公开(公告)号：US20110148449A1

公开(公告)日：2011-06-23

申请号：US13038140

申请日：2011-03-01

申请人： Scott R. Williams ,  Edward Laurent ,  David T. Beatson ,  Bahadir Tunaboylu ,  Edward L. Malantonio

发明人： Scott R. Williams ,  Edward Laurent ,  David T. Beatson ,  Bahadir Tunaboylu ,  Edward L. Malantonio

IPC分类号： G01R31/00

CPC分类号： G01R1/06727

摘要： A probe for a probe card assembly includes a beam and a fulcrum element. The fulcrum element is positioned between a base end portion of the beam and a tip end portion of the beam and is adapted for contact with the beam such that the beam is cantilevered by the fulcrum.

摘要翻译： 用于探针卡组件的探针包括光束和支点元件。 支点元件位于梁的基端部分和梁的顶端部分之间，并且适于与梁接触，使得梁被支点悬臂。

公开(公告)号：US20090212795A1

公开(公告)日：2009-08-27

申请号：US11792331

申请日：2005-11-30

申请人： Scott R. Williams

发明人： Scott R. Williams

IPC分类号： G01R1/073 ,  G01R31/02

CPC分类号： G01R1/07314 ,  G01R31/2886 ,  G01R31/31905

摘要： A probe card for testing of semiconductor dice is provided. The probe card includes a mounting plate and a plurality of substrate segments supported by the mounting plate.

摘要翻译： 提供了一种用于测试半导体晶片的探针卡。 探针卡包括安装板和由安装板支撑的多个基片段。

公开(公告)号：US06845657B2

公开(公告)日：2005-01-25

申请号：US10112496

申请日：2002-03-28

申请人： Scott R. Williams

发明人： Scott R. Williams

IPC分类号： E21B49/00 ,  G01N1/08 ,  E21B49/08 ,  G01N1/20

CPC分类号： E21B49/005 ,  G01N1/08

摘要： A sample collection device for collecting a sample of drill cuttings from a hole being drilled as the hole is being drilled includes a stem collector surrounding the drill pipe. Pressurized air is injected through the drill pipe into the hole being drilled. The air forms a stream of air-entrained drill cuttings traveling up the drill hole during drilling. This stream of air-entrained drill cuttings is directed by the stem collector into a conduit which directs the stream of cuttings to a sampling device. The sampling device samples the stream of cuttings and creates a stream of sample cuttings which is directed to a diffuser which separates the sample cuttings from the air stream. The sample cuttings are collected in a sample container or in a sample collector from which they are transferred to a sample container or bag. The stem collector seals against the ground surrounding the hole being drilled to direct substantially all drill cuttings from the hole to the sampling device, thus substantially eliminating loss of fines prior to sampling, and the sampler is designed to collect a substantially representative sample from the cuttings stream, again substantially without loss of fines and in a device which can be mounted under the drill deck of a drilling rig.

摘要翻译： 用于从被钻孔的钻孔中收集钻屑样品的样品收集装置正在钻孔，包括围绕钻杆的杆收集器。 加压空气通过钻杆进入钻孔中。 空气在钻孔过程中形成一个气流夹带的钻屑，钻进钻孔。 气流夹带的钻屑由杆收集器引导到导管中，导管将切屑流引导到采样装置。 取样装置对样品流进行采样并产生样品切屑流，该样品切片流被引导到将样品切片与气流分开的扩散器。 将样品切片收集在样品容器中或样品收集器中，从样品收集器中将样品切片转移到样品容器或袋中。 杆收集器密封靠在被钻孔的周围的地面，以将基本上所有的钻屑从孔引导到采样装置，从而基本上消除了取样之前的细粉损失，并且采样器设计成从切屑收集基本上代表性的样品 再次基本上不损失细粉，并且可以安装在钻机的钻台下方的装置中。

公开(公告)号：US08058889B2

公开(公告)日：2011-11-15

申请号：US11792331

申请日：2005-11-30

申请人： Scott R. Williams

发明人： Scott R. Williams

IPC分类号： G01R31/00

CPC分类号： G01R1/07314 ,  G01R31/2886 ,  G01R31/31905

摘要： A probe card for testing of semiconductor dice is provided. The probe card includes a mounting plate and a plurality of substrate segments supported by the mounting plate.

摘要翻译： 提供了一种用于测试半导体晶片的探针卡。 探针卡包括安装板和由安装板支撑的多个基片段。

公开(公告)号：US6114869A

公开(公告)日：2000-09-05

申请号：US82896

申请日：1998-05-21

申请人： Scott R. Williams ,  Martin A. Kurtz

发明人： Scott R. Williams ,  Martin A. Kurtz

IPC分类号： G01R1/04 ,  G01R1/073 ,  G01R31/02 ,  G01R31/26

CPC分类号： G01R31/2889 ,  G01R1/07342 ,  G01R1/07378

摘要： A system for interfacing between a semiconductor wafer, an automatic wafer probe machine, and an automatic IC test system includes an insert ring adapted for attachment to a support of the wafer probe machines. A lock ring assembly includes a lock ring rotatably disposed in the insert ring. A cam element having a sloped camming surface is attached to the lock ring. A retaining element attached to the insert ring retains the lock ring in the insert ring. A lid hingeably attached to the insert ring supports a POGO tower assembly including an adapter ring for attachment to a POGO tower and a z-axis ring attached to the adapter ring, and a mounting assembly connecting the z-axis ring in spring-loaded relationship to the lid. A cam follower attached to the z-axis ring engages the sloped camming surface when the lid is lowered to position a bottom surface of the POGO tower slightly above the probe card. The cam follower follows the camming surface lower as the lock ring is rotated to force POGO pins at the bottom of the POGO tower against contact pads of the probe card.

摘要翻译： 用于在半导体晶片，自动晶片探针机和自动IC测试系统之间进行接口的系统包括适于附接到晶片探针机的支撑件的插入环。 锁环组件包括可旋转地设置在插入环中的锁环。 具有倾斜凸轮表面的凸轮元件附接到锁定环。 附接到插入环的保持元件将锁定环保持在插入环中。 可铰接地附接到插入环的盖子支撑POGO塔架组件，其包括用于连接到POGO塔的适配环和连接到适配环的z轴环，以及以弹簧加载的关系连接z轴环的安装组件 到盖子。 安装在z轴环上的凸轮随动件当盖下降时与倾斜的凸轮表面接合，以将POGO塔的底部表面置于探针卡的上方。 当锁定环旋转时，凸轮从动件跟随凸轮表面较低，以迫使POGO塔底部的POGO针脚抵靠探针卡的接触垫。

公开(公告)号：US08004299B2

公开(公告)日：2011-08-23

申请号：US13038140

申请日：2011-03-01

申请人： Scott R. Williams ,  Edward Laurent ,  David T. Beatson ,  Bahadir Tunaboylu ,  Edward L. Malantonio

发明人： Scott R. Williams ,  Edward Laurent ,  David T. Beatson ,  Bahadir Tunaboylu ,  Edward L. Malantonio

IPC分类号： G01R1/067 ,  G01R31/00

CPC分类号： G01R1/06727

摘要： A probe for a probe card assembly includes a beam and a fulcrum element. The fulcrum element is positioned between a base end portion of the beam and a tip end portion of the beam and is adapted for contact with the beam such that the beam is cantilevered by the fulcrum.

摘要翻译： 用于探针卡组件的探针包括光束和支点元件。 支点元件位于梁的基端部分和梁的顶端部分之间，并且适于与梁接触，使得梁被支点悬臂。

公开(公告)号：US07898276B2

公开(公告)日：2011-03-01

申请号：US11885479

申请日：2006-02-21

申请人： Scott R. Williams ,  Bahadir Tunaboylu ,  John McGlory

发明人： Scott R. Williams ,  Bahadir Tunaboylu ,  John McGlory

IPC分类号： G01R31/26

CPC分类号： G01R1/073 ,  G01R1/07307

摘要： A probe card is provided including a first substrate, a second substrate, and a plurality of conductive wires extending between the first substrate and the second substrate. The conductive wires are fixed (a) at a first end to a contact of the first substrate, and (b) at a second end to a contact of the second substrate.

摘要翻译： 提供一种探针卡，包括第一基板，第二基板和在第一基板和第二基板之间延伸的多根导电线。 导线在第一端被固定（a）到第一基板的接触部，（b）在第二端部与第二基板接触。

公开(公告)号：US20080246501A1

公开(公告)日：2008-10-09

申请号：US11885479

申请日：2006-02-21

申请人： Scott R. Williams ,  Bahadir Tunaboylu ,  John McGlory

发明人： Scott R. Williams ,  Bahadir Tunaboylu ,  John McGlory

IPC分类号： G01R1/073

CPC分类号： G01R1/073 ,  G01R1/07307

摘要： A probe card is provided including a first substrate, a second substrate, and a plurality of conductive wires extending between the first substrate and the second substrate. The conductive wires are fixed (a) at a first end to a contact of the first substrate, and (b) at a second end to a contact of the second substrate.

摘要翻译： 提供一种探针卡，包括第一基板，第二基板和在第一基板和第二基板之间延伸的多根导电线。 导线在第一端被固定（a）到第一基板的接触部，（b）在第二端部与第二基板接触。

公开(公告)号：US07279917B2

公开(公告)日：2007-10-09

申请号：US11211994

申请日：2005-08-25

申请人： Scott R. Williams ,  John M. Shuhart ,  Alan Slopey ,  Guy B. Frick

发明人： Scott R. Williams ,  John M. Shuhart ,  Alan Slopey ,  Guy B. Frick

IPC分类号： G01R31/02

CPC分类号： G01R1/06738 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/07342 ,  G01R3/00

摘要： A probe for a probe card assembly is provided. The probe includes a beam element having a tip end portion. The probe also includes a tip structure on the tip end portion of the beam element. The tip structure includes a plurality of conductive bumps arranged in a stacked configuration.

摘要翻译： 提供探针卡组件的探头。 探针包括具有尖端部分的束元件。 探头还包括在梁元件的尖端部分上的尖端结构。 尖端结构包括以堆叠构造布置的多个导电凸块。

公开(公告)号：US06426637B1

公开(公告)日：2002-07-30

申请号：US09469944

申请日：1999-12-21

申请人： Son N. Dang ,  Gerald W. Back ,  H. Dan Higgins ,  Scott R. Williams

发明人： Son N. Dang ,  Gerald W. Back ,  H. Dan Higgins ,  Scott R. Williams

IPC分类号： G01R3102

CPC分类号： G01R1/07357

摘要： Probe testing of an integrated circuit so as to achieve low probe needle contact resistance without probe needles “scrubbing” against bonding pads is achieved at high test signal frequencies by a probe needle assembly (14) including a plurality of probe needles (13) each having a shank portion (13A), a curved flex portion (13B), and a contact tip (13C) on a free end of the flex portion, the shank portion (13A) being electrically coupled to an electrical test system. The shank portion (13A) of each probe needle is attached to a surface (16A) of an insulative layer (16). The insulative layer is supported on a ground plane conductor 25. The flex portions (13B) of the probe needles (13) extend beyond an edge of the insulative layer. A portion (24) of the ground plane conductor (25) extends beyond the insulator (16) and is adjacent to all but an extending tip portion (30) of the flex portion (13B) of each probe needle (13). A thin insulator/guide layer (26B) is attached to the extending portion (24) of the ground plane conductor (25) and disposed between the extending portion and the flex portions (13B), the insulator/guide layer (26B) having a smooth, low friction surface to guide/stabilize the flex portions (13B) during flexing. The insulative layer (16) and insulator/guide layer (26B) provide matched impedance between the shank and flex portions of the probe needles.

摘要翻译： 通过包括多个探针（13）的探针针组件（14）在高测试信号频率下实现集成电路的探针测试，以便实现低探针针接触电阻而不用探针针对接合焊盘“擦洗” 在柔性部分的自由端上的柄部分（13A），弯曲弯曲部分（13B）和接触尖端（13C），所述柄部分（13A）电耦合到电气测试系统。 每个探针的柄部分（13A）附接到绝缘层（16）的表面（16A）。 绝缘层被支撑在接地平面导体25上。探针（13）的挠曲部分（13B）延伸超过绝缘层的边缘。 接地平面导体（25）的部分（24）延伸超过绝缘体（16），并且与每个探针（13）的柔性部分（13B）的延伸的尖端部分（30）相邻。 薄的绝缘体/引导层（26B）被附接到接地平面导体（25）的延伸部分（24）并且设置在延伸部分和挠曲部分（13B）之间，绝缘体/引导层（26B）具有 光滑的低摩擦表面，以在弯曲期间引导/稳定柔性部分（13B）。 绝缘层（16）和绝缘体/引导层（26B）在探针的柄和挠曲部分之间提供匹配的阻抗。