公开(公告)号：US20100101730A1

公开(公告)日：2010-04-29

申请号：US12603582

申请日：2009-10-21

申请人： Kyu Jin CHOI ,  Sung Min NA ,  Euy Kyu LEE ,  Yong Han JEON ,  Cheol Hoon YANG ,  Tae Wan LEE ,  Uk HWANG ,  Sun Kee KIM

发明人： Kyu Jin CHOI ,  Sung Min NA ,  Euy Kyu LEE ,  Yong Han JEON ,  Cheol Hoon YANG ,  Tae Wan LEE ,  Uk HWANG ,  Sun Kee KIM

IPC分类号： H01L21/465 ,  H01L21/687 ,  B05C13/02

CPC分类号： H01L21/68792

摘要： A substrate processing apparatus, which is designed to prevent the wobbling of a rotational shaft rotating, is provided. The substrate includes a rotation shaft and a connecting member. A unit is disposed between the rotational shaft and the connecting member to make the rotational shaft and the connecting member close-contact each other or a unit is disposed under the rotational shaft to prevent the wobbling of the rotational shaft.

摘要翻译： 设置有用于防止旋转轴的摆动的基板处理装置。 基板包括旋转轴和连接构件。 单元设置在旋转轴和连接构件之间，以使旋转轴和连接构件彼此紧密接触，或者单元设置在旋转轴下方以防止旋转轴的摆动。

公开(公告)号：US20120251837A1

公开(公告)日：2012-10-04

申请号：US13384141

申请日：2010-01-14

申请人： Sung-Min Na

发明人： Sung-Min Na

IPC分类号： B32B15/02 ,  B23K11/11 ,  C25D5/02 ,  B32B13/02 ,  B32B5/26 ,  B32B7/04 ,  B23P17/06 ,  B32B15/01

CPC分类号： B23K11/243 ,  D04H1/4234 ,  D04H1/587 ,  D04H1/645 ,  E04B1/942 ,  Y10T29/14 ,  Y10T428/12347 ,  Y10T428/12424 ,  Y10T442/20 ,  Y10T442/339 ,  Y10T442/655

摘要： The present invention relates to an inflammable mat board for an architecture and a method for manufacturing the same, and in particular to a mat board which is characterized in that in an inflammable mat board for architecture, a mat shaped board is manufactured in such a way that a metallic thread made from an iron, a nonferrous metal, a waste can and a waste tin plate, etc. is tangled like a cotton ball in a thin sheet shape, so it is possible to recycle materials, and an inflammability can be enhanced, and a heat insulation effect can be maximized, and a recycling rate can be enhanced in terms of a material management, and the production of wastes can be advantageously minimized, thus contributing a lot to a green growth policy of the world.

摘要翻译： 本发明涉及一种用于建筑的可燃性垫板及其制造方法，特别涉及一种垫板，其特征在于，在用于建筑的易燃垫板中，以这种方式制造垫形板 由铁，有色金属，废物罐和废锡板等制成的金属线与薄片状的棉球缠结，可以回收材料，并且可以提高易燃性 能够最大化隔热效果，能够在物料管理方面提高回收利用率，能够有利地减少废弃物的生成，从而对世界绿色增长政策有很大贡献。

公开(公告)号：US20080061034A1

公开(公告)日：2008-03-13

申请号：US11852012

申请日：2007-09-07

申请人： Dae-Sik JUNN ,  Jeong-Beom LEE ,  Sung-Ho CHA ,  Sung-Min NA ,  Myung-Gon SONG ,  Duck-Ho KIM ,  Kyoung-Jin LIM

发明人： Dae-Sik JUNN ,  Jeong-Beom LEE ,  Sung-Ho CHA ,  Sung-Min NA ,  Myung-Gon SONG ,  Duck-Ho KIM ,  Kyoung-Jin LIM

IPC分类号： H01L21/3065

CPC分类号： H01J37/3299 ,  H01J37/32091 ,  H01J37/32743 ,  H01J37/32752 ,  H01J37/32935 ,  H01J2237/334 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/681 ,  H01L21/68785

摘要： An etching apparatus includes a chamber, a substrate support in the chamber, a substrate-screening unit over the substrate support, wherein a diameter of the substrate-screening unit is smaller than as or equals to a substrate, a gas injection means injecting gases onto a periphery of the substrate, a power supply unit providing an RF (radio frequency) power into the chamber, and a plurality of sensors sensing intervals between the substrate support and the substrate-screening unit.

摘要翻译： 蚀刻装置包括腔室，腔室中的衬底支撑件，衬底支撑件上方的衬底筛选单元，其中衬底筛选单元的直径小于或等于衬底;气体注入装置，将气体注入到 所述基板的周边，向所述室提供RF（射频）功率的电源单元以及检测所述基板支撑件和所述基板检测单元之间的间隔的多个传感器。