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    CHARGED PARTICLE BEAM APPARATUS
    2.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权
    充电颗粒光束装置

    公开(公告)号：US20140131590A1

    公开(公告)日：2014-05-15

    申请号：US14232279

    申请日：2012-05-28

    申请人： Kunji Shigeto ,  Mitsugu Sato ,  Noriko Iizumi ,  Hiroyuki Noda ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi ,  Shinichi Tomita ,  Ryuichiro Tamochi

    发明人： Kunji Shigeto ,  Mitsugu Sato ,  Noriko Iizumi ,  Hiroyuki Noda ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi ,  Shinichi Tomita ,  Ryuichiro Tamochi

    IPC分类号： H01J37/153 ,  H01J37/10

    CPC分类号： H01J37/153 ,  H01J37/10 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/21

    摘要： In recent years, a range of users for a charged particle beam apparatus such as a scanning electron microscope has been broadened. All users want to learn a manual adjustment technology, but it is very difficult to adjust all parameters for observation to have an appropriate value. Therefore, a beginner is unlikely to sufficiently show a performance of an apparatus. This disclosure aims to provide the charged particle beam apparatus including a parameter adjustment practice function for allowing any user to easily learn the manual adjustment technology.In order to solve the above-described problem, there is provided means for practicing a focus adjustment and a stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.

    摘要翻译： 近年来，扫描型电子显微镜等带电粒子束装置的使用范围已经扩大。 所有用户想要学习手动调整技术，但是很难调整所有观察参数以获得适当的值。 因此，初学者不太可能充分显示设备的性能。 本公开旨在提供包括用于允许任何用户容易地学习手动调整技术的参数调整实践功能的带电粒子束装置。 为了解决上述问题，提供了用于实施焦点调整和柱头调节的装置。 根据使用者的操作设定物镜，X形扫描器和Y型标枪器的聚焦结构的控制条件。 根据一组焦点调整，设置了X字样调整和Y字符调整，从存储装置读出与控制条件相对应的实用目的图像，并将其显示在屏幕上。

    Scanning electron microscope
    3.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：US06657193B2

    公开(公告)日：2003-12-02

    申请号：US10274029

    申请日：2002-10-21

    申请人： Yukari Dan ,  Ryuichiro Tamochi ,  Mitsugu Sato

    发明人： Yukari Dan ,  Ryuichiro Tamochi ,  Mitsugu Sato

    IPC分类号： H01J37252

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/2605

    摘要： A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption current. A scanning electron microscope irradiates an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect generated ions and display a sample image. An ion detecting electrode is provided exclusively for detecting ions. The ion detecting electrode is arranged nearby a path for accelerating ions by a bias electrode.

    摘要翻译： 提供一种扫描电子显微镜，其能够有效地检测由偏置电场引起的一次电子激发离子，反射电子激发离子或二次电子激发离子等离子，从而获得吸收电流。 扫描电子显微镜在将样品室压力保持在1Pa以上的同时将电子束照射到样品，以检测产生的离子并显示样品图像。 离子检测电极专门用于检测离子。 离子检测电极设置在用于通过偏置电极加速离子的路径附近。