摘要:
In a substrate processing method, a polysilicon layer 38 on a wafer W is etched with a bromine cation 45a and a bromine radical 45b in plasma generated from a processing gas containing a hydrogen bromide gas, an oxygen gas, and a nitrogen trifluoride gas, and then, is ashed with an oxygen radical 46 and a nitrogen radical 47 in plasma generated from a processing gas containing an oxygen gas and a nitrogen gas. Thereafter, the polysilicon layer 38 is etched with a fluorine cation 48a and a fluorine radical 48b in plasma generated from a processing gas containing an argon gas and a nitrogen trifluoride gas. While the polysilicon layer 38 is ashed, an oxidation process is performed on a silicon bromide generated by etching the polysilicon layer 38 with the bromine cation 45a.
摘要:
A saddle seat type fuel-cell electric vehicle includes a motor for driving rear wheels, a secondary battery for supplying electric power to the motor, a carrier for carrying luggage and a seat for supporting an operator, the carrier is located behind the seat and above the rear wheels. The secondary battery includes a plurality of cells each having an elongated boxlike shape, and it is stored in the internal space of the carrier, thereby increasing the flexibility of the layout of the vehicle body. Spacings functioning as air passages are defined between the inner wall of the carrier and the secondary battery. The carrier is formed with air inlet openings for introducing an air flow into the internal space and an air outlet opening for discharging the air flow out of the internal space. The plural cells are arranged adjacent to each other with given intervals on the same plane.
摘要:
A battery housing structure, in an electric vehicle, is operable to regulate a temperature of a battery disposed between front and rear wheels of the vehicle. The battery housing structure includes a main housing body for receiving the battery, inlet and outlet ports for respectively supplying air to and discharging air from the main housing body; and a fan for discharging air from the main housing body. A bypass passage is provided in the battery housing structure for selectively connecting a downstream side of the fan with the inlet ports. First and second air flow control valves are also provided in the battery housing structure for selectively controlling and routing the flow of air within the battery housing structure.
摘要:
A method of controlling the charging of a secondary battery (battery) without deterioration of a charging/discharging characteristic of the battery. An ordinary charging portion performs a first charging control specified to stop the charging at a charge level less than a full-charge level is used in combination with a refresh charging portion for performing a second charging control specified to stop the charging at a charge level more than the full-charge level. When the charging by the ordinary charging portion is continuously repeated by, for example, 10 times, a switching portion is switched such that the next charging is performed by the refresh charging portion. A counter, which is reset when the charging by the refresh charging portion is terminated, is provided for deciding whether or not the number of times of the repeated charging reaches 10. The counter can be replaced with means having a function of outputting, if a random number generated by a random number generator is a specific value, a switching command to the switching portion.
摘要:
In a data processor and a shading apparatus used in the data processor, the data processor selects an address based on the information of a memory or a translation look-aside buffer. Therefore, even when the same data are accessed, a different address at high speed is adopted according to the hardware, object to be processed, processing, etc. A plurality of geometric vectors are given as the parameters for the vertexes of a picture, the vectors are interpolated in the picture, and the luminance of each small area in the figure is calculated using the vectors generated by the interpolation. Therefore, a spotlight or highlight can be expressed with high accuracy and at high speed even when the amount of the hardware and the extent of the picture are small.
摘要:
A graphic processing system including a main memory for storing a program and information correspond to pixels, a main processor for effecting an execution processing of a program transferred from the main memory or from an external device so as to control the system, display/output devices such as a CRT device and a printer for outputting graphic information attained by controlling pixels arranged in a plurality of dimensions, a frame buffer for storing information corresponding to pixels outputted to the display/output devices, and a graphic processor for receiving a command and parameter information transferred from the main memory and/or the main processor, for generating character and graphic data in accordance with a predetermined processing procedure and for performing a transfer control including an execution of a drawing processing to transfer generated data through first and second address buses and first and second data buses to the main memory and/or the frame buffer, respectively. The system includes a bus connection switch circuit to be controlled by the graphic processor to effect a connection control between the first and second address buses and between the first and second data buses so as to enable execution of a drawing processing in the main memory connected to a bus on the main processor side and a data transfer between the main memory and the frame buffer.
摘要:
A graphic processor which controls reading, writing and transfer of graphic data for a display memory that stores graphic data. The processor includes a first unit which stores first address information for addressing the display memory and first pixel address information which points a pixel position in a word specified by the first address information, a second unit which stores second address information for addressing the display memory and second pixel address information which points a pixel position in a word specified by the second address information, a third unit which shifts graphic data of multiple pixels included in two consecutive words to extract continuous 1-word graphic data, and a fourth unit which implements drawing computations pixel-wise concurrently for one word depending on the number of pixels included in a word. Even if transfer source graphic data lies across two consecutive words, the processor fetches the source data in single reading, processes the data word-wise at once, and stores the result in the display memory.
摘要:
A slave controller formed on a single semiconductor substrate executes a built in control algorithm in response to a command supplied from a master controller. Upon completion of command execution, the controls respond to predetermined information contained within the command by branching internal control operation in accordance with the new command. The controls then suspend a series of operations for executing the new command upon detection of the branch condition. Once the internal state has been changed over, the slave controller sends an instruction to the master controller.
摘要:
A graphic processing system including a main memory for storing a program and information corresponding to pixels, a main processor for effecting an execution processing of a program transferred from the main memory or from an external device so as to control the system, display/output devices such as a CRT device and a printer for outputting graphic information attained by controlling pixels arranged in a plurality of dimensions, a frame buffer for storing information corresponding to pixels outputted to the display/output devices, and a graphic processor for receiving a command and parameter information transferred from the main memory and/or the main processor, for generating character and graphic data in accordance with a predetermined processing procedure and for performing a transfer control including an execution of a drawing processing to transfer generated data through first and second address buses and first and second data buses to the main memory and/or the frame buffer, respectively. The system also includes bus connection switch circuit to be controlled by the graphic processor to effect a connection control between the first and second address buses and between the first and second data buses so as to enable execution of a drawing processing in the main memory connected to a bus on the main processor side and a data transfer between the main memory and the frame buffer.
摘要:
There is provided a substrate processing method capable of etching a layer containing, at least, platinum without using a halogen gas. When etching the platinum-manganese layer on a wafer W by using a tantalum (Ta) layer 38 having a certain pattern shape, a processing gas containing, at least, a carbon monoxide gas, a hydrogen gas, and a rare gas is used, and a ratio of a gas flow rate of the hydrogen gas to a total gas flow rate of the carbon monoxide gas and the hydrogen gas is in a range of from about 50% to about 75%.