Method for fabricating a sensor, a sensor, and a method for sensing
    1.
    发明授权
    Method for fabricating a sensor, a sensor, and a method for sensing 有权
    用于制造传感器的方法,传感器和用于感测的方法

    公开(公告)号:US08174703B2

    公开(公告)日:2012-05-08

    申请号:US12436592

    申请日:2009-05-06

    IPC分类号: G01B9/02

    摘要: A method for fabricating a sensor, a sensor so fabricated, and a method for sensing a stimulus are provided. The method includes providing an elongated open channel, such as, a V-groove, in a substrate, the open channel providing a first surface; removing at least some material from at least a portion of the open channel to provide a second surface displaced from the first surface; positioning a diaphragm on the second surface; and positioning an elongated wave-guide having a beveled end in the elongated open channel wherein the beveled end is positioned over the diaphragm to define an interferometric cavity between the diaphragm and the outer surface of the wave-guide. The sensor so fabricated can provide an effective sensor for detecting acoustic emission waves, among other pressure waves.

    摘要翻译: 提供了一种用于制造传感器的方法,如此制造的传感器以及用于感测刺激的方法。 该方法包括在衬底中提供细长的开放通道,例如V形槽,所述开放通道提供第一表面; 从所述开放通道的至少一部分去除至少一些材料以提供从所述第一表面移位的第二表面; 将隔膜定位在第二表面上; 并且将细长的波导定位在细长的开放通道中具有倾斜的端部,其中斜面端部位于隔膜上方以在隔膜和波导的外表面之间限定干涉腔。 如此制造的传感器可以提供用于检测声发射波以及其它压力波的有效传感器。

    METHOD FOR FABRICATING A SENSOR, A SENSOR, AND A METHOD FOR SENSING
    2.
    发明申请
    METHOD FOR FABRICATING A SENSOR, A SENSOR, AND A METHOD FOR SENSING 有权
    用于制造传感器,传感器和感测方法的方法

    公开(公告)号:US20090279099A1

    公开(公告)日:2009-11-12

    申请号:US12436592

    申请日:2009-05-06

    IPC分类号: G01B9/02 G01N29/14 H01L21/28

    摘要: A method for fabricating a sensor, a sensor so fabricated, and a method for sensing a stimulus are provided. The method includes providing an elongated open channel, such as, a V-groove, in a substrate, the open channel providing a first surface; removing at least some material from at least a portion of the open channel to provide a second surface displaced from the first surface; positioning a diaphragm on the second surface; and positioning an elongated wave-guide having a beveled end in the elongated open channel wherein the beveled end is positioned over the diaphragm to define an interferometric cavity between the diaphragm and the outer surface of the wave-guide. The sensor so fabricated can provide an effective sensor for detecting acoustic emission waves, among other pressure waves.

    摘要翻译: 提供了一种用于制造传感器的方法,如此制造的传感器以及用于感测刺激的方法。 该方法包括在衬底中提供细长的开放通道,例如V形槽,所述开放通道提供第一表面; 从所述开放通道的至少一部分去除至少一些材料以提供从所述第一表面移位的第二表面; 将隔膜定位在第二表面上; 并且将细长的波导定位在细长的开放通道中具有倾斜的端部,其中斜面端部位于隔膜上方以在隔膜和波导的外表面之间限定干涉腔。 如此制造的传感器可以提供用于检测声发射波以及其它压力波的有效传感器。

    Optical fiber pressure and acceleration sensor fabricated on a fiber endface
    4.
    发明申请
    Optical fiber pressure and acceleration sensor fabricated on a fiber endface 有权
    在光纤端面上制造的光纤压力和加速度传感器

    公开(公告)号:US20050062979A1

    公开(公告)日:2005-03-24

    申请号:US10911635

    申请日:2004-08-05

    摘要: A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.

    摘要翻译: 光纤传感器具有结合到光纤端面的中空管,以及结合到中空管的隔膜。 纤维端面和隔膜包括标准具腔。 当施加压力或加速度弯曲隔膜时,标准具腔的长度会发生变化。 整个结构可以由熔融石英制成。 纤维,管和隔膜可以用熔接粘合。 本传感器特别适用于在高温,高压和腐蚀性环境(例如油井下井和喷气发动机)中测量压力或加速度。 本传感器也适用于生物和医学应用。

    INTRINSIC FABRY-PEROT STRUCTURE WITH MICROMETRIC TIP
    5.
    发明申请
    INTRINSIC FABRY-PEROT STRUCTURE WITH MICROMETRIC TIP 审中-公开
    具有微电子提示的内置机架结构

    公开(公告)号:US20070147738A1

    公开(公告)日:2007-06-28

    申请号:US11609655

    申请日:2006-12-12

    IPC分类号: G02B6/42 G02B6/26 G02B6/00

    摘要: A fiber-optic sensor includes a Fabry-Perot cavity, the length of which may be altered by deposition of a material of interest that may be deposited or captured on an end surface thereof. The sensor may also be tapered near the end surface to a tip diameter in the range of a few micrometers or a few micrometers by a variety of techniques which may be used singly or in combination. A tapered probe of such dimensions is of minimal intrusiveness in biological observations and can be used to probe sub-micron sized cells in vivo. By developing a multi-layer self-assembled film to immobilize a capture material such as a DNA sequence complementary to a DNA sequence of interest or other organic material such as proteins, antigens and/or antibodies materials of interest may be preferentially captured and immediately detected by alteration of spectral response of the fiber-optic sensor.

    摘要翻译: 光纤传感器包括法布里 - 珀罗腔,其长度可以通过沉积可能在其端面上沉积或捕获的感兴趣的材料来改变。 通过单独或组合使用的各种技术,传感器也可以在端面附近锥形到尖端直径在几微米或几微米的范围内。 这种尺寸的锥形探针在生物学观察中具有最小的侵入性,并且可用于体内探测亚微米尺寸的细胞。 通过开发多层自组装膜以固定捕获材料,例如与感兴趣的DNA序列互补的DNA序列或其它有机材料如蛋白质,可以优先捕获并立即检测到蛋白质,抗原和/或抗体材料 通过改变光纤传感器的光谱响应。

    Optical fiber pressure and acceleration sensor fabricated on a fiber endface
    6.
    发明授权
    Optical fiber pressure and acceleration sensor fabricated on a fiber endface 有权
    在光纤端面上制造的光纤压力和加速度传感器

    公开(公告)号:US07054011B2

    公开(公告)日:2006-05-30

    申请号:US10911635

    申请日:2004-08-05

    IPC分类号: G01B9/02

    摘要: A fiber optic sensor has a hollow tube bonded to the endface of an optical fiber, and a diaphragm bonded to the hollow tube. The fiber endface and diaphragm comprise an etalon cavity. The length of the etalon cavity changes when applied pressure or acceleration flexes the diaphragm. The entire structure can be made of fused silica. The fiber, tube, and diaphragm can be bonded with a fusion splice. The present sensor is particularly well suited for measuring pressure or acceleration in high temperature, high pressure and corrosive environments (e.g., oil well downholes and jet engines). The present sensors are also suitable for use in biological and medical applications.

    摘要翻译: 光纤传感器具有结合到光纤端面的中空管,以及结合到中空管的隔膜。 纤维端面和隔膜包括标准具腔。 当施加压力或加速度弯曲隔膜时,标准具腔的长度会发生变化。 整个结构可以由熔融石英制成。 纤维,管和隔膜可以用熔接粘合。 本传感器特别适用于在高温,高压和腐蚀性环境(例如油井下井和喷气发动机)中测量压力或加速度。 本传感器也适用于生物和医学应用。