公开(公告)号：US06764572B2

公开(公告)日：2004-07-20

申请号：US10068092

申请日：2002-02-05

申请人： Akira Shimizu ,  Kunitoshi Nanba

发明人： Akira Shimizu ,  Kunitoshi Nanba

IPC分类号： H01L21306

CPC分类号： H01L21/67069 ,  H01J37/32192

摘要： A batch-type etching device and a method, which enable a stable process with high reproducibility by preventing contamination of CVD equipment by effectively removing H2O, CH3OH or CH3COOH and by-products adsorbing and remaining on the surface of a semiconductor wafer after etching is completed, are provided. The device comprises a reaction chamber, an exhaust port for evacuating the air inside the reaction chamber, a wafer-supporting boat for supporting at least one batch of semiconductor wafers inside the reaction chamber, a gas inlet port for introducing a reaction gas into the reaction chamber, and a microwave generator. The microwave generator is adapted to introduce microwaves into reaction chamber so that substances which adsorb and remain on the semiconductor wafers are desorbed and removed after etching is completed.

摘要翻译： 分批式蚀刻装置和方法，其通过有效地除去H 2 O，CH 3 OH或CH 3 COOH以及蚀刻后吸附并保留在半导体晶片的表面上的副产物来完成CVD设备的污染，从而能够实现高再现性的稳定工艺 ，提供。 该装置包括反应室，用于抽空反应室内的空气的排气口，用于在反应室内支撑至少一批半导体晶片的晶片支撑槽，用于将反应气体引入反应的气体入口 室和微波发生器。 微波发生器适于将微波引入反应室，使得在蚀刻完成之后吸附并保留在半导体晶片上的物质被解吸和去除。

公开(公告)号：US06383900B1

公开(公告)日：2002-05-07

申请号：US09591589

申请日：2000-06-09

申请人： Akira Shimizu ,  Kunitoshi Nanba ,  Atsuki Fukazawa

发明人： Akira Shimizu ,  Kunitoshi Nanba ,  Atsuki Fukazawa

IPC分类号： H01L2120

CPC分类号： H01L28/84 ,  Y10S438/964

摘要： HSG with an uneven surface is formed by (i) removing a spontaneous oxidation layer formed on an amorphous silicon surface of a semiconductor substrate by preprocessing, (ii) dissociating hydrogen in dangling bonds by heating it to a processing temperature, (iii) forming an amorphous silicon/polysilicon mixed-phase thin film selectively on solely an activated surface of the amorphous silicon surface in a silicon compound atmosphere, and (iv) annealing the film continuously. This method is characterized in including (a) a process which supplies a phosphorus compound and a dilution gas into a reactor while the semiconductor substrate is heated to a processing temperature, and (b) a process of annealing the semiconductor substrate in an atmosphere which contains the phosphorus compound and the dilution gas.

摘要翻译： 通过（i）通过预处理除去形成在半导体衬底的非晶硅表面上的自发氧化层，（ii）通过将悬空氢气加热至加工温度来解离氢气，（iii）形成 非晶硅/多晶硅混合相薄膜选择性地仅在硅化合物气氛中的非晶硅表面的活化表面上，以及（iv）连续退火该膜。 该方法的特征在于包括（a）在将半导体基板加热至加工温度的同时将磷化合物和稀释气体供给到反应器中的工序，（b）在含有 磷化合物和稀释气体。

公开(公告)号：US06914208B2

公开(公告)日：2005-07-05

申请号：US10706624

申请日：2003-11-12

申请人： Akira Shimizu ,  Kunitoshi Nanba

发明人： Akira Shimizu ,  Kunitoshi Nanba

IPC分类号： H01L21/302 ,  H01L21/00 ,  H01L21/3065 ,  B23K10/00

CPC分类号： H01L21/67069 ,  H01J37/32192

摘要： A batch-type etching method includes applying microwaves from the outside of a reaction chamber to semiconductor wafers after HF gas etching of the wafers to remove residual substances including H2O, CH3OH, CH3COOH and/or other by-products from surfaces of the wafers. Microwaves oscillate polar molecules of the substances and generate heat, thereby removing the substances.

摘要翻译： 间歇型蚀刻方法包括在晶片的HF气体蚀刻之后将微波从反应室的外部施加到半导体晶片以除去包括H 2 O，CH 3 N的残留物质 OH，CH 3 COOH和/或从晶片表面的其它副产物。 微波振荡物质的极性分子并产生热量，从而去除物质。

公开(公告)号：US09109276B2

公开(公告)日：2015-08-18

申请号：US12885026

申请日：2010-09-17

申请人： Koichi Kanai ,  Kiyokazu Sugiyama ,  Eiji Shiotani ,  Kimio Nishimura ,  Junichi Uchiyama ,  Kiyohisa Suzuki ,  Jun Inomata ,  Daisuke Terada ,  Akira Shimizu ,  Hidenobu Matsuyama ,  Kiyoshi Hasegawa ,  Takashi Iiya

发明人： Koichi Kanai ,  Kiyokazu Sugiyama ,  Eiji Shiotani ,  Kimio Nishimura ,  Junichi Uchiyama ,  Kiyohisa Suzuki ,  Jun Inomata ,  Daisuke Terada ,  Akira Shimizu ,  Hidenobu Matsuyama ,  Kiyoshi Hasegawa ,  Takashi Iiya

IPC分类号： C23C4/18 ,  C23C4/12 ,  C23C4/16 ,  F02F1/00 ,  B05B7/22 ,  B05B13/06

CPC分类号： C23C4/124 ,  B05B7/224 ,  B05B13/0636 ,  C23C4/12 ,  C23C4/129 ,  C23C4/16 ,  C23C4/18 ,  F02F1/00 ,  F05C2253/12 ,  Y10T29/49272 ,  Y10T428/13

摘要： A cylindrical internal surface processing method comprises forming a cylinder bore, roughening an upper section of the bore, depositing coating onto the bore, and machining a lower section of the bore and the coating. The forming of the cylinder bore includes forming the upper and lower sections with the lower section being axially spaced from the upper section and having an axial length greater than zero. The roughening creates a roughened surface such that a radially innermost edge of the roughened surface has an internal diameter smaller than an internal diameter of the lower section. The coating is deposited to cover the upper section and at least a portion of the lower section. The machining forms a tapered portion and a cylindrical portion, a radially outermost edge of the cylindrical portion having an internal diameter larger than that of a radially outermost edge of the roughened surface.

摘要翻译： 圆柱形内表面处理方法包括形成气缸孔，使孔的上部部分粗糙化，在孔上沉积涂层，以及加工孔的下部和涂层。 缸孔的形成包括形成上部和下部，其中下部与上部轴向间隔开并具有大于零的轴向长度。 粗糙化产生粗糙表面，使得粗糙表面的径向最内边缘具有小于下部内径的内径。 沉积涂层以覆盖上部和下部的至少一部分。 加工形成锥形部分和圆柱形部分，圆柱形部分的径向最外边缘的内径大于粗糙表面的径向最外边缘的内径。

公开(公告)号：US20150169591A1

公开(公告)日：2015-06-18

申请号：US14402878

申请日：2012-05-24

申请人： Michiko Yoshida ,  Akira Shimizu ,  Seisuke Tokuda ,  Kazuhiko Mogi ,  Shinji Fujiwara ,  Nobuo Kawamura ,  Masaru Kitsuregawa ,  Kazuo Goda

发明人： Michiko Yoshida ,  Akira Shimizu ,  Seisuke Tokuda ,  Kazuhiko Mogi ,  Shinji Fujiwara ,  Nobuo Kawamura ,  Masaru Kitsuregawa ,  Kazuo Goda

IPC分类号： G06F17/30

CPC分类号： G06F16/252 ,  G06F16/24532 ,  G06F16/2455 ,  G06F16/24569

摘要： A database management system (DBMS) manages a database existing in a second storage device with an access speed lower than that of a first storage device. In an execution of a query, the DBMS dynamically generates tasks two or more executable tasks in parallel. The DBMS generates task start information which is information representing a content of the execution of the task, manages the task start information, and executes a content represented by the task start information by the task. The task start information includes a data address set existing in the second storage device. The DBMS controls movement of the data address sets between the first storage device and the second storage device based on a management state of the task start information. In addition, the DBMS selects the task start information based on whether or not the data address set exists in the first storage device.

摘要翻译： 数据库管理系统（DBMS）以比第一存储设备低的访问速度来管理第二存储设备中存在的数据库。 在执行查询时，DBMS并行动态生成任务两个或多个可执行任务。 DBMS生成作为任务执行内容的信息的任务开始信息，管理该任务开始信息，并执行任务开始信息所表示的内容。 任务开始信息包括存在于第二存储装置中的数据地址集。 DBMS基于任务开始信息的管理状态，控制第一存储装置与第二存储装置之间的数据地址集的移动。 另外，DBMS根据第一存储装置中是否存在数据地址组来选择任务开始信息。

公开(公告)号：US20130159303A1

公开(公告)日：2013-06-20

申请号：US13814989

申请日：2011-02-24

申请人： Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Michiko Tanaka ,  Nobuo Kawamura ,  Norihiro Hara

发明人： Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Michiko Tanaka ,  Nobuo Kawamura ,  Norihiro Hara

IPC分类号： G06F17/30

CPC分类号： G06F17/30283 ,  G06F17/30339

摘要： A computer system, comprising: a computer for outputting a result in response to a request; and a storage system for storing data output based on the request, the computer including: a request reception module for receiving the request; a processing procedure generation module for generating a plurality of processing procedures including an order of access to the data stored in the plurality of storage devices; a data division module for dividing the data; an information obtaining module for obtaining load information indicating a load condition of the storage system; an allotment determination module for determining, based on the obtained load information, allotments for allocating the divided data to be processed by the generated plurality of processing procedures; and a processing execution module for executing, based on the determined allotments, the generated plurality of processing procedures in parallel.

摘要翻译： 一种计算机系统，包括：用于响应于请求输出结果的计算机; 以及存储系统，用于存储基于所述请求输出的数据，所述计算机包括：用于接收所述请求的请求接收模块; 处理过程生成模块，用于生成包括访问存储在所述多个存储装置中的数据的顺序的多个处理过程; 数据分割模块，用于分割数据; 信息获取模块，用于获取指示所述存储系统的负载状况的负载信息; 分配确定模块，用于基于所获得的负载信息，确定用于分配由所生成的多个处理过程来处理的划分数据的分配; 以及处理执行模块，用于基于所确定的分配，并行地执行生成的多个处理过程。

公开(公告)号：US20130084714A1

公开(公告)日：2013-04-04

申请号：US13250721

申请日：2011-09-30

申请人： Takahiro Oka ,  Akira Shimizu

发明人： Takahiro Oka ,  Akira Shimizu

IPC分类号： H01L21/31

CPC分类号： C23C16/401 ,  C23C16/30 ,  C23C16/45536 ,  H01L21/02126 ,  H01L21/02164 ,  H01L21/02167 ,  H01L21/02274 ,  H01L21/0228

摘要： A method for forming a single-phase multi-element film on a substrate in a reaction zone by PEALD repeating a single deposition cycle. The single deposition cycle includes: adsorbing a precursor on the substrate in the absence of reactant and plasma; decomposing the precursor adsorbed on the substrate by an inert gas plasma; and reacting the decomposed precursor with a reactant gas plasma in the presence of the inert gas plasma. The multi-element film contains silicon and at least two non-metal elements constituting a matrix of the film, the precursor contains silicon and optionally at least one non-metal element to be incorporated in the matrix, and the reactant gas contains at least one non-metal element to be incorporated in the matrix.

摘要翻译： 一种通过重复单个沉积循环的PEALD在反应区中在衬底上形成单相多元素膜的方法。 单个沉积循环包括：在不存在反应物和等离子体的情况下在基底上吸附前体; 通过惰性气体等离子体分解吸附在基板上的前体; 并在惰性气体等离子体存在下使分解的前体与反应气体等离子体反应。 多元素膜含有硅和构成膜的基质的至少两种非金属元素，前体含有硅和任选的至少一种待掺入基质的非金属元素，并且反应物气体含有至少一种 非金属元素加入基质中。

公开(公告)号：US08283822B2

公开(公告)日：2012-10-09

申请号：US12703372

申请日：2010-02-10

申请人： Daigo Kuraishi ,  Akira Shimizu

发明人： Daigo Kuraishi ,  Akira Shimizu

IPC分类号： H02K5/00 ,  H02K11/00

CPC分类号： H02K5/225 ,  H02K3/522 ,  H02K2203/03

摘要： A connection circuit board includes a main portion and a lead wire connecting portion. The main portion is positioned between an end portion of a motor case body and an end bracket. The lead wire connecting portion projects outwardly from the motor case body. A protective cap including a connecting portion receiving chamber for receiving the lead wire connecting portion of the connection circuit board is attached to the lead wire connecting portion through an engaging structure. An adhesive is filled in the connecting portion receiving chamber of the protective cap. In a small-sized motor of the above configuration, the protective cap can securely be fixed to the motor case.

摘要翻译： 连接电路板包括主要部分和引线连接部分。 主要部分位于马达壳体的端部和端托架之间。 引线连接部从电动机壳体向外突出。 包括用于接纳连接电路板的引线连接部分的连接部分接收室的保护盖通过接合结构附接到引线连接部分。 粘合剂填充在保护盖的连接部分接收室中。 在上述结构的小型电动机中，保护盖可以牢固地固定在电动机壳上。

公开(公告)号：US20120200951A1

公开(公告)日：2012-08-09

申请号：US13502019

申请日：2009-10-21

申请人： Takeshi Koda ,  Katsutoshi Inagaki ,  Akira Shimizu ,  Hirokazu Oishi ,  Masayoshi Yoshida ,  Tsuyoshi Hasebe ,  Tsuyoshi Namiki

发明人： Takeshi Koda ,  Katsutoshi Inagaki ,  Akira Shimizu ,  Hirokazu Oishi ,  Masayoshi Yoshida ,  Tsuyoshi Hasebe ,  Tsuyoshi Namiki

IPC分类号： G11B5/86

CPC分类号： G11B20/10 ,  G11B2020/10768 ,  G11B2020/10833 ,  G11B2220/2516 ,  G11B2220/2537

摘要： A duplication device is provided. When content is duplicated by recording, in a recording medium of a recording destination, the same content as content recorded in a recording medium of a duplication source, even if a reading speed is slower than a writing speed, the duplication device can reduce a duplication time as much as possible. The duplication device 100 reads a reading portion of content from an optical disc D in which content is recorded, and in parallel to this reading, downloads a transmission portion which includes a portion of content other than the reading portion, from a distribution server 200, and records the read reading portion and the downloaded transmission portion in the hard disc 106 at a speed faster than a speed of reading the reading portion.

摘要翻译： 提供复制设备。 当通过记录复制内容时，在记录目的地的记录介质中，与复制源的记录介质中记录的内容相同的内容，即使读取速度比写入速度慢，复制设备也可以减少重复 时间尽可能多。 复制装置100从记录有内容的光盘D读取内容的读取部分，并且与该读取并行地，从分发服务器200下载包含读取部分以外的内容的一部分的传输部分， 并将阅读部分和下载的传输部分以比阅读部分读取速度快的速度记录在硬盘106中。

公开(公告)号：US20120151138A1

公开(公告)日：2012-06-14

申请号：US13389893

申请日：2010-08-10

申请人： Seisuke Tokuda ,  Kazutomo Ushijima ,  Akira Shimizu ,  Michiko Tanaka ,  Shinji Fujiwara ,  Nobuo Kawamura

发明人： Seisuke Tokuda ,  Kazutomo Ushijima ,  Akira Shimizu ,  Michiko Tanaka ,  Shinji Fujiwara ,  Nobuo Kawamura

IPC分类号： G06F12/00

CPC分类号： G06F3/0665 ,  G06F3/061 ,  G06F3/064 ,  G06F3/0689

摘要： According to this invention, a data arrangement method, the computer connected to a storage system which provides a plurality of logical storage devices comprising a plurality of physical storage devices arranges data in a logical storage volume constructed by integrating the plurality of logical storage devices. The method includes: a step wherein the computer receives an instruction to build the logical storage volume using the plurality of logical storage devices or to rebuild the constructed logical storage volume; a step wherein the computer obtains information about the plurality of physical storage devices constituting each of the plurality of logical storage devices included in the received instruction; and a step wherein the arrangement position of data into the logical storage volume is determined on the basis of the obtained information about the plurality of physical storage devices.

摘要翻译： 根据本发明，一种数据配置方法，连接到存储系统的计算机，其提供包括多个物理存储装置的多个逻辑存储装置，将数据排列在通过集成多个逻辑存储装置构成的逻辑存储卷中。 该方法包括：一个步骤，其中计算机接收使用多个逻辑存储设备构建逻辑存储卷的指令或重建构造的逻辑存储卷; 计算机获取构成接收到的指令中包含的多个逻辑存储装置中的每一个的多个物理存储装置的信息的步骤; 以及基于获得的关于多个物理存储设备的信息来确定数据到逻辑存储卷中的布置位置的步骤。