公开(公告)号：US06544627B1

公开(公告)日：2003-04-08

申请号：US09648341

申请日：2000-08-25

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： B32B900

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

摘要翻译： 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

公开(公告)号：US20070098980A1

公开(公告)日：2007-05-03

申请号：US11463579

申请日：2006-08-09

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： B32B9/00 ,  B32B17/06 ,  H05H1/24 ,  C23C16/00

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

公开(公告)号：US06537668B1

公开(公告)日：2003-03-25

申请号：US09165513

申请日：1998-10-02

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： G11B572

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

公开(公告)号：US20070098979A1

公开(公告)日：2007-05-03

申请号：US11463575

申请日：2006-08-09

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： B32B17/06 ,  B32B15/04 ,  B32B9/00

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

摘要翻译： 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，其特征在于在金刚石晶格内存在大量的碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

公开(公告)号：US07513215B2

公开(公告)日：2009-04-07

申请号：US11463577

申请日：2006-08-09

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： C23C16/00

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

摘要翻译： 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

公开(公告)号：US06805891B2

公开(公告)日：2004-10-19

申请号：US10350498

申请日：2003-01-23

申请人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

发明人： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

IPC分类号： G11B572

CPC分类号： H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon—carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

摘要翻译： 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即在金刚石晶格内存在大量的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。