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公开(公告)号：US08039205B2
公开(公告)日：2011-10-18
申请号：US11948891
申请日：2007-11-30
申请人： Chien-Hua Chen , Xia feng Yang
发明人： Chien-Hua Chen , Xia feng Yang
IPC分类号： G03F7/20
CPC分类号： F04B43/046 , B01D57/02 , B01D61/18 , B01D63/081 , B01D63/088 , B01D67/003 , B01D2323/30 , B01D2323/50 , B01D2325/08 , B01J19/0093 , B01J2219/00783 , B01J2219/0081 , B01J2219/00833 , B01J2219/00853 , B01J2219/00873 , B01J2219/00891 , B01J2219/00909 , B01J2219/00912 , B01J2219/00943 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L3/502753 , B01L7/525 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0654 , B01L2300/0681 , B01L2300/1827 , B01L2400/0415 , B01L2400/0439 , B01L2400/0442 , B01L2400/0638 , B81B2201/058 , B81C1/00119 , F04B19/24 , G01N21/05 , G01N2021/0346 , Y10T436/11 , Y10T436/117497 , Y10T436/118339 , Y10T436/25 , Y10T436/25375 , Y10T436/2575
摘要： A method includes depositing a sacrificial material on a substrate, and depositing a polymer layer on the substrate and the sacrificial material. The method further includes removing the sacrificial material to at least partially define boundaries of at least one fluidic channel of a fluidic micro electromechanical system (MEM) device, the at least one fluidic channel is at least partially defined by a portion of the polymer layer and a portion of the substrate.
摘要翻译： 一种方法包括将牺牲材料沉积在基底上，以及在基底和牺牲材料上沉积聚合物层。 该方法还包括去除牺牲材料以至少部分地限定流体微机电系统（MEM）装置的至少一个流体通道的边界，所述至少一个流体通道至少部分地由聚合物层的一部分限定， 衬底的一部分。
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公开(公告)号：US07309467B2
公开(公告)日：2007-12-18
申请号：US10606023
申请日：2003-06-24
申请人： Chien-Hua Chen , Xia feng Yang
发明人： Chien-Hua Chen , Xia feng Yang
CPC分类号： F04B43/046 , B01D57/02 , B01D61/18 , B01D63/081 , B01D63/088 , B01D67/003 , B01D2323/30 , B01D2323/50 , B01D2325/08 , B01J19/0093 , B01J2219/00783 , B01J2219/0081 , B01J2219/00833 , B01J2219/00853 , B01J2219/00873 , B01J2219/00891 , B01J2219/00909 , B01J2219/00912 , B01J2219/00943 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L3/502753 , B01L7/525 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0654 , B01L2300/0681 , B01L2300/1827 , B01L2400/0415 , B01L2400/0439 , B01L2400/0442 , B01L2400/0638 , B81B2201/058 , B81C1/00119 , F04B19/24 , G01N21/05 , G01N2021/0346 , Y10T436/11 , Y10T436/117497 , Y10T436/118339 , Y10T436/25 , Y10T436/25375 , Y10T436/2575
摘要： A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.
摘要翻译： 描述了流体微机电系统（MEMS）装置。 在一个方面，当聚合物层沉积在基底上时，在聚合物层和聚合物基底之间形成至少一个至少部分覆盖的流体通道。 部分覆盖的流体通道被制造为单一的聚合物层结构。 在一个实施方案中，将强烈的曝光工艺应用于聚合物层以产生深交联聚合物区域。 将弱曝光工艺应用于聚合物层以产生浅交联聚合物区域。
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公开(公告)号：US20080128390A1
公开(公告)日：2008-06-05
申请号：US11948891
申请日：2007-11-30
申请人： Chien-Hua Chen , Xia feng Yang
发明人： Chien-Hua Chen , Xia feng Yang
IPC分类号： B44C1/22
CPC分类号： F04B43/046 , B01D57/02 , B01D61/18 , B01D63/081 , B01D63/088 , B01D67/003 , B01D2323/30 , B01D2323/50 , B01D2325/08 , B01J19/0093 , B01J2219/00783 , B01J2219/0081 , B01J2219/00833 , B01J2219/00853 , B01J2219/00873 , B01J2219/00891 , B01J2219/00909 , B01J2219/00912 , B01J2219/00943 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L3/502753 , B01L7/525 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0654 , B01L2300/0681 , B01L2300/1827 , B01L2400/0415 , B01L2400/0439 , B01L2400/0442 , B01L2400/0638 , B81B2201/058 , B81C1/00119 , F04B19/24 , G01N21/05 , G01N2021/0346 , Y10T436/11 , Y10T436/117497 , Y10T436/118339 , Y10T436/25 , Y10T436/25375 , Y10T436/2575
摘要： A method includes depositing a sacrificial material on a substrate, and depositing a polymer layer on the substrate and the sacrificial material. The method further includes removing the sacrificial material to at least partially define boundaries of at least one fluidic channel of a fluidic micro electromechanical system (MEM) device, the at least one fluidic channel is at least partially defined by a portion of the polymer layer and a portion of the substrate.
摘要翻译： 一种方法包括将牺牲材料沉积在基底上，以及在基底和牺牲材料上沉积聚合物层。 该方法还包括去除牺牲材料以至少部分地限定流体微机电系统（MEM）装置的至少一个流体通道的边界，所述至少一个流体通道至少部分地由聚合物层的一部分限定， 衬底的一部分。
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