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    SCANNING ELECTRON MICROSCOPE
    1.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20090230304A1

    公开(公告)日：2009-09-17

    申请号：US12396593

    申请日：2009-03-03

    申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    IPC分类号： G01N23/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

    摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

    摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

    Scanning electron microscope
    2.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US08097848B2

    公开(公告)日：2012-01-17

    申请号：US12396593

    申请日：2009-03-03

    申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    IPC分类号： H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

    摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

    摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

    Charged particle beam device
    3.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US09287083B2

    公开(公告)日：2016-03-15

    申请号：US13979964

    申请日：2011-12-16

    申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

    发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

    IPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/28

    CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

    摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10), in conjunction with a focus compensation of the objective lens (7).

    摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

    CHARGED PARTICLE BEAM DEVICE
    4.
    发明申请
    CHARGED PARTICLE BEAM DEVICE 有权
    充电颗粒光束装置

    公开(公告)号：US20130299715A1

    公开(公告)日：2013-11-14

    申请号：US13979964

    申请日：2011-12-16

    申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

    发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

    IPC分类号： H01J37/147

    CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

    摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10) , in conjunction with a focus compensation of the objective lens (7).

    摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

    Scanning Electron Microscope
    7.
    发明申请
    Scanning Electron Microscope 有权
    扫描电子显微镜

    公开(公告)号：US20080035843A1

    公开(公告)日：2008-02-14

    申请号：US11768291

    申请日：2007-06-26

    申请人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    发明人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    IPC分类号： H01J49/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/24495 ,  H01J2237/2605 ,  H01J2237/28

    摘要： In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.

    摘要翻译： 在扫描型电子显微镜中，在试样室内设置接地电位的反射板，反射散射从试样射出的电子撞击在反射板上，产生副电子。 施加+100〜+ 500V的正电压的电场供给电极被配置在由反射板和样本台所限定的间隙中。 布置第一检测电极以检测归因于后向散射电子的离子电流，并且布置第二检测电极以检测代表归属于二次电子和后向散射电子的离子电流共存的电流。 如上构造的扫描电子显微镜可以实现二次电子和后向散射电子的同时分离/检测。

    Scanning electron microscope
    8.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US07755045B2

    公开(公告)日：2010-07-13

    申请号：US11768291

    申请日：2007-06-26

    申请人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    发明人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    IPC分类号： H01J37/26

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/24495 ,  H01J2237/2605 ,  H01J2237/28

    摘要： In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.

    摘要翻译： 在扫描型电子显微镜中，在试样室内设置接地电位的反射板，反射散射从试样射出的电子撞击在反射板上，产生副电子。 施加+100〜+ 500V的正电压的电场供给电极被配置在由反射板和样本台所限定的间隙中。 布置第一检测电极以检测归因于后向散射电子的离子电流，并且布置第二检测电极以检测代表归属于二次电子和后向散射电子的离子电流共存的电流。 如上构造的扫描电子显微镜可以实现二次电子和后向散射电子的同时分离/检测。

    Charged particle beam apparatus
    10.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US08143573B2

    公开(公告)日：2012-03-27

    申请号：US12490775

    申请日：2009-06-24

    申请人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

    发明人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

    IPC分类号： G02F1/1335 ,  G01K1/08

    CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2611

    摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.

    摘要翻译： 照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。 提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。 以这种方式，获取图像。 通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。 像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。