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公开(公告)号：US08471580B2
公开(公告)日：2013-06-25
申请号：US12749833
申请日：2010-03-30
IPC分类号： G01R31/302
CPC分类号： H01L22/14
摘要： An apparatus comprises: a first signal source; a dopant profile measurement module (DPPM) configured to receive a portion of the signal from the signal source; a probe tip connected to the reflective coupler; a load connected in parallel with the probe tip; and a second signal source connected to a load, wherein the signal source is configured to provide an amplitude-modulated (AM) signal to the probe tip. A method is also described.
摘要翻译： 一种装置包括：第一信号源; 配置为从所述信号源接收所述信号的一部分的掺杂物分布测量模块（DPPM）; 连接到反射耦合器的探针尖端; 与探针尖端并联连接的负载; 以及连接到负载的第二信号源，其中所述信号源被配置为向所述探针尖端提供幅度调制（AM）信号。 还描述了一种方法。
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2.发明申请DOPANT PROFILE MEASUREMENT MODULE, METHOD AND APPARATUS 有权DOPANT PROFILE MEASUREMENT MODULE，METHOD AND APPARATUS公开(公告)号：US20100244870A1
公开(公告)日：2010-09-30
申请号：US12749833
申请日：2010-03-30
CPC分类号： H01L22/14
摘要： An apparatus comprises: a first signal source; a dopant profile measurement module (DPPM) configured to receive a portion of the signal from the signal source; a probe tip connected to the reflective coupler; a load connected in parallel with the probe tip; and a second signal source connected to a load, wherein the signal source is configured to provide an amplitude-modulated (AM) signal to the probe tip. A method is also described.
摘要翻译： 一种装置包括：第一信号源; 配置为从所述信号源接收所述信号的一部分的掺杂物分布测量模块（DPPM）; 连接到反射耦合器的探针尖端; 与探针尖端并联连接的负载; 以及连接到负载的第二信号源，其中所述信号源被配置为向所述探针尖端提供幅度调制（AM）信号。 还描述了一种方法。
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3.发明授权Magnetic modulation of force sensor for AC detection in an atomic force microscope 有权在原子力显微镜中用于AC检测的力传感器的磁调制
公开(公告)号：US6134955A
公开(公告)日：2000-10-24
申请号：US228226
申请日：1999-01-11
申请人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
发明人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/38 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/871 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample is provided and includes a force sensing probe tip disposed on a first side of a free end of a flexible cantilever which is adapted to be brought into close proximity to a sample surface; a magnetized material disposed on a second side opposite the first side of the flexible cantilever; an XY scanner for generating relative scanning movement between the force sensing probe tip and the sample surface; a Z control for adjusting the distance between the force sensing probe tip and the sample surface; and a deflection detector for generating a deflection signal indicative of deflection of the flexible cantilever. The scanning probe microscope also includes an ac signal source and a magnetic field generator for generating a magnetic field, with the magnetic field generator being coupled to the ac signal source so as to modulate the magnetic field with the ac signal. The force-sensing cantilever is magnetized with a moment along the soft axis of the cantilever.
摘要翻译： 提供了用于产生对应于扫描样品的表面特性的信号的扫描探针显微镜，并且包括设置在柔性悬臂的自由端的第一侧上的力感测探针尖端，该柔性悬臂适用于靠近 样品表面; 设置在与所述柔性悬臂的第一侧相对的第二侧的磁化材料; XY扫描器，用于在力感测探针尖端和样品表面之间产生相对扫描运动; 用于调节力传感探针尖端和样品表面之间的距离的Z控制; 以及用于产生指示柔性悬臂的偏转的偏转信号的偏转检测器。 扫描探针显微镜还包括用于产生磁场的交流信号源和磁场发生器，其中磁场发生器耦合到交流信号源，以便利用交流信号调制磁场。 力传感悬臂沿着悬臂的软轴磁化一段时间。
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公开(公告)号：US5983712A
公开(公告)日：1999-11-16
申请号：US905815
申请日：1997-08-04
申请人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
发明人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
IPC分类号： G01B7/34 , B81B3/00 , G01B7/00 , G01B21/30 , G01Q10/06 , G01Q30/14 , G01Q60/24 , G01Q60/32 , G01Q60/38 , G01Q70/06 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q10/06 , G01Q30/14 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/872 , Y10S977/875 , Y10S977/881 , Y10S977/934
摘要： An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.
摘要翻译： 提供了一种原子力显微镜和操作方法，其包括适于与样品表面紧密接近的力传感探针尖端，用于产生探针尖端和样品表面之间的相对运动的扫描元件，用于产生 磁场以引起探针尖端的偏转，用于该装置的驱动器，该驱动器包括交流电流源和受控量级的第二电流源，以及用于检测探头尖端的位置的检测器。 在优选的操作模式中，施加两个信号，一个交流电流，另一个是固定的但是可变的电流，以引起探头尖端的时间平均位置的位移。
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公开(公告)号：US5866805A
公开(公告)日：1999-02-02
申请号：US710191
申请日：1996-09-12
申请人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
发明人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/38 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/871 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.
摘要翻译： 用于扫描探针显微镜的力传感悬臂具有顶侧和底侧。 从底部延伸探针尖。 底部涂覆有第一材料的薄膜，并且顶侧涂覆有第二材料的薄膜。 第一和第二材料可以相同或可以不同。 选择各个薄膜的材料和厚度以产生相反的力，以便在仅将薄膜施加到其一侧时产生这种悬臂弯曲的倾向。
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公开(公告)号：US5753814A
公开(公告)日：1998-05-19
申请号：US722344
申请日：1996-09-27
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/38 , Y10S977/865 , Y10S977/872
摘要： In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the magnetic cantilever of the ACAFM. In accordance with a second aspect of the present invention, the detection system for a magnetically modulated AC-AFM incorporates AC coupling of the signal from the position sensitive detector/beam deflection detector in order to remove the DC component of the signal, resulting in significantly improved dynamic range over systems utilizing DC coupling. High frequency modulation signals are detected through the use of fast analog multipliers which, after active filtering, give a low frequency signal which may be processed by digital electronics. In accordance with a third aspect of the present invention, operation of the microscope at small amplitudes of oscillation leaves small asperities on the tip intact and results in dramatic improvement in resolution.
摘要翻译： 根据本发明的第一方面，通过使用用于调制ACAFM的磁悬臂的铁氧体磁芯螺线管，实质上改进了磁调制的AC-AFM的灵敏度。 根据本发明的第二方面，用于磁调制AC-AFM的检测系统结合来自位置敏感检测器/光束偏转检测器的信号的AC耦合，以便去除信号的DC分量，导致明显的 改善使用直流耦合的系统的动态范围。 通过使用快速模拟乘法器来检测高频调制信号，其在有源滤波之后给出可由数字电子器件处理的低频信号。 根据本发明的第三方面，显微镜在小振幅振幅下的操作使尖端的粗糙度不变，导致分辨率的显着提高。
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