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公开(公告)号：US09321630B2
公开(公告)日：2016-04-26
申请号：US13772183
申请日：2013-02-20
Inventor： Jinghui Xu , Julius Ming-Lin Tsai , Winston Sun , Chengliang Sun
CPC classification number: B81C1/00182 , B81B2201/0257 , G01H11/08 , G01V1/186
Abstract: A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.
Abstract translation: 公开了一种用于检测水下声音的方法和装置。 该装置的实施例包括具有真空密封空腔的基板。 支撑结构和声压传感器位于基板上。 该装置的支撑结构可以包括位于基板上的第一氧化物层，位于第一氧化物层上的硅层和位于硅层上的第二氧化物层。 设备的声压传感器包括位于基板上的第一电极层，位于第一电极层上的压电层和位于压电层上的第二电极层。 在一个实施例中，第二电极层的表面积在压电层的表面积的约70％至90％之间。 在各种实施例中，支撑结构比压电层厚。
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公开(公告)号：US20160202366A1
公开(公告)日：2016-07-14
申请号：US14295080
申请日：2014-06-03
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
IPC: G01V1/18 , G01P15/125 , G01V1/09 , G01V1/38
CPC classification number: G01V1/18 , G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0862 , G01P2015/0882 , G01V1/09 , G01V1/38
Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。
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公开(公告)号：US09829358B2
公开(公告)日：2017-11-28
申请号：US15031982
申请日：2014-11-21
Applicant: Agency for Science, Technology and Research
Inventor： Xiaojing Mu , Chengliang Sun , Alex Yuandong Gu
CPC classification number: G01F1/3218 , G01F1/3209 , G01F1/36 , G01F1/48 , G01F15/063 , H02N2/185
Abstract: In various embodiments, a device for determining a property of a fluid may be provided. The device may include a fluid receiving structure configured to receive the fluid having a first condition. The device may further include a flow control structure coupled to the fluid receiving structure. The flow control structure may be configured to change the first condition of the fluid to a second condition. The device may further include a determination mechanism configured to determine the property of the fluid based on the second condition. The device may also include a voltage generation mechanism a voltage generation mechanism configured to generate a voltage based on the second condition.
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公开(公告)号：US20140260618A1
公开(公告)日：2014-09-18
申请号：US14190721
申请日：2014-02-26
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
IPC: G01P15/125
CPC classification number: G01V1/18 , G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0862 , G01P2015/0882 , G01V1/09 , G01V1/38
Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。
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公开(公告)号：US20140260617A1
公开(公告)日：2014-09-18
申请号：US14190673
申请日：2014-02-26
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0882 , G01V1/02 , G01V1/38
Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。
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Patent Agency Ranking
公开(公告)号：US10033305B2
公开(公告)日：2018-07-24
申请号：US14550863
申请日：2014-11-21
Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Inventor： Chengliang Sun , Xiaojing Mu , Ilker Ender Ocak , Alex Yuandong Gu
IPC: H02N2/18 , H01L41/113
CPC classification number: H02N2/188 , H01L41/1134 , H01L41/1136 , Y10T29/42
Abstract: According to embodiments of the present invention, an energy harvesting device is provided. The energy harvesting device includes a plurality of energy harvesting elements, each energy harvesting element including a transducer, and at least one spring arranged in between at least two energy harvesting elements of the plurality of energy harvesting elements to mechanically couple the at least two energy harvesting elements to each other. According to further embodiments of the present invention, a method for forming an energy harvesting device is also provided.
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公开(公告)号：US09945968B2
公开(公告)日：2018-04-17
申请号：US14295080
申请日：2014-06-03
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
CPC classification number: G01V1/18 , G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0862 , G01P2015/0882 , G01V1/09 , G01V1/38
Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
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公开(公告)号：US09506946B2
公开(公告)日：2016-11-29
申请号：US14294999
申请日：2014-06-03
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
CPC classification number: G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0882 , G01V1/02 , G01V1/38
Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。
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公开(公告)号：US20160111980A1
公开(公告)日：2016-04-21
申请号：US14895838
申请日：2014-06-23
Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Inventor： Chengliang Sun , Xiaojing Mu , Peter Hyun Kee Chang , Qingxin Zhang , Alex Yuandong Gu , Wei Mong Tsang
IPC: H02N2/18
CPC classification number: H02N2/185 , H01L41/1134 , H01L41/1136
Abstract: According to embodiments of the present invention, an energy harvesting device is provided. The energy harvesting device includes a microchannel arranged to receive a fluid, a bluff body arranged to interact with the fluid flowing through the microchannel to generate a vortex fluid street, and an energy harvesting element arranged to interact with the vortex fluid street to harvest energy from the fluid. According to further embodiments of the present invention, a method of harvesting energy is also provided.
Abstract translation: 根据本发明的实施例，提供了一种能量收集装置。 能量收集装置包括布置成接收流体的微通道，布置成与流过微通道的流体相互作用以产生涡流流体街道的非流线体，以及能量收集元件，其布置成与涡流流体街道相互作用以从 流体。 根据本发明的另外的实施例，还提供了一种收获能量的方法。
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公开(公告)号：US20150293142A1
公开(公告)日：2015-10-15
申请号：US14294999
申请日：2014-06-03
Inventor： Ilker Ender Ocak , Chengliang Sun , Julius Ming-Lin Tsai , Sanchitha Nirodha Fernando
IPC: G01P15/125 , G01V1/02 , G01V1/38
CPC classification number: G01P15/125 , G01P15/131 , G01P2015/0837 , G01P2015/0882 , G01V1/02 , G01V1/38
Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.
Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。
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