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公开(公告)号:US10203353B2
公开(公告)日:2019-02-12
申请号:US15483719
申请日:2017-04-10
申请人: Alan S. Edelstein
IPC分类号: G01Q10/04 , G03F7/20 , H02N2/02 , G01Q10/06 , G05B19/23 , G03F9/00 , G05B19/402 , G01Q60/22 , G01Q80/00
摘要: Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an evanescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.
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公开(公告)号:US20170365497A1
公开(公告)日:2017-12-21
申请号:US15596485
申请日:2017-05-16
申请人: Alan S. EDELSTEIN
IPC分类号: H01L21/68 , H01L23/00 , G01B11/27 , G01B21/24 , H01L21/66 , G01K7/02 , H01L25/00 , H01L25/065
CPC分类号: H01L21/681 , G01B11/272 , G01B21/24 , G01K7/02 , G01Q60/22 , G01Q80/00 , G05B19/402 , G05B2219/37387 , H01L22/20 , H01L24/16 , H01L24/81 , H01L25/0657 , H01L25/50 , H01L2224/16145 , H01L2224/16225 , H01L2224/81007 , H01L2224/81122 , H01L2224/8117 , H01L2224/8118 , H01L2224/81908 , H02N2/028
摘要: Method for positioning and orienting a first object relative to a second object. Method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first and second objects in a desired position and orientation relative to the other one of the first and second objects. One or both of the first and second objects may be an interposer, such as a silicon or glass interposer.
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公开(公告)号:US20170356930A1
公开(公告)日:2017-12-14
申请号:US15483719
申请日:2017-04-10
申请人: Alan S. Edelstein
CPC分类号: G01Q10/04 , G01Q10/065 , G01Q60/22 , G01Q80/00 , G03F7/70725 , G03F9/7003 , G05B19/231 , G05B19/402 , G05B2219/37387 , G05B2219/45029 , H02N2/028
摘要: Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.
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