公开(公告)号：US20230235428A1

公开(公告)日：2023-07-27

申请号：US18100048

申请日：2023-01-23

Applicant: ASM IP Holding B.V.

Inventor： Joaquin Aguilar Santillan ,  Hong Gao ,  Shanker Kuttath ,  Shaofeng Chen ,  Gary Urban Keppers ,  Felix Rabinovich

IPC: C22C1/02 ,  C22C21/08 ,  B22D21/00 ,  H01L21/67 ,  H01L21/687

CPC classification number: C22C1/026 ,  C22C21/08 ,  B22D21/007 ,  H01L21/67167 ,  H01L21/68707 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201

Abstract: A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.

公开(公告)号：US20240222187A1

公开(公告)日：2024-07-04

申请号：US18397372

申请日：2023-12-27

Applicant: ASM IP Holding B.V.

Inventor： Aniket Chitale ,  Felix Rabinovich ,  Gary Urban Keppers ,  Han Ye ,  Bradley Wayne Evans ,  Wentao Wang ,  Gregory Rosendahl ,  Amin Azimi

IPC: H01L21/687 ,  C23C16/44 ,  C23C16/458

CPC classification number: H01L21/68792 ,  C23C16/4412 ,  C23C16/4581 ,  H01L21/68785

Abstract: A shaft member includes a cylindrical body formed from a ceramic material and having a drive segment, a frustoconical segment, and an end key segment. The drive segment extends about a rotation axis, the frustoconical segment is offset from the drive segment along the rotation axis, and the end key segment extends axially from the frustoconical segment and is axially separated from the drive segment by the frustoconical segment of the shaft member. The end key segment has a first circumferential facet and a second circumferential facet circumferentially opposite the first circumferential facet to fix the shaft member in rotation about the rotation axis relative to a support member seated when the end key segment is slidably received within an end key socket defined within the support member. Process kits, semiconductor processing systems, and methods of making semiconductor processing systems are also described.