公开(公告)号：US07118630B1

公开(公告)日：2006-10-10

申请号：US09636134

申请日：2000-08-10

申请人： Mehdi Balooch ,  Long N. Dinh ,  Wigbert J. Siekhaus

发明人： Mehdi Balooch ,  Long N. Dinh ,  Wigbert J. Siekhaus

IPC分类号： C23C16/00

CPC分类号： C23C14/0026 ,  C23C14/022 ,  C23C14/28

摘要： Short-wavelength photons are used to ablate material from a low work function target onto a suitable substrate. The short-wavelength photons are at or below visible wavelength. The elemental composition of the deposit is controlled by the composition of the target and the gaseous environment in which the ablation process is performed. The process is carried out in a deposition chamber to which a short-wavelength laser is mounted and which includes a substrate holder which can be rotated, tilted, heated, or cooled. The target material is mounted onto a holder that spins the target during laser ablation. In addition, the deposition chamber is provided with a vacuum pump, an external gas supply with atomizer and radical generator, a gas generator for producing a flow of molecules on the substrate, and a substrate cleaning device, such as an ion gun. The substrate can be rotated and tilted, for example, whereby only the tip of an emitter can be coated with a low work function material.

摘要翻译： 短波长光子用于将材料从低功函数目标消融到合适的基底上。 短波长光子处于或低于可见波长。 沉积物的元素组成由靶的组成和进行消融处理的气体环境控制。 该过程在安装有短波长激光器的沉积室中进行，其包括可旋转，倾斜，加热或冷却的衬底保持器。 目标材料安装在激光烧蚀过程中旋转目标的支架上。 此外，沉积室设置有真空泵，具有雾化器和自由基发生器的外部气体供应器，用于在基板上产生分子流的气体发生器和诸如离子枪的基板清洁装置。 例如，衬底可以旋转和倾斜，由此只有发射器的尖端可以用低功函数材料涂覆。

公开(公告)号：US6120857A

公开(公告)日：2000-09-19

申请号：US80109

申请日：1998-05-18

申请人： Mehdi Balooch ,  Long N. Dinh ,  Wigbert J. Siekhaus

发明人： Mehdi Balooch ,  Long N. Dinh ,  Wigbert J. Siekhaus

IPC分类号： C23C14/00 ,  C23C14/02 ,  C23C14/28 ,  B05D5/12

CPC分类号： C23C14/0026 ,  C23C14/022 ,  C23C14/28

摘要： Short-wavelength photons are used to ablate material from a low work function target onto a suitable substrate. The short-wavelength photons are at or below visible wavelength. The elemental composition of the deposit is controlled by the composition of the target and the gaseous environment in which the ablation process is performed. The process is carried out in a deposition chamber to which a short-wavelength laser is mounted and which includes a substrate holder which can be rotated, tilted, heated, or cooled. The target material is mounted onto a holder that spins the target during laser ablation. In addition, the deposition chamber is provided with a vacuum pump, an external gas supply with atomizer and radical generator, a gas generator for producing a flow of molecules on the substrate, and a substrate cleaning device, such as an ion gun. The substrate can be rotated and tilted, for example, whereby only the tip of an emitter can be coated with a low work function material.

摘要翻译： 短波长光子用于将材料从低功函数目标消融到合适的基底上。 短波长光子处于或低于可见波长。 沉积物的元素组成由靶的组成和进行消融处理的气体环境控制。 该过程在安装有短波长激光器的沉积室中进行，其包括可旋转，倾斜，加热或冷却的衬底保持器。 目标材料安装在激光烧蚀过程中旋转目标的支架上。 此外，沉积室设置有真空泵，具有雾化器和自由基发生器的外部气体供应器，用于在基板上产生分子流的气体发生器和诸如离子枪的基板清洁装置。 例如，衬底可以旋转和倾斜，由此只有发射器的尖端可以用低功函数材料涂覆。

公开(公告)号：US5620854A

公开(公告)日：1997-04-15

申请号：US402800

申请日：1995-03-13

申请人： John F. Holzrichter ,  Wigbert J. Siekhaus

发明人： John F. Holzrichter ,  Wigbert J. Siekhaus

IPC分类号： C12P19/34 ,  C12Q1/68 ,  G01Q20/00 ,  G01Q60/04 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q60/42 ,  G01N21/00 ,  G01N33/53

CPC分类号： G01Q60/42 ,  B82Y35/00 ,  C12Q1/6869 ,  G01Q60/04 ,  Y10S977/853

摘要： A scanning probe microscope, such as an atomic force microscope (AFM) or a scanning tunneling microscope (STM), is operated in a stationary mode on a site where an activity of interest occurs to measure and identify characteristic time-varying micromotions caused by biological, chemical, mechanical, electrical, optical, or physical processes. The tip and cantilever assembly of an AFM is used as a micromechanical detector of characteristic micromotions transmitted either directly by a site of interest or indirectly through the surrounding medium. Alternatively, the exponential dependence of the tunneling current on the size of the gap in the STM is used to detect micromechanical movement. The stationary mode of operation can be used to observe dynamic biological processes in real time and in a natural environment, such as polymerase processing of DNA for determining the sequence of a DNA molecule.

摘要翻译： 诸如原子力显微镜（AFM）或扫描隧道显微镜（STM）的扫描探针显微镜在静息模式下在感兴趣的活动位置进行操作，以测量和识别由生物引起的特征性时变微型 ，化学，机械，电气，光学或物理过程。 AFM的尖端和悬臂组件被用作直接由感兴趣的位置或间接地通过周围介质传输的特征微观测量的微机械探测器。 或者，隧道电流对STM中间隙大小的指数依赖性用于检测微机械运动。 固定操作模式可以用于实时和自然环境中观察动态生物过程，例如用于确定DNA分子序列的DNA的聚合酶处理。

公开(公告)号：US5747120A

公开(公告)日：1998-05-05

申请号：US799085

申请日：1997-02-11

申请人： William McLean, II ,  Mehdi Balooch ,  Wigbert J. Siekhaus

发明人： William McLean, II ,  Mehdi Balooch ,  Wigbert J. Siekhaus

IPC分类号： C23C14/06 ,  C23C14/28 ,  B05D3/06

CPC分类号： C23C14/0605 ,  B82Y35/00 ,  C23C14/28 ,  G01Q70/14 ,  Y10S427/104 ,  Y10S977/879

摘要： Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10-20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode.

摘要翻译： 由激光烧蚀的硬质碳膜组成的耐磨涂层通过脉冲激光烧蚀法使用可见光沉积在仪器如显微镜尖端和微型手术工具上。 被称为类金刚石碳（DLC）的硬质碳，通过使用可见光的脉冲激光烧蚀产生的膜增强了小型工具或仪器的耐磨性，磨损特性和使用寿命，例如在原子探针显微镜中使用的小而尖锐的硅尖端 而不会显着影响这些设备的清晰度或尺寸。 例如，在标准硅原子力显微镜（AFM）尖端上的10-20nm的类金刚石层，使尖端的有效工作寿命增加至少两倍。 此外，DLC涂层的低固有摩擦系数导致在接触模式下操作的AFM尖端的更高分辨率。

公开(公告)号：US5461907A

公开(公告)日：1995-10-31

申请号：US35741

申请日：1993-03-23

申请人： Robert J. Tench ,  Wigbert J. Siekhaus ,  Mehdi Balooch ,  Rodney L. Balhorn ,  Michael J. Allen

发明人： Robert J. Tench ,  Wigbert J. Siekhaus ,  Mehdi Balooch ,  Rodney L. Balhorn ,  Michael J. Allen

IPC分类号： G01Q60/24 ,  G01Q60/38 ,  H01J3/14

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q70/10 ,  Y10S977/856

摘要： Instrumentation and techniques to image small objects, such as but not limited to individual human chromosomes, with nanometer resolution, to cut-off identified parts of such objects, to move around and manipulate such cut-off parts on the substrate on which they are being imaged to predetermined locations on the substrate, and to remove the cut-off parts from the substrate. This is accomplished using an atomic force microscope (AFM) and by modification of the conventional cantilever stylus assembly of an AFM, such that plural cantilevers are used with either sharp-tips or knife-edges thereon. In addition, the invention can be utilized for measuring hardness of materials.

摘要翻译： 用于将小物体（例如但不限于单个人类染色体）以纳米分辨率成像的仪器和技术，以截断所述物体的识别部分，以移动并操纵其正在其上的基底上的这种截止部分 成像到基板上的预定位置，并从基板去除截止部分。 这是使用原子力显微镜（AFM）和通过修改AFM的常规悬臂测针组件来实现的，使得在其上使用尖锐尖端或刀刃的多个悬臂。 此外，本发明可用于测量材料的硬度。