公开(公告)号：US20090086381A1

公开(公告)日：2009-04-02

申请号：US11865405

申请日：2007-10-01

申请人： Tetsuya HIRAKI ,  Seiji YARI ,  Yasufumi UNO ,  Hideaki SATO ,  Takahide MASUDA ,  Kazuhiro KOBAYASHI

发明人： Tetsuya HIRAKI ,  Seiji YARI ,  Yasufumi UNO ,  Hideaki SATO ,  Takahide MASUDA ,  Kazuhiro KOBAYASHI

IPC分类号： G11B5/33

CPC分类号： G11B5/3163 ,  G11B5/00826 ,  G11B5/3169 ,  G11B5/3173

摘要： A manufacturing method of a thin-film magnetic head with a dishing suppressed in the case of planarizing a magnetic shield which a read head portion has or a magnetic pole which a write head portion has is provided. A manufacturing method of a thin-film magnetic head comprising a read head portion for data reading which has at least two magnetic layers functioning as a magnetic shield and a write head portion for data writing which has two magnetic layers functioning as a magnetic pole is provided, in a process forming at least the lowest magnetic layer in at least the two magnetic layers functioning as the magnetic shield and the two magnetic layers functioning as the magnetic pole in the case of forming a plurality of thin-film magnetic head patterns on an element formation surface of the wafer substrate, which comprises steps of: forming this magnetic layer so as to reach a position which becomes a medium opposed surface at a middle portion to a trick width direction in each thin-film magnetic head pattern, and forming a dishing prevention portion at a position farther than this magnetic layer from the position which becomes the medium opposed surface in both sides or either side along the track width direction of this magnetic layer; forming a nonmagnetic insulating layer so as to cover the magnetic layer and the dishing prevention portion; and planarizing and polishing the magnetic layer, the dishing prevention portion, and the nonmagnetic insulating layer thereafter.

摘要翻译： 在平面化磁头部分所具有的磁屏蔽或者写入磁头部分所具有的磁极的情况下，具有凹陷抑制的薄膜磁头的制造方法。 一种薄膜磁头的制造方法，其特征在于，具备读取磁头部分，该读取头部分具有用作磁屏蔽的至少两个磁性层和用作磁极的两个磁性层的用于数据写入的写入头部分 在至少形成作为磁屏蔽的两个磁性层中形成至少最低磁性层的工艺中，并且在元件上形成多个薄膜磁头图案的情况下用作磁极的两个磁性层 所述晶片基板的形成面包括以下步骤：在每个薄膜磁头图案中形成该磁性层以达到在中间部分与特技宽度方向成为介质相对表面的位置，并形成凹陷 防止部分位于远离该磁性层的位置，该位置从成为两侧或两侧的介质相对表面的位置 该磁性层的宽度方向; 形成非磁性绝缘层以覆盖磁性层和凹陷防止部分; 此后对磁性层，凹陷防止部分和非磁性绝缘层进行平面化和抛光。

公开(公告)号：US07248435B2

公开(公告)日：2007-07-24

申请号：US10827632

申请日：2004-04-20

申请人： Taro Oike ,  Kiyoshi Noguchi ,  Seiji Yari

发明人： Taro Oike ,  Kiyoshi Noguchi ,  Seiji Yari

IPC分类号： G11B5/31 ,  G11B5/23 ,  G11B5/39

CPC分类号： G11B5/3906

摘要： A bottom pole layer and a top pole layer respectively incorporate pole portion layers. Cross sections of the pole portion layers and a gap layer parallel to the top surface of a substrate are of the same shapes. The aggregate of the pole portion layers and the gap layer includes a first portion having a width W that defines the track width, and a second portion having a width greater than the width W of the first portion. L/W falls within a range of 2 to 5 inclusive, where L is the distance from a medium facing surface to the interface between the first portion and the second portion. S/(W×L) falls within a range of 5 to 40 inclusive, where S is the area of the cross section of the aggregate parallel to the top surface of the substrate.

摘要翻译： 底极层和顶极层分别包括极部分层。 极性部分层的横截面和与衬底的顶表面平行的间隙层具有相同的形状。 极部分层和间隙层的聚集体包括具有限定轨道宽度的宽度W的第一部分和宽度大于第一部分宽度W的第二部分。 L / W落在2到5的范围内，其中L是从介质面向表面到第一部分和第二部分之间的界面的距离。 S /（WxL）在5〜40的范围内，其中S是与基板的顶面平行的集合体的横截面积。

公开(公告)号：US06815096B2

公开(公告)日：2004-11-09

申请号：US10139377

申请日：2002-05-07

申请人： Tetsuya Mino ,  Seiji Yari ,  Atsushi Yamaguchi

发明人： Tetsuya Mino ,  Seiji Yari ,  Atsushi Yamaguchi

IPC分类号： G11B531

CPC分类号： H01F10/16 ,  G11B5/3109 ,  Y10T428/115 ,  Y10T428/32

摘要： There is disclosed a soft magnetic thin film represented by a composition formula of Fea1·Cob1·Cc1·Od1. In this case, atomic % values of the a1 to d1 respectively satisfy the following: 51.0≦a1≦95.0, 5 0≦b1≦49.0, 0.5≦c1≦10.0, 0.5≦d1≦20.0, a1+b1+c1+d1=100 Thus, it is possible to improve a characteristic of a thin film magnetic head by achieving a high saturation magnetic flux density, suppressing an increase in an anisotropic magnetic field caused by increased concentration of oxygen, and preventing a reduction in permeability.

公开(公告)号：US06669855B2

公开(公告)日：2003-12-30

申请号：US09765293

申请日：2001-01-22

申请人： Yoshitaka Sasaki ,  Atsushi Iijima ,  Seiji Yari ,  Katsuya Kanakubo

发明人： Yoshitaka Sasaki ,  Atsushi Iijima ,  Seiji Yari ,  Katsuya Kanakubo

IPC分类号： B44C122

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A method of manufacturing a thin-film magnetic head allowing dimension control of the width of the magnetic pole and reduction of the time required for formation is provided. A layer of iron nitride formed by sputtering is selectively etched with the RIE to form a top pole tip. In this etching process with RIE, chlorine-type gas is selected as a gas seed for etching, and the process temperature is in a range of 50° C. to 300° C. Subsequently, using part of a first mask and a tip portion of the top pole tip as a mask, part of both the write gap layer and the second bottom pole are etched with the RIE similarly to the above process, to thereby form a magnetic pole. The etching conditions are optimized by performing the process with the RIE under the above conditions, so that both of the top pole tip and the magnetic pole can be formed with high precision, and that the time required for forming both of these elements can be significantly reduced.

摘要翻译： 提供一种制造允许尺寸控制磁极宽度并减少形成所需时间的薄膜磁头的方法。 通过RIE选择性地蚀刻由溅射形成的氮化铁层，以形成顶极尖端。 在用RIE的蚀刻工艺中，选择氯型气体作为蚀刻用气体种子，并且处理温度在50℃至300℃的范围内。随后，使用部分第一掩模和尖端部分 作为掩模，类似于上述过程，用RIE蚀刻写间隙层和第二底极两者的一部分，从而形成磁极。 通过在上述条件下通过RIE进行处理来优化蚀刻条件，从而可以高精度地形成顶极尖端和磁极两者，并且形成这两个元件所需的时间可以显着地 减少

公开(公告)号：US08238057B2

公开(公告)日：2012-08-07

申请号：US12388923

申请日：2009-02-19

申请人： Yuji Ito ,  Seiji Yari

发明人： Yuji Ito ,  Seiji Yari

IPC分类号： G11B5/31 ,  G11B5/127 ,  H01L43/12

CPC分类号： G11B5/3123 ,  Y10T29/49032

摘要： The present invention relates to a magnetic head and particularly to improvement of its recording element. The recording element includes a first magnetic film, a second magnetic film, a coil film, and an insulating film. The first magnetic film has a first pole portion. The second magnetic film has a second pole portion opposed to the first pole portion with a magnetic gap film therebetween and is joined to the first magnetic film at a back gap portion that is located in a rearward position with respect to a medium facing surface. The coil film extends around the back gap portion, and the insulating film encloses the coil film. Moreover, the second magnetic film entirely covers the insulating film.

摘要翻译： 磁头技术领域本发明涉及磁头，特别涉及其记录元件的改进。 记录元件包括第一磁性膜，第二磁性膜，线圈膜和绝缘膜。 第一磁性膜具有第一极部。 第二磁性膜具有与第一极部相对的第二极部，在其之间具有磁隙膜，并且在相对于面向介质的表面位于后方位置的后部间隔部分处接合到第一磁性膜。 线圈膜围绕后隙部分延伸，并且绝缘膜包围线圈膜。 此外，第二磁性膜完全覆盖绝缘膜。

公开(公告)号：US20100149685A1

公开(公告)日：2010-06-17

申请号：US12335090

申请日：2008-12-15

申请人： Seiji YARI ,  Yasufumi UNO ,  Yuji ITO ,  Hideaki SATO ,  Nozomu HACHISUKA

发明人： Seiji YARI ,  Yasufumi UNO ,  Yuji ITO ,  Hideaki SATO ,  Nozomu HACHISUKA

IPC分类号： G11B5/027 ,  G11B5/127 ,  B44C1/22 ,  B05D5/12

CPC分类号： G11B5/3106 ,  G11B5/00826 ,  G11B5/102

摘要： A multi-channel thin-film magnetic head includes a substrate, a plurality of thin-film magnetic head elements formed on the substrate, a closure fixed onto the plurality of thin-film magnetic head elements, a protection film laminated on a whole area of a TBS of the plurality of thin-film magnetic head elements and the closure, and many micro-grooves formed in a surface of the protection film.

摘要翻译： 多通道薄膜磁头包括基板，形成在基板上的多个薄膜磁头元件，固定到多个薄膜磁头元件上的封闭件，层压在整个区域上的保护膜 多个薄膜磁头元件的TBS和封闭件，以及形成在保护膜的表面中的许多微槽。

公开(公告)号：US06822830B2

公开(公告)日：2004-11-23

申请号：US09942871

申请日：2001-08-31

申请人： Tetsuya Mino ,  Atsushi Yamaguchi ,  Seiji Yari

发明人： Tetsuya Mino ,  Atsushi Yamaguchi ,  Seiji Yari

IPC分类号： G11B5127

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/313 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996

摘要： A top pole layer in a write head includes, in a pole portion, a first layer having surfaces one of which is adjacent to a write gap layer, a second layer having surfaces one of which is adjacent to the other surface of the first layer, and a third layer having surfaces one of which is adjacent to the other surface of the second layer. The first to third layers have different saturation flux densities such that the closer the layer to the write gap layer, the higher saturation flux density.

摘要翻译： 写头中的顶极层包括在极部分中的第一层，其具有与写间隙层相邻的表面，第二层具有与第一层的另一表面相邻的表面， 以及第三层，其具有与第二层的另一表面相邻的表面。 第一至第三层具有不同的饱和磁通密度，使得层与写间隙层越接近，饱和磁通密度越高。

公开(公告)号：US08035919B2

公开(公告)日：2011-10-11

申请号：US12335090

申请日：2008-12-15

申请人： Seiji Yari ,  Yasufumi Uno ,  Yuji Ito ,  Hideaki Sato ,  Nozomu Hachisuka

发明人： Seiji Yari ,  Yasufumi Uno ,  Yuji Ito ,  Hideaki Sato ,  Nozomu Hachisuka

IPC分类号： G11B5/29 ,  G11B5/027 ,  G11B5/127

CPC分类号： G11B5/3106 ,  G11B5/00826 ,  G11B5/102

摘要： A multi-channel thin-film magnetic head includes a substrate, a plurality of thin-film magnetic head elements formed on the substrate, a closure fixed onto the plurality of thin-film magnetic head elements, a protection film laminated on a whole area of a TBS of the plurality of thin-film magnetic head elements and the closure, and many micro-grooves formed in a surface of the protection film.

摘要翻译： 多通道薄膜磁头包括基板，形成在基板上的多个薄膜磁头元件，固定到多个薄膜磁头元件上的封闭件，层压在整个区域上的保护膜 多个薄膜磁头元件的TBS和封闭件，以及形成在保护膜的表面中的许多微槽。

公开(公告)号：US20060256481A1

公开(公告)日：2006-11-16

申请号：US11393775

申请日：2006-03-31

申请人： Takeo Kagami ,  Hiroshi Kiyono ,  Hiraku Hirabayashi ,  Eiichi Omata ,  Seiji Yari ,  Takamitsu Sakamoto

发明人： Takeo Kagami ,  Hiroshi Kiyono ,  Hiraku Hirabayashi ,  Eiichi Omata ,  Seiji Yari ,  Takamitsu Sakamoto

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/3967 ,  G11B5/6064 ,  G11B2005/0005

摘要： A composite thin-film magnetic head includes a substrate, an under layer formed on the substrate, an MR read head element formed on the under layer and provided with a lower shield layer, an upper shield layer and an MR layer in which a sense current flows in a direction perpendicular to a surface of the MR layer through the upper shield layer and the lower shield layer, an inter-shield insulation layer laminated on the MR read head element, an inductive write head element formed on the inter-shield insulation layer and provided with a first magnetic pole layer, a nonmagnetic layer, a second magnetic pole layer whose end portion is opposed to an end portion of the first magnetic pole layer through the nonmagnetic layer, and a write coil, and an additional shield layer formed between the upper shield layer and the first magnetic pole layer.

摘要翻译： 复合薄膜磁头包括基板，形成在基板上的下层，形成在下层上并设置有下屏蔽层，上屏蔽层和MR层的MR读头元件，其中感测电流 通过上屏蔽层和下屏蔽层在垂直于MR层的表面的方向上流动，层叠在MR读头元件上的屏蔽间绝缘层，形成在屏蔽间绝缘层上的感应写头元件 并且具有第一磁极层，非磁性层，其端部通过非磁性层与第一磁极层的端部相对的第二磁极层和写入线圈，以及形成在第一磁极层之间的附加屏蔽层 上屏蔽层和第一磁极层。

公开(公告)号：US07101633B2

公开(公告)日：2006-09-05

申请号：US10376607

申请日：2003-03-03

申请人： Atsushi Yamaguchi ,  Tetsuya Mino ,  Seiji Yari ,  Shigeru Ichihara

发明人： Atsushi Yamaguchi ,  Tetsuya Mino ,  Seiji Yari ,  Shigeru Ichihara

IPC分类号： G11B5/39 ,  G11B5/127

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/3109 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996 ,  H01F10/16 ,  H01F10/324 ,  H01F41/26 ,  H01F41/309 ,  Y10T428/115 ,  Y10T428/1186 ,  Y10T428/1193

摘要： An electroplated magnetic thin film consisting of an electroplated film of Fe—Co alloy containing Fe by an amount of 52–86 wt % and having a highly packed fine crystal grain structure, a flat and glossy surface, a high saturation magnetic flux density not less than 2.1 T, a low coercive force of 5–10 Oe, and being particularly suitable as a pole portion of a thin film magnetic head is proposed. The electroplated magnetic thin film is deposited on a substrate by an electroplating process with a pulsatory current or direct current having a current density of 3–120 mA/cm2 while using an electroplating bath containing one or both of sulfate salt and hydrochloric salt serving as supply sources of Fe ions and Co ions, saccharin sodium serving as a stress relaxation agent by an amount not less than 1 g/l, boric acid as a pH buffer agent, ammonium chloride as an electrically conductivity salt, and sodium lauryl sulfate as a surfactant.

摘要翻译： 一种由Fe-Co合金的电镀膜组成的电镀磁性薄膜，其含有52-86重量％的Fe，具有高度包装的细晶粒结构，平坦光泽的表面，高饱和磁通密度不低于 超过2.1T，提出了5-10Oe的低矫顽力，特别适合作为薄膜磁头的磁极部分。 电镀磁性薄膜通过电镀工艺沉积在基板上，该电镀工艺使用电流密度为3-120mA / cm 2的脉动电流或直流电流，同时使用含有以下的一种或两种 作为Fe离子和Co离子的供给源的硫酸盐和盐酸盐，作为应力松弛剂的糖精钠，用量不小于1g / l，硼酸作为pH缓冲剂，氯化铵作为电导率盐 和十二烷基硫酸钠作为表面活性剂。