter from the exhaust opening and are oriented at an angle with the intake opening pointing away from the deposition source. A movable seal enables transport of the substrate in open position and processing the substrate in closed position. The seal may be formed as a labyrinth seal to avoid particle generation from a standard contact seal.

    摘要翻译： 一种用于在用于涂覆基底的处理室内产生二次环境的外壳。 外壳壁形成包围涂料源，等离子体和基材的二次环境，并将它们从处理室的内部分离。 封闭壁包括多个泵送通道，用于将气流从衬底转向。 通道具有来自排气口的较大直径的入口并且与进气开口指向远离沉积源的角度定向。 可移动密封件使得能够将基板传送到打开位置并且将基板处于关闭位置。 密封件可以形成为迷宫式密封件，以避免从标准接触密封件产生颗粒。

    Bonded multi-layer RF window
    3.
    发明申请
    Bonded multi-layer RF window 审中-公开
    保税多层射频窗口

    公开(公告)号：US20070079936A1

    公开(公告)日：2007-04-12

    申请号：US11445559

    申请日：2006-06-02

    申请人： Maocheng Li ,  John Holland ,  Patrick Leahey ,  Xueyu Qian ,  Michael Barnes ,  Jon Clinton ,  You Wang ,  Nianci Han

    发明人： Maocheng Li ,  John Holland ,  Patrick Leahey ,  Xueyu Qian ,  Michael Barnes ,  Jon Clinton ,  You Wang ,  Nianci Han

    IPC分类号： B31B1/60 ,  C23F1/00 ,  C23C16/00

    CPC分类号： H01P1/08 ,  B32B2315/02 ,  C04B35/63452 ,  C04B37/003 ,  C04B37/005 ,  C04B37/008 ,  C04B2237/10 ,  C04B2237/34 ,  C04B2237/341 ,  C04B2237/343 ,  C04B2237/708 ,  H01J37/32082 ,  Y10T156/10

    摘要： A bonded multi-layer RF window may include an external layer of dielectric material having desired thermal properties, an internal layer of dielectric material exposed to plasma inside a reaction chamber, and an intermediate layer of bonding material between the external layer and the internal layer. Heat produced by the chemical reaction inside the chamber and by the transmission of RF energy through the window may be conducted from the internal layer to the external layer, which may be cooled during a semiconductor wafer manufacturing process. A bonded multi-layer RF window may include cooling conduits for circulating coolant to facilitate cooling of the internal layer; additionally or alternatively, gas distribution conduits and gas injection apertures may be included for delivering one or more process gases into a reaction chamber. A system including a plasma reaction chamber may employ the inventive bonded multi-layer RF window.

    摘要翻译： 键合的多层RF窗可以包括具有期望的热性质的外部介电材料层，暴露于反应室内的等离子体的介电材料的内部层，以及外层和内层之间的接合材料的中间层。 通过室内的化学反应和通过窗口的RF能量传递产生的热量可以从内层传导到外层，其可在半导体晶片制造过程中被冷却。 粘合的多层RF窗可以包括用于循环冷却剂以便于冷却内层的冷却管道; 另外或替代地，可以包括气体分配管道和气体注入孔，用于将一个或多个处理气体输送到反应室中。 包括等离子体反应室的系统可以采用本发明的结合的多层RF窗口。