公开(公告)号：US20190198487A1

公开(公告)日：2019-06-27

申请号：US15852257

申请日：2017-12-22

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Rainer Minixhofer

IPC: H01L25/16 ,  H01L23/13 ,  H01L23/26 ,  H01L23/48 ,  H01L35/10 ,  H01L35/02 ,  H01L35/32 ,  H01L35/08 ,  H01L35/34 ,  H05B3/36

CPC classification number: H01L25/165 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/045 ,  G01J5/0815 ,  H01L21/78 ,  H01L23/13 ,  H01L23/26 ,  H01L23/481 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L35/02 ,  H01L35/08 ,  H01L35/10 ,  H01L35/32 ,  H01L35/34 ,  H01L2224/13025 ,  H01L2224/4845 ,  H05B3/36

Abstract: We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.