公开(公告)号：US09213242B2

公开(公告)日：2015-12-15

申请号：US13541167

申请日：2012-07-03

申请人： Yoshihiro Uozumi ,  Shinsuke Kimura ,  Yoshihiro Ogawa ,  Hiroyasu Iimori ,  Tatsuhiko Koide ,  Hideaki Hirabayashi ,  Yuji Nagashima

发明人： Yoshihiro Uozumi ,  Shinsuke Kimura ,  Yoshihiro Ogawa ,  Hiroyasu Iimori ,  Tatsuhiko Koide ,  Hideaki Hirabayashi ,  Yuji Nagashima

IPC分类号： B08B3/00 ,  G03F7/40 ,  H01L21/67 ,  G03F7/16

CPC分类号： H01L21/67075 ,  G03F7/162 ,  G03F7/405 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67098 ,  H01L21/6715 ,  H01L21/67739 ,  H01L21/68

摘要： According to one embodiment, a substrate processing method is disclosed. The method can include treating a substrate with a first liquid. The substrate has a structural body formed on a major surface of the substrate. The method can include forming a support member supporting the structural body by bringing a second liquid into contact with the substrate wetted by the first liquid, and changing at least a portion of the second liquid into a solid by carrying out at least one of causing the second liquid to react, reducing a quantity of a solvent included in the second liquid, and causing at least a portion of a substance dissolved in the second liquid to be separated. The method can include removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase.

摘要翻译： 根据一个实施例，公开了一种基板处理方法。 该方法可以包括用第一液体处理底物。 衬底具有形成在衬底的主表面上的结构体。 该方法可以包括通过使第二液体与由第一液体润湿的基底接触而形成支撑结构体的支撑构件，并且通过执行至少一个将第二液体的至少一部分变为固体， 第二液体反应，减少包含在第二液体中的溶剂的量，并使溶解在第二液体中的物质的至少一部分被分离。 该方法可以包括通过将支撑构件的至少一部分从固相改变为气相而不通过液相来移除支撑构件。

公开(公告)号：US20120088357A1

公开(公告)日：2012-04-12

申请号：US13238997

申请日：2011-09-21

申请人： Yoshihiro OGAWA ,  Tatsuhiko Koide ,  Shinsuke Kimura

发明人： Yoshihiro OGAWA ,  Tatsuhiko Koide ,  Shinsuke Kimura

IPC分类号： H01L21/265 ,  H01L21/308

CPC分类号： H01L21/02071 ,  H01L21/02057 ,  H01L21/265 ,  H01L21/31133 ,  H01L27/1052

摘要： A method of manufacturing a semiconductor device is disclosed. The method forms a semiconductor device including a workpiece structure having a first region and second region located adjacent to the first region formed therein. The first region includes a first pattern and the second region includes a second pattern having at least a greater pattern width or a smaller aspect ratio than the first pattern. The method includes forming the first pattern by providing a first film having a first contact angle at a top portion thereof and the second pattern by providing a second film having a second contact angle less than the first contact angle at a top portion thereof; cleaning the first and the second regions by a chemical liquid; rinsing the cleaned first and the second regions by a rinse liquid; and drying the rinsed first and the second regions.

摘要翻译： 公开了制造半导体器件的方法。 该方法形成半导体器件，该半导体器件包括具有第一区域的工件结构和与形成在其中的第一区域相邻的第二区域。 第一区域包括第一图案，第二区域包括具有比第一图案至少更大的图案宽度或更小的纵横比的第二图案。 该方法包括：通过在其顶部提供具有小于第一接触角的第二接触角的第二膜，通过提供在其顶部具有第一接触角的第一膜和第二图案来形成第一图案; 用化学液体清洗第一和第二区域; 用漂洗液冲洗净化的第一和第二区域; 并干燥漂洗的第一和第二区域。

公开(公告)号：US08115177B2

公开(公告)日：2012-02-14

申请号：US12095748

申请日：2007-01-19

申请人： Shinichi Takeda ,  Yoshihiro Ogawa ,  Satoshi Okada ,  Masato Inoue ,  Kazumi Nagano ,  Keiichi Nomura ,  Satoru Sawada

发明人： Shinichi Takeda ,  Yoshihiro Ogawa ,  Satoshi Okada ,  Masato Inoue ,  Kazumi Nagano ,  Keiichi Nomura ,  Satoru Sawada

IPC分类号： G01T1/20

CPC分类号： G01T1/20 ,  A61B6/4233 ,  H01L27/14663 ,  H01L31/02322

摘要： A radiation detection apparatus has a sensor panel including a photoelectric conversion unit with a plurality of photoelectric conversion elements over a substrate, a wavelength converter, disposed over the photoelectric conversion unit of the sensor panel, for converting a radiation into light detectable by the photoelectric conversion element, a plane shaped light emitting body for emitting light to the photoelectric conversion unit of the sensor panel, disposed over the wavelength converter, and a protective layer disposed on the plane shaped light emitting body.

摘要翻译： 辐射检测装置具有传感器面板，其包括在基板上具有多个光电转换元件的光电转换单元，设置在传感器面板的光电转换单元上方的波长转换器，用于将辐射转换成可由光电转换检测的光 元件，用于向布置在波长转换器上的传感器面板的光电转换单元发射光的平面形发光体，以及设置在平面状发光体上的保护层。

公开(公告)号：US20110143545A1

公开(公告)日：2011-06-16

申请号：US12879097

申请日：2010-09-10

申请人： Hisashi OKUCHI ,  Tatsuhiko Koide ,  Shinsuke Kimura ,  Yoshihiro Ogawa ,  Hiroshi Tomita

发明人： Hisashi OKUCHI ,  Tatsuhiko Koide ,  Shinsuke Kimura ,  Yoshihiro Ogawa ,  Hiroshi Tomita

IPC分类号： H01L21/306 ,  B08B3/00

CPC分类号： H01L21/02057 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67051

摘要： In one embodiment, an apparatus of treating a surface of a semiconductor substrate comprises a substrate holding and rotating unit which holds a semiconductor substrate with a surface having a convex pattern formed thereon and rotates the semiconductor substrate, a first supply unit which supplies a chemical and/or pure water to the surface of the semiconductor substrate, and a second supply unit which supplies a diluted water repellent to the surface of the semiconductor substrate to form a water-repellent protective film on the surface of the convex pattern. The second supply unit comprises a buffer tank which stores the water repellent, a first supply line which supplies a purge gas to the buffer tank, a second supply line which supplies a diluent, a pump which sends off the water repellent within the buffer tank, a third supply line which supplies the water repellent sent off from the pump, and a mixing valve which mixes the diluent and the water repellent to produce the diluted water repellent.

摘要翻译： 在一个实施例中，处理半导体衬底的表面的设备包括：衬底保持和旋转单元，其保持具有形成在其上的凸起图案的表面的半导体衬底，并使半导体衬底旋转，提供化学品的第一供应单元和 /或纯水，以及第二供给单元，其向半导体基板的表面供给稀释斥水剂，以在凸形图案的表面上形成防水保护膜。 第二供应单元包括缓冲罐，其存储防水剂，向缓冲罐供应净化气体的第一供应管线，供应稀释剂的第二供应管线，在缓冲罐内排出拒水剂的泵， 供给从泵送出的防水剂的第三供给管路和将稀释剂与防水剂混合而制成稀释斥水剂的混合阀。

公开(公告)号：US07723693B2

公开(公告)日：2010-05-25

申请号：US11633448

申请日：2006-12-05

申请人： Satoshi Okada ,  Yoshihiro Ogawa ,  Masato Inoue ,  Shinichi Takeda ,  Kazumi Nagano ,  Keiichi Nomura ,  Satoru Sawada

发明人： Satoshi Okada ,  Yoshihiro Ogawa ,  Masato Inoue ,  Shinichi Takeda ,  Kazumi Nagano ,  Keiichi Nomura ,  Satoru Sawada

IPC分类号： G01T1/24

CPC分类号： G01T1/2018 ,  G01T1/24 ,  G01T1/244 ,  G01T7/005

摘要： At a radiation incident side of light generating means comprising light guiding means 300 including a light source such as an LED 301, a light guiding plate 303, a reflecting plate 304, a diffusing plate 305, and the like, radiation shielding members 401 to 403 for shielding the radiation are provided. As the radiation shielding members, those absorbing or reflecting 70% of the incident radiation are preferably used. Further, the radiation shielding member is disposed between a radiation detecting panel 500 and a light generating source such as the LED 301 and the like or disposed between the radiation detecting panel and a drive circuit which drives the light source such as the LED 301, and the like.

摘要翻译： 在发光装置的辐射入射侧包括包括诸如LED 301的光源的导光装置300，导光板303，反射板304，漫射板305等，辐射屏蔽构件401至403 用于屏蔽辐射。 作为辐射屏蔽构件，优选使用吸收或反射70％入射辐射的辐射屏蔽构件。 此外，辐射屏蔽构件设置在辐射检测面板500和诸如LED 301等的发光源之间，或者设置在辐射检测面板和驱动诸如LED 301的光源的驱动电路之间，以及 类似。

公开(公告)号：US07644729B2

公开(公告)日：2010-01-12

申请号：US11922009

申请日：2006-06-08

申请人： Ryosuke Cho ,  Yoshihiro Ogawa ,  Kohei Fukudome

发明人： Ryosuke Cho ,  Yoshihiro Ogawa ,  Kohei Fukudome

IPC分类号： F16K11/044

CPC分类号： F04B27/1804 ,  F04B2027/1827 ,  F04B2027/1831 ,  F04B2027/1845 ,  F04B2027/1854 ,  Y10T137/86485 ,  Y10T137/86686

摘要： A capacity control valve has a communication path (31) for communicating a discharge chamber (11) and a control chamber (12); one valve chamber (36) in the middle of the communication path (31); communication paths (32, 31b) for communicating a suction chamber (13) and the control chamber (12); the other valve chamber (36) in the middle of the communication path (32); a valve body (40) including a first valve section (41) that opens and closes the communication path (31) and a second valve section (42) that opens and closes the communication path (32), the first and second valve sections being placed in the valve chamber (36) and performing the opening and closing operation in a manner opposite to each other; and a solenoid (60) for moving the valve body (40). The valve body (40) has a pressure receiving section (44) at its end section that is across the second valve section (42) from the first valve section (41), and the pressure receiving section (44) receives pressure in the control chamber. The pressure receiving area S3 of the pressure receiving section (44) is substantially the same as the difference between the pressure receiving area S2 of the second valve section (42) and the pressure receiving area S1 of the first valve section. The valve is reduced in size, an influence of the pressure in the control chamber is minimized, and stable capacity control with excellent response is enabled.

摘要翻译： 容量控制阀具有用于连通排出室（11）和控制室（12）的连通路径（31）。 在所述连通路径（31）的中间的一个阀室（36）; 用于连通吸入室（13）和控制室（12）的连通路径（32,31b）。 连通路径（32）中间的另一个阀室（36）; 包括打开和关闭连通路径（31）的第一阀部分（41）和打开和关闭连通路径（32）的第二阀部分（42）的阀体（40），第一和第二阀部分是 放置在阀室（36）中并以彼此相反的方式进行打开和关闭操作; 以及用于使阀体（40）移动的螺线管（60）。 阀体（40）在其端部处具有与第一阀部（41）相对的第二阀部（42）的压力接收部（44），受压部（44）承受控制中的压力 房间。 受压部（44）的受压面积S3与第二阀部（42）的受压面积S2与第一阀部的受压面积S1的差大致相同。 阀门尺寸减小，控制室内压力的影响最小化，能够实现稳定的容量控制。

公开(公告)号：US20090186288A1

公开(公告)日：2009-07-23

申请号：US12298755

申请日：2007-04-25

申请人： Junko Hirata ,  Yoshihiro Ogawa ,  Yusuke Hasegawa ,  Kouji Nishikawa ,  Miho Okazaki ,  Takashige Kasuya

发明人： Junko Hirata ,  Yoshihiro Ogawa ,  Yusuke Hasegawa ,  Kouji Nishikawa ,  Miho Okazaki ,  Takashige Kasuya

IPC分类号： G03G9/083

CPC分类号： G03G9/0833 ,  G03G9/0834 ,  G03G9/0835 ,  G03G9/0836 ,  G03G9/08755

摘要： The object of the present invention is to provide a magnetic toner enabling an image with high image density and excellent image reproducibility to be obtained, which is excellent in fluidity, charging stability, and charging uniformity, even for long-term use, and also enabling an image whose fogging, ghost, and scattering are suppressed to be obtained. The magnetic toner has at least a binder resin and a magnetic material, where, the magnetic material is an magnetic iron oxide whose dielectric breakdown voltage of the magnetic material is 160 to 1600 V/cm, and the dielectric loss tangent (tan δ) of the magnetic toner at 100 kHz and 40° C. is 2.0×10−3 to 1.0×10−2.

摘要翻译： 本发明的目的是提供一种能够获得具有高图像密度和优异的图像再现性的图像的磁性调色剂，即使长期使用也具有优异的流动性，充电稳定性和充电均匀性，并且还使得 抑制雾化，重影和散射的图像。 磁性调色剂至少具有粘合剂树脂和磁性材料，其中磁性材料是磁性材料的介电击穿电压为160至1600V / cm的磁性氧化铁，介电损耗角正切（tanδ）为 在100kHz和40℃下的磁性调色剂为2.0×10 -3至1.0×10 -2。

公开(公告)号：US07470494B2

公开(公告)日：2008-12-30

申请号：US11168506

申请日：2005-06-29

申请人： Junko Nishiyama ,  Yoshihiro Ogawa ,  Yusuke Hasegawa ,  Shinichiro Abe ,  Takashige Kasuya

发明人： Junko Nishiyama ,  Yoshihiro Ogawa ,  Yusuke Hasegawa ,  Shinichiro Abe ,  Takashige Kasuya

IPC分类号： G03G9/083

CPC分类号： G03G9/0834 ,  G03G9/0836 ,  G03G9/0837 ,  G03G9/0838 ,  G03G9/0839 ,  G03G9/08795 ,  G03G9/08797

摘要： According to the present invention, a magnetic toner comprising magnetic toner particles including at least a binder resin and magnetic particles is provided, wherein an isoelectric point of the magnetic particles is pH 4.0 or less, in order to provide a magnetic toner stably having an optimum charged amount regardless of environments so that a high-quality image having high blackness can be formed without causing any ghost phenomenon.

摘要翻译： 根据本发明，提供一种磁性调色剂，其包含至少包含粘合剂树脂和磁性颗粒的磁性调色剂颗粒，其中磁性颗粒的等电点为4.0以下，以便稳定地提供具有最佳的磁性调色剂 充电量，而不管环境如何，从而可以形成具有高黑度的高质量图像而不引起任何重影现象。

公开(公告)号：US07402368B2

公开(公告)日：2008-07-22

申请号：US11681396

申请日：2007-03-02

申请人： Yoshihiro Ogawa ,  Takashige Kasuya ,  Kaori Hiratsuka

发明人： Yoshihiro Ogawa ,  Takashige Kasuya ,  Kaori Hiratsuka

IPC分类号： G03G9/08

CPC分类号： G03G9/09725 ,  B82Y30/00 ,  C01P2004/64 ,  C01P2006/12 ,  C09C1/3081 ,  C09C1/3684 ,  G03G9/09708 ,  G03G9/09716 ,  Y10T428/2995

摘要： Hydrophobic inorganic fine particles characterized by being a mixture of at least small-particle-diameter inorganic fine particles having an average primary particle diameter of 5 to 25 nm and having a maximum peak particle diameter of 20 nm or less and large-particle-diameter inorganic fine particles having an average primary particle diameter which is 1.5 to 100 times the average primary particle diameter of the small-particle-diameter inorganic fine particles; the mixture being a mixture having been treated in the same treating tank to subject both the small-particle-diameter inorganic fine particles and large-particle-diameter inorganic fine particles simultaneously to hydrophobic treatment.

摘要翻译： 疏水性无机细颗粒，其特征在于平均一次粒径为5〜25nm，最大峰值粒径为20nm以下的至少小粒径的无机微粒和大粒径的无机微粒的混合物 平均一次粒径为小粒径无机微粒的平均一次粒径的1.5〜100倍的微粒; 该混合物是在相同处理槽中处理的混合物，同时使小颗粒直径的无机细颗粒和大颗粒直径的无机细颗粒同时进行疏水处理。

公开(公告)号：US07391029B2

公开(公告)日：2008-06-24

申请号：US11198229

申请日：2005-08-08

申请人： Shinichi Takeda ,  Yoshihiro Ogawa ,  Masato Inoue ,  Satoshi Okada ,  Tomoyuki Tamura ,  Kazumi Nagano

发明人： Shinichi Takeda ,  Yoshihiro Ogawa ,  Masato Inoue ,  Satoshi Okada ,  Tomoyuki Tamura ,  Kazumi Nagano

IPC分类号： G01T1/20 ,  G01T1/24

CPC分类号： G01T1/2018

摘要： A radiation detection apparatus including a sensor panel, having a photoreceiving unit constituted of plural photoelectric converting elements two-dimensionally arranged on a substrate and electrical connecting portions provided in an external portion of the photoreceiving unit and electrically connected to the photoelectric converting elements of respective rows or columns of the photoreceiving unit, a phosphor layer provided at least on the photoreceiving unit for converting a radiation into a light detectable by the photoelectric converting element, and a phosphor protective member covering the phosphor layer and in contact with the sensor panel, characterized in that the phosphor protective member includes a frame member provided between the phosphor layer and the electric connecting portion on the sensor panel, and a phosphor protective layer covering an upper surface of the phosphor layer and provided in close contact with an upper surface of the frame member. This configuration allows to prevent a discharge of an electrostatic charge accumulated on the sensor panel, thereby providing a stable radiation detection apparatus with a high production yield.

摘要翻译： 一种辐射检测装置，包括传感器面板，具有由二维布置在基板上的多个光电转换元件构成的光接收单元和设置在所述光接收单元的外部的电连接部分，并电连接到各行的光电转换元件 或列，至少设置在光接收单元上用于将辐射转换成可由光电转换元件检测的光的荧光体层和覆盖荧光体层并与传感器面板接触的荧光体保护构件，其特征在于， 荧光体保护构件包括设置在荧光体层和传感器面板上的电连接部分之间的框架构件，以及覆盖荧光体层的上表面并且与框架构件的上表面紧密接触地设置的荧光体保护层 。 这种结构允许防止积聚在传感器面板上的静电电荷的放电，从而提供具有高产量的稳定的放射线检测装置。