公开(公告)号：US5656229A

公开(公告)日：1997-08-12

申请号：US459806

申请日：1995-06-02

申请人： Akikazu Tanimoto ,  Kiyoshi Motegi ,  Yukako Komaru

发明人： Akikazu Tanimoto ,  Kiyoshi Motegi ,  Yukako Komaru

IPC分类号： B23K26/08 ,  G03F9/00

CPC分类号： B23K26/0823 ,  G03F9/70

摘要： A method and apparatus whereby a thin film layer, e.g., a resist covering at least selected patterns formed on a surface of a substrate, e.g., a wafer is removed from a limited localized portion at a predetermined position relative to each of the patterns, such as, an alignment mark portion of the pattern in response to the irradiation of an energy beam. The substrate is positioned on a turn table and the position of a selected portion of the pattern is detected on the turn table. In accordance with the detected position of the selected portion and design coordinate position information of the pattern, the position of the localized portion requiring removal of the thin film layer is determined by means of a polar coordinate system based on a center of rotation of the turn table so that in accordance with the determined polar coordinate values the energy beam is irradiated on the thin film layer of the localized portion.

摘要翻译： 一种方法和装置，其中薄膜层，例如覆盖至少选定的图案的抗蚀剂的抗蚀剂，例如晶片的表面上，例如晶片，相对于每个图案在预定位置处从有限的局部部分移除， 作为响应于能量束的照射的图案的对准标记部分。 基板位于转台上，并且在转台上检测图案的选定部分的位置。 根据所选择的部分的检测位置和图案的设计坐标位置信息，需要去除薄膜层的局部部分的位置通过基于转弯旋转中心的极坐标系来确定 使得根据确定的极坐标值，能量束被照射在局部部分的薄膜层上。

公开(公告)号：US5597590A

公开(公告)日：1997-01-28

申请号：US563349

申请日：1995-11-28

申请人： Akikazu Tanimoto ,  Kiyoshi Motegi ,  Yukako Komaru

发明人： Akikazu Tanimoto ,  Kiyoshi Motegi ,  Yukako Komaru

IPC分类号： B23K26/08 ,  G03F9/00

CPC分类号： B23K26/0823 ,  G03F9/70

摘要： A method and apparatus whereby a thin film layer, e.g., a resist covering at least selected patterns formed on a surface of a substrate, e.g., a wafer is removed from a limited localized portion at a predetermined position relative to each of the patterns, such as, an alignment mark portion of the pattern in response to the irradiation of an energy beam. The substrate is positioned on a turn table and the position of a selected portion of the pattern is detected on the turn table. In accordance with the detected position of the selected portion and design coordinate position information of the pattern, the position of the localized portion requiring removal of the thin film layer is determined by means of a polar coordinate system based on a center of rotation of the turn table so that in accordance with the determined polar coordinate values the energy beam is irradiated on the thin film layer of the localized portion.

摘要翻译： 一种方法和装置，其中薄膜层，例如覆盖至少选定的图案的抗蚀剂的抗蚀剂，例如晶片的表面上，例如晶片，相对于每个图案在预定位置处从有限的局部部分移除， 作为响应于能量束的照射的图案的对准标记部分。 基板位于转台上，并且在转台上检测图案的选定部分的位置。 根据所选择的部分的检测位置和图案的设计坐标位置信息，需要去除薄膜层的局部部分的位置通过基于转弯旋转中心的极坐标系来确定 使得根据确定的极坐标值，能量束被照射在局部部分的薄膜层上。

公开(公告)号：US5686211A

公开(公告)日：1997-11-11

申请号：US542684

申请日：1995-10-13

申请人： Kiyoshi Motegi ,  Yukako Komaru

发明人： Kiyoshi Motegi ,  Yukako Komaru

IPC分类号： G03F9/00 ,  G03F7/16 ,  G03F7/42 ,  H01L21/027 ,  G03F7/20

CPC分类号： G03F7/42 ,  G03F9/70 ,  G03F7/168 ,  Y10S430/146

摘要： A method and apparatus whereby a thin film layer covering a plurality of marks of a given pattern formed on a surface of a substrate is selectively removed from each of a plurality of localized areas each including one of the marks by irradiation of an energy beam. The mark is detected by a mark detecting system in a noncontact manner during the irradiation of the energy beam or during a time that the irradiation is stopped, thereby producing an electric signal including information corresponding to a change of an optical or physical property of the localized area. In accordance with the electric signal produced by the mark detecting system, it is evaluated whether the information indicative of the optical or physical property of the mark has attained a predetermined condition for a predetermined information processing application of the information. In accordance with a result of the evaluation, it is selected whether the irradiation of the energy beam onto the localized area is to be effected continuously.

摘要翻译： 通过照射能量束，通过从多个局部区域中的每一个选择性地去除覆盖在衬底表面上形成的给定图案的多个标记的薄膜层的方法和装置。 在能量束的照射期间或在照射停止的时间期间，通过标记检测系统以非接触方式检测标记，从而产生包括对应于局部化的光学或物理性质的变化的信息的电信号 区。 根据由标记检测系统产生的电信号，对于信息的预定信息处理应用，评估指示标记的光学或物理属性的信息是否已经达到预定条件。 根据评价结果，选择能否连续地对能量束照射到局部区域上。

公开(公告)号：US4623543A

公开(公告)日：1986-11-18

申请号：US768225

申请日：1985-08-22

申请人： Kiyoshi Motegi ,  Kichiro Otani

发明人： Kiyoshi Motegi ,  Kichiro Otani

IPC分类号： A23G3/34 ,  A23G3/00 ,  A23G3/02 ,  A23G3/20 ,  A23G3/38 ,  A23G3/42

CPC分类号： A23G3/42 ,  A23G3/0215 ,  A23G3/20 ,  A23G3/2007 ,  A23G3/34 ,  A23G3/38 ,  A23G3/54 ,  Y10S426/804

摘要： Low-calorie candies made mainly of reducing maltose syrup having a multi-layer structure comprising a core, a sugar-coating, and a protective coating of high-melting fatty substance are disclosed. These candies have good storage stability, are non-hygroscopic and are easy to mold. A sweetening agent of high sweetness is incorporated in the candies, making it possible to produce very tasty candies without adversely affecting the desirable features of maltose-based candies, such as low calorific value and freedom from the danger of tooth decay.

摘要翻译： 公开了主要由还原麦芽糖糖浆制成的低热量糖果，其具有包含核心，糖衣和高熔点脂肪物质保护涂层的多层结构。 这些糖果具有良好的储存稳定性，不吸湿，易于模塑。 糖果中加入了高甜度的甜味剂，可以生产非常美味的糖果，而不会不利地影响麦芽糖基糖果的所需特征，例如低热值，并且不受蛀牙的危害。

公开(公告)号：US5734236A

公开(公告)日：1998-03-31

申请号：US749676

申请日：1996-11-15

申请人： Kiyoshi Motegi

发明人： Kiyoshi Motegi

IPC分类号： H02N2/00 ,  H01L41/04 ,  H02N2/14

CPC分类号： H02N2/142 ,  H02N2/14 ,  H02N2/145 ,  H02N2/163

摘要： A drive device for a vibration motor which provides constant efficient driving with a simple circuit and control sequence. The drive device for the vibration motor includes a charging circuit which impresses a predetermined voltage on an electromechanical energy conversion element, a discharge circuit which causes discharge of the electromechanical energy conversion element via an inductive element, a control circuit which alternately connects the charging circuit or the discharge circuit to the electromechanical energy conversion element, and a period detection circuit which detects the period of the resonant frequency of a circuit formed by the electromechanical energy conversion element and the inductive element. The control circuit causes an increase and a decrease of the interval the discharge circuit is connected, such that the interval of connection of the discharge circuit and the period detected by the period detection circuit become equal, causing the drive frequency of the vibration motor to change.

摘要翻译： 一种用于振动电动机的驱动装置，其以简单的电路和控制顺序提供恒定的有效驱动。 用于振动电动机的驱动装置包括一个充电电路，该充电电路对机电能量转换元件施加预定的电压，一个通过电感元件引起机电能转换元件的放电的放电电路，一个交替连接充电电路的控制电路或 到机电能量转换元件的放电电路，以及周期检测电路，其检测由机电能量转换元件和电感元件形成的电路的谐振频率的周期。 控制电路导致放电电路连接的间隔的增加和减小，使得放电电路的连接间隔和周期检测电路检测到的周期变得相等，导致振动电机的驱动频率变化 。

公开(公告)号：US06781672B2

公开(公告)日：2004-08-24

申请号：US10223622

申请日：2002-08-20

申请人： Kiyoshi Motegi

发明人： Kiyoshi Motegi

IPC分类号： G03B2772

CPC分类号： G03B27/72 ,  G03F7/70058

摘要： An exposure apparatus, wherein light emitted from a relatively low output light source is selectively transmitted by a light path switching controller and mirrors to exposure units, amplifiers are provided near the exposure units, and the light from the light source is amplified there and then sent to the corresponding exposure units.

摘要翻译： 一种曝光装置，其中从相对低的输出光源发射的光被光路切换控制器和反射镜选择性地传输到曝光单元，放大器设置在曝光单元附近，并且来自光源的光在那里被放大，然后发送 到相应的曝光单位。

公开(公告)号：US5777445A

公开(公告)日：1998-07-07

申请号：US761818

申请日：1996-12-06

申请人： Kiyoshi Motegi

发明人： Kiyoshi Motegi

IPC分类号： H02N2/00 ,  H01L41/04 ,  H02N2/14

CPC分类号： H02N2/14 ,  H02N2/142 ,  H02N2/147 ,  H02N2/163

摘要： A drive device of a vibration actuator to cause stable driving of a vibration actuator without causing the occurrence of a cogging phenomenon. In a drive device of a vibration actuator using mechanical vibrating motion of an electromechanical energy converting element which converts electrical energy into mechanical energy, the drive device includes a control circuit to output a control signal of a frequency to drive the electromechanical conversion element, a drive circuit to impress on the electromechanical conversion element an alternating voltage of the same frequency as the drive signal, and a direct current power supply to supply electric power to the drive circuit. The drive circuit has an inductive element connected in series or in parallel with the electromechanical conversion element, and a switching element to open and close at the same frequency as the control signal, connected such that the voltage of the direct current power supply is impressed thereon. The control circuit limits the range of variation of the frequency of the control signal, based on the current value which flows in the switching element.

摘要翻译： 振动致动器的驱动装置，用于使振动致动器稳定地驱动而不会发生齿槽现象。 在使用将电能转换成机械能的机电能量转换元件的机械振动运动的振动致动器的驱动装置中，驱动装置包括控制电路，用于输出频率的控制信号以驱动机电转换元件，驱动器 将机电转换元件施加与驱动信号相同频率的交流电压的电路，以及向驱动电路供电的直流电源。 驱动电路具有与机电转换元件串联或并联连接的电感元件，并且以与控制信号相同的频率开关的开关元件被连接，使得直流电源的电压被压入其上 。 控制电路基于在开关元件中流动的电流值来限制控制信号的频率的变化范围。

公开(公告)号：US5777444A

公开(公告)日：1998-07-07

申请号：US774347

申请日：1996-12-27

申请人： Kiyoshi Motegi

发明人： Kiyoshi Motegi

IPC分类号： H01L41/04 ,  H02N2/14 ,  H02N2/00

CPC分类号： H02N2/147 ,  H02N2/142 ,  H02N2/163

摘要： A drive device for a vibration actuator which stably drives the vibration actuator and prevents the occurrence of the cogging phenomenon. The vibration actuator provides a drive force by supplying a voltage to an electromechanical energy converting element which converts electrical energy into mechanical energy to produce mechanical vibratory motion. The drive device for the vibration actuator includes a voltage generating device to generate an alternating voltage which is impressed on the electromechanical energy converting element, and a voltage control device to control the alternating voltage of the voltage generating device such that the current supplied to the electromechanical energy converting element from the voltage generating device becomes constant. The voltage control device changes the output voltage value of the voltage generating device according to the excitation state of the electromechanical conversion element. The voltage control device controls the alternating voltage such that amplitude value, the effective value, or the average value of current supplied from the electromechanical energy converting element is constant. The drive device for the vibration actuator may also include a direct current power supply, a direct current-alternating current converter to convert the direct current voltage to an alternating voltage and to impress the alternating voltage on the electromechanical energy conversion element.

摘要翻译： 一种用于振动致动器的驱动装置，其稳定地驱动振动致动器并防止发生齿槽现象。 振动致动器通过向机电能量转换元件提供电压来提供驱动力，其将电能转换成机械能以产生机械振动。 用于振动致动器的驱动装置包括产生施加在机电能量转换元件上的交流电压的电压产生装置，以及用于控制电压产生装置的交流电压的电压控制装置，使得提供给机电 来自电压产生装置的能量转换元件变得恒定。 电压控制装置根据机电转换元件的激励状态改变电压产生装置的输出电压值。 电压控制装置控制交流电压使得从机电能量转换元件提供的电流的振幅值，有效值或平均值是恒定的。 用于振动致动器的驱动装置还可以包括直流电源，直流电流转换器，用于将直流电压转换成交流电压，并将交流电压压在机电能转换元件上。