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公开(公告)号：US20170343500A1
公开(公告)日：2017-11-30
申请号：US15168464
申请日：2016-05-31
Applicant: AMS Sensors UK Limited
Inventor： Florin Udrea , Syed Zeeshan Ali , Mohamed Foysol Chowdhury
Abstract: We disclose a micro-hotplate comprising a substrate comprising an etched portion and a substrate portion and a dielectric region over the substrate. The dielectric region comprises first and second portions. The first portion is adjacent to the etched portion of the substrate and the second portion is adjacent to the substrate portion of the substrate. The micro-hotplate further comprises a heater formed in the dielectric region, and a ring structure formed within and/or over the dielectric region such that the ring structure is coupled with the first and second portions of the dielectric region.
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公开(公告)号：US20170343419A1
公开(公告)日：2017-11-30
申请号：US15168562
申请日：2016-05-31
Applicant: AMS Sensors UK Limited
Inventor： Richard Henry Hopper , Andrea De Luca , Kaspars Ledins , Syed Zeeshan Ali , Mohamed Foysol Chowdhury
IPC: G01J5/14 , B01L3/00 , H01L31/18 , H01L31/167 , H01L31/16 , G01N33/00 , H01L31/0203 , H01L31/02 , H01L35/32 , G01N21/552 , G01N21/61 , H01L37/00 , H01L31/0232
CPC classification number: G01J5/14 , B01L3/502707 , B01L3/502715 , B01L3/50273 , B01L2200/12 , B01L2300/0654 , B01L2300/08 , B01L2300/0858 , B01L2300/0887 , B01L2300/168 , B01L2400/0424 , G01J5/0853 , G01N21/0303 , G01N21/3504 , G01N21/552 , G01N21/61 , G01N33/004 , G01N2201/068 , H01L31/02002 , H01L31/0203 , H01L31/02325 , H01L31/16 , H01L31/167 , H01L31/18 , H01L35/32 , H01L37/00
Abstract: We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.
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公开(公告)号：US09909926B2
公开(公告)日：2018-03-06
申请号：US15168562
申请日：2016-05-31
Applicant: AMS Sensors UK Limited
Inventor： Richard Henry Hopper , Andrea De Luca , Kaspars Ledins , Syed Zeeshan Ali , Mohamed Foysol Chowdhury
IPC: G01J5/14 , G01N21/61 , G01N33/00 , B01L3/00 , G01N21/552 , H01L31/16 , H01L31/0232 , H01L31/02 , H01L35/32 , H01L37/00 , H01L31/167 , H01L31/0203 , H01L31/18
CPC classification number: G01J5/14 , B01L3/502707 , B01L3/502715 , B01L3/50273 , B01L2200/12 , B01L2300/0654 , B01L2300/08 , B01L2300/0858 , B01L2300/0887 , B01L2300/168 , B01L2400/0424 , G01J5/0853 , G01N21/0303 , G01N21/3504 , G01N21/552 , G01N21/61 , G01N33/004 , G01N2201/068 , H01L31/02002 , H01L31/0203 , H01L31/02325 , H01L31/16 , H01L31/167 , H01L31/18 , H01L35/32 , H01L37/00
Abstract: We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.
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