公开(公告)号：US07602199B2

公开(公告)日：2009-10-13

申请号：US11746515

申请日：2007-05-09

申请人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

发明人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

IPC分类号： G01R31/02 ,  G01R31/00 ,  G01R31/26 ,  G01R31/28 ,  G02F1/133

CPC分类号： G01R31/2808 ,  G09G3/006

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

公开(公告)号：US07786742B2

公开(公告)日：2010-08-31

申请号：US11746530

申请日：2007-05-09

申请人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

发明人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

IPC分类号： G01R31/02

CPC分类号： G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案而不从测试台移除探测器组件。

公开(公告)号：US07973546B2

公开(公告)日：2011-07-05

申请号：US12826635

申请日：2010-06-29

申请人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

发明人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC分类号： G01R31/302 ,  G01R31/305

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the method includes transferring a substrate on an end effector relative to a testing platform having a plurality of testing columns coupled thereto, the substrate having a plurality of electronic devices located thereon, and moving the substrate in a single directional axis relative to an optical axis of each of the plurality of testing columns, the single directional axis being substantially orthogonal to the optical axis to define a test area on the substrate, wherein the test area is configured to cover an entire length or an entire width of the substrate such that the testing columns are capable of testing the entire substrate as the substrate is moved through the test area.

摘要翻译： 描述了用于测试形成在大面积基板上的多个电子设备的方法。 在一个实施例中，所述方法包括相对于具有耦合到其上的多个测试柱的测试平台在端部执行器上传送衬底，所述衬底具有位于其上的多个电子器件，并且相对于 所述多个测试列中的每一个的光轴，所述单方向轴基本上垂直于所述光轴，以在所述衬底上限定测试区域，其中所述测试区域被配置为覆盖所述衬底的整个长度或整个宽度 使得当衬底移动通过测试区域时，测试柱能够测试整个衬底。

公开(公告)号：US20100327162A1

公开(公告)日：2010-12-30

申请号：US12826635

申请日：2010-06-29

申请人： FAYEZ E. ABBOUD ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

发明人： FAYEZ E. ABBOUD ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC分类号： G01N23/00

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

公开(公告)号：US07746088B2

公开(公告)日：2010-06-29

申请号：US12422164

申请日：2009-04-10

申请人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

发明人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC分类号： G01R31/302

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

公开(公告)号：US20090195262A1

公开(公告)日：2009-08-06

申请号：US12422164

申请日：2009-04-10

申请人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

发明人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC分类号： G01R31/305

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

公开(公告)号：US07535238B2

公开(公告)日：2009-05-19

申请号：US11375625

申请日：2006-03-14

申请人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

发明人： Fayez E. Abboud ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC分类号： G01R31/302

CPC分类号： H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

公开(公告)号：US20080251019A1

公开(公告)日：2008-10-16

申请号：US11871510

申请日：2007-10-12

申请人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

发明人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

IPC分类号： B05C11/00 ,  H01L21/02

CPC分类号： H01L21/6719 ,  H01L21/67201 ,  H01L21/67236 ,  H01L21/67748

摘要： The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

摘要翻译： 本发明包括用于将衬底转入和移出被配置为容纳多个衬底的室的系统和方法。 在一个实施例中，系统包括腔室壳体，其包括第一衬底支撑托盘和可沿着垂直轴线独立移动的第二衬底支撑托盘以及可移入和移出腔室壳体的衬底输送器。 第一基板支撑托盘和第二基板支撑托盘可移动到第二基板支撑托盘的一部分被容纳在第一基板支撑托盘中的位置。

公开(公告)号：US20070296437A1

公开(公告)日：2007-12-27

申请号：US11746515

申请日：2007-05-09

申请人： Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

发明人： Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

IPC分类号： G01R31/02

CPC分类号： G01R31/2808 ,  G09G3/006

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

公开(公告)号：US20070296426A1

公开(公告)日：2007-12-27

申请号：US11746530

申请日：2007-05-09

申请人： SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

发明人： SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

IPC分类号： G01R31/02

CPC分类号： G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。