公开(公告)号：US09023170B2

公开(公告)日：2015-05-05

申请号：US13260041

申请日：2010-10-27

申请人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

发明人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

IPC分类号： B29C70/68 ,  H01L21/67 ,  B81C1/00 ,  B81C99/00

摘要： A multi-layer bonding method of the present invention includes: forming a first bonded substrate by bonding a first substrate and an intermediate substrate in a bonding chamber; conveying a second substrate inside said bonding chamber when said first bonded substrate is arranged inside said bonding chamber; and forming a second bonded substrate by bonding said first bonded substrate and said second substrate in said bonding chamber. According to such a multi-layer bonding method, the upper-side substrate can be bonded with an intermediate substrate and then a first bonded substrate is bonded with a lower-side substrate without taking out the first bonded substrate from the bonding chamber. For this reason, a second bonded substrate can be produced at high speed and at a low cost.

公开(公告)号：US20060169632A1

公开(公告)日：2006-08-03

申请号：US11342545

申请日：2006-01-31

申请人： Takenori Suzuki ,  Masanori Goto ,  Yosuke Hio

发明人： Takenori Suzuki ,  Masanori Goto ,  Yosuke Hio

IPC分类号： B01D29/07

CPC分类号： B01D29/07 ,  B01D2201/12 ,  B01D2201/127 ,  F16H57/0404

摘要： There is provided a filter element which maintains the flow rate of a fluid passing through a filter medium, restrains a pressure loss as far as possible, and is compact in size. In the filter element including a filter medium 30 pleated so that peaks 30a and valleys 30b are arranged alternately and a frame 21 for holding the filter medium 30, the frame 21 includes a frame body 22 forming the peripheral edge portion thereof and a plurality of ribs 23 extending in parallel on the inside of the frame body 22. The interval H between the ribs 23 is set at 5 to 35 mm, and the filter medium 30 is folded at an angle θ of at least four degrees at the peaks 30a and the valleys 30b.

摘要翻译： 提供一种过滤元件，其保持通过过滤介质的流体的流量，尽可能地抑制压力损失，并且尺寸紧凑。 在包括过滤介质30的过滤元件中，使得峰30a和谷30b交替布置，并且框架21用于保持过滤介质30，框架21包括形成其周缘部的框体22和多个 的肋23在框体22的内侧平行延伸。肋23之间的间隔H设定为5〜35mm，过滤介质30在峰30处以至少四度的角度θ折叠 a和谷30b。

公开(公告)号：US08985175B2

公开(公告)日：2015-03-24

申请号：US12811177

申请日：2008-09-29

申请人： Masato Kinouchi ,  Takayuki Goto ,  Satoshi Tawara ,  Takeshi Tsuno ,  Jun Utsumi ,  Kensuke Ide ,  Takenori Suzuki

发明人： Masato Kinouchi ,  Takayuki Goto ,  Satoshi Tawara ,  Takeshi Tsuno ,  Jun Utsumi ,  Kensuke Ide ,  Takenori Suzuki

IPC分类号： B32B37/10 ,  B23K20/02

CPC分类号： B32B37/1009 ,  B23K20/02 ,  B32B37/10 ,  B32B2309/68 ,  H01L21/187 ,  H01L21/2007 ,  H01L21/67092 ,  H01L21/67253

摘要： A room temperature bonding machine is provided with an evacuation apparatus, a gas supply apparatus, a pressure gauge, a cleaner apparatus, a pressure controller and a pressing mechanism. The evacuation apparatus evacuates gas from the chamber. The gas supply apparatus supplies introduction gas into the chamber. The pressure gauge measures the pressure in the chamber. The cleaner apparatus cleans first and second substrates in the chamber when said pressure is at a predetermined degree of vacuum. The pressure controller controls both of the evacuation apparatus and the gas supply apparatus so that the pressure is regulated to a target pressure. The pressing mechanism presses and bonds the first and second substrates when the pressure is set to said target pressure.

摘要翻译： 室温粘合机设置有排气装置，气体供给装置，压力计，清洁装置，压力控制器和按压机构。 抽空装置从室抽出气体。 气体供给装置将引入气体供给到室内。 压力表测量室内的压力。 当所述压力处于预定的真空度时，清洁器装置清洗腔室中的第一和第二基板。 压力控制器控制排气装置和气体供给装置，使得压力被调节到目标压力。 当压力设定为所述目标压力时，按压机构按压并结合第一和​​第二基板。

公开(公告)号：US20120031557A1

公开(公告)日：2012-02-09

申请号：US13260041

申请日：2010-10-27

申请人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

发明人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

IPC分类号： B29C70/68 ,  B65C9/40

CPC分类号： H01L21/67092 ,  B81C1/00357 ,  B81C99/0025

摘要： A multi-layer bonding method of the present invention includes: forming a first bonded substrate by bonding a first substrate and an intermediate substrate in a bonding chamber; conveying a second substrate inside said bonding chamber when said first bonded substrate is arranged inside said bonding chamber; and forming a second bonded substrate by bonding said first bonded substrate and said second substrate in said bonding chamber. According to such a multi-layer bonding method, the upper-side substrate can be bonded with an intermediate substrate and then a first bonded substrate is bonded with a lower-side substrate without taking out the first bonded substrate from the bonding chamber. For this reason, a second bonded substrate can be produced at high speed and at a low cost.

摘要翻译： 本发明的多层接合方法包括：通过在接合室中接合第一基板和中间基板来形成第一接合基板; 当所述第一键合衬底布置在所述接合室内时，在所述接合室内传送第二衬底; 以及通过在所述接合室中接合所述第一键合衬底和所述第二衬底来形成第二接合衬底。 根据这样的多层接合方法，可以将上侧基板与中间基板接合，然后将第一接合基板与下侧基板接合，而不从接合室取出第一接合基板。 为此，可以高速且低成本地制造第二粘结衬底。

公开(公告)号：US5304235A

公开(公告)日：1994-04-19

申请号：US862460

申请日：1992-04-02

申请人： Hideo Watanabe ,  Masatoshi Udagawa ,  Naritoshi Muramatsu ,  Hideki Hoshino ,  Kazumi Yamazaki ,  Hideo Moriwaki ,  Atsushi Suzuki ,  Tsutomu Mori ,  Takenori Suzuki

发明人： Hideo Watanabe ,  Masatoshi Udagawa ,  Naritoshi Muramatsu ,  Hideki Hoshino ,  Kazumi Yamazaki ,  Hideo Moriwaki ,  Atsushi Suzuki ,  Tsutomu Mori ,  Takenori Suzuki

IPC分类号： B01D53/04 ,  F02M25/08

CPC分类号： B01D53/0415 ,  F02M25/0854 ,  B01D2253/102 ,  B01D2256/24 ,  B01D2259/40086 ,  B01D2259/4516 ,  B01D2259/4566 ,  F02M2025/0863

摘要： A canister includes a casing, a fuel reserve well defined at the bottom of the casing, an adsorbent layer provided in the casing for adsorbing fuel vapor, the adsorbent layer communicating with the fuel reserve well at a region of its lower portion and communicating with an atmosphere at its upper portion, a first communication passage defined so that the fuel reserve well communicates with a fuel system of an engine, and a second communication passage defined so that the fuel reserve well communicates with an intake system o f the engine. The second communication passage includes a purge chamber communicating with a region of the adsorbent layer other than the region of the adsorbent layer with which the fuel reserve well communicates, a first fuel outflow passage having a liquid fuel suction port open to the bottom of the fuel reserve well at its lower portion and a nozzle opening positioned in the purge chamber at its upper portion, and a second fuel outflow passage defined over the nozzle opening of the first fuel outflow passage for providing a fuel flow passage extending from the purge chamber to the suction system of the engine.

摘要翻译： 罐包括壳体，在壳体底部限定的燃料储存器，设置在壳体中用于吸附燃料蒸气的吸附剂层，吸附剂层在其下部的区域与燃料备用井连通并与其连通 其上部具有第一连通通道，第一连通通道被限定为使得燃料储备良好地与发动机的燃料系统连通;以及第二连通通道，其被限定为使得燃料储备良好地与发动机的进气系统连通。 第二连通通道包括与吸附剂层的除了燃料储备良好连通的区域之外的吸附剂层的区域连通的净化室，具有通向燃料底部的液体燃料吸入口的第一燃料流出通道 在其下部保持良好并且在其上部处设置在净化室中的喷嘴开口和限定在第一燃料流出通道的喷嘴开口上方的第二燃料流出通道，用于提供从吹扫室延伸到燃料流通道的燃料流动通道 发动机抽吸系统。

公开(公告)号：US09443711B2

公开(公告)日：2016-09-13

申请号：US14345984

申请日：2012-02-24

申请人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

发明人： Masato Kinouchi ,  Takayuki Goto ,  Takeshi Tsuno ,  Kensuke Ide ,  Takenori Suzuki

IPC分类号： H01L21/02 ,  H01L21/67 ,  H01L21/683

CPC分类号： H01L21/02 ,  H01L21/67011 ,  H01L21/67092 ,  H01L21/67253 ,  H01L21/6831

摘要： A room-temperature bonding apparatus of the present invention includes: a plurality of first beam sources configured to emit a plurality of first activation beams which are irradiated to a first activation surface of a first substrate; a plurality of second beam sources configured to emit a plurality of second activation beams which are irradiated to a second activation surface of a second substrate; and a pressure welding mechanism configured to bond the first substrate and the second substrate by bring the first activation surface and the second activation surface contact, after the first activation surface and the second activation surface are irradiated. The room-temperature bonding apparatus can more uniformly irradiate to the first activation surface and the second activation surface, so that the first substrate and the second substrate can be more appropriately bonded with each other, compared with another room-temperature bonding apparatus which irradiates the first activation surface and the second activation surface by using one beam source.

摘要翻译： 本发明的室温接合装置包括：多个第一光束源，被配置为发射照射到第一基板的第一激活表面的多个第一激活光束; 多个第二光束源，被配置为发射多个第二激活光束，其被照射到第二基板的第二激活表面; 以及压力焊接机构，其被配置为在所述第一激活表面和所述第二激活表面被照射之后使所述第一激活表面和所述第二激活表面接触来接合所述第一基板和所述第二基板。 与另外的室温接合装置相比，室温接合装置能够更均匀地照射到第一活化面和第二活化面，使得第一基板和第二基板能够更适当地接合 第一激活表面和第二激活表面。

公开(公告)号：US08906175B2

公开(公告)日：2014-12-09

申请号：US13139085

申请日：2009-09-29

申请人： Masato Kinouchi ,  Takayuki Goto ,  Satoshi Tawara ,  Takeshi Tsuno ,  Jun Utsumi ,  Kensuke Ide ,  Takenori Suzuki

发明人： Masato Kinouchi ,  Takayuki Goto ,  Satoshi Tawara ,  Takeshi Tsuno ,  Jun Utsumi ,  Kensuke Ide ,  Takenori Suzuki

IPC分类号： B29C65/00 ,  B31B1/60 ,  B32B37/00 ,  H01L21/67 ,  H01L21/683 ,  B23K20/02

CPC分类号： H01L21/6838 ,  B23K20/02 ,  B23K2101/40 ,  H01L21/67201 ,  Y10T156/10 ,  Y10T156/17

摘要： A room temperature bonding apparatus according to the present invention is provided with a load lock chamber having an internal space which is pressure-reduced; and a cartridge arranged in the load lock chamber. The cartridge includes an island portion formed to contact a substrate when the substrate is put on the cartridge. A flow passage is formed for the island portion to connect a space between the cartridge and the substrate to outside when the substrate is put on the cartridge. Therefore, in the room temperature bonding apparatus can prevent making the substrate is moved to the cartridge due to gas when the internal space is pressure-reduced.

摘要翻译： 根据本发明的室温接合装置设置有具有减压的内部空间的负载锁定室; 以及设置在负载锁定室中的盒。 所述盒包括当所述基板被放置在所述盒上时形成为接触基板的岛部。 当基板被放置在盒上时，形成用于岛部分的流动通道，以将盒和基板之间的空间连接到外部。 因此，室温接合装置可以防止当内部空间减压时由于气体使基板移动到墨盒。

公开(公告)号：US20120247645A1

公开(公告)日：2012-10-04

申请号：US13504356

申请日：2010-11-30

申请人： Keiichiro Tsutsumi ,  Takeshi Tsuno ,  Takayuki Goto ,  Masato Kinouchi ,  Takenori Suzuki ,  Kensuke Ide

发明人： Keiichiro Tsutsumi ,  Takeshi Tsuno ,  Takayuki Goto ,  Masato Kinouchi ,  Takenori Suzuki ,  Kensuke Ide

IPC分类号： B32B41/00 ,  B32B37/08 ,  B32B37/06

CPC分类号： H01L21/67092 ,  H01L21/187

摘要： The present invention includes an activating step S2 of activating, by irradiating a first substrate surface of a first substrate and a second substrate surface of a second substrate with particles, the second substrate surface and the first substrate surface, and a bonding step S4 of bonding the second substrate and the first substrate together by bringing the second substrate surface and the first substrate surface into contact with each other after a temperature difference between a temperature of the first substrate and a temperature of the second substrate becomes equal to or lower than a predetermined value. According to this bonding method, warpage occurring in a bonded substrate obtained can be further reduced compared with other bonding methods of bonding both substrates before the temperature difference between the temperature of the first substrate and the temperature of the second substrate becomes equal to or lower than a predetermined value.

摘要翻译： 本发明包括激活步骤S2，通过用第二基板表面和第一基板表面照射第一基板的第一基板表面和第二基板的第二基板表面，以及接合步骤S4 第二基板和第一基板通过使第二基板表面和第一基板表面在第一基板的温度和第二基板的温度之间的温度差等于或低于预定的温度之间彼此接触而一起 值。 根据该接合方法，与在第一基板的温度和第二基板的温度之间的温度差变为等于或低于第一基板的温度差之前的两个基板的其他接合方法相比，获得的接合基板的翘曲可以进一步降低 预定值。

公开(公告)号：US06514326B1

公开(公告)日：2003-02-04

申请号：US09890137

申请日：2001-07-26

申请人： Toshimi Hara ,  Takenori Suzuki

发明人： Toshimi Hara ,  Takenori Suzuki

IPC分类号： B01D5304

CPC分类号： F02M25/0854

摘要： A canister module includes a canister housing in which a plurality of cylindrical adsorbent chambers filled with adsorbent are provided side by side with a gap therebetween. Canister-peripheral parts are connected to the adsorbent chambers through communicating openings provided on the canister housing and are in the gap.

摘要翻译： 罐模块包括罐壳体，其中填充有吸附剂的多个圆柱形吸附剂室并排设置，其间具有间隙。 罐周边部分通过设置在罐壳体上的连通孔连接到吸附剂室，并且在间隙中。

公开(公告)号：US5645036A

公开(公告)日：1997-07-08

申请号：US541797

申请日：1995-10-10

申请人： Hideki Matsumoto ,  Naritoshi Muramatsu ,  Hiroaki Mihara ,  Masahiko Uchiyama ,  Kouichi Ikuma ,  Takenori Suzuki

发明人： Hideki Matsumoto ,  Naritoshi Muramatsu ,  Hiroaki Mihara ,  Masahiko Uchiyama ,  Kouichi Ikuma ,  Takenori Suzuki

IPC分类号： F02M25/08 ,  F02M37/04

CPC分类号： F02M25/0854

摘要： A fuel vapor capturing canister includes a cylindrical casing having a communicating hole which is formed at one end so as to communicate with the atmosphere and another communicating hole which is formed at the other end so as to communicate with a fuel tank and an intake system of an engine. An adsorbent is accommodated in the casing so as to form at least one layer. A pair of partitioning plates partition the adsorbent layer longitudinally of the casing. A deflecting plate is disposed between the partitioning plates so as to protrude from an inner wall face of the casing inwardly of the same. The partitioning plates are open in the vicinity of sides of the deflecting plate respectively.

摘要翻译： 燃料蒸汽捕集罐包括：圆筒形壳体，其具有连通孔，该连通孔一端形成为与大气连通;另一端形成有连通孔，该连通孔与燃料箱和进气系统连通; 一个引擎 吸附剂容纳在壳体中以形成至少一层。 一对分隔板在壳体的纵向分隔吸附剂层。 偏转板设置在分隔板之间，以便从壳体的内壁面向内突出。 分隔板分别在偏转板的侧面附近打开。