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    Removable liners for charged particle beam systems
    1.
    发明授权
    Removable liners for charged particle beam systems 失效
    用于带电粒子束系统的可拆卸衬套

    公开(公告)号：US07897939B2

    公开(公告)日：2011-03-01

    申请号：US12167271

    申请日：2008-07-03

    申请人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone, Jr. ,  James Spiros Nakos

    发明人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone, Jr. ,  James Spiros Nakos

    IPC分类号： G21K5/00

    CPC分类号： H01J37/3171 ,  H01J37/16 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/0268

    摘要： A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.

    摘要翻译： 一种提高带电束装置性能的方法。 该方法包括：提供该装置，该装置包括：具有内表面的腔室; 用于抽空室的泵口; 腔室内的衬底保持器; 以及室内的带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 并且将一个或多个衬垫定位成与腔室的内表面的一个或多个不同区域接触，衬垫防止由带电束和衬底的相互作用产生的材料涂覆在腔室的内表面的一个或多个不同区域 房间。

    Removable liners for charged particle beam systems
    2.
    发明授权
    Removable liners for charged particle beam systems 失效
    用于带电粒子束系统的可拆卸衬套

    公开(公告)号：US07462845B2

    公开(公告)日：2008-12-09

    申请号：US11422092

    申请日：2006-06-05

    申请人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone, Jr. ,  James Spiros Nakos

    发明人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone, Jr. ,  James Spiros Nakos

    IPC分类号： H01J37/317

    CPC分类号： H01J37/3171 ,  H01J37/16 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/0268

    摘要： A method of improving the performance of a charged beam apparatus. The method including: providing a chamber having an interior surface; providing a pump port for evacuating the chamber; providing a substrate holder within the chamber; forming a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and placing one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.

    摘要翻译： 一种提高带电束装置性能的方法。 该方法包括：提供具有内表面的室; 提供用于抽空腔室的泵口; 在所述室内提供衬底保持器; 在室内形成带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 并且将一个或多个衬垫放置成与腔室的内表面的一个或多个不同区域接触，衬垫防止由带电束和衬底的相互作用产生的材料涂覆在腔室内表面的一个或多个不同区域 房间。

    REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS
    3.
    发明申请
    REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS 失效
    充电粒子束系统的可拆卸线

    公开(公告)号：US20080258081A1

    公开(公告)日：2008-10-23

    申请号：US12167271

    申请日：2008-07-03

    申请人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone ,  James Spiros Nakos

    发明人： Alan Michael Chandler ,  Tushar Desai ,  Ellis Craig Hayford ,  Nicholas Mone ,  James Spiros Nakos

    IPC分类号： H01J37/30 ,  H05H1/00

    CPC分类号： H01J37/3171 ,  H01J37/16 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/0268

    摘要： A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.

    摘要翻译： 一种提高带电束装置性能的方法。 该方法包括：提供该装置，该装置包括：具有内表面的腔室; 用于抽空室的泵口; 腔室内的衬底保持器; 以及室内的带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 并且将一个或多个衬垫定位成与腔室的内表面的一个或多个不同区域接触，衬垫防止由带电束和衬底的相互作用产生的材料涂覆在腔室的内表面的一个或多个不同区域 房间。

    REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS
    6.
    发明申请
    REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS 失效
    充电粒子束系统的可拆卸线

    公开(公告)号：US20070134894A1

    公开(公告)日：2007-06-14

    申请号：US11422092

    申请日：2006-06-05

    申请人： Alan Chandler ,  Tushar Desai ,  Ellis Hayford ,  Nicholas Mone ,  James Nakos

    发明人： Alan Chandler ,  Tushar Desai ,  Ellis Hayford ,  Nicholas Mone ,  James Nakos

    IPC分类号： H01L21/04 ,  H01L23/58

    CPC分类号： H01J37/3171 ,  H01J37/16 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/0268

    摘要： An improved performance charged beam apparatus and method of improving the performance of charged beam apparatus. The apparatus including: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.

    摘要翻译： 一种改进的性能带电束装置和改善带电束装置性能的方法。 该装置包括：具有内表面的室; 用于抽空室的泵口; 腔室内的衬底保持器; 室内的带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 以及与室的内表面的一个或多个不同区域接触的一个或多个衬垫，衬垫防止由带电束和衬底的相互作用产生的材料涂覆室的内表面的一个或多个不同区域 。

    Ion beam system
    7.
    发明授权
    Ion beam system 失效
    离子束系统

    公开(公告)号：US07078710B2

    公开(公告)日：2006-07-18

    申请号：US10710051

    申请日：2004-06-15

    申请人： Tushar Desai ,  Ellis C. Hayford ,  Nicholas Mone, Jr.

    发明人： Tushar Desai ,  Ellis C. Hayford ,  Nicholas Mone, Jr.

    IPC分类号： H01J37/36

    CPC分类号： H01J37/02 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/16 ,  H01J2237/31701

    摘要： A method of reducing foreign material contamination of a substrate in an ion beam system and an ion beam system. The system, including: a vacuum chamber having an ion beam axis; a substrate chamber free to tilt about a tilt axis, the tilt axis orthogonal to and intersecting the ion beam axis; a flexible bellows connecting an opening in the substrate chamber and an opening in the vacuum chamber, both openings co-axially aligned with the ion beam axis, the bellows providing a vacuum seal between the substrate chamber and the vacuum chamber; and a hollow foreign material shield open at a top proximate to the vacuum chamber and a bottom proximate to the substrate chamber, the foreign material shield located between the ion beam axis and the flexible bellows, the top and bottom of the foreign material shield co-axially aligned with the ion beam axis.

    摘要翻译： 一种减少离子束系统和离子束系统中的衬底的异物污染的方法。 该系统包括：具有离子束轴的真空室; 基板室可绕倾斜轴线自由倾斜，倾斜轴线与离子束轴线正交并与其相交; 连接基板室中的开口和真空室中的开口的柔性波纹管，两个开口与离子束轴线同轴对准，波纹管在基板室和真空室之间提供真空密封; 以及在靠近真空室的顶部开口的中空异物屏蔽件和靠近基板室的底部，位于离子束轴线和柔性波纹管之间的异物屏蔽层，异物屏蔽层的顶部和底部， 与离子束轴线轴向对准。

    ION BEAM SYSTEM
    8.
    发明申请
    ION BEAM SYSTEM 失效
    离子束系统

    公开(公告)号：US20050274910A1

    公开(公告)日：2005-12-15

    申请号：US10710051

    申请日：2004-06-15

    申请人： Tushar Desai ,  Ellis Hayford ,  Nicholas Mone

    发明人： Tushar Desai ,  Ellis Hayford ,  Nicholas Mone

    IPC分类号： H01J37/02 ,  H01J37/317

    CPC分类号： H01J37/02 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/16 ,  H01J2237/31701

    摘要： A method of reducing foreign material contamination of a substrate in an ion beam system and an ion beam system. The system, including: a vacuum chamber having an ion beam axis; a substrate chamber free to tilt about a tilt axis, the tilt axis orthogonal to and intersecting the ion beam axis; a flexible bellows connecting an opening in the substrate chamber and an opening in the vacuum chamber, both openings co-axially aligned with the ion beam axis, the bellows providing a vacuum seal between the substrate chamber and the vacuum chamber; and a hollow foreign material shield open at a top proximate to the vacuum chamber and a bottom proximate to the substrate chamber, the foreign material shield located between the ion beam axis and the flexible bellows, the top and bottom of the foreign material shield co-axially aligned with the ion beam axis.

    摘要翻译： 一种减少离子束系统和离子束系统中的衬底的异物污染的方法。 该系统包括：具有离子束轴的真空室; 基板室可绕倾斜轴线自由倾斜，倾斜轴线与离子束轴线正交并与其相交; 连接基板室中的开口和真空室中的开口的柔性波纹管，两个开口与离子束轴线同轴对准，波纹管在基板室和真空室之间提供真空密封; 以及在靠近真空室的顶部开口的中空异物屏蔽件和靠近基板室的底部，位于离子束轴线和柔性波纹管之间的异物屏蔽层，异物屏蔽层的顶部和底部， 与离子束轴线轴向对准。

    Trunking for fabric ports in Fibre channel switches and attached devices
    9.
    发明授权
    Trunking for fabric ports in Fibre channel switches and attached devices 有权
    在光纤通道交换机和连接设备中进行网络端口的中继

    公开(公告)号：US08750094B2

    公开(公告)日：2014-06-10

    申请号：US13031013

    申请日：2011-02-18

    申请人： Kalyan K. Ghosh ,  Praveen Jain ,  Shashank Gupta ,  Tushar Desai

    发明人： Kalyan K. Ghosh ,  Praveen Jain ,  Shashank Gupta ,  Tushar Desai

    IPC分类号： G01R31/08

    CPC分类号： H04L49/25 ,  H04L49/3009 ,  H04L49/357

    摘要： N_Ports and F_Ports are provided with logic allowing designation of multiple virtual interfaces on a single host bus adaptor or other Fiber Channel interface, one virtual interface for each VSAN operating on the node interface. Node ports with this additional functionality are referred to as trunking N_Ports or TN_Ports. These ports have a functional design allowing creation of the multiple virtual interfaces as appropriate for the application at hand. This port design also includes logic for communicating with a peer fabric port to initialize and modify the configuration of the virtual interfaces on the TN_Port. A corresponding functional design and communication logic is provided for fabric ports, referred to herein as trunking F_Ports or TF_Ports.

    摘要翻译： N_Ports和F_Port提供了逻辑，允许在单个主机总线适配器或其他光纤通道接口上指定多个虚拟接口，一个虚拟接口用于在节点接口上操作的每个VSAN。 具有此附加功能的节点端口称为中继N_Port或TN_Port。 这些端口具有功能设计，允许根据手头的应用程序创建多个虚拟接口。 该端口设计还包括与对端结构端口进行通信的逻辑，以初始化和修改TN_Port上虚拟接口的配置。 为结构端口提供相应的功能设计和通信逻辑，这里称为中继F_Port或TF_Port。

    TRUNKING FOR FABRIC PORTS IN FIBRE CHANNEL SWITCHES AND ATTACHED DEVICES
    10.
    发明申请
    TRUNKING FOR FABRIC PORTS IN FIBRE CHANNEL SWITCHES AND ATTACHED DEVICES 有权
    光纤通道切换和连接设备中织物端口的触发

    公开(公告)号：US20110141906A1

    公开(公告)日：2011-06-16

    申请号：US13031013

    申请日：2011-02-18

    申请人： Kalyan K. Ghosh ,  Praveen Jain ,  Shashank Gupta ,  Tushar Desai

    发明人： Kalyan K. Ghosh ,  Praveen Jain ,  Shashank Gupta ,  Tushar Desai

    IPC分类号： H04L12/28 ,  H04L12/56

    CPC分类号： H04L49/25 ,  H04L49/3009 ,  H04L49/357

    摘要： N_Ports and F_Ports are provided with logic allowing designation of multiple virtual interfaces on a single host bus adaptor or other Fibre Channel interface, one virtual interface for each VSAN operating on the node interface. Node ports with this additional functionality are referred to as trunking N_Ports or TN_Ports. These ports have a functional design allowing creation of the multiple virtual interfaces as appropriate for the application at hand. This port design also includes logic for communicating with a peer fabric port to initialize and modify the configuration of the virtual interfaces on the TN_Port. A corresponding functional design and communication logic is provided for fabric ports, referred to herein as trunking F_Ports or TF_Ports.

    摘要翻译： N_Ports和F_Port提供了逻辑，允许在单个主机总线适配器或其他光纤通道接口上指定多个虚拟接口，一个虚拟接口用于在节点接口上操作的每个VSAN。 具有此附加功能的节点端口称为中继N_Port或TN_Port。 这些端口具有功能设计，允许根据手头的应用程序创建多个虚拟接口。 该端口设计还包括与对端结构端口进行通信的逻辑，以初始化和修改TN_Port上虚拟接口的配置。 为结构端口提供相应的功能设计和通信逻辑，这里称为中继F_Port或TF_Port。