公开(公告)号：US20090230304A1

公开(公告)日：2009-09-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

公开(公告)号：US09287083B2

公开(公告)日：2016-03-15

申请号：US13979964

申请日：2011-12-16

申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

IPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/28

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10), in conjunction with a focus compensation of the objective lens (7).

摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

公开(公告)号：US20130299715A1

公开(公告)日：2013-11-14

申请号：US13979964

申请日：2011-12-16

申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

IPC分类号： H01J37/147

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10) , in conjunction with a focus compensation of the objective lens (7).

摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

公开(公告)号：US08097848B2

公开(公告)日：2012-01-17

申请号：US12396593

申请日：2009-03-03

申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

IPC分类号： H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。