摘要:
A method of manufacturing a layer stack adapted for a thin-film solar cell is and a precursor for a solar cell are described. The method includes depositing a TCO layer over a transparent substrate, depositing a first conductive-type layer a first p-i-n junction configured for the solar cell, depositing a first intrinsic-type layer of a first p-i-n junction configured for the solar cell and depositing a further conductive-layer with a conductivity opposite to the first conductive-type layer first p-i-n junction configured for the solar cell. The method further includes providing for a SiOx-containing intermediate layer by chemical vapor deposition and depositing a second p-i-n junction configured for the solar cell, wherein the SiOx-containing intermediate layer is provided within the a further conductive-type layer, and wherein the SiOx-containing layer has a thickness of 17 nm or less.
摘要翻译:描述适用于薄膜太阳能电池的层叠体的制造方法和太阳能电池的前体。 该方法包括在透明衬底上沉积TCO层,为第二导电类型层沉积构造用于太阳能电池的第一引脚结,沉积针对太阳能电池构造的第一引脚结的第一本征型层,并进一步沉积 导电层,其具有与为太阳能电池构造的第一导电类型第一引脚连接点相反的导电性。 该方法还包括通过化学气相沉积提供含SiO x的中间层,并沉积为太阳能电池构成的第二pin结,其中所述含SiOx的中间层设置在另一导电型层内,并且其中SiO x 包含层的厚度为17nm以下。
摘要:
Method of depositing a TCO layer on a substrate, of depositing precursors of a solar cell and precursors of a solar cell are described. The methods includes DC sputtering a ZnO-containing transparent conductive oxide layer over the substrate, the substrate having a size of 1.4 m2 or above and texturing the ZnO-containing transparent conductive oxide layer, wherein the textured ZnO-containing transparent conductive oxide layer has a root means square roughness of 60 nm or below.