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    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES
    1.
    发明申请
    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES 审中-公开
    将基板输入和输出到减少容积的多个基板的系统和方法

    公开(公告)号：US20080251019A1

    公开(公告)日：2008-10-16

    申请号：US11871510

    申请日：2007-10-12

    申请人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

    发明人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

    IPC分类号： B05C11/00 ,  H01L21/02

    CPC分类号： H01L21/6719 ,  H01L21/67201 ,  H01L21/67236 ,  H01L21/67748

    摘要： The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

    摘要翻译： 本发明包括用于将衬底转入和移出被配置为容纳多个衬底的室的系统和方法。 在一个实施例中，系统包括腔室壳体，其包括第一衬底支撑托盘和可沿着垂直轴线独立移动的第二衬底支撑托盘以及可移入和移出腔室壳体的衬底输送器。 第一基板支撑托盘和第二基板支撑托盘可移动到第二基板支撑托盘的一部分被容纳在第一基板支撑托盘中的位置。

    Mini-prober for TFT-LCD testing
    4.
    发明授权
    Mini-prober for TFT-LCD testing 有权
    微型探针用于TFT-LCD测试

    公开(公告)号：US07602199B2

    公开(公告)日：2009-10-13

    申请号：US11746515

    申请日：2007-05-09

    申请人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

    发明人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

    IPC分类号： G01R31/02 ,  G01R31/00 ,  G01R31/26 ,  G01R31/28 ,  G02F1/133

    CPC分类号： G01R31/2808 ,  G09G3/006

    摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

    摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

    Prober for electronic device testing on large area substrates
    5.
    发明授权
    Prober for electronic device testing on large area substrates 有权
    用于在大面积基板上进行电子设备测试的探针

    公开(公告)号：US07786742B2

    公开(公告)日：2010-08-31

    申请号：US11746530

    申请日：2007-05-09

    申请人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

    发明人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

    摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

    摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案而不从测试台移除探测器组件。

    ELECTROSTATIC DISCHARGE PREVENTION FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM
    9.
    发明申请
    ELECTROSTATIC DISCHARGE PREVENTION FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM 审中-公开
    大面积基层加工系统的静电放电防护

    公开(公告)号：US20120113559A1

    公开(公告)日：2012-05-10

    申请号：US13288743

    申请日：2011-11-03

    申请人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

    发明人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

    IPC分类号： H05F3/00

    CPC分类号： H01L21/67748 ,  H01L21/6831 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

    摘要： Embodiments of the invention relate to methods and apparatus for minimizing electrostatic discharge in processing and testing systems utilizing large area substrates in the production of flat panel displays, solar panels, and the like. In one embodiment, an apparatus is described. The apparatus includes a testing chamber, a substrate support disposed in the testing chamber, the substrate support having a substrate support surface, a structure disposed in the testing chamber, the structure having a length that spans a width of the substrate support surface, the structure being linearly movable relative to the substrate support, and a brush device having a plurality of conductive bristles coupled to the structure and spaced a distance away from the substrate support surface of the substrate support, the brush device electrically coupling the support surface to ground through the structure.

    摘要翻译： 本发明的实施例涉及在平板显示器，太阳能电池板等的生产中利用大面积基板的处理和测试系统中的静电放电最小化的方法和装置。 在一个实施例中，描述了一种装置。 该装置包括测试室，设置在测试室中的衬底支撑件，衬底支撑件具有衬底支撑表面，设置在测试室中的结构，该结构具有跨过衬底支撑表面的宽度的长度，该结构 相对于衬底支撑件可线性移动;以及刷子装置，其具有耦合到该结构并且离开衬底支撑件的衬底支撑表面间隔一定距离的多个导电刷毛，刷装置通过 结构体。

    IN/OUT DOOR FOR A VACUUM CHAMBER
    10.
    发明申请
    IN/OUT DOOR FOR A VACUUM CHAMBER 审中-公开
    IN / OUT门为真空室

    公开(公告)号：US20100098518A1

    公开(公告)日：2010-04-22

    申请号：US12254517

    申请日：2008-10-20

    申请人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Lawrence T. Nguyen ,  Jonathan Cerezo

    发明人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Lawrence T. Nguyen ,  Jonathan Cerezo

    IPC分类号： H01L21/67

    CPC分类号： H01L21/67201 ,  H01L21/67126

    摘要： A load lock chamber sized for a large area substrate is provided. The load lock chamber includes a housing comprising a door and a body having at least two sealable ports, a movable door associated with at least one of the sealable ports, and a door actuation assembly coupled between the door and the housing. The door actuation assembly further includes a pair of first actuators coupled to the door for moving the door in a first direction, and a pair of second actuators for moving the door in a second direction that is orthogonal to the first direction.

    摘要翻译： 提供了一种用于大面积基板的负载锁定室。 所述装载锁定室包括壳体，所述壳体包括具有至少两个可密封端口的门和主体，与所述可密封端口中的至少一个相关联的活动门以及联接在所述门和所述壳体之间的门致动组件。 门致动组件还包括耦合到门的一对第一致动器，用于沿第一方向移动门;以及一对第二致动器，用于沿与第一方向正交的第二方向移动门。