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21 条记录 (耗时 0.014 秒)

    Apparatus and method for analysis of surface impurities in a very small region
    3.
    发明授权
    Apparatus and method for analysis of surface impurities in a very small region 失效
    用于分析非常小的区域中的表面杂质的装置和方法

    公开(公告)号：US5877496A

    公开(公告)日：1999-03-02

    申请号：US860926

    申请日：1997-07-21

    申请人： Kazuhiko Tabuse ,  Masao Watanabe

    发明人： Kazuhiko Tabuse ,  Masao Watanabe

    IPC分类号： G01N23/225 ,  H01J37/252 ,  H01J49/00

    CPC分类号： G01N23/2252 ,  G01N23/225 ,  H01J37/252 ,  H01J2237/2516

    摘要： An analysis method by which a surface impurity in a very small region can be specified, wherein an electron beam is accelerated with an acceleration voltage and irradiated upon a very small region of a specimen and a mass spectrometry of neutral surface impurity molecules desorbed from the very small region is performed. The acceleration voltage for accelerating the electron beam is set to a voltage with which desorption of the neutral surface impurity molecules by an electron stimulated desorption (ESD) effect occurs.

    摘要翻译： PCT No.PCT / JP96 / 03406 Sec。 371日期1997年7月21日 102（e）日期1997年7月21日PCT 1996年11月21日PCT PCT。 WO97 / 19343 PCT公开号 日期：1997年5月29日可以规定非常小的区域的表面杂质的分析方法，其中电子束以加速电压加速并照射在样本的非常小的区域上，并且中性表面杂质分子的质谱 从非常小的区域解吸。 用于加速电子束的加速电压被设定为通过电子刺激解吸（ESD）效应发生中性表面杂质分子的解吸的电压。

    Focused ion beam system and a method of sample preparation and observation
    4.
    发明申请
    Focused ion beam system and a method of sample preparation and observation 有权
    聚焦离子束系统及样品制备与观察方法

    公开(公告)号：US20070187597A1

    公开(公告)日：2007-08-16

    申请号：US11654685

    申请日：2007-01-18

    申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    IPC分类号： G21K7/00

    CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

    摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

    摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。

    Flood gun for charge neutralization
    5.
    发明授权
    Flood gun for charge neutralization 有权
    洪水枪用于中和电荷

    公开(公告)号：US07067821B2

    公开(公告)日：2006-06-27

    申请号：US11071998

    申请日：2005-03-04

    申请人： Bryan Robert Barnard ,  Alan Rupert Bayly ,  Michael Hugh Humpherson

    发明人： Bryan Robert Barnard ,  Alan Rupert Bayly ,  Michael Hugh Humpherson

    IPC分类号： H01J37/30 ,  H01J49/10

    CPC分类号： H01J37/026 ,  H01J2237/0044 ,  H01J2237/06308 ,  H01J2237/0807 ,  H01J2237/082 ,  H01J2237/2516

    摘要： A flood gun 10 for charge neutralization of an analysis region Ra of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Ae at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Ai at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.

    摘要翻译： 用于对洪水枪下游的样品S的分析区域R a a进行电荷中和的喷枪10，包括：电子的第一源30; 带正电的颗粒的第二源50; 以及提取和聚焦组件60,64，其布置成：（i）从第一源提取第一电子束，并将第一光束聚焦到分析区域处的第一泛洪区域A 1; 和（ii）从第二源提取第二个正的粒子束，并将第二个光束聚焦到分析区域的第二个洪泛区域A 1。 电子束和正粒子束可以在单一操作模式中或者以双重操作模式同时被提取和聚焦。 公开了提供电荷中和的相应方法和用于二次粒子发射分析的光谱系统。

    Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same
    6.
    发明授权
    Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same 有权
    标准样品用透射电子显微镜（TEM）元素测绘和TEM电子测绘法使用该方法

    公开(公告)号：US07053372B2

    公开(公告)日：2006-05-30

    申请号：US11034721

    申请日：2005-01-14

    申请人： Gyeong-su Park ,  Kazutoshi Kaji ,  Jong-bong Park ,  Shohei Terada ,  Tatsumi Hirano ,  Se-ahn Song

    发明人： Gyeong-su Park ,  Kazutoshi Kaji ,  Jong-bong Park ,  Shohei Terada ,  Tatsumi Hirano ,  Se-ahn Song

    IPC分类号： G01N23/02 ,  H01J37/26

    CPC分类号： G01N23/083 ,  H01J2237/2516

    摘要： A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1–5 nm or 6–10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.

    摘要翻译： 提供了用于透射电子显微镜（TEM）元素映射的标准样品和使用其的TEM元素映射方法。 标准样品包括底物; 含有形成在基材上的重原子的第一晶体薄膜; 在第一结晶薄膜上形成具有含有轻质原子并具有1-5nm或6-10nm厚度的氧化物或氮化物的第一非晶薄膜; 含有形成在第一非晶薄膜上的重原子的第二晶体薄膜。 标准样品可用于校正多层纳米尺寸薄膜的TEM，EDS和EELS映射结果，并优化测绘条件。

    ELECTRONIC STATE CALCULATION METHOD, ELECTRONIC STATE CALCULATION DEVICE, AND RECORDING MEDIUM
    7.
    发明申请
    ELECTRONIC STATE CALCULATION METHOD, ELECTRONIC STATE CALCULATION DEVICE, AND RECORDING MEDIUM 有权
    电子状态计算方法，电子状态计算装置和记录介质

    公开(公告)号：US20130151174A1

    公开(公告)日：2013-06-13

    申请号：US13817586

    申请日：2011-08-17

    申请人： Koichi Kusakabe ,  Isao Maruyama

    发明人： Koichi Kusakabe ,  Isao Maruyama

    IPC分类号： G06F17/11 ,  G01N27/00

    CPC分类号： G06F17/11 ,  G01N23/2251 ,  G01N27/00 ,  G06F19/701 ,  H01J2237/2445 ,  H01J2237/24485 ,  H01J2237/2516

    摘要： A method of calculating an electronic state of a material by using a calculation device, wherein the calculation device sets a set containing, as elements, a plurality of operation models, where each of operation models provides an approximate solution to the electronic state of the material, determines an optimized operation model that are close in distance in a space formed by the set while defining a direction in which the calculated self-consistent solutions of the effective Hamiltonian of an electron system continuously change, evaluates a variational energy of the electron system by the self-consistent solution, updates the operation model so that the evaluated variational energy approaches an energy of an exact solution to be calculated and further, so that the variational energy forms a monotonically decreasing convex function, and calculates the exact solution of the electronic state from one or a plurality of variational energy series.

    摘要翻译： 一种通过使用计算装置计算材料的电子状态的方法，其中所述计算装置设置包含作为元件的多个操作模型的组，其中每个操作模型提供对所述材料的电子状态的近似解 确定在由组合形成的空间中距离接近的优化操作模型，同时限定计算出的电子系统的有效哈密顿量的自相矛盾解的连续变化的方向，评估电子系统的变分能量 自相矛盾的解决方案更新了操作模型，使得评估的变分能量接近待计算的精确解的能量，使得变分能量形成单调递减的凸函数，并计算电子状态的精确解 从一个或多个变分能量序列。

    Charged particle analyser and method using electrostatic filter grids to filter charged particles
    8.
    发明授权
    Charged particle analyser and method using electrostatic filter grids to filter charged particles 有权
    带电粒子分析仪和使用静电过滤网过滤带电粒子的方法

    公开(公告)号：US08421027B2

    公开(公告)日：2013-04-16

    申请号：US12523287

    申请日：2008-01-14

    申请人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

    发明人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

    IPC分类号： H01J3/26

    CPC分类号： H01J37/05 ,  H01J37/256 ,  H01J37/28 ,  H01J49/488 ,  H01J2237/053 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/2516

    摘要： A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

    摘要翻译： 带电粒子分析仪（1）包括用于接收具有发散轨迹的带电粒子并用于将所述轨迹转换成基本上平行轨迹的第一非成像静电透镜（8,9）。 提供至少一个平面过滤器（10）用于接收具有基本上平行轨迹的带电粒子并根据它们各自的能量对带电粒子进行过滤。 第二非成像静电透镜（11）接收能量过滤的带电粒子并根据其能量选择性地修改它们的轨迹。 带电粒子检测器（12）然后根据它们选择性地修改的轨迹接收带电粒子。

    Flood gun for charge neutralization
    10.
    发明申请
    Flood gun for charge neutralization 有权
    洪水枪用于中和电荷

    公开(公告)号：US20050205800A1

    公开(公告)日：2005-09-22

    申请号：US11071998

    申请日：2005-03-04

    申请人： Bryan Barnard ,  Alan Bayly ,  Michael Humpherson

    发明人： Bryan Barnard ,  Alan Bayly ,  Michael Humpherson

    IPC分类号： H01J37/02 ,  G01N23/00 ,  H01J27/00

    CPC分类号： H01J37/026 ,  H01J2237/0044 ,  H01J2237/06308 ,  H01J2237/0807 ,  H01J2237/082 ,  H01J2237/2516

    摘要： A flood gun 10 for charge neutralization of an analysis region Ra of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Ae at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Ai at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.

    摘要翻译： 用于对洪水枪下游的样品S的分析区域R a a进行电荷中和的喷枪10，包括：电子的第一源30; 带正电的颗粒的第二源50; 以及提取和聚焦组件60,64，其布置成：（i）从第一源提取第一电子束，并将第一光束聚焦到分析区域处的第一泛洪区域A 1; 和（ii）从第二源提取第二个正的粒子束，并将第二个光束聚焦到分析区域的第二个洪泛区域A 1。 电子束和正粒子束可以在单一操作模式中或者以双重操作模式同时被提取和聚焦。 公开了提供电荷中和的相应方法和用于二次粒子发射分析的光谱系统。