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公开(公告)号：US20070012576A1
公开(公告)日：2007-01-18
申请号：US11180468
申请日：2005-07-13
申请人： Robert A. Binstead , Chunyi Wu , Robert D. Mikkola
发明人： Robert A. Binstead , Chunyi Wu , Robert D. Mikkola
CPC分类号： C25D3/38 , C25D5/10 , C25D5/18 , H05K3/423 , H05K2203/1476
摘要： Methods of depositing layers of copper that selectively incorporate certain impurities are provided. Such copper layers reduce stress-induced void formation in wide copper lines under vias.
摘要翻译： 提供了选择性地掺入某些杂质的铜沉积方法。 这样的铜层在通孔下的宽铜线路中减少了应力诱导的空隙形成。
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公开(公告)号：US06645364B2
公开(公告)日：2003-11-11
申请号：US10046507
申请日：2001-10-19
IPC分类号： C25D2112
CPC分类号： C25D21/14 , C25D21/12 , Y10T436/24
摘要： Disclosed is a method of analyzing components in an electroplating bath. Also disclosed is a method of controlling electroplating baths by monitoring the components of the plating bath in real-time.
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公开(公告)号：US06827839B2
公开(公告)日：2004-12-07
申请号：US10002039
申请日：2001-11-02
申请人： Wade Sonnenberg , Mark J. Kapeckas , David L. Jacques , Raymond Cruz , Leon R. Barstad , Elie H. Najjar , Eugene N. Step , Robert A. Binstead
发明人： Wade Sonnenberg , Mark J. Kapeckas , David L. Jacques , Raymond Cruz , Leon R. Barstad , Elie H. Najjar , Eugene N. Step , Robert A. Binstead
IPC分类号： G01N2742
摘要： Disclosed are methods for determining the quantity of leveler in an electroplating bath in the presence of other organic additives, such as accelerators, brighteners and suppressors. Such methods are fast, work over a broad concentration range of components and can be performed in real-time.
摘要翻译： 公开了用于在存在其它有机添加剂如加速剂，增白剂和抑制剂的情况下确定电镀浴中的矫光机的量的方法。 这样的方法是快速的，在广泛的组分范围内工作，并且可以实时地执行。
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公开(公告)号：US06610192B1
公开(公告)日：2003-08-26
申请号：US10002281
申请日：2001-11-02
IPC分类号： C25D338
摘要： Disclosed are compositions and methods for providing a planarized metal layer on a substrate having small apertures. The compositions and methods of the present invention provide complete fill of small apertures with reduced void formation.
摘要翻译： 公开了用于在具有小孔的基板上提供平坦化金属层的组合物和方法。 本发明的组合物和方法提供具有减小的空隙形成的小孔的完全填充。
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5.发明授权Electrode, electrochemical cell, and method for analysis of electroplating baths 失效电极，电化学电池和电镀浴分析方法公开(公告)号：US07144488B2
公开(公告)日：2006-12-05
申请号：US10455558
申请日：2003-06-05
IPC分类号： G01N27/26 , G01N27/30 , G01N27/403
摘要： A counter electrode for use in an electrochemical cell suitable for analysis of an electroplating composition, the counter electrode comprising a conductor; a sheath disposed about the conductor; an electrolyte disposed within the sheath; and an optionally porous element on the sheath, the porous element providing signal communication between the electrolyte and an analyte.
摘要翻译： 一种用于电化学电池的对电极，适用于电镀组合物的分析，所述对电极包括导体; 围绕导体设置的护套; 设置在护套内的电解质; 和护套上的可选多孔的元件，多孔元件提供电解质和分析物之间的信号连通。
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