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    Barrel structure for semiconductor epitaxial reactor
    2.
    发明授权
    Barrel structure for semiconductor epitaxial reactor 失效
    半导体外延反应堆的桶结构

    公开(公告)号：US4823736A

    公开(公告)日：1989-04-25

    申请号：US801978

    申请日：1985-11-26

    申请人： Robert C. Post ,  Kevin N. Bordelon ,  Burl M. Moon

    发明人： Robert C. Post ,  Kevin N. Bordelon ,  Burl M. Moon

    IPC分类号： C30B25/12 ,  C23C16/00

    CPC分类号： C30B25/12

    摘要： A multipiece susceptor assembly that includes a generally flat polyhedron shaped top and bottom defining a plurality of facets on which panels are secured for supporting wafers to be processed. Various embodiments are disclosed including a top plate that receives a slide. The polyhedron shape portion further includes a multifaced side which includes an open side face that receives a single face mounted on the slide. A bottom plate is provided that fits within the bottom frame. The single side face structure to mount on the slide and the bottom frame prevents displacement of the slide and holds the slide against the frame during rotation of the susceptor. In another embodiment each individual panel is secured to the top plate by a hanger on the panel inserted in a cavity on the top plate while the panel is secured to the bottom plate in a locking relation by a notch in the panel interfitting with a triangular tab extending outward from the bottom plate. A back draft on the tab secures the panel against outward movement. The individual panels are likewise joined together by a tongue and groove interfitting such that when assembled the panels collectively form on enclosure that protects the interior against entry of gases and light from the surrounding process environment.

    摘要翻译： 一种多体基座组件，其包括大致平坦的多面体形状的顶部和底部，其限定多个小平面，面板固定在多个小面上，用于支撑要处理的晶片。 公开了包括接收滑块的顶板的各种实施例。 多面体形状部分还包括多面侧，其包括容纳安装在载玻片上的单面的开放侧面。 设置有底板，该底板装配在底架内。 安装在滑块和底架上的单个侧面结构可防止滑块的移动，并且在基座旋转期间将滑块保持在框架上。 在另一个实施例中，每个单独的面板通过插入顶板中的空腔中的面板上的悬挂器固定到顶板，同时面板通过与三角形接片相互配合的面板中的凹口以锁定关系固定到底板 从底板向外延伸。 标签上的后退草稿可确保面板不会向外移动。 单个面板同样通过舌和槽相互连接在一起，使得当组装时，面板共同形成在外壳上，保护内部免受来自周围工艺环境的气体和光的侵入。