SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
    1.
    发明申请
    SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM 有权
    基板加工方法和储存介质

    公开(公告)号:US20120214315A1

    公开(公告)日:2012-08-23

    申请号:US13400247

    申请日:2012-02-20

    IPC分类号: H01L21/3065

    CPC分类号: H01L21/32137

    摘要: In a substrate processing method, a polysilicon layer 38 on a wafer W is etched with a bromine cation 45a and a bromine radical 45b in plasma generated from a processing gas containing a hydrogen bromide gas, an oxygen gas, and a nitrogen trifluoride gas, and then, is ashed with an oxygen radical 46 and a nitrogen radical 47 in plasma generated from a processing gas containing an oxygen gas and a nitrogen gas. Thereafter, the polysilicon layer 38 is etched with a fluorine cation 48a and a fluorine radical 48b in plasma generated from a processing gas containing an argon gas and a nitrogen trifluoride gas. While the polysilicon layer 38 is ashed, an oxidation process is performed on a silicon bromide generated by etching the polysilicon layer 38 with the bromine cation 45a.

    摘要翻译: 在基板处理方法中,用含有溴化氢气体,氧气和三氟化氮气体的处理气体产生的等离子体中的溴阳离子45a和溴根45b蚀刻晶片W上的多晶硅层38, 然后,由含有氧气和氮气的处理气体产生的等离子体中的氧自由基46和氮根47被灰化。 此后,用含有氩气和三氟化氮气体的处理气体产生的等离子体中的氟阳离子48a和氟根48b进行蚀刻。 当多晶硅层38灰化时,对通过用溴阳离子45a蚀刻多晶硅层38产生的溴化硅进行氧化处理。

    Saddle seat type electric vehicle
    2.
    发明授权
    Saddle seat type electric vehicle 有权
    鞍座式电动车

    公开(公告)号:US08056658B2

    公开(公告)日:2011-11-15

    申请号:US12174953

    申请日:2008-07-17

    IPC分类号: B60K1/00

    摘要: A saddle seat type fuel-cell electric vehicle includes a motor for driving rear wheels, a secondary battery for supplying electric power to the motor, a carrier for carrying luggage and a seat for supporting an operator, the carrier is located behind the seat and above the rear wheels. The secondary battery includes a plurality of cells each having an elongated boxlike shape, and it is stored in the internal space of the carrier, thereby increasing the flexibility of the layout of the vehicle body. Spacings functioning as air passages are defined between the inner wall of the carrier and the secondary battery. The carrier is formed with air inlet openings for introducing an air flow into the internal space and an air outlet opening for discharging the air flow out of the internal space. The plural cells are arranged adjacent to each other with given intervals on the same plane.

    摘要翻译: 鞍座式燃料电池电动车辆包括用于驱动后轮的马达,用于向马达供电的二次电池,用于运送行李的托架和用于支撑操作者的座椅,托架位于座椅后面和上方 后轮。 二次电池包括多个细胞,每个细胞具有细长的盒状形状,并且存储在载体的内部空间中,从而增加了车身布局的灵活性。 作为空气通道的间隔限定在载体的内壁和二次电池之间。 载体形成有用于将空气流引入内部空间的空气入口开口和用于将空气流排出内部空间的出气口。 多个单元以相同的平面上给定的间隔彼此相邻布置。

    Method and system for controlling charging of batteries
    4.
    发明授权
    Method and system for controlling charging of batteries 失效
    电池充电控制方法及系统

    公开(公告)号:US06771046B2

    公开(公告)日:2004-08-03

    申请号:US10329687

    申请日:2002-12-27

    IPC分类号: H01M1044

    摘要: A method of controlling the charging of a secondary battery (battery) without deterioration of a charging/discharging characteristic of the battery. An ordinary charging portion performs a first charging control specified to stop the charging at a charge level less than a full-charge level is used in combination with a refresh charging portion for performing a second charging control specified to stop the charging at a charge level more than the full-charge level. When the charging by the ordinary charging portion is continuously repeated by, for example, 10 times, a switching portion is switched such that the next charging is performed by the refresh charging portion. A counter, which is reset when the charging by the refresh charging portion is terminated, is provided for deciding whether or not the number of times of the repeated charging reaches 10. The counter can be replaced with means having a function of outputting, if a random number generated by a random number generator is a specific value, a switching command to the switching portion.

    摘要翻译: 控制二次电池(电池)的充电而不劣化电池的充放电特性的方法。 普通充电部分执行指定的停止充电水平的充电水平的第一充电控制,该充电控制与完全充电电平相结合的刷新充电部分结合使用,用于执行指定的用于以更多充电水平停止充电的第二充电控制 比完全充电水平。 当普通充电部分的充电例如持续重复10次时,切换部分被切换,使得下一次充电由刷新充电部分执行。 提供当刷新充电部分的充电终止时复位的计数器,用于确定重复充电的次数是否达到10。可以用具有输出功能的装置来替换计数器,如果 由随机数发生器产生的随机数是特定值,切换部分的切换命令。

    Data processor apparatus and shading apparatus
    5.
    发明授权
    Data processor apparatus and shading apparatus 失效
    数据处理装置和遮光装置

    公开(公告)号:US06433782B1

    公开(公告)日:2002-08-13

    申请号:US08894786

    申请日:1997-08-28

    IPC分类号: G06T1550

    摘要: In a data processor and a shading apparatus used in the data processor, the data processor selects an address based on the information of a memory or a translation look-aside buffer. Therefore, even when the same data are accessed, a different address at high speed is adopted according to the hardware, object to be processed, processing, etc. A plurality of geometric vectors are given as the parameters for the vertexes of a picture, the vectors are interpolated in the picture, and the luminance of each small area in the figure is calculated using the vectors generated by the interpolation. Therefore, a spotlight or highlight can be expressed with high accuracy and at high speed even when the amount of the hardware and the extent of the picture are small.

    摘要翻译: 在数据处理器中使用的数据处理器和着色装置中,数据处理器根据存储器或翻译后备缓冲器的信息来选择一个地址。 因此,即使在访问相同的数据的情况下,也可以根据硬件,被处理对象,处理等来采用高速的不同的地址。作为图像的顶点的参数,给出多个几何矢量, 矢量被内插在图像中,并且使用通过内插生成的矢量来计算图中每个小区域的亮度。 因此,即使当硬件的数量和图像的程度小时,也可以高精度和高速度地表现聚光灯或高光。

    Graphic processing having apparatus for outputting FIFO vacant
information
    6.
    发明授权
    Graphic processing having apparatus for outputting FIFO vacant information 失效
    具有用于输出FIFO空闲信息的装置的图形处理

    公开(公告)号:US5717440A

    公开(公告)日:1998-02-10

    申请号:US355151

    申请日:1994-12-06

    摘要: A graphic processing system including a main memory for storing a program and information correspond to pixels, a main processor for effecting an execution processing of a program transferred from the main memory or from an external device so as to control the system, display/output devices such as a CRT device and a printer for outputting graphic information attained by controlling pixels arranged in a plurality of dimensions, a frame buffer for storing information corresponding to pixels outputted to the display/output devices, and a graphic processor for receiving a command and parameter information transferred from the main memory and/or the main processor, for generating character and graphic data in accordance with a predetermined processing procedure and for performing a transfer control including an execution of a drawing processing to transfer generated data through first and second address buses and first and second data buses to the main memory and/or the frame buffer, respectively. The system includes a bus connection switch circuit to be controlled by the graphic processor to effect a connection control between the first and second address buses and between the first and second data buses so as to enable execution of a drawing processing in the main memory connected to a bus on the main processor side and a data transfer between the main memory and the frame buffer.

    摘要翻译: 包括用于存储程序的主存储器和对应于像素的信息的图形处理系统,用于执行从主存储器或从外部设备传送的程序的执行处理以便控制系统的主处理器,显示/输出设备 例如用于输出通过控制以多个维度排列的像素获得的图形信息的CRT设备和打印机,用于存储对应于输出到显示/输出设备的像素的信息的帧缓冲器,以及用于接收命令和参数的图形处理器 从主存储器和/或主处理器传送的信息,用于根据预定的处理过程产生字符和图形数据,并且用于执行包括执行绘图处理的传送控制,以通过第一和第二地址总线传送生成的数据;以及 呼叫到主存储器和/或帧缓冲器的第一和第二数据总线 真诚地 该系统包括由图形处理器控制的总线连接开关电路,以实现第一和第二地址总线之间以及第一和第二数据总线之间的连接控制,以便能够执行与主存储器连接的图形处理 主处理器侧的总线和主存储器与帧缓冲器之间的数据传输。

    Graphic processor suitable for graphic data tranfers and conversion
processes
    7.
    发明授权
    Graphic processor suitable for graphic data tranfers and conversion processes 失效
    图形处理器适用于图形数据传输和转换过程

    公开(公告)号:US5319750A

    公开(公告)日:1994-06-07

    申请号:US942001

    申请日:1992-09-08

    IPC分类号: G06T17/00 G06F15/62

    CPC分类号: G06T17/00

    摘要: A graphic processor which controls reading, writing and transfer of graphic data for a display memory that stores graphic data. The processor includes a first unit which stores first address information for addressing the display memory and first pixel address information which points a pixel position in a word specified by the first address information, a second unit which stores second address information for addressing the display memory and second pixel address information which points a pixel position in a word specified by the second address information, a third unit which shifts graphic data of multiple pixels included in two consecutive words to extract continuous 1-word graphic data, and a fourth unit which implements drawing computations pixel-wise concurrently for one word depending on the number of pixels included in a word. Even if transfer source graphic data lies across two consecutive words, the processor fetches the source data in single reading, processes the data word-wise at once, and stores the result in the display memory.

    摘要翻译: 用于控制用于存储图形数据的显示存储器的图形数据的读取,写入和传送的图形处理器。 处理器包括第一单元,其存储用于寻址显示存储器的第一地址信息和指向由第一地址信息指定的字中的像素位置的第一像素地址信息;第二单元,存储用于寻址显示存储器的第二地址信息;以及 指定由第二地址信息指定的字中的像素位置的第二像素地址信息;移动包括在两个连续字中的多个像素的图形数据以提取连续的1字图形数据的第三单元;以及实现绘图的第四单元 根据包含在一个单词中的像素数量,对一个单词进行像素同步的计算。 即使传输源图形数据位于两个连续的字中,处理器以单次读取的方式读取源数据,一次处理数据,并将结果存储在显示存储器中。

    Command performing order change-over system in data processor
    8.
    发明授权
    Command performing order change-over system in data processor 失效
    在数据处理器中执行命令转换系统的命令

    公开(公告)号:US5155821A

    公开(公告)日:1992-10-13

    申请号:US290467

    申请日:1988-12-27

    摘要: A slave controller formed on a single semiconductor substrate executes a built in control algorithm in response to a command supplied from a master controller. Upon completion of command execution, the controls respond to predetermined information contained within the command by branching internal control operation in accordance with the new command. The controls then suspend a series of operations for executing the new command upon detection of the branch condition. Once the internal state has been changed over, the slave controller sends an instruction to the master controller.

    摘要翻译: 形成在单个半导体衬底上的从控制器响应于从主控制器提供的命令执行内置的控制算法。 命令执行完成后,通过根据新命令分支内部控制操作来控制命令中包含的预定信息。 然后,控制器在检测到分支条件后暂停执行新命令的一系列操作。 一旦内部状态已经改变,从控制器向主控制器发送指令。

    Graphic processing system having bus connection control capable of
high-speed parallel drawing processing in a frame buffer and a system
memory
    9.
    发明授权
    Graphic processing system having bus connection control capable of high-speed parallel drawing processing in a frame buffer and a system memory 失效
    具有能够在帧缓冲器和系统存储器中进行高速并行绘制处理的总线连接控制的图形处理系统

    公开(公告)号:US5046023A

    公开(公告)日:1991-09-03

    申请号:US105292

    申请日:1987-10-06

    摘要: A graphic processing system including a main memory for storing a program and information corresponding to pixels, a main processor for effecting an execution processing of a program transferred from the main memory or from an external device so as to control the system, display/output devices such as a CRT device and a printer for outputting graphic information attained by controlling pixels arranged in a plurality of dimensions, a frame buffer for storing information corresponding to pixels outputted to the display/output devices, and a graphic processor for receiving a command and parameter information transferred from the main memory and/or the main processor, for generating character and graphic data in accordance with a predetermined processing procedure and for performing a transfer control including an execution of a drawing processing to transfer generated data through first and second address buses and first and second data buses to the main memory and/or the frame buffer, respectively. The system also includes bus connection switch circuit to be controlled by the graphic processor to effect a connection control between the first and second address buses and between the first and second data buses so as to enable execution of a drawing processing in the main memory connected to a bus on the main processor side and a data transfer between the main memory and the frame buffer.

    摘要翻译: 一种图形处理系统,包括用于存储程序的主存储器和与像素相对应的信息,用于执行从主存储器或从外部设备传送的程序的执行处理以便控制系统的主处理器,显示/输出设备 例如用于输出通过控制以多个维度排列的像素获得的图形信息的CRT设备和打印机,用于存储对应于输出到显示/输出设备的像素的信息的帧缓冲器,以及用于接收命令和参数的图形处理器 从主存储器和/或主处理器传送的信息,用于根据预定的处理过程产生字符和图形数据,并且用于执行包括执行绘图处理的传送控制,以通过第一和第二地址总线传送生成的数据;以及 第一和第二数据总线到主存储器和/或帧缓冲器, 分别。 该系统还包括由图形处理器控制的总线连接开关电路,以实现第一和第二地址总线之间以及第一和第二数据总线之间的连接控制,以便能够执行连接到 主处理器侧的总线和主存储器与帧缓冲器之间的数据传输。

    Substrate processing method and storage medium
    10.
    发明授权
    Substrate processing method and storage medium 有权
    基板处理方法和存储介质

    公开(公告)号:US08715520B2

    公开(公告)日:2014-05-06

    申请号:US13425551

    申请日:2012-03-21

    IPC分类号: C23F1/40

    摘要: There is provided a substrate processing method capable of etching a layer containing, at least, platinum without using a halogen gas. When etching the platinum-manganese layer on a wafer W by using a tantalum (Ta) layer 38 having a certain pattern shape, a processing gas containing, at least, a carbon monoxide gas, a hydrogen gas, and a rare gas is used, and a ratio of a gas flow rate of the hydrogen gas to a total gas flow rate of the carbon monoxide gas and the hydrogen gas is in a range of from about 50% to about 75%.

    摘要翻译: 提供了能够在不使用卤素气体的情况下蚀刻至少含有铂的层的基板处理方法。 当通过使用具有一定图案形状的钽(Ta)层38来蚀刻晶圆W上的铂 - 锰层时,使用至少含有一氧化碳气体,氢气和稀有气体的处理气体, 并且氢气的气体流量与一氧化碳气体和氢气的总气体流量的比率在约50%至约75%的范围内。